-
公开(公告)号：US20190254155A1
公开(公告)日：2019-08-15
申请号：US16343797
申请日：2017-08-16
发明人： LEONID RIVKIN , ANDREAS STREUN , ALBIN WRULICH
摘要： A compact, small foot print, light source based on electron beam acceleration for insertion devices in EUV range metrology and actinic mask inspection using coherent scattering methods includes spiral storage rings providing plane straight sections. A magnet structure generates emittance for brilliance and coherent light content. A booster feeds the storage ring by top-up injection and keeps electron beam intensity stable. A booster level below the storage ring receives the electron beam from a linear accelerator in a central booster area. The source fits into laboratories or maintenance areas. Injection, RF-acceleration, beam manipulating devices and large diagnostics systems are required once. Higher average currents stored in the spiral enhance central cone power. Bunches are limited by ion trapping and a gap clears ions. The current is increased in the spiral. Gain in central cone power increases 5 fold, assuming a gap size of half single storage ring circumference.
-
公开(公告)号：US20190239329A1
公开(公告)日：2019-08-01
申请号：US16375556
申请日：2019-04-04
申请人： Gigaphoton Inc.
发明人： Tatsuya YANAGIDA
IPC分类号： H05G2/00
摘要： An extreme ultraviolet light generation apparatus includes: a target supply unit configured to output a target toward a predetermined region; a laser system configured to output a first laser beam to be applied to the target, a second laser beam to be applied to the target irradiated with the first laser beam, and a third laser beam to be applied to the target irradiated with the second laser beam; and a control unit configured to control the laser system such that the third laser beam is applied to the target after ions of elements constituting the target are eliminated from at least an optical path of the third laser beam.
-
公开(公告)号：US20180307146A1
公开(公告)日：2018-10-25
申请号：US15766225
申请日：2016-10-25
发明人： Hendrikus Gijsbertus SCHIMMEL , Jeroen Marcel HUIJBREGTSE , Maarten VAN KAMPEN , Pieter-Jan VAN ZWOL
CPC分类号： G03F7/70883 , G03F7/70033 , G03F7/70908 , G03F7/70925 , G21K1/062 , H05G2/00 , H05G2/001 , H05G2/005 , H05G2/008
摘要： A radiation system comprises a fuel emitter configured to provide fuel to a plasma formation region, a laser arranged to provide a laser beam at the plasma formation region incident on the fuel to generate a radiation emitting plasma, and a reflective or transmissive device (30) arranged to receive radiation emitted by the plasma and to reflect or transmit at least some of the received radiation along a desired path, wherein the reflective or transmissive device comprises a body configured to reflect and/or transmit said at least some of the radiation, and selected secondary electron emission (SEE) material (34) arranged relative to the body such as to emit secondary electrons in response to the received radiation, thereby to clean material from a surface of the device.32
-
公开(公告)号：US20180288863A1
公开(公告)日：2018-10-04
申请号：US16001441
申请日：2018-06-06
申请人： GIGAPHOTON INC.
IPC分类号： H05G2/00
CPC分类号： H05G2/006 , G05D16/2006 , G05D23/19 , H05G2/00 , H05G2/008
摘要： A target supply device may include a nozzle configured to output a liquid target substance contained in a tank, an excitation element, a droplet detection unit configured to detect a droplet output from the nozzle, a passage time interval measurement unit configured to measure a passage time interval of droplets, and a control unit. The control unit may be configured to set a proper range of the passage time interval, change the duty value of the electric signal to be input to the excitation element, store the passage time interval measurement values of the droplets generated with respect to a plurality of duty values and variation thereof in association with the duty values, and determine an operation duty value based on the variation from among the duty values with which the passage time interval measurement values are within the proper range, among the duty values.
-
公开(公告)号：US20180284618A1
公开(公告)日：2018-10-04
申请号：US16001091
申请日：2018-06-06
申请人： Gigaphoton Inc.
发明人： Hirokazu HOSODA
IPC分类号： G03F7/20
CPC分类号： G03F7/7055 , G03F7/70033 , H05G2/00
摘要： An extreme ultraviolet light generating apparatus may include: a chamber, within which extreme ultraviolet light is generated from a droplet which is supplied to a predetermined region therein; an image forming optical system that forms an image of the droplet supplied to the predetermined region; an imaging element that captures an image of the formed image; a stage that moves the image forming optical system and/or the imaging element in an optical axis direction of the image forming optical system; a light energy measuring unit that measures light energy which is generated when the extreme ultraviolet light is generated; and a control unit that controls the stage based on a measured value of the light energy measured by the light energy measuring unit such that an image formation plane of the image of the droplet formed by the image forming optical system matches an imaging surface of the imaging element.
-
公开(公告)号：US20180224747A1
公开(公告)日：2018-08-09
申请号：US15945214
申请日：2018-04-04
申请人： Gigaphoton Inc.
发明人： Yoshifumi UENO
CPC分类号： G03F7/70033 , G03F7/20 , G03F7/70175 , G03F7/70916 , G21K1/06 , H05G2/00
摘要： An extreme ultraviolet light generating apparatus includes a light collecting mirror that reflects and focuses extreme ultraviolet light, and a magnet that generates a magnetic field. The light collecting mirror includes a first mirror portion that includes a first reflective surface formed by a portion of a spheroidal surface, and a second mirror portion that includes a second reflective surface having a focal point at substantially the same position as a focal point of the first reflective surface, formed by a portion of a spheroidal surface different from that of the first reflective surface. The second reflective surface is provided at a position at which a magnetic flux density caused by the magnetic field is lower than that of the first reflective surface.
-
公开(公告)号：US20180068822A1
公开(公告)日：2018-03-08
申请号：US15652102
申请日：2017-07-17
申请人： Tribogenics, Inc.
发明人： Carlos G. Camara , Mark G. Valentine , Zachary J. Gamlieli , Benjamin A. Lucas , David M. Kamkar , Pedro Cortes, JR. , Vasish Narayan M. , Gilberto Jimenez , Daniel E. Cuadra
摘要： An x-ray device utilizes a band of material to exchange charge through tribocharging within a chamber maintained at low fluid pressure. The charge is utilized to generate x-rays within the housing, which may pass through a window of the housing. Various contact rods may be used as part of the tribocharging process.
-
公开(公告)号：US09854657B2
公开(公告)日：2017-12-26
申请号：US15015516
申请日：2016-02-04
申请人： Tribogenics, Inc.
发明人： Carlos Camara
IPC分类号： H05G2/00
CPC分类号： H05G2/00
摘要： An x-ray generator device includes a housing at least partially holding a specific fluid pressure, with an arm positioned to be able to strike a strike plate within the housing. The housing contains an x-ray window. The arm is magnetically actuated in at least one direction by a magnetic field generator outside of the housing. A striking portion of the lever arm and/or the strike plate may be a polymeric material with embedded metal or metal alloys.
-
公开(公告)号：US09839113B2
公开(公告)日：2017-12-05
申请号：US14658648
申请日：2015-03-16
发明人： Toshiki Tajima , Gerard Mourou
IPC分类号： H05G2/00 , H05H1/54 , H01S3/0959 , H05H7/08 , H05H15/00
CPC分类号： H05H7/08 , H05G2/00 , H05H15/00 , H05H2007/081
摘要： Systems and methods for that utilize a compressed coherent high intensity X-ray pulse to drive acceleration of particles in a solid medium laser wakefield accelerator (LWFA).
-
公开(公告)号：US20170347439A1
公开(公告)日：2017-11-30
申请号：US15635119
申请日：2017-06-27
IPC分类号： H05G2/00
CPC分类号： H05G2/00
摘要： A method of x-ray and gamma-ray generation via laser Compton scattering uses the interaction of a specially-formatted, highly modulated, long duration, laser pulse with a high-frequency train of high-brightness electron bunches to both create narrow bandwidth x-ray and gamma-ray sources and significantly increase the laser to Compton photon conversion efficiency.
-
-
-
-
-
-
-
-
-
搜索结果
467 条记录 (耗时 0.02 秒)
