公开(公告)号：US3806382A

公开(公告)日：1974-04-23

申请号：US24182172

申请日：1972-04-06

Applicant: IBM

Inventor： MICHAUD R ,  FITZGIBBONS W ,  KENNEY D

IPC: C30B31/02 ,  H01L21/22 ,  H01L21/225 ,  H01L21/306 ,  H01L7/34

CPC classification number: C30B31/02 ,  H01L21/2252 ,  Y10S438/92

Abstract: A VAPOR-SOLID DIFFUSION PROCESS FOR PROVIDING ACCURATE AND CONTROLLABLE QUANTITIES OF SEMICONDUCTOR CONDUCTIVITY DETERMINING IMPURITIES IN SEMICONDUCTOR SURFACES WHEREIN A NORMALLY UNDESIRABLE SEMICONDUCTOR-IMPURITY PHASE MATERIAL IS USED TO PROVIDE A SUBSTANTIALLY UNLIMITED AND CONSTANT SOURCE OF IMPURITY IN A DEPOSITION AND FIRST DIFFUSION STEP AND WHEREIN AN OXIDIZING ATMOSPHERE IS PROVIDED IMMEDIATELY AFTER INITIAL DEPOSITION, PRIOR TO FINAL DRIVE IN, IN ORDER TO CONVERT THE PHASE MATERIAL TO A SOLUBLE COMPOUND WHICH IS REMOVED PRIOR TO DRIVE-IN. THE PROCESS PROVIDES FOR HIGHER SURFACE CONCENTRATIONS OF IMPURITIES AND AVOIDS THE KNOWN DISADVANTAGES OF THE PHASE MATERIAL.

公开(公告)号：US3805736A

公开(公告)日：1974-04-23

申请号：US37530873

申请日：1973-06-29

Applicant: IBM

Inventor： FOEHRING R ,  GARNACHE R ,  KENNEY D

IPC: C30B31/10 ,  C30B31/12 ,  C30B31/16 ,  C23C13/10

CPC classification number: C30B31/16 ,  C30B31/106 ,  C30B31/12 ,  Y10S148/006 ,  Y10S148/12

Abstract: Apparatus for continuously carrying out mass transfer reactions in a reaction chamber utilizing laminar flow to provide diffusion limited transport and to provide isolation between process steps. There is provided a gaseous phase material inlet filter tube to introduce gaseous phase material in laminar flow within a reaction zone and an exhaust pressure baffle to maintain laminar flow throughout the reaction zone. Substrates may be continuously passed through a reaction zone to provide an inline system.

Abstract translation: 用于在反应室中连续进行质量传递反应的装置，其利用层流以提供扩散限制的传输并在工艺步骤之间提供隔离。 提供了一种气相材料入口过滤管，以在反应区内的层流中引入气相物质和排气压力挡板，以保持整个反应区域中的层流。 底物可以连续地通过反应区以提供在线系统。