-
公开(公告)号:US11833611B2
公开(公告)日:2023-12-05
申请号:US17289011
申请日:2019-10-30
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor: Takeshi Sakamoto , Junji Okuma
IPC: B23K26/08 , B23K26/351 , B23K26/06 , B23K101/40
CPC classification number: B23K26/0823 , B23K26/0604 , B23K26/0853 , B23K26/0884 , B23K26/351 , B23K2101/40
Abstract: A laser processing apparatus includes a support portion, a laser processing head, a vertical movement mechanism, a horizontal movement mechanism, and a controller. The controller controls starting and stopping of emission of a laser light from the laser processing head based on rotation information in a state where a focusing point is positioned at a position along a circumferential edge of an effective region in a target, while rotating the support portion, to perform a circumferential edge process for forming a modified region along the circumferential edge of the effective region in the target.
-
公开(公告)号:US10898975B2
公开(公告)日:2021-01-26
申请号:US15753311
申请日:2016-08-08
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor: Junji Okuma , Yo Sugimoto
IPC: B23K26/53 , B23K26/0622 , B23K26/08 , B23K26/03 , B23K26/00 , B23K26/364 , B23K26/06
Abstract: A laser processing device includes: a support table; a laser light source; a converging optical system; an imaging unit configured to image a front surface of an object; a candidate line setting unit configured to set a plurality of candidate lines; an operation controller configured to control operation of at least one of the support table, the laser light source, and the converging optical system such that a modified region is formed inside the object along each of the plurality of candidate lines, and a crack reaches the front surface of the object from the modified region; and a reference line setting unit configured to set a reference line determined as a line indicating a crystal orientation of the object on the basis of an image of the crack.
-
公开(公告)号:US12202070B2
公开(公告)日:2025-01-21
申请号:US16072626
申请日:2017-01-24
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor: Junji Okuma , Mitsuhiro Nagao , Yasunori Igasaki
IPC: B23K26/06 , B23K26/03 , B23K26/064 , B23K26/08 , B23K26/53 , H01S3/00 , H01S3/10 , B23K103/00 , H01S3/23
Abstract: A laser processing device includes: a device frame; a support unit attached to the device frame and configured to support an object to be processed; a laser output unit attached to the device frame; and a laser converging unit attached to the device frame so as to be movable with respect to the laser output unit. The laser output unit includes a laser light source configured to emit laser light, and the laser converging unit includes: a reflective spatial light modulator configured to reflect the laser light while modulating the laser light; a converging optical system configured to converge the laser light at the object to be processed; and an imaging optical system constituting a double telecentric optical system in which a reflective surface of the reflective spatial light modulator and an entrance pupil plane of the converging optical system are in an imaging relationship.
-
公开(公告)号:USD920397S1
公开(公告)日:2021-05-25
申请号:US29689267
申请日:2019-04-29
Applicant: HAMAMATSU PHOTONICS K.K.
Designer: Junji Okuma , Takeshi Sakamoto
-
公开(公告)号:USD918276S1
公开(公告)日:2021-05-04
申请号:US29689272
申请日:2019-04-29
Applicant: HAMAMATSU PHOTONICS K.K.
Designer: Junji Okuma , Takeshi Sakamoto
-
公开(公告)号:US12145214B2
公开(公告)日:2024-11-19
申请号:US17288821
申请日:2019-10-30
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor: Takeshi Sakamoto , Junji Okuma
Abstract: A laser processing head includes: a housing; an entrance portion; an adjustment portion; and a condensing portion. A distance between a third wall portion and a fourth wall portion facing each other in a second direction is shorter than a distance between a first wall portion and a second wall portion facing each other in a first direction. The housing is configured to be attached to an attachment portion of a laser processing apparatus, with at least one of the first wall portion, the second wall portion, the third wall portion, and a fifth wall portion disposed on the side of the attachment portion. The condensing portion is disposed on a sixth wall portion, and is offset toward the fourth wall portion in the second direction.
-
公开(公告)号:US11642743B2
公开(公告)日:2023-05-09
申请号:US16760094
申请日:2018-10-31
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor: Junji Okuma
IPC: B23K26/53 , B23K26/00 , B23K26/03 , B23K26/062 , B23K26/064 , G01N21/55 , G06T7/70 , B23K103/00
CPC classification number: B23K26/53 , B23K26/0006 , B23K26/032 , B23K26/062 , B23K26/064 , G01N21/55 , G06T7/70 , B23K2103/56 , G01N2201/06113
Abstract: A laser processing method includes a first step of emitting measurement laser light of a first wavelength from the reference surface side to a reference object having a reference surface of which reflectance for the first wavelength is known to obtain a reference light amount as a reflected light amount of the measurement laser light on the reference surface, a second step of emitting the measurement laser light from the first surface side to the object to be processed to obtain a first light amount as a reflected light amount of the measurement laser light on the first surface, and a third step of, after the first step and the second step, calculating a reflectance of the first surface for the first wavelength based on a reflectance of the reference object, the reference light amount, and the first light amount.
-
公开(公告)号:USD917586S1
公开(公告)日:2021-04-27
申请号:US29689300
申请日:2019-04-29
Applicant: HAMAMATSU PHOTONICS K.K.
Designer: Junji Okuma , Takeshi Sakamoto
-
公开(公告)号:USD917585S1
公开(公告)日:2021-04-27
申请号:US29689281
申请日:2019-04-29
Applicant: HAMAMATSU PHOTONICS K.K.
Designer: Junji Okuma , Takeshi Sakamoto
-
公开(公告)号:US11872655B2
公开(公告)日:2024-01-16
申请号:US17257606
申请日:2019-07-01
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor: Junji Okuma
IPC: B23K26/38 , B23K26/06 , B23K26/03 , B23K26/073 , B23K26/08 , B23K26/0622 , B23K101/40
CPC classification number: B23K26/38 , B23K26/032 , B23K26/0643 , B23K26/0648 , B23K26/0736 , B23K26/083 , B23K26/0622 , B23K2101/40
Abstract: Disclosed is a laser processing device including a laser light source configured to output laser light, a converging unit configured to converge the laser light toward a first surface to form a converging point, a camera configured to image reflected light of the laser light from the first surface, a spatial light modulator for modulating the laser light according to a modulation pattern, and a controller configured to execute acquisition processing of applying the laser light to the first surface by controlling the laser light source and imaging the reflected light by controlling the camera to acquire a reflectance of the first surface for the first wavelength.
-
-
-
-
-
-
-
-
-