公开(公告)号：US09165742B1

公开(公告)日：2015-10-20

申请号：US14627940

申请日：2015-02-20

Applicant: KLA-Tencor Corporation

Inventor： Richard Simmons ,  Douglas Masnaghetti ,  Mark McCord ,  Fred E Stanke ,  Scott Young ,  Christopher Sears

IPC: H01J37/26 ,  H01J27/00 ,  H01J37/06 ,  H01J37/28

CPC classification number: H01J37/06 ,  H01J37/026 ,  H01J37/28 ,  H01J2237/0044 ,  H01J2237/061

Abstract: Embodiments of the present disclosure are directed to an electron beam imaging/inspection apparatus having an electron source device to direct flood electrons on a sample immediately before image acquisition or inspection. The apparatus comprises a first device configured to charge a sample in a first mode, wherein the first device includes an electron source configured to provide a flood beam of charged particles to a first area of the sample. The apparatus also comprises a second device configured to generate a primary beam of electrons and characterize an interaction between the primary beam and a second area of the sample within the first area in a second mode. The apparatus is configured to switch from the first mode to the second mode less than 1 second.

Abstract translation: 本公开的实施例涉及一种具有电子源装置的电子束成像/检查装置，用于在图像采集或检查之前立即将样品引导到样品上。 该装置包括被配置为以第一模式对样本进行充电的第一装置，其中第一装置包括电子源，该电子源被配置为将带电粒子的泛光束提供到样品的第一区域。 该装置还包括被配置为产生主电子束的第二装置，并且在第二模式中表征主光束和第一区域内的样品的第二区域之间的相互作用。 该装置被配置为在第一模式下切换到第二模式小于1秒。