公开(公告)号：US06555829B1

公开(公告)日：2003-04-29

申请号：US09481103

申请日：2000-01-10

申请人： James P. Spallas ,  Lawrence P. Muray ,  David Trost ,  Ho-Seob Kim ,  Tai-Hon P. Chang

发明人： James P. Spallas ,  Lawrence P. Muray ,  David Trost ,  Ho-Seob Kim ,  Tai-Hon P. Chang

IPC分类号： G01B902

CPC分类号： B23Q1/34 ,  B23Q1/621 ,  H01J37/023 ,  H01J2237/20264 ,  H01L21/68

摘要： Disclosed is a positioning stage for precisely positioning an object within a limited range of travel (e.g. 100 &mgr;m). By way of example, the stage can be used to position an electron source such as a field emitter in an electron beam microcolumn. The stage includes a block which defines a channel to allow flexure along a first axis. The block also defines another channel to allow flexure along a second axis perpendicular to the first axis. Using actuators in the channels to flex a portion of the block, the object supported by the block can be precisely positioned to a desired location in a horizontal plane defined by the first and second axes.

摘要翻译： 公开了一种用于在有限的旅行范围内（例如，100mum）精确地定位物体的定位台。 作为示例，该级可用于将诸如场致发射体的电子源定位在电子束微柱中。 舞台包括限定通道以允许沿着第一轴弯曲的块。 该块还限定另一个通道，以允许沿垂直于第一轴线的第二轴线弯曲。 使用通道中的致动器来弯曲块的一部分，由块支撑的物体可精确地定位在由第一和第二轴限定的水平平面中的期望位置。

公开(公告)号：US5784925A

公开(公告)日：1998-07-28

申请号：US766271

申请日：1996-12-13

申请人： David Trost ,  Lee Veneklasen

发明人： David Trost ,  Lee Veneklasen

IPC分类号： F16C29/00 ,  F16C29/02 ,  F16C32/06 ,  G03F7/20 ,  H01J37/20 ,  H01J37/305 ,  H01L21/027 ,  G05G11/00 ,  F16C33/06 ,  F16J15/52

CPC分类号： F16C32/06 ,  F16C29/025 ,  F16C32/0603 ,  F16C33/748 ,  G03F7/70716 ,  G03F7/70816 ,  H01J37/20 ,  F16C2300/62 ,  H01J2237/20221 ,  H01J2237/3175 ,  Y10S277/913 ,  Y10T74/20354

摘要： A vacuum compatible linear motion device having a fluid bearing is contained within a vacuum chamber having a working pressure of significantly less than one atmosphere. The fluid bearing is contained within a vacuum enclosure within the vacuum chamber and is maintained at a pressure higher than that of the vacuum chamber but less than one atmosphere, thus essentially isolating the fluid bearing. A moveable payload is coupled to the linear motion device such that linear motion in the direction of the long axis of the device is provided to the moveable payload.

摘要翻译： 具有流体轴承的真空兼容的直线运动装置包含在具有明显小于一个大气压的工作压力的真空室内。 流体轴承包含在真空室内的真空外壳内，并保持在比真空室高的压力，但小于一个大气压，因此基本上隔离流体轴承。 可移动有效载荷耦合到线性运动装置，使得在装置的长轴方向上的线性运动被提供给可移动的有效载荷。

公开(公告)号：US5558666A

公开(公告)日：1996-09-24

申请号：US183111

申请日：1994-01-14

申请人： David A. Dewey ,  Michael Arnett ,  Dale E. Koop ,  David Trost

发明人： David A. Dewey ,  Michael Arnett ,  Dale E. Koop ,  David Trost

IPC分类号： A61B18/20 ,  A61N5/06

CPC分类号： A61B18/203 ,  A61B18/201 ,  A61B2018/00452 ,  A61B2018/2025

摘要： A handpiece for use in delivering the output beam of a laser to the surface of a patient's skin for performing a dermatological procedure. In a first and second embodiment of the present invention, the handpiece provides a highly collimated beam of a fixed, non-variable spot size which is largely insensitive to movement of the handpiece over a range of working positions. In a third embodiment the handpiece provides a highly collimated and well defined focused laser spot of variable size where for a selected spot size, the size is largely insensitive to movement of the handpiece over a range of working positions. In all of the embodiments, the highly collimated laser beam permits the surgeon performing the procedure to move the handpiece over a range of positions without significantly defocusing or altering the spot size of the beam.

摘要翻译： 用于将激光的输出光束传送到患者皮肤表面以进行皮肤病学手术的手持件。 在本发明的第一和第二实施例中，手持件提供固定的，不可变的光斑尺寸的高度准直的光束，其大大不敏感于在一定范围的工作位置上的手持件的移动。 在第三实施例中，手持件提供可变尺寸的高度准直和良好限定的聚焦激光光斑，其中对于所选择的光点尺寸，该尺寸对于在一定范围的工作位置上的手持件的移动很大程度上不敏感。 在所有实施例中，高度准直的激光束允许外科医生执行过程以将手持件移动到一定范围的位置，而不会明显地散焦或改变光束的光点尺寸。

公开(公告)号：US6135995A

公开(公告)日：2000-10-24

申请号：US710577

申请日：1996-09-19

申请人： Michael Arnett ,  Robert J. Rorden ,  Gregory Dumond ,  Jerzy Orkiszewski ,  David Dewey ,  David Trost

发明人： Michael Arnett ,  Robert J. Rorden ,  Gregory Dumond ,  Jerzy Orkiszewski ,  David Dewey ,  David Trost

IPC分类号： A61B18/20 ,  B23K26/00 ,  B23K26/42 ,  A61N5/06

CPC分类号： A61B18/20 ,  B23K26/0096 ,  A61B2018/00636

摘要： Typically, a laser emits significant energy after a control signal is generated to disable the power supply. The inherent delay between generation of a control signal for shutting off a laser power supply and actual termination of an output beam pulse in response to the control signal, is compensated in the context that the control signal is generated automatically upon coincidence of measured output beam power with a preset threshold value. Power supplied to a laser is modulated to cause generation of a pulsed laser output beam. The cumulative energy of each output beam pulse is monitored and a feedback signal indicative of measured output beam pulse energy is supplied to the power supply. The feedback signal is compared with a user-selected threshold value, and a control signal is generated for terminating the output beam pulse (by terminating input power to the laser) when the measured output pulse energy reaches the threshold value. By generating the threshold signal to have a value representing a threshold output beam pulse energy that is lower than a desired output beam pulse energy, the threshold signal is generated in a manner which compensates for the inherent delay between generation of the control signal and the actual termination of the output beam pulse in response to the control signal. This prevents delivery of significant output beam energy in excess of a user-selected amount.

摘要翻译： 通常，在产生控制信号以禁用电源之后，激光器发射显着的能量。 在响应于控制信号的用于关闭激光电源的控制信号的产生和输出光束脉冲的实际终止之间的固有延迟在上下文中得到补偿，所述上下文中控制信号在测量的输出光束功率一致时自动产生 具有预设的阈值。 对激光器供电的功率被调制以产生脉冲激光输出光束。 监视每个输出光束脉冲的累积能量，并将指示测量的输出光束脉冲能量的反馈信号提供给电源。 将反馈信号与用户选择的阈值进行比较，并且当测量的输出脉冲能量达到阈值时，生成用于终止输出光束脉冲（通过终止对激光器的输入功率）的控制信号。 通过产生阈值信号以具有表示低于期望的输出光束脉冲能量的阈值输出光束脉冲能量的值，该阈值信号以补偿控制信号的产生与实际的信号之间的固有延迟的方式产生 响应于控制信号终止输出光束脉冲。 这防止输出超过用户选择量的显着输出光束能量。

公开(公告)号：US5999555A

公开(公告)日：1999-12-07

申请号：US105874

申请日：1998-06-26

申请人： Kevin P. Connors ,  James L. Hobart ,  Edward D. Reed ,  David Trost

发明人： Kevin P. Connors ,  James L. Hobart ,  Edward D. Reed ,  David Trost

IPC分类号： G02B6/42 ,  H01S3/04 ,  H01S3/042 ,  H01S3/0915 ,  H01S3/092 ,  H01S3/23 ,  H01S3/08

CPC分类号： G02B6/4296 ,  H01S3/042 ,  H01S3/092 ,  H01S3/2383 ,  H01S3/005 ,  H01S3/025 ,  H01S3/0407 ,  H01S3/0931 ,  H01S3/10046 ,  H01S3/10053 ,  H01S3/1022 ,  Y10S165/303 ,  Y10S165/314

摘要： A pulsed solid state laser system is disclosed which utilizes a plurality of individual laser rods which are sequentially pumped and whose beans are combined into a single interleaved output bean. The individual laser rods are pumped at an average power level which is below that for maximum output power from each rod, thereby obviating the need for refrigeration cooling. A compact optical system is disclosed which permits a constant beam size even at different pump levels and other advantages. A compact cooling system is also disclosed.

摘要翻译： 公开了一种脉冲固态激光系统，其利用了顺序泵浦的多个单独的激光棒，并将其组合成单个交错输出豆。 单个激光棒的平均功率水平被泵浦，该功率水平低于来自每个杆的最大输出功率的激光棒，从而避免了对制冷冷却的需要。 公开了一种紧凑的光学系统，即使在不同的泵水平和其他优点下也允许恒定的光束尺寸。 还公开了紧凑的冷却系统。

公开(公告)号：US5847959A

公开(公告)日：1998-12-08

申请号：US789246

申请日：1997-01-28

申请人： Lee H. Veneklasen ,  Robert Innes ,  Sergey Babin ,  David Trost ,  Jeffrey Varner

发明人： Lee H. Veneklasen ,  Robert Innes ,  Sergey Babin ,  David Trost ,  Jeffrey Varner

IPC分类号： H01J37/305 ,  H01J37/302 ,  H01J37/317 ,  H01L21/027 ,  G06F11/00 ,  G03C5/00

CPC分类号： B82Y10/00 ,  B82Y40/00 ,  H01J37/3026 ,  H01J37/3174 ,  H01J2237/31769 ,  Y10S430/143

摘要： An electron beam pattern generating system for exposing a pattern on a substrate using a raster scan method. The system stores a rasterized representation of the pattern as a plurality of regular pixel dose exposure levels. These pixel dose exposure levels are evaluated by the system for one or more proximity effects and corrections to the dose exposure level and/or pixel location are calculated. The system includes apparatus for both calculation and storage of intermediate and final results as required. As they are calculated, the corrections are provided to an exposure dose modulator wherein they are applied to forming the pattern. Thus corrections for both long range and short range proximity effects due to both electron scattering and heating as well as for proximity effects due to global thermal expansion can be calculated and provided during run-time and a corrected pattern exposed.

摘要翻译： 一种电子束图案生成系统，用于使用光栅扫描方法在衬底上曝光图案。 系统将图案的光栅化表示存储为多个规则像素剂量曝光水平。 这些像素剂量暴露水平由系统评估一个或多个邻近效应，并且计算对剂量暴露水平和/或像素位置的校正。 该系统包括用于根据需要计算和存储中间和最终结果的装置。 当它们被计算时，校正被提供给曝光剂量调制器，其中它们被应用于形成图案。 因此，由于电子散射和加热以及由于全局热膨胀引起的邻近效应，对长距离和短距离邻近效应的校正可以在运行时间和校正图案暴露期间被计算和提供。

公开(公告)号：US4507597A

公开(公告)日：1985-03-26

申请号：US502995

申请日：1983-06-10

申请人： David Trost

发明人： David Trost

IPC分类号： H01L21/30 ,  G03F7/20 ,  G03F9/00 ,  G05D3/00 ,  H01L21/027 ,  H01L21/68 ,  H02K41/02 ,  G05B1/06

CPC分类号： G03F7/70716 ,  H02K41/031 ,  H02K2201/18

摘要： This invention is directed to electromagnetic alignment apparatus, which is particularly adapted, among other possible uses, for use in aligning the wafers in a microlithography system, said apparatus comprising in combination a first magnetic circuit having a plurality of elements including a first magnet; a second magnetic circuit having a plurality of elements including a second magnet; the second magnetic circuit being disposed in spaced relationship with respect to the first magnetic circuit; a movable structural component adapted for mounting an object thereon; one element of each magnetic circuit being fixedly attached to the movable structural component; first and second current carrying coil assemblies mounted in the first magnetic circuit; the second coil assembly being disposed at an angle with respect to the first coil assembly; third and fourth current carrying coil assemblies mounted in the second magnetic circuit; the fourth coil assembly being disposed at an angle with respect to the third coil assembly; and control apparatus for controlling the flow and direction of the current through the coil assemblies, respectively.

摘要翻译： 本发明涉及电磁对准装置，其特别适用于微光刻系统中对准晶片的其它可能用途，所述装置组合包括具有包括第一磁体的多个元件的第一磁路; 具有包括第二磁体的多个元件的第二磁路; 所述第二磁路相对于所述第一磁路以间隔的关系设置; 适于在其上安装物体的可移动结构部件; 每个磁路的一个元件固定地附接到可移动结构部件; 安装在第一磁路中的第一和第二载流线圈组件; 所述第二线圈组件相对于所述第一线圈组件以一定角度设置; 安装在第二磁路中的第三和第四载流线圈组件; 所述第四线圈组件相对于所述第三线圈组件以一定角度设置; 以及用于分别控制通过线圈组件的电流的流动和方向的控制装置。

公开(公告)号：US4504144A

公开(公告)日：1985-03-12

申请号：US395414

申请日：1982-07-06

申请人： David Trost

发明人： David Trost

IPC分类号： G03F9/00 ,  G03B27/42

CPC分类号： G03F9/70

摘要： An apparatus automatically for correcting tilt and focus errors of a wafer in a mask projection system for a plurality of subfields on the wafer which vary in position according to a known scheme. The tilt and focus of each subfield on the wafer is individually corrected by three axial actuators operating on the variable X and Y coordinates of the center of each subfield and its tilt and focus errors.

摘要翻译： 一种自动修正用于根据已知方案在位置上变化的晶片上的多个子场的掩模投影系统中的晶片的倾斜和聚焦误差的装置。 通过在每个子场的中心的可变X和Y坐标上进行的三个轴向致动器及其倾斜和聚焦误差来单独校正晶片上每个子场的倾斜和聚焦。

公开(公告)号：US5321715A

公开(公告)日：1994-06-14

申请号：US57125

申请日：1993-05-04

申请人： David Trost

发明人： David Trost

IPC分类号： A61B17/00 ,  A61B18/20 ,  A61B18/24 ,  H01S3/09

CPC分类号： A61B18/24 ,  A61B18/201 ,  A61B2017/00154 ,  A61B2017/00176

摘要： A pulse format for a laser system is disclosed for maximizing the energy delivered to a target immersed in an absorbing liquid. A first pulse is generated having an energy sufficient to initiate the formation of a vapor bubble in the liquid medium adjacent the end of the delivery device. A second, high energy pulse is generated after the vapor bubble initiated by the first pulse has expanded an amount sufficient to displace the liquid between the delivery device and the target. In this manner, the second pulse is delivered directly to the target and little energy is lost to the liquid medium.

摘要翻译： 公开了一种激光系统的脉冲格式，用于最大限度地提供传递到浸在吸收液体中的目标物质的能量。 产生第一脉冲，其具有足以在邻近输送装置末端的液体介质中开始形成蒸气泡的能量。 在由第一脉冲启动的蒸汽气泡膨胀足以使输送装置和靶之间的液体移位的量之后，产生第二高能量脉冲。 以这种方式，第二脉冲被直接输送到靶，并且很少的能量损失到液体介质。

公开(公告)号：US5312398A

公开(公告)日：1994-05-17

申请号：US867895

申请日：1992-04-13

申请人： James L. Hobart ,  David Trost

发明人： James L. Hobart ,  David Trost

IPC分类号： A61B18/20 ,  G02B17/06 ,  A61B17/36 ,  A61B17/24

CPC分类号： A61B18/201 ,  G02B19/0023 ,  G02B19/0033 ,  G02B19/009

摘要： A beam delivery apparatus, including a set of focusing mirrors (or transmissive lenses) mounted along an endoscope channel. A laser beam can be focused into an input end of the channel with a smaller F number (wider cone angle) than is possible in a conventional endoscope. As the beam propagates down the channel, it is reflected (or transmitted) a finite number of times by the focusing elements. The focusing elements act as a periscope to focus and refocus the beam as it propagates along the channel, with little loss of beam power. The invention enables delivery of the beam to the channel's distal end with a smaller F number than can be achieved using a conventional endoscope. In a preferred embodiment, a pair of reflecting strips are mounted the channel, the surface of each strip defines six focusing mirrors, and the beam undergoes a total of twelve reflections from the mirrors as it propagates down the channel. Preferably, the surface of each mirror has a curvature selected to prevent the introduction of astigmatic distortion during each beam reflection.

摘要翻译： 一种束输送装置，包括沿着内窥镜通道安装的一组聚焦镜（或透射透镜）。 激光束可以以比传统内窥镜中可能的更小的F数（更宽的锥角）聚焦到通道的输入端。 随着光束向下传播，它被聚焦元件反射（或传输）有限次数。 聚焦元件用作潜望镜，以便当光束沿着通道传播时聚焦和重新聚焦光束，光束功率损失很小。 本发明使得能够以比使用常规内窥镜可以实现的更小的F数将束传送到通道的远端。 在优选实施例中，一对反射条安装在通道上，每个条的表面限定六个聚焦反射镜，并且当光束沿着通道向下传播时，该光束经过总共十二次反射。 优选地，每个反射镜的表面具有选择的曲率，以防止在每个光束反射期间引入散光变形。