公开(公告)号：US20030112095A1

公开(公告)日：2003-06-19

申请号：US10023594

申请日：2001-12-17

Applicant: Intel Corporation

Inventor： Li-Peng Wang ,  Qing Ma ,  Valluri Rao

IPC: H01L041/18

CPC classification number: H03H9/174 ,  H03H3/02 ,  H03H2003/023 ,  Y10T29/42 ,  Y10T29/49005 ,  Y10T29/4908 ,  Y10T29/49156

Abstract: A film bulk acoustic resonator is formed on a substrate. The film bulk acoustic resonator includes a layer of piezoelectric material having a first surface proximate the substrate, and a second surface distal from the substrate. The first conductive layer deposited on the first surface of the piezoelectric material includes a first portion having a surface on a different plane than a surface associated with a second portion. A method for forming the device includes depositing a first portion of a first electrode, and a piezoelectric layer onto the substrate. The method includes removing a portion of the substrate under the piezoelectric layer and under the portion of the first electrode, and depositing a second portion of the first electrode onto the piezoelectric film layer and onto the first portion of the first electrode.

Abstract translation: 在基板上形成膜体声波谐振器。 膜体声波谐振器包括具有靠近衬底的第一表面的压电材料层和远离衬底的第二表面。 沉积在压电材料的第一表面上的第一导电层包括具有与与第二部分相关联的表面不同的平面上的表面的第一部分。 一种形成该器件的方法包括将第一电极的第一部分和压电层沉积到该衬底上。 该方法包括：在压电层下方和第一电极的部分之下去除衬底的一部分，并将第一电极的第二部分沉积到压电膜层上并且沉积到第一电极的第一部分上。

公开(公告)号：US20030048520A1

公开(公告)日：2003-03-13

申请号：US09949368

申请日：2001-09-07

Applicant: Intel Corporation

Inventor： Qing Ma ,  Peng Cheng ,  Valluri Rao

IPC: G02B026/00 ,  H03H009/00

CPC classification number: B81B7/0077 ,  H03H3/0072 ,  H03H9/1057 ,  H03H9/2405 ,  H03H9/2431 ,  H03H9/2457 ,  H03H9/2463 ,  H03H2009/02503 ,  H03H2009/02511

Abstract: A microelectromechanical (MEMS) resonator with a vacuum-cavity is fabricated using polysilicon-enabled release methods. A vacuum-cavity surrounding the MEMS beam is formed by removing release material that surrounds the beam and sealing the resulting cavity under vacuum by depositing a layer of nitride over the structure. The vacuum-cavity MEMS resonators have cantilever beams, bridge beams or breathing-bar beams.

Abstract translation: 具有真空腔的微机电（MEMS）谐振器是使用多晶硅启用释放方法制造的。 围绕MEMS光束的真空腔通过去除围绕光束的释放材料并通过在结构上沉积氮化层而在真空下密封所得空腔来形成。 真空腔MEMS谐振器具有悬臂梁，桥梁或呼吸杆梁。

公开(公告)号：US20030148289A1

公开(公告)日：2003-08-07

申请号：US10067029

申请日：2002-02-04

Applicant: Intel Corporation

Inventor： Narayan Sundararajan ,  Andrew A. Berlin ,  Mineo Yamakawa ,  Valluri Rao

IPC: C12Q001/68 ,  G01N033/551

CPC classification number: B82Y30/00 ,  B82Y5/00 ,  C12Q1/6816 ,  G01N33/551 ,  G01N33/58 ,  Y10T436/23 ,  C12Q2565/601 ,  C12Q2563/155

Abstract: A novel device and method for characterization of molecules is provides that improves characterization accuracy by utilizing larger numbers of reactive molecules that are smaller or shorter in chain length for the analysis procedure. Modification of markers such as nanotubes form nanotube assemblies that are easily detected using a number of surface analysis devices such as AFM and STM. The novel method shown using carbon nanotubes to mark a signature on reactive molecules permits a larger distribution and smaller molecule size of reactive molecules used in characterization of a sample molecule. The modification of the carbon nanotubes allows the characterization procedure to detect the nanotube markers more easily, thus decreasing characterization errors, and allowing faster characterization speeds.

Abstract translation: 提供了用于表征分子的新型装置和方法，其通过利用较大数量的链长度较小或较短的分析过程来提高表征精度。 诸如纳米管之类的标记的修饰形成使用许多表面分析装置如AFM和STM容易检测的纳米管组件。 使用碳纳米管标记反应性分子上的标记的新颖方法允许用于表征样品分子的反应性分子更大的分布和更小的分子大小。 碳纳米管的修改允许表征过程更容易地检测纳米管标记，从而减少表征误差，并允许更快的表征速度。

公开(公告)号：US20030112097A1

公开(公告)日：2003-06-19

申请号：US10109811

申请日：2002-03-28

Applicant: Intel Corporation

Inventor： Qing Ma ,  Li-Peng Wang ,  Valluri Rao

IPC: H03H009/56

CPC classification number: H03H9/172 ,  H03H3/02 ,  H03H9/586 ,  Y10T29/42

Abstract: A film bulk acoustic resonator is formed on a substrate having a major surface. The film bulk acoustic resonator includes an elongated stack. The elongated stack includes a layer of piezoelectric material positioned between a first conductive layer deposited on a first surface of the layer of piezoelectric material, and a second conductive layer deposited on a second surface of the layer of piezoelectric material. The elongated stack is positioned substantially perpendicular with respect to the major surface of the substrate. The first and second conductive layers are placed on the layer of piezoelectric material substantially simultaneously and in one processing step. The major surface of the substrate is in a horizontal plane and the stack of the film bulk acoustic resonator is in a substantially vertical plane. The resonator structure formed may be used either as a resonator or a filter.

Abstract translation: 在具有主表面的基板上形成膜体声波谐振器。 薄膜体声波谐振器包括细长的叠层。 细长堆叠包括一层位于压电材料层的第一表面上的第一导电层和沉积在该压电材料层的第二表面上的第二导电层之间的压电材料。 细长的堆叠被定位成相对于基底的主表面基本垂直。 第一和第二导电层基本上同时并在一个处理步骤中放置在压电材料层上。 衬底的主表面处于水平面，膜体声波谐振器的堆叠处于基本垂直的平面。 形成的谐振器结构可以用作谐振器或滤波器。

公开(公告)号：US20040248186A1

公开(公告)日：2004-12-09

申请号：US10886400

申请日：2004-07-07

Applicant: INTEL CORPORATION

Inventor： Andrew Berlin ,  Steven J. Kirch ,  Gabi Neubauer ,  Valluri Rao ,  Mineo Yamakawa

IPC: C12Q001/68 ,  C12M001/34

CPC classification number: G01N21/6428 ,  B01L3/5027 ,  C12Q1/6869 ,  G01J3/4406 ,  G01N21/65 ,  G01N21/658 ,  G01N2021/6441 ,  G01N2021/651 ,  G01N2021/653 ,  G01N2021/655 ,  G01N2021/656 ,  C12Q2565/632 ,  C12Q2565/101 ,  C12Q2533/101 ,  C12Q2565/629 ,  C12Q2565/60

Abstract: The methods, compositions and apparatus disclosed herein are of use for nucleic acid sequence determination. The methods involve isolation of one or more nucleic acid template molecules and polymerization of a nascent complementary strand of nucleic acid, using a DNA or RNA polymerase or similar synthetic reagent. As the nascent strand is extended one nucleotide at a time, the disappearance of nucleotide precursors from solution is monitored by Raman spectroscopy or FRET. The nucleic acid sequence of the nascent strand, and the complementary sequence of the template strand, may be determined by tracking the order of incorporation of nucleotide precursors during the polymerization reaction. Certain embodiments concern apparatus comprising a reaction chamber and detection unit, of use in practicing the claimed methods. The methods, compositions and apparatus are of use in sequencing very long nucleic acid templates in a single sequencing reaction.

Abstract translation: 本文公开的方法，组合物和装置用于核酸序列测定。 所述方法包括使用DNA或RNA聚合酶或类似的合成试剂分离一个或多个核酸模板分子和核酸的新生互补链的聚合。 当新生链一次延伸一个核苷酸时，通过拉曼光谱法或FRET监测核苷酸前体从溶液中的消失。 新生链的核酸序列和模板链的互补序列可以通过跟踪聚合反应期间核苷酸前体的掺入顺序来确定。 某些实施例涉及包括在实施所要求保护的方法中使用的反应室和检测单元的装置。 方法，组合物和装置在用于在单次测序反应中测序非常长的核酸模板中有用。

公开(公告)号：US20040248185A1

公开(公告)日：2004-12-09

申请号：US10886094

申请日：2004-07-07

Applicant: INTEL CORPORATION

Inventor： Andrew Berlin ,  Steven J. Kirch ,  Gabi Neubauer ,  Valluri Rao ,  Mineo Yamakawa

IPC: C12Q001/68 ,  C12M001/34

CPC classification number: G01N21/6428 ,  B01L3/5027 ,  C12Q1/6869 ,  G01J3/4406 ,  G01N21/65 ,  G01N21/658 ,  G01N2021/6441 ,  G01N2021/651 ,  G01N2021/653 ,  G01N2021/655 ,  G01N2021/656 ,  C12Q2565/632 ,  C12Q2565/101 ,  C12Q2533/101 ,  C12Q2565/629 ,  C12Q2565/60

Abstract: The methods, compositions and apparatus disclosed herein are of use for nucleic acid sequence determination. The methods involve isolation of one or more nucleic acid template molecules and polymerization of a nascent complementary strand of nucleic acid, using a DNA or RNA polymerase or similar synthetic reagent. As the nascent strand is extended one nucleotide at a time, the disappearance of nucleotide precursors from solution is monitored by Raman spectroscopy or FRET. The nucleic acid sequence of the nascent strand, and the complementary sequence of the template strand, may be determined by tracking the order of incorporation of nucleotide precursors during the polymerization reaction. Certain embodiments concern apparatus comprising a reaction chamber and detection unit, of use in practicing the claimed methods. The methods, compositions and apparatus are of use in sequencing very long nucleic acid templates in a single sequencing reaction.

Abstract translation: 本文公开的方法，组合物和装置用于核酸序列测定。 所述方法包括使用DNA或RNA聚合酶或类似的合成试剂分离一个或多个核酸模板分子和核酸的新生互补链的聚合。 当新生链一次延伸一个核苷酸时，通过拉曼光谱法或FRET监测核苷酸前体从溶液中的消失。 新生链的核酸序列和模板链的互补序列可以通过跟踪聚合反应期间核苷酸前体的掺入顺序来确定。 某些实施例涉及包括在实施所要求保护的方法中使用的反应室和检测单元的装置。 方法，组合物和装置在用于在单次测序反应中测序非常长的核酸模板中有用。

公开(公告)号：US20040219596A1

公开(公告)日：2004-11-04

申请号：US10861644

申请日：2004-06-04

Applicant: Intel Corporation

Inventor： Narayan Sundararajan ,  Andrew A. Berlin ,  Mineo Yamakawa ,  Valluri Rao

IPC: C12Q001/68 ,  G01N033/53 ,  G01N033/00

CPC classification number: B82Y30/00 ,  B82Y5/00 ,  C12Q1/6816 ,  G01N33/551 ,  G01N33/58 ,  Y10T436/23 ,  C12Q2565/601 ,  C12Q2563/155

Abstract: A novel device and method for characterization of molecules is provides that improves characterization accuracy by utilizing larger numbers of reactive molecules that are smaller or shorter in chain length for the analysis procedure. Modification of markers such as nanotubes form nanotube assemblies that are easily detected using a number of surface analysis devices such as AFM and STM. The novel method shown using carbon nanotubes to mark a signature on reactive molecules permits a larger distribution and smaller molecule size of reactive molecules used in characterization of a sample molecule. The modification of the carbon nanotubes allows the characterization procedure to detect the nanotube markers more easily, thus decreasing characterization errors, and allowing faster characterization speeds.

Abstract translation: 提供了用于表征分子的新型装置和方法，其通过利用较大数量的链长度较小或较短的分析过程来提高表征精度。 诸如纳米管之类的标记的修饰形成使用许多表面分析装置如AFM和STM容易检测的纳米管组件。 使用碳纳米管标记反应性分子上的标记的新颖方法允许用于表征样品分子的反应性分子更大的分布和更小的分子大小。 碳纳米管的修改允许表征过程更容易地检测纳米管标记，从而减少表征误差，并允许更快的表征速度。

公开(公告)号：US20040115654A1

公开(公告)日：2004-06-17

申请号：US10320041

申请日：2002-12-16

Applicant: Intel Corporation

Inventor： Valluri Rao ,  Mineo Yamakawa ,  Andrew A. Berlin

IPC: C12Q001/68 ,  B05D003/00 ,  C12M001/34

CPC classification number: B82Y30/00 ,  B01J19/0046 ,  B01J2219/00441 ,  B01J2219/00527 ,  B01J2219/00608 ,  B01J2219/0061 ,  B01J2219/00612 ,  B01J2219/00621 ,  B01J2219/00689 ,  B01J2219/00711 ,  B01J2219/00722

Abstract: A method and apparatus for forming a polymer array on a substrate suitable for synthesizing polymer sequences. This includes forming an array, each location of the array having at least one strand end, forming photosensitive protection on the strand ends, and selectively scanning and modulating at least one energy beam to expose a pattern on the photosensitive protection. In some embodiments, the method further includes removing a protective group from selected strand ends based on the exposed pattern. The method then includes adding a predetermined one or more polymeric subunits to the deprotected strand ends. In some embodiments the photosensitive protection includes a layer of photoresist to cover the strand ends. Some embodiments use an ultra-violet laser.

Abstract translation: 一种在适于合成聚合物序列的基材上形成聚合物阵列的方法和装置。 这包括形成阵列，阵列的每个位置具有至少一个绞合端，在绞合端上形成感光保护，并且选择性地扫描和调制至少一个能量束以暴露感光保护上的图案。 在一些实施方案中，该方法还包括基于暴露图案从选定的链末端去除保护基团。 该方法然后包括将预定的一个或多个聚合物亚单位加入去保护的末端。 在一些实施例中，感光保护包括一层光致抗蚀剂以覆盖绞合端。 一些实施例使用紫外激光。

公开(公告)号：US20040104640A1

公开(公告)日：2004-06-03

申请号：US10716750

申请日：2003-11-19

Applicant: Intel Corporation

Inventor： Li-Peng Wang ,  Qing Ma ,  Valluri Rao

IPC: H02N002/00 ,  H01L041/04

CPC classification number: H03H9/174 ,  H03H3/02 ,  H03H2003/023 ,  Y10T29/42 ,  Y10T29/49005 ,  Y10T29/4908 ,  Y10T29/49156

Abstract: A film bulk acoustic resonator is formed on a substrate. The film bulk acoustic resonator includes a layer of piezoelectric material having a first surface proximate the substrate, and a second surface distal from the substrate. The first conductive layer deposited on the first surface of the piezoelectric material includes a first portion having a surface on a different plane than a surface associated with a second portion.

Abstract translation: 在基板上形成膜体声波谐振器。 膜体声波谐振器包括具有靠近衬底的第一表面的压电材料层和远离衬底的第二表面。 沉积在压电材料的第一表面上的第一导电层包括具有与与第二部分相关联的表面不同的平面上的表面的第一部分。