OPTICAL INSPECTION METHOD, NON-TRANSITORY STORAGE MEDIUM STORING OPTICAL INSPECTION PROGRAM, AND OPTICAL INSPECTION APPARATUS

    公开(公告)号:US20230066704A1

    公开(公告)日:2023-03-02

    申请号:US17681396

    申请日:2022-02-25

    IPC分类号: G01N21/88

    摘要: According to the embodiment, an optical inspection method includes: emitting, acquiring, and comparing. The emitting includes emitting light beams having a first wavelength and a second wavelength toward an imaging unit in accordance with light beam directions from a subject, with light beam intensities of the first wavelength and the second wavelength being in a complementary relationship. The acquiring includes acquiring each of information of a first image related to the first wavelength and information of a second image related to the second wavelength with the imaging unit. The comparing includes comparing the information of the first image and the information of the second image to extract unevenness information of the subject.

    OPTICAL TEST APPARATUS AND OPTICAL TEST METHOD

    公开(公告)号:US20230288619A1

    公开(公告)日:2023-09-14

    申请号:US18320525

    申请日:2023-05-19

    IPC分类号: G02B5/20 H04N5/911

    CPC分类号: G02B5/20 H04N5/911 G01N21/455

    摘要: According to one embodiment, an optical test apparatus includes a light convergence element, an optical filter, and an image sensor. The light convergence element converges light from a subject. The optical filter is arranged on an optical axis of the light convergence element. The image sensor is arranged in an effective region not crossing the optical axis of the light convergence element, and receives light passing through the light convergence element and the optical filter.

    OPTICAL INSPECTION APPARATUS
    6.
    发明申请

    公开(公告)号:US20210131961A1

    公开(公告)日:2021-05-06

    申请号:US17006933

    申请日:2020-08-31

    IPC分类号: G01N21/47 G02B27/28 G02B27/30

    摘要: According to one embodiment, an optical inspection apparatus includes a first illuminator, an image-forming optical system, a scattering light selector, and an imaging element. The first illuminator is configured to emit a first light beam. The first light beam reflected by an object is incident on the image-forming optical system. The scattering light selector is configured to emit passing light beams of at least two mutually different wavelength regions, at the same time as the first light beam passes, a wavelength spectrum of at least one of the passing light beams being different from a wavelength spectrum of the reflected first light beam. The passing light beams simultaneously form an image on the imaging element.

    OPTICAL INSPECTION METHOD, NON-TRANSITORY STORAGE MEDIUM STORING OPTICAL INSPECTION PROGRAM, PROCESSING DEVICE, AND OPTICAL INSPECTION APPARATUS

    公开(公告)号:US20230304929A1

    公开(公告)日:2023-09-28

    申请号:US17823957

    申请日:2022-09-01

    IPC分类号: G01N21/47 G01N21/27 G01N21/25

    摘要: According to the embodiment, an optical inspection method includes: acquiring an image by capturing the image, using light from a surface of an object, which passes through a wavelength selection portion configured to selectively pass light components of a plurality of predetermined wavelengths different from each other, the image sensor including color channels configured to discriminately receive the light components of the plurality of predetermined wavelengths, performing color count estimation processing configured to estimate the number of colors based on the intensity ratio of the color channels that have received the light in each pixel of the image, and performing scattered light distribution identification processing configured to identify a scattered light distribution as BRDF from the surface of the object based on the number of colors or surface state identification processing configured to identify a state of the surface of the object based on the number of colors.

    OPTICAL TEST APPARATUS AND OPTICAL TEST METHOD

    公开(公告)号:US20200333247A1

    公开(公告)日:2020-10-22

    申请号:US16911473

    申请日:2020-06-25

    摘要: According to one embodiment, an optical test apparatus includes a first aperture, a second aperture, an image sensor, and a first lens. The first aperture includes a first aperture plane provided with a first wavelength selecting region. The second aperture includes a second aperture plane provided with a second wavelength selecting region different from the first wavelength selecting region. The image sensor is configured to image a light beam passing through the first aperture plane and the second aperture plane and reaching an imaging plane. The first lens is configured to make a light beam passing through the first aperture plane and the second aperture plane be incident on the imaging plane.