摘要:
Methods and apparatus are provided for locating a notch and/or a center of the notch of a substrate. An exemplary method includes rotating a substrate; illuminating an edge of the substrate with a light beam as the substrate rotates; detecting a change in light intensity of the light beam as the substrate rotates; determining a rough location of a notch in the edge of the substrate based on a position of the substrate when the change in light intensity of the light beam is detected; and reversing a rotational direction of the substrate to determine a fine location of the notch in the edge of the substrate. Numerous other aspects are provided.
摘要:
In a first aspect, a first apparatus is provided. The first apparatus includes a through-beam sensor coupled to a scrubber and adapted to detect a notch or flat of a substrate in the scrubber during processing. The through-beam sensor has (1) an emitter facing a first major surface of a substrate in the scrubber and adapted to transmit a beam toward an edge of the first major surface; and (2) a receiver facing a second major surface of the substrate and adapted to receive the beam transmitted from the emitter when the edge of the substrate does not obstruct the beam. Numerous other aspects are provided.
摘要:
In a first aspect, a first apparatus is provided. The first apparatus includes a through-beam sensor coupled to a scrubber and adapted to detect a notch or flat of a substrate in the scrubber during processing. The through-beam sensor has (1) an emitter facing a first major surface of a substrate in the scrubber and adapted to transmit a beam toward an edge of the first major surface; and (2) a receiver facing a second major surface of the substrate and adapted to receive the beam transmitted from the emitter when the edge of the substrate does not obstruct the beam. Numerous other aspects are provided.
摘要:
A scrubber box is provided that includes a tank adapted to receive a substrate for cleaning, supports outside of the tank and adapted to couple to ends of scrubber brushes disposed within the tank, a motor mounted to each of the supports and adapted to rotate the scrubber brushes, a base to which the supports are pivotally mounted via spherical bearings adapted to permit toe-in of the scrubber brushes, a brush gap actuator adapted, via a crank and rocker mechanism, to substantially simultaneously pivot the supports toward or away from each other so as to permit the scrubber brushes to substantially simultaneously achieve or break contact with the substrate, and a toe-in actuator adapted to move two of the spherical bearings toward or away from each other so as to adjust a toe-in angle between the scrubber brushes.
摘要:
A scrubber box is provided that includes a tank adapted to receive a substrate for cleaning, supports outside of the tank and adapted to couple to ends of scrubber brushes disposed within the tank, a motor mounted to each of the supports and adapted to rotate the scrubber brushes, a base to which the supports are pivotally mounted via spherical bearings adapted to permit toe-in of the scrubber brushes, a brush gap actuator adapted, via a crank and rocker mechanism, to substantially simultaneously pivot the supports toward or away from each other so as to permit the scrubber brushes to substantially simultaneously achieve or break contact with the substrate, and a toe-in actuator adapted to move two of the spherical bearings toward or away from each other so as to adjust a toe-in angle between the scrubber brushes.
摘要:
A scrubber box is provided that includes a tank adapted to receive a substrate for cleaning, supports outside of the tank and adapted to couple to ends of scrubber brushes disposed within the tank, a motor mounted to each of the supports and adapted to rotate the scrubber brushes, a base to which the supports are pivotally mounted via spherical bearings adapted to permit toe-in of the scrubber brushes, a brush gap actuator adapted, via a crank and rocker mechanism, to substantially simultaneously pivot the supports toward or away from each other so as to permit the scrubber brushes to substantially simultaneously achieve or break contact with the substrate, and a toe-in actuator adapted to move two of the spherical bearings toward or away from each other so as to adjust a toe-in angle between the scrubber brushes.
摘要:
A scrubber box is provided that includes a tank adapted to receive a substrate for cleaning, supports outside of the tank and adapted to couple to ends of scrubber brushes disposed within the tank, a motor mounted to each of the supports and adapted to rotate the scrubber brushes, a base to which the supports are pivotally mounted via spherical bearings adapted to permit toe-in of the scrubber brushes, a brush gap actuator adapted, via a crank and rocker mechanism, to substantially simultaneously pivot the supports toward or away from each other so as to permit the scrubber brushes to substantially simultaneously achieve or break contact with the substrate, and a toe-in actuator adapted to move two of the spherical bearings toward or away from each other so as to adjust a toe-in angle between the scrubber brushes.
摘要:
One embodiment of the invention is directed to a method comprising, receiving, by a server computer, a request to establish a group identifier for a group. A group identifier is generated for the group. Group invitations to join the group are transmitted and group invitation responses are received. The method further comprises receiving, by the server computer, confirmations to share a group transaction. A plurality of messages are initiated, the plurality of messages corresponding to the plurality of confirmations, where the plurality of messages result in an initiation of a single message to a third-party, the third-party computer being configured to conduct the group transaction according the single message.
摘要:
According to a first aspect, it is presented a method for decoding at least one signal from a sequence of symbols. The method is executed in a network node of a mobile communication system and comprises the steps of: receiving a sequence of symbols using a radio receiver; identifying at least one corrupted symbol by identifying a corruption of at least the first received symbol of the plurality of symbols; obtaining a working set of symbols, by omitting the at least one corrupted symbol from the sequence of symbols; and de-spreading the working set of symbols using a subset of a first de-spreading code, wherein the subset of the first de-spreading code comprises code elements corresponding to the working set of symbols, to thereby provide a first decoded signal. A corresponding network node, computer program and computer program product are also presented.
摘要:
The present invention discloses a network node (100) for multi-user scheduling involving retransmission. The network node comprises a receiver (110) adapted to receive channel quality indicator (CQI) report from a user equipment (UE), an adjuster (120) adapted to adjust signal to interference and noise ratio (SINR) derived from the CQI report to obtain SINR for retransmission, a combiner (130) adapted to combine SINR for initial transmission and SINR for one or a plurality of retransmission to obtain effective SINR, and a scheduler (140) adapted to perform multi-user scheduling on the basis of priority metric derived from the effective SINR. The present invention improves multi-user scheduling by taking HARQ combining gain into account. Instantaneous throughput as well as priority metric can be accurately measured, because SINR from not only channel quality (e.g. CQI) but also HARQ processing gain are both included.