Surface measurement device and method thereof

    公开(公告)号:US09970754B2

    公开(公告)日:2018-05-15

    申请号:US15249298

    申请日:2016-08-26

    CPC classification number: G01B11/303 B24B37/20 G01B11/0608

    Abstract: A surface measurement device includes a rotating platform, a motion lever, a measuring module and a control module. The rotating platform rotates an object at a rotating speed. The motion lever is above the rotating platform. The measuring module moves to a variety of measuring positions on the motion lever. When the measuring module is at one of the measuring positions, the measuring module measures the heights of a plurality of sampling points on the surface of the object in a sampling frequency. The control module selectively modifies the rotating speed of the rotating platform or the sampling frequency of the measuring module according to the measuring position of the measuring module to make the distance between the sampling points in at least a region of the surface of the object match a sampling rule.

    Three-dimension measurement device and operation method thereof

    公开(公告)号:US11248903B2

    公开(公告)日:2022-02-15

    申请号:US16717425

    申请日:2019-12-17

    Abstract: A three-dimension measurement device includes a moving device, a projecting device, a surface-type image-capturing device and a processing device. The moving device carries an object, and moves the object to a plurality of positions. The projecting device generates a first light to the object. The surface-type image-capturing device senses a second light generated by the object in response to the first light to generate a phase image on each of the positions. The processing device is coupled to the surface-type image-capturing device and receives the phase images. The processing device performs a region-of-interest (ROI) operation for the phase images to generate a plurality of ROI images. The processing device performs a multi-step phase-shifting operation for the ROI images to calculate the surface height distribution of the object.

    TEMPERATURE SENSING APPARATUS, LASER PROCESSING SYSTEM, AND TEMPERATURE MEASURING METHOD
    3.
    发明申请
    TEMPERATURE SENSING APPARATUS, LASER PROCESSING SYSTEM, AND TEMPERATURE MEASURING METHOD 有权
    温度感测装置,激光加工系统和温度测量方法

    公开(公告)号:US20160096236A1

    公开(公告)日:2016-04-07

    申请号:US14504433

    申请日:2014-10-02

    Abstract: A temperature sensing apparatus configured to measure a temperature distribution of a surface to be measured is provided. The temperature sensing apparatus includes a lens set, a filtering module, a plurality of sensor arrays, and a processing unit. The lens set is configured to receive radiation from the surface to be measured. The filtering module is configured to filter the radiation from the lens set into a plurality of radiation portions respectively having different wavelengths. The sensor arrays are configured to respectively sense the radiation portions. The processing unit is configured to calculate an intensity ratio distribution of the radiation between the different wavelengths according to the radiation portions respectively sensed by the sensor arrays and determine the temperature distribution according to the intensity ratio distribution. A laser processing system and a temperature measuring method are also provided.

    Abstract translation: 提供了一种被配置为测量待测表面的温度分布的温度感测装置。 温度感测装置包括透镜组,滤光模块,多个传感器阵列和处理单元。 透镜组被配置为从待测量的表面接收辐射。 滤波模块被配置为将来自透镜组的辐射滤波成分别具有不同波长的多个辐射部分。 传感器阵列被配置成分别感测辐射部分。 处理单元被配置为根据由传感器阵列分别感测的辐射部分来计算不同波长之间的辐射的强度比分布,并根据强度比分布确定温度分布。 还提供了激光加工系统和温度测量方法。

    Optical measurement system for obtaining and analyzing surface topography of object

    公开(公告)号:US11507020B2

    公开(公告)日:2022-11-22

    申请号:US17028012

    申请日:2020-09-22

    Abstract: An optical measurement system comprises a polarization beam splitter for dividing an incident beam into a reference beam and a measurement beam, a first beam splitter for reflecting the measurement beam to form a first reflected measurement beam, a spatial light modulator for modulating the first reflected measurement beam to form a modulated measurement beam, a condenser lens for focusing the modulated measurement beam to an object to form a penetrating measurement beam, an objective lens for converting the penetrating measurement beam into a parallel measurement beam, a mirror for reflecting the parallel measurement beam to form an object beam, a second beam splitter for reflecting the reference beam to a path coincident with that of the object beam, and a camera for receiving an interference signal generated by the reference beam and the object beam to generate an image of the object.

    Measurement system
    6.
    发明授权

    公开(公告)号:US09752866B2

    公开(公告)日:2017-09-05

    申请号:US14983053

    申请日:2015-12-29

    Abstract: A measurement system is configured to measure a surface structure of a sample. The surface of the sample has a thin film and a via, the depth of the via is larger than the thickness of the thin film. The measurement system includes a light source, a first light splitter, a first aperture stop, a lens assembly, a second aperture stop, a spectrum analyzer and an analysis module. The first light splitter disposed in the light emitting direction of the light source. The first aperture stop disposed between the light source and the first light splitter. The lens assembly is disposed between the first light splitter and the sample. The second aperture stop is disposed between the lens assembly and the first light splitter. The spectrum analyzer is disposed to at a side of the first light splitter opposite to the sample.

    STRUCTURED LIGHT GENERATING DEVICE AND MEASURING SYSTEM AND METHOD
    7.
    发明申请
    STRUCTURED LIGHT GENERATING DEVICE AND MEASURING SYSTEM AND METHOD 审中-公开
    结构光产生装置和测量系统及方法

    公开(公告)号:US20170066192A1

    公开(公告)日:2017-03-09

    申请号:US14935601

    申请日:2015-11-09

    Abstract: A structured light generating device and a measuring system and method are provided. The structured light generating device includes: a light modulating element for receiving a projection light beam and modulating the projection light beam into a first structured light beam having a pattern, and a light shifting element corresponding to the light modulating element for receiving and shifting the first structured light beam to generate a second structured light beam having the pattern. A shift difference is formed between the first structured light beam and the second structured light beam, and the first structured light beam and the second structured light beam are superimposed to form a superimposed structured light beam so as to improve resolution.

    Abstract translation: 提供了一种结构化光产生装置和测量系统和方法。 结构光产生装置包括:光调制元件,用于接收投影光束并将投影光束调制成具有图案的第一结构化光束;以及与光调制元件对应的光移动元件,用于接收和移位第一 结构化光束以产生具有该图案的第二结构光束。 在第一结构光束和第二结构光束之间形成偏移差,并且第一结构光束和第二结构光束被叠加以形成叠加的结构光束,从而提高分辨率。

    CLOSE-LOOP DEEP BRAIN STIMULATION ALGORITHM SYSTEM FOR PARKINSON?S DISEASE AND CLOSE-LOOP DEEP BRAIN STIMULATION ALGORITHM METHOD FOR PARKINSON?S DISEASE

    公开(公告)号:US20240075291A1

    公开(公告)日:2024-03-07

    申请号:US18088777

    申请日:2022-12-27

    CPC classification number: A61N1/36067 A61N1/36139 A61N1/36178

    Abstract: A close-loop deep brain stimulation algorithm system for Parkinson's disease includes a memory and a processor. The processor includes a deep brain stimulation (DBS) simulation module, a virtual brain network module, a feature extraction module, and a reinforcement learning module. The deep brain stimulation simulation module is adapted to combine a deep brain stimulation waveform according to the stimulation frequency and the stimulation amplitude and output the deep brain stimulation waveform. The virtual brain network module is adapted to receive the deep brain stimulation waveform to output a synaptic signal and calculate a reward parameter. The feature extraction module is adapted to receive the synaptic signal and extract a plurality of feature values according to the synaptic signal. The reinforcement learning module is adapted to train a deep brain stimulation neural network based on the feature values and reward parameter and output the stimulation frequency and the stimulation amplitude to the deep brain stimulation simulation module.

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