- 专利标题: OPTICAL TEST APPARATUS AND OPTICAL TEST METHOD
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申请号: US16911473申请日: 2020-06-25
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公开(公告)号: US20200333247A1公开(公告)日: 2020-10-22
- 发明人: Hiroshi OHNO , Hiroya KANO , Hideaki OKANO
- 申请人: KABUSHIKI KAISHA TOSHIBA
- 申请人地址: JP Tokyo
- 专利权人: KABUSHIKI KAISHA TOSHIBA
- 当前专利权人: KABUSHIKI KAISHA TOSHIBA
- 当前专利权人地址: JP Tokyo
- 优先权: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@d72da66
- 主分类号: G01N21/45
- IPC分类号: G01N21/45 ; G01M11/02 ; G01B11/14 ; G01N21/41 ; G01N21/47
摘要:
According to one embodiment, an optical test apparatus includes a first aperture, a second aperture, an image sensor, and a first lens. The first aperture includes a first aperture plane provided with a first wavelength selecting region. The second aperture includes a second aperture plane provided with a second wavelength selecting region different from the first wavelength selecting region. The image sensor is configured to image a light beam passing through the first aperture plane and the second aperture plane and reaching an imaging plane. The first lens is configured to make a light beam passing through the first aperture plane and the second aperture plane be incident on the imaging plane.
公开/授权文献
- US11536652B2 Optical test apparatus and optical test method 公开/授权日:2022-12-27
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