METHODS AND APPARATUS FOR FINDING A SUBSTRATE NOTCH CENTER
    1.
    发明申请
    METHODS AND APPARATUS FOR FINDING A SUBSTRATE NOTCH CENTER 审中-公开
    用于发现底板凹陷中心的方法和装置

    公开(公告)号:US20080291448A1

    公开(公告)日:2008-11-27

    申请号:US12124135

    申请日:2008-05-20

    IPC分类号: G01B11/00

    CPC分类号: G01B11/002

    摘要: Methods and apparatus are provided for locating a notch and/or a center of the notch of a substrate. An exemplary method includes rotating a substrate; illuminating an edge of the substrate with a light beam as the substrate rotates; detecting a change in light intensity of the light beam as the substrate rotates; determining a rough location of a notch in the edge of the substrate based on a position of the substrate when the change in light intensity of the light beam is detected; and reversing a rotational direction of the substrate to determine a fine location of the notch in the edge of the substrate. Numerous other aspects are provided.

    摘要翻译: 提供了用于定位基板的凹口和/或中心的方法和装置。 一种示例性方法包括旋转衬底; 当衬底旋转时,用光束照射衬底的边缘; 检测基板旋转时光束的光强度的变化; 当检测到光束的光强度的变化时,基于衬底的位置确定衬底的边缘中的凹口的粗略位置; 并且反转衬底的旋转方向以确定衬底边缘中凹口的精细位置。 提供了许多其他方面。

    METHODS AND APPARATUS FOR DETECTING A SUBSTRATE NOTCH OR FLAT
    2.
    发明申请
    METHODS AND APPARATUS FOR DETECTING A SUBSTRATE NOTCH OR FLAT 有权
    用于检测基底凹陷或平面的方法和装置

    公开(公告)号:US20080006785A1

    公开(公告)日:2008-01-10

    申请号:US11683420

    申请日:2007-03-07

    IPC分类号: G01N21/86

    CPC分类号: G01V8/12

    摘要: In a first aspect, a first apparatus is provided. The first apparatus includes a through-beam sensor coupled to a scrubber and adapted to detect a notch or flat of a substrate in the scrubber during processing. The through-beam sensor has (1) an emitter facing a first major surface of a substrate in the scrubber and adapted to transmit a beam toward an edge of the first major surface; and (2) a receiver facing a second major surface of the substrate and adapted to receive the beam transmitted from the emitter when the edge of the substrate does not obstruct the beam. Numerous other aspects are provided.

    摘要翻译: 在第一方面中,提供了一种第一装置。 第一装置包括耦合到洗涤器并适于在处理期间检测洗涤器中的基板的凹口或平面的通过光束传感器。 通过光束传感器具有(1)发射器面向洗涤器中的基板的第一主表面并且适于将光束传送到第一主表面的边缘; 和(2)接触器,其面对衬底的第二主表面,并且适于在衬底的边缘不阻挡光束时接收从发射器发射的光束。 提供了许多其他方面。

    Methods and apparatus for detecting a substrate notch or flat
    3.
    发明授权
    Methods and apparatus for detecting a substrate notch or flat 有权
    用于检测基板切口或平面的方法和装置

    公开(公告)号:US08101934B2

    公开(公告)日:2012-01-24

    申请号:US11683420

    申请日:2007-03-07

    IPC分类号: G01V8/00

    CPC分类号: G01V8/12

    摘要: In a first aspect, a first apparatus is provided. The first apparatus includes a through-beam sensor coupled to a scrubber and adapted to detect a notch or flat of a substrate in the scrubber during processing. The through-beam sensor has (1) an emitter facing a first major surface of a substrate in the scrubber and adapted to transmit a beam toward an edge of the first major surface; and (2) a receiver facing a second major surface of the substrate and adapted to receive the beam transmitted from the emitter when the edge of the substrate does not obstruct the beam. Numerous other aspects are provided.

    摘要翻译: 在第一方面中,提供了一种第一装置。 第一装置包括耦合到洗涤器并适于在处理期间检测洗涤器中的基板的凹口或平面的通过光束传感器。 通过光束传感器具有(1)发射器面向洗涤器中的基板的第一主表面并且适于将光束传送到第一主表面的边缘; 和(2)接触器,其面对衬底的第二主表面,并且适于在衬底的边缘不阻挡光束时接收从发射器发射的光束。 提供了许多其他方面。

    SCRUBBER BOX AND METHODS FOR USING THE SAME
    4.
    发明申请
    SCRUBBER BOX AND METHODS FOR USING THE SAME 有权
    SCRUBBER BOX及其使用方法

    公开(公告)号:US20080210258A1

    公开(公告)日:2008-09-04

    申请号:US12102846

    申请日:2008-04-14

    IPC分类号: B08B7/00 A47L25/00

    CPC分类号: H01L21/67046 B08B1/04

    摘要: A scrubber box is provided that includes a tank adapted to receive a substrate for cleaning, supports outside of the tank and adapted to couple to ends of scrubber brushes disposed within the tank, a motor mounted to each of the supports and adapted to rotate the scrubber brushes, a base to which the supports are pivotally mounted via spherical bearings adapted to permit toe-in of the scrubber brushes, a brush gap actuator adapted, via a crank and rocker mechanism, to substantially simultaneously pivot the supports toward or away from each other so as to permit the scrubber brushes to substantially simultaneously achieve or break contact with the substrate, and a toe-in actuator adapted to move two of the spherical bearings toward or away from each other so as to adjust a toe-in angle between the scrubber brushes.

    摘要翻译: 提供了一种洗涤器箱,其包括适于接收用于清洁的基底的罐,支撑在罐外部并且适于耦合到设置在罐内的洗涤器刷的端部;马达,其安装到每个支撑件上并适于旋转洗涤器 电刷,支架通过适于允许洗涤器刷子进入的球面轴承可枢转地安装的基座,经由曲柄和摇臂机构适应的基本上同时地使支撑件朝向或远离彼此枢转的电刷间隙致动器 以便允许洗涤器刷子基本上同时实现或断开与基板的接触,以及适于将两个球形轴承朝向或远离彼此移动的脚趾致动器,以便调节洗涤器之间的束缚角度 刷子

    Scrubber box
    5.
    发明授权
    Scrubber box 有权
    洗衣盒

    公开(公告)号:US07377002B2

    公开(公告)日:2008-05-27

    申请号:US10976012

    申请日:2004-10-28

    IPC分类号: B08B1/04

    CPC分类号: H01L21/67046 B08B1/04

    摘要: A scrubber box is provided that includes a tank adapted to receive a substrate for cleaning, supports outside of the tank and adapted to couple to ends of scrubber brushes disposed within the tank, a motor mounted to each of the supports and adapted to rotate the scrubber brushes, a base to which the supports are pivotally mounted via spherical bearings adapted to permit toe-in of the scrubber brushes, a brush gap actuator adapted, via a crank and rocker mechanism, to substantially simultaneously pivot the supports toward or away from each other so as to permit the scrubber brushes to substantially simultaneously achieve or break contact with the substrate, and a toe-in actuator adapted to move two of the spherical bearings toward or away from each other so as to adjust a toe-in angle between the scrubber brushes.

    摘要翻译: 提供了一种洗涤器箱,其包括适于接收用于清洁的基底的罐,支撑在罐外部并且适于耦合到设置在罐内的洗涤器刷的端部;马达,其安装到每个支撑件上并适于旋转洗涤器 电刷,支架通过适于允许洗涤器刷子进入的球面轴承可枢转地安装的基座,经由曲柄和摇臂机构适应的基本上同时地使支撑件朝向或远离彼此枢转的电刷间隙致动器 以便允许洗涤器刷子基本上同时实现或断开与基板的接触,以及适于将两个球形轴承朝向或远离彼此移动的脚趾致动器,以便调节洗涤器之间的束缚角度 刷子

    Scrubber box and methods for using the same
    6.
    发明授权
    Scrubber box and methods for using the same 有权
    洗涤箱和使用方法

    公开(公告)号:US07774887B2

    公开(公告)日:2010-08-17

    申请号:US12102846

    申请日:2008-04-14

    IPC分类号: B08B7/00 A47L25/00

    CPC分类号: H01L21/67046 B08B1/04

    摘要: A scrubber box is provided that includes a tank adapted to receive a substrate for cleaning, supports outside of the tank and adapted to couple to ends of scrubber brushes disposed within the tank, a motor mounted to each of the supports and adapted to rotate the scrubber brushes, a base to which the supports are pivotally mounted via spherical bearings adapted to permit toe-in of the scrubber brushes, a brush gap actuator adapted, via a crank and rocker mechanism, to substantially simultaneously pivot the supports toward or away from each other so as to permit the scrubber brushes to substantially simultaneously achieve or break contact with the substrate, and a toe-in actuator adapted to move two of the spherical bearings toward or away from each other so as to adjust a toe-in angle between the scrubber brushes.

    摘要翻译: 提供了一种洗涤器箱,其包括适于接收用于清洁的基底的罐,支撑在罐外部并且适于耦合到设置在罐内的洗涤器刷的端部;马达,其安装到每个支撑件上并适于旋转洗涤器 电刷,支架通过适于允许洗涤器刷子进入的球面轴承可枢转地安装的基座,经由曲柄和摇臂机构适应的基本上同时地使支撑件朝向或远离彼此枢转的电刷间隙致动器 以便允许洗涤器刷子基本上同时实现或断开与基板的接触,以及适于将两个球形轴承朝向或远离彼此移动的脚趾致动器,以便调节洗涤器之间的束缚角度 刷子

    Scrubber box and methods for using the same
    7.
    发明申请
    Scrubber box and methods for using the same 有权
    洗涤箱和使用方法

    公开(公告)号:US20050087212A1

    公开(公告)日:2005-04-28

    申请号:US10976012

    申请日:2004-10-28

    IPC分类号: B08B1/04 H01L21/00

    CPC分类号: H01L21/67046 B08B1/04

    摘要: A scrubber box is provided that includes a tank adapted to receive a substrate for cleaning, supports outside of the tank and adapted to couple to ends of scrubber brushes disposed within the tank, a motor mounted to each of the supports and adapted to rotate the scrubber brushes, a base to which the supports are pivotally mounted via spherical bearings adapted to permit toe-in of the scrubber brushes, a brush gap actuator adapted, via a crank and rocker mechanism, to substantially simultaneously pivot the supports toward or away from each other so as to permit the scrubber brushes to substantially simultaneously achieve or break contact with the substrate, and a toe-in actuator adapted to move two of the spherical bearings toward or away from each other so as to adjust a toe-in angle between the scrubber brushes.

    摘要翻译: 提供了一种洗涤器箱,其包括适于接收用于清洁的基底的罐,支撑在罐外部并且适于耦合到设置在罐内的洗涤器刷的端部;马达,其安装到每个支撑件上并适于旋转洗涤器 电刷,支架通过适于允许洗涤器刷子进入的球面轴承可枢转地安装的基座,经由曲柄和摇臂机构适应的基本上同时地使支撑件朝向或远离彼此枢转的电刷间隙致动器 以便允许洗涤器刷子基本上同时实现或断开与基板的接触,以及适于将两个球形轴承朝向或远离彼此移动的脚趾致动器,以便调节洗涤器之间的束缚角度 刷子

    METHOD, NETWORK NODE, COMPUTER PROGRAM AND COMPUTER PROGRAM PRODUCT FOR DECODING A SIGNAL
    9.
    发明申请
    METHOD, NETWORK NODE, COMPUTER PROGRAM AND COMPUTER PROGRAM PRODUCT FOR DECODING A SIGNAL 有权
    方法,网络节点,计算机程序和用于解码信号的计算机程序产品

    公开(公告)号:US20140362956A1

    公开(公告)日:2014-12-11

    申请号:US14366995

    申请日:2011-12-21

    IPC分类号: H04L1/00

    摘要: According to a first aspect, it is presented a method for decoding at least one signal from a sequence of symbols. The method is executed in a network node of a mobile communication system and comprises the steps of: receiving a sequence of symbols using a radio receiver; identifying at least one corrupted symbol by identifying a corruption of at least the first received symbol of the plurality of symbols; obtaining a working set of symbols, by omitting the at least one corrupted symbol from the sequence of symbols; and de-spreading the working set of symbols using a subset of a first de-spreading code, wherein the subset of the first de-spreading code comprises code elements corresponding to the working set of symbols, to thereby provide a first decoded signal. A corresponding network node, computer program and computer program product are also presented.

    摘要翻译: 根据第一方面,提供了一种用于从符号序列中解码至少一个信号的方法。 该方法在移动通信系统的网络节点中执行,并且包括以下步骤:使用无线电接收机接收符号序列; 通过识别至少所述多个符号中的所述第一接收符号的损坏来识别至少一个损坏的符号; 通过从所述符号序列中省略所述至少一个损坏的符号来获得工作符号集合; 以及使用第一去扩展码的子集来解扩所述工作符号组,其中所述第一解扩展码的子集包括与所述工作符号集相对应的代码元素,从而提供第一解码信号。 还提出了相应的网络节点,计算机程序和计算机程序产品。

    Multi-user scheduling involving retransmission
    10.
    发明授权
    Multi-user scheduling involving retransmission 有权
    涉及重传的多用户调度

    公开(公告)号:US08665812B2

    公开(公告)日:2014-03-04

    申请号:US13377187

    申请日:2011-10-27

    IPC分类号: H04W4/00

    摘要: The present invention discloses a network node (100) for multi-user scheduling involving retransmission. The network node comprises a receiver (110) adapted to receive channel quality indicator (CQI) report from a user equipment (UE), an adjuster (120) adapted to adjust signal to interference and noise ratio (SINR) derived from the CQI report to obtain SINR for retransmission, a combiner (130) adapted to combine SINR for initial transmission and SINR for one or a plurality of retransmission to obtain effective SINR, and a scheduler (140) adapted to perform multi-user scheduling on the basis of priority metric derived from the effective SINR. The present invention improves multi-user scheduling by taking HARQ combining gain into account. Instantaneous throughput as well as priority metric can be accurately measured, because SINR from not only channel quality (e.g. CQI) but also HARQ processing gain are both included.

    摘要翻译: 本发明公开了一种用于涉及重传的多用户调度的网络节点(100)。 网络节点包括适于从用户设备(UE)接收信道质量指示符(CQI)报告的接收机(110),适于调整从CQI报告导出的信噪比和噪声比(SINR)的调整器(120) 获取用于重传的SINR,适于组合用于初始传输的SINR和用于一次或多次重发的SINR以获得有效SINR的组合器(130),以及适于基于优先级度量进行多用户调度的调度器(140) 源自有效的SINR。 本发明通过考虑HARQ组合增益来改进多用户调度。 由于不仅包括信道质量(例如CQI)的SINR,还包括HARQ处理增益,因此可以精确地测量瞬时吞吐量以及优先级度量。