公开(公告)号：US20190187067A1

公开(公告)日：2019-06-20

申请号：US15846932

申请日：2017-12-19

Applicant: Industrial Technology Research Institute

Inventor： Ding-Kun Liu ,  Chia-Hung Cho

IPC: G01N21/94 ,  G01N21/958 ,  G03F1/84 ,  G01N21/88

CPC classification number: G01N21/94 ,  G01N21/8422 ,  G01N21/8806 ,  G01N21/958 ,  G01N2021/3181 ,  G01N2021/4707 ,  G01N2021/4709 ,  G01N2021/8438 ,  G03F1/84

Abstract: A detection system for a multilayer film is provided. The detection system for a multilayer film includes a light source device, a first image capture device, a second image capture device and an image processing device. The light source device projects a pair of parallel incident light to a transparent multilayer film obliquely. The pair of parallel incident light is projected onto the transparent multilayer film for producing and enabling a forward scattered light and a back scattered light to be projected therefrom. The first image capture device captures the back scattered light to produce a first image. The second image capture device captures the forward scattered light to produce a second image. The image processing device is coupled to the first image capture device and the second image capture device. The image processing device is used to compares and detect the differences between the second image and the first image.

公开(公告)号：US10429318B2

公开(公告)日：2019-10-01

申请号：US15846932

申请日：2017-12-19

Applicant: Industrial Technology Research Institute

Inventor： Ding-Kun Liu ,  Chia-Hung Cho

IPC: G01N21/94 ,  G01N21/958 ,  G01N21/88 ,  G03F1/84 ,  G01N21/31 ,  G01N21/84

Abstract: A detection system for a multilayer film is provided. The detection system for a multilayer film includes a light source device, a first image capture device, a second image capture device and an image processing device. The light source device projects a pair of parallel incident light to a transparent multilayer film obliquely. The pair of parallel incident light is projected onto the transparent multilayer film for producing and enabling a forward scattered light and a back scattered light to be projected therefrom. The first image capture device captures the back scattered light to produce a first image. The second image capture device captures the forward scattered light to produce a second image. The image processing device is coupled to the first image capture device and the second image capture device. The image processing device is used to compares and detect the differences between the second image and the first image.