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公开(公告)号：US20170280544A1
公开(公告)日：2017-09-28
申请号：US15613789
申请日：2017-06-05
Applicant: GIGAPHOTON INC.
Inventor： Yoshifumi UENO , Takashi SUGANUMA , Yoshiaki KUROSAWA
CPC classification number: H05G2/008 , G01J1/0238 , G01J1/0403 , G01J1/0411 , G01J1/0448 , G01J1/4257 , G02B17/0892 , G02B17/0896 , G02B19/0095 , G02B26/0816 , H01S3/005
Abstract: A beam delivery system may include: beam adjusters configured to adjust a divergence angle of a pulse laser beam; a beam sampler configured to separate a part of the pulse laser beam outputted from a first beam adjuster provided at the most downstream among the beam adjusters to acquire a sample beam; a beam monitor configured to receive the sample beam and output a monitored diameter; and a beam delivery controller configured to control the beam adjusters based on the monitored diameter. The beam delivery controller may adjust each of beam adjusters other than the first beam adjuster selected one after another from the most upstream so that the monitored diameter at the beam monitor becomes a predetermined value specific to the beam adjuster, and adjust the first beam adjuster so that the pulse laser beam becomes focused at a position downstream of a target position.
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2.发明申请LASER APPARATUS, LASER SYSTEM, AND EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS 审中-公开激光装置，激光系统和极光紫外线发光装置公开(公告)号：US20140346375A1
公开(公告)日：2014-11-27
申请号：US14455669
申请日：2014-08-08
Applicant: GIGAPHOTON INC.
Inventor： Krzysztof NOWAK , Takashi SUGANUMA , Osamu WAKABAYASHI
CPC classification number: H01S3/10015 , H01S3/0014 , H01S3/0971 , H01S3/10069 , H01S3/104 , H01S3/2232 , H01S3/2316 , H01S3/2325 , H01S2301/02 , H05G2/008
Abstract: A laser apparatus includes a master oscillator configured to output a pulse laser beam, at least one amplifier disposed in an optical path of the pulse laser beam, an energy detector that is disposed in the optical path on one of an input side and an output side of the amplifier and that is configured to detect energy of self-oscillating light from the amplifier, a gain adjustment section configured to adjust the gain of the amplifier, and a control unit configured to control the gain adjustment section based on a detection result from the energy detector when a pulse laser beam is not being inputted into the amplifier from the master oscillator.
Abstract translation: 激光装置包括：主振荡器，被配置为输出脉冲激光束;设置在所述脉冲激光束的光路中的至少一个放大器;能量检测器，设置在所述光路中的输入侧和输出侧之一上 并且被配置为检测来自放大器的自振荡光的能量;增益调整部，被配置为调整放大器的增益;以及控制单元，被配置为基于来自所述放大器的检测结果来控制所述增益调整部 当脉冲激光束未从主振荡器输入到放大器中时，能量检测器。
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公开(公告)号：US20180351322A1
公开(公告)日：2018-12-06
申请号：US16055656
申请日：2018-08-06
Applicant: GIGAPHOTON INC.
Inventor： Yoshiaki KUROSAWA , Takashi SUGANUMA
CPC classification number: H01S3/134 , G01N21/5907 , G01N33/004 , G01N33/0063 , G03F7/70033 , H01S3/005 , H01S3/0071 , H01S3/034 , H01S3/036 , H01S3/1305 , H01S3/1306 , H01S3/2232 , H01S3/2316
Abstract: A laser apparatus according to one aspect of the present disclosure includes a master oscillator configured to output laser light, a plurality of amplifiers each configured to include carbon dioxide as a laser medium and amplify the laser light, a first optical path pipe configured to cover a laser optical path between the amplifiers, a gas supply port configured to supply, into the first optical path pipe, gas having lower carbon dioxide concentration than that of the air, a first carbon dioxide densitometer configured to measure carbon dioxide concentration in the first optical path pipe, and an alarm device configured to issue an alarm when the carbon dioxide concentration measured by the first carbon dioxide densitometer exceeds a preset prescribed value.
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公开(公告)号：US20150340838A1
公开(公告)日：2015-11-26
申请号：US14748332
申请日：2015-06-24
Applicant: GIGAPHOTON INC.
Inventor： Masato MORIYA , Takashi SUGANUMA , Osamu WAKABAYASHI
CPC classification number: H01S3/0064 , H01S3/005 , H01S3/2232 , H01S3/2316 , H01S2301/02 , H05G2/008
Abstract: There may be included: a master oscillator configured to output pulsed laser light; two or more power amplifiers disposed in an optical path of the pulsed laser light to amplify the pulsed laser light; and an optical isolator provided between adjacent two of the power amplifiers in the optical path of the pulsed laser light, and configured to suppress transmission of light traveling from the power amplifiers to a side where the master oscillator is provided.
Abstract translation: 可以包括：主振荡器，被配置为输出脉冲激光; 设置在脉冲激光的光路中的两个或更多个功率放大器以放大脉冲激光; 以及光隔离器，其设置在脉冲激光的光路中的相邻的两个功率放大器之间，并且被配置为抑制从功率放大器传播到发送主振荡器的一侧的光。
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公开(公告)号：US20140348188A1
公开(公告)日：2014-11-27
申请号：US14454494
申请日：2014-08-07
Applicant: GIGAPHOTON INC.
Inventor： Takashi SUGANUMA , Hidenobu KAMEDA , Masato MORIYA , Osamu WAKABAYASHI
IPC: H01S3/10
CPC classification number: H01S3/10 , H01S3/005 , H01S3/0971 , H01S3/10007 , H01S3/10023 , H01S3/1003 , H01S3/104 , H01S3/13 , H01S3/1301 , H01S3/1305 , H01S3/134 , H01S3/2308 , H01S3/2316 , H01S3/2325 , H01S3/2391 , H05G2/008
Abstract: A laser apparatus may include a master oscillator, an optical unit provided in a beam path of a laser beam from the master oscillator, a beam adjusting unit provided upstream from the optical unit in a beam path of the laser beam and configured for adjusting at least one of a beam path and a wavefront of the laser beam, a first detection unit provided between the beam adjusting unit and the optical unit in a beam path of the laser beam and configured for detecting the laser beam, a second detection unit provided downstream from the optical unit in a beam path of the laser beam and configured for detecting the laser beam, and a controller configured for controlling the beam adjusting unit based on outputs from the first and second detection units.
Abstract translation: 激光装置可以包括主振荡器，设置在来自主振荡器的激光束的光束路径中的光学单元，光束调节单元，其设置在激光束的光束路径中的光学单元的上游，并被配置为至少调节 激光束的光束路径和波前的一个;第一检测单元，设置在激光束的光束路径中的光束调整单元和光学单元之间，并且被配置为检测激光束;第二检测单元， 激光束的光束路径中的光学单元，被配置为检测激光束;以及控制器，被配置为基于来自第一和第二检测单元的输出来控制光束调整单元。
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Patent Agency Ranking
6.发明申请公开(公告)号：US20170299857A1
公开(公告)日：2017-10-19
申请号：US15642745
申请日：2017-07-06
Applicant: Gigaphoton Inc.
Inventor： Yoshiaki KUROSAWA , Takashi SUGANUMA
CPC classification number: G02B26/023 , G02B27/14 , G21K1/06 , H01S3/005 , H01S3/1003 , H01S3/2316 , H05G2/008
Abstract: A beam dump apparatus may include: an attenuator module; a beam dump module; and a control unit. The attenuator module includes: a first beam splitter provided inclined with respect to the optical axis of a laser beam at a first angle; a second beam splitter provided inclined with respect to the optical axis at a second angle; a first beam dumper provided such that the laser beam from the first beam splitter enters thereinto; a second beam dumper provided such that the laser beam from the second beam splitter enters thereinto; and a first stage that causes the beam splitters to advance into and retreat from the optical path. The beam dump module includes: a mirror; a third beam dumper provided such that the laser beam from the mirror enters thereinto; and a second stage that causes the mirror to advance into and retreat from the optical path.
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公开(公告)号：US20170250517A1
公开(公告)日：2017-08-31
申请号：US15590238
申请日：2017-05-09
Applicant: Gigaphoton Inc.
Inventor： Toru SUZUKI , Takashi SUGANUMA , Akihiro TAKAYAMA , Yoshiaki KUROSAWA
Abstract: A beam adjusting apparatus of an extreme ultraviolet light generating apparatus may include: a first pair of mirrors constituted by a first concave mirror and a first convex mirror, provided along the optical path of the pulsed laser beam; a second pair of mirrors constituted by a second concave mirror and a second convex mirror, which are arranged in an order reversed from the order of arrangement of the first concave mirror and the first convex mirror, provided along the optical path of the pulsed laser beam downstream from the first pair of mirrors; and a moving apparatus configured to simultaneously increase or simultaneously decrease the distance between the first concave mirror and the first convex mirror and the distance between the second concave mirror and the second convex mirror.
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公开(公告)号：US20150351208A1
公开(公告)日：2015-12-03
申请号：US14737262
申请日：2015-06-11
Applicant: GIGAPHOTON INC.
Inventor： Takashi SUGANUMA , Toru SUZUKI , Takahisa FUJIMAKI , Yoshiaki KUROSAWA
CPC classification number: H05G2/008 , G02F1/0136 , G02F1/09 , H01S3/005 , H01S3/0078 , H01S3/0085 , H01S3/10023 , H01S3/2232 , H01S3/2316 , H01S2301/02 , H05G2/003
Abstract: There may be included: a master oscillator configured to output pulsed laser light; a power amplifier disposed in an optical path of the pulsed laser light to amplify the pulsed laser light; and a wavelength filter disposed between the master oscillator and the power amplifier in the optical path of the pulsed laser light, and configured to allow the pulsed laser light to pass therethrough and suppress transmission of light with a wavelength other than a wavelength of the pulsed laser light.
Abstract translation: 可以包括：主振荡器，被配置为输出脉冲激光; 功率放大器，设置在脉冲激光的光路中，以放大脉冲激光; 以及布置在脉冲激光的光路中的主振荡器和功率放大器之间的波长滤波器，并且被配置为允许脉冲激光通过，并抑制具有除了脉冲激光器的波长以外的波长的光的透射 光。
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9.发明申请OPTICAL DEVICE, LASER APPARATUS, AND EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM 有权光学装置，激光装置和超极紫外光发生系统公开(公告)号：US20140374605A1
公开(公告)日：2014-12-25
申请号：US14485355
申请日：2014-09-12
Applicant: GIGAPHOTON INC.
Inventor： Hakaru MIZOGUCHI , Takashi SUGANUMA , Hideo HOSHINO , Osamu WAKABAYASHI
CPC classification number: H01S3/0071 , H01S3/0014 , H01S3/10061 , H01S3/1305 , H05G2/008
Abstract: An optical device may include: an optical module disposed in a beam delivery path of a laser beam; a beam adjusting unit disposed in the beam delivery path for adjusting the beam delivery path of the laser beam; a measuring unit disposed in the beam delivery path for detecting the beam delivery path; and a control unit for controlling the beam adjusting unit based on a detection result of the beam delivery path of the laser beam detected by the measuring unit.
Abstract translation: 光学装置可以包括：设置在激光束的光束输送路径中的光学模块; 设置在所述光束传送路径中用于调节所述激光束的光束传送路径的光束调节单元; 设置在所述光束传送路径中用于检测所述光束传送路径的测量单元; 以及控制单元，用于基于由测量单元检测到的激光束的光束传递路径的检测结果来控制光束调节单元。
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10.发明申请公开(公告)号：US20210149185A1
公开(公告)日：2021-05-20
申请号：US17036412
申请日：2020-09-29
Applicant: Gigaphoton Inc.
Inventor： Takashi SUGANUMA , Takahiro TATSUMI
Abstract: A beam delivery system according to an aspect of the present disclosure is used for an extreme ultraviolet light generation apparatus and includes a propagation mirror disposed on an optical path between a laser apparatus and a condensation optical system and configured to change the propagation direction of a pulse laser beam, and a curvature mirror disposed on an optical path between the propagation mirror and the condensation optical system and having a concave reflective surface configured to convert the pulse laser beam to be incident on the condensation optical system into a convergent beam. The curvature mirror has a focal length selected so that the beam spread angle of the pulse laser beam from the curvature mirror is constant irrespective of thermal deformation of the propagation mirror or constant with change in a predetermined allowable range irrespective of thermal deformation of the propagation mirror.
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