公开(公告)号：US20240247362A1

公开(公告)日：2024-07-25

申请号：US18558817

申请日：2021-05-21

Applicant: Applied Materials, Inc.

Inventor： Julian AULBACH ,  Andreas MÜLLER ,  Harald WURSTER ,  Andreas LOPP ,  David Friedrich FREIHERR VON LINDENFELS ,  Takashi ANJIKI

IPC: C23C14/24 ,  C23C14/12

CPC classification number: C23C14/243 ,  C23C14/12

Abstract: A nozzle for an evaporated material distributor is described. The nozzle includes a nozzle inlet for receiving evaporated material; a nozzle outlet; and a nozzle passage extending between the nozzle inlet and the nozzle outlet having a first passage portion, a second passage portion and a third passage portion, the second passage portion having an aperture angle which continuously increases in a direction from the nozzle inlet to the nozzle outlet and the third passage portion having an essentially constant aperture angle.

公开(公告)号：US20240084439A1

公开(公告)日：2024-03-14

申请号：US18272841

申请日：2021-02-16

Applicant: Applied Materials, Inc.

Inventor： Takashi ANJIKI ,  Sebastian FRANKE

IPC: C23C14/24 ,  C23C14/12 ,  C23C14/54

CPC classification number: C23C14/243 ,  C23C14/12 ,  C23C14/54 ,  H10K71/164

Abstract: A crucible to evaporate a material is described. The crucible includes a first material compartment configured to contain material to be evaporated, a first heater to heat the first material compartment, a second material compartment configured to contain material to be evaporated, and a second heater to heat the second material compartment. A vapor guiding compartment is provided. The vapor guiding compartment has a first opening providing a first fluid communication path between the first material compartment and the vapor guiding compartment and has a second opening providing a second fluid communication path between the second material compartment and the vapor guiding compartment. Further, the vapor guiding compartment has a third opening connectable to a vapor distributor. The crucible further includes a third heater to heat the vapor guiding compartment.

公开(公告)号：US20230256483A1

公开(公告)日：2023-08-17

申请号：US18139246

申请日：2023-04-25

Applicant: Applied Materials, Inc.

Inventor： Jose Manuel DIEGUEZ-CAMPO ,  Stefan KELLER ,  Jae Won LEE ,  Takashi ANJIKI ,  Dieter HAAS

IPC: B08B7/04 ,  B08B3/08 ,  B08B7/00 ,  B08B9/08 ,  C23C14/12 ,  C23C14/24 ,  C23C14/56 ,  H10K71/00 ,  H10K71/16

CPC classification number: B08B7/04 ,  B08B3/08 ,  B08B7/0035 ,  B08B9/08 ,  C23C14/12 ,  C23C14/24 ,  C23C14/566 ,  H10K71/00 ,  H10K71/164 ,  H10K71/166 ,  B08B2209/08

Abstract: The present disclosure provides a method for cleaning a vacuum system used in the manufacture of OLED devices. The method includes performing pre-cleaning for cleaning at least a portion of the vacuum system, and performing plasma cleaning using a remote plasma source.

公开(公告)号：US20210308725A1

公开(公告)日：2021-10-07

申请号：US16318052

申请日：2017-04-28

Applicant: Applied Materials, Inc.

Inventor： Jose Manuel DIEGUEZ-CAMPO ,  Stefan KELLER ,  Jae Won LEE ,  Takashi ANJIKI ,  Dieter HAAS

IPC: B08B7/04 ,  B08B7/00 ,  B08B3/08 ,  B08B9/08 ,  C23C14/12 ,  C23C14/24 ,  C23C14/56 ,  H01L51/00 ,  H01L51/56

Abstract: The present disclosure provides a method for cleaning a vacuum system used in the manufacture of OLED devices. The method includes performing pre-cleaning for cleaning at least a portion of the vacuum system, and performing plasma cleaning using a remote plasma source.

公开(公告)号：US20250143089A1

公开(公告)日：2025-05-01

申请号：US18690574

申请日：2023-12-13

Applicant: Applied Materials, Inc.

Inventor： Yu-Hsin LIN ,  Takashi ANJIKI ,  Chung-chia CHEN ,  Jae Wook JEONG ,  Ji Young CHOUNG ,  Jungmin LEE

IPC: H10K59/122 ,  H10K59/12 ,  H10K59/80 ,  H10K102/00

Abstract: Embodiments described herein relate to a device. The device includes a substrate, overhang structures disposed over the substrate, and a plurality of sub-pixels. Each overhang structure has a second structure disposed over a first structure. The second structure has an overhang extension extending laterally past the first structure. The first structure includes a first sidewall opposing a second sidewall. The first sidewall and the second sidewall are connected to each other. The plurality of sub-pixels each include an organic light-emitting diode (OLED) material, and a cathode disposed over the OLED material. The cathode extends under the overhang extension such that the cathode contacts the first sidewall and the second sidewall of the first structure under the overhang extension.

公开(公告)号：US20230263014A1

公开(公告)日：2023-08-17

申请号：US18183822

申请日：2023-03-14

Applicant: Applied Materials, Inc.

Inventor： Yu-hsin LIN ,  Ji Young CHOUNG ,  Chung-chia CHEN ,  Jungmin LEE ,  Wen-Hao WU ,  Takashi ANJIKI ,  Takuji KATO ,  Dieter HAAS ,  Si Kyoung KIM ,  Stefan KELLER

IPC: H10K59/122 ,  H10K59/173

CPC classification number: H10K59/122 ,  H10K59/173 ,  H10K71/16

Abstract: Embodiments described herein relate to a device including a substrate, a plurality of adjacent pixel-defining layer (PDL) structures disposed over the substrate, and a plurality of sub-pixels. Each sub-pixel includes adjacent first overhangs, adjacent second overhangs, an anode, a hole injection layer (HIL) material, an additional organic light emitting diode (OLED) material, and a cathode. Each first overhang is defined by a body structure disposed on and extending laterally past a base structure disposed on the PDL structure. Each second overhang is defined by a top structure disposed on and extending laterally past the body structure. The HIL material is disposed over and in contact with the anode and disposed under the adjacent first overhangs. The additional OLED material is disposed on the HIL material and extends under the first overhang.