公开(公告)号：US08597528B1

公开(公告)日：2013-12-03

申请号：US13076103

申请日：2011-03-30

申请人： Anup G. Roy ,  Ming Mao

发明人： Anup G. Roy ,  Ming Mao

IPC分类号： B44C1/22

CPC分类号： H01L43/12 ,  G01R33/093 ,  G01R33/098 ,  G11B5/3163 ,  G11B5/3932

摘要： A method and system for fabricating a magnetic transducer is described. A magnetic junction is defined from the magnetoresistive stack. The magnetic junction has a top and a plurality of sides. The step of defining the magnetic junction redeposits a portion of the magnetoresistive stack and forms fencing adjacent to the top of the magnetic junction. At least one hard bias structure is provided after the magnetic junction is defined. A first portion of the at least one hard bias structure is substantially adjacent to the magnetoresistive junction in a track-width direction. The magnetic junction is ion beam planarized, thereby substantially removing the fencing.

摘要翻译： 描述了用于制造磁换能器的方法和系统。 从磁阻叠层定义磁结。 磁性接头具有顶部和多个侧面。 限定磁结的步骤重新沉积磁阻堆叠的一部分并且形成与磁结的顶部相邻的围栏。 在确定了磁结后，提供了至少一个硬偏置结构。 至少一个硬偏压结构的第一部分基本上与轨道宽度方向上的磁阻结相邻。 磁结是离子束平坦化的，从而基本上除去围栏。

公开(公告)号：US08611054B1

公开(公告)日：2013-12-17

申请号：US13444723

申请日：2012-04-11

申请人： Changhe Shang ,  Daniele Mauri ,  Kuok San Ho ,  Anup G. Roy ,  Ming Mao

发明人： Changhe Shang ,  Daniele Mauri ,  Kuok San Ho ,  Anup G. Roy ,  Ming Mao

IPC分类号： G11B5/39

CPC分类号： G11B5/3932 ,  G01R33/093 ,  G11B5/3909 ,  G11B2005/3996 ,  H01F10/3218 ,  H01F10/3254

摘要： A magnetic read transducer is described with a magnetoresistive sensor that has a free layer, and an antiferromagnetically-coupled (AFC) soft bias layer for magnetically biasing the free layer. The free layer has a first edge in a track width direction along an air-bearing surface (ABS). At least a portion of the AFC soft bias layer is conformal to at least a portion of a second edge of the free layer, and situated to form a magnetic moment at an angle with respect to a center line of the free layer. The center line of the free layer extends in the same direction as the free layer first edge that is in the track width direction along the ABS.

摘要翻译： 用具有自由层的磁阻传感器和用于磁偏置自由层的反铁磁耦合（AFC）软偏置层来描述磁读取传感器。 自由层具有沿空气轴承表面（ABS）的轨道宽度方向上的第一边缘。 AFC柔性偏置层的至少一部分与自由层的第二边缘的至少一部分共形，并且位于相对于自由层的中心线形成一个角度的磁矩。 自由层的中心线沿与ABS沿轨道宽度方向的自由层第一边缘相同的方向延伸。

公开(公告)号：US08607438B1

公开(公告)日：2013-12-17

申请号：US13309357

申请日：2011-12-01

申请人： Wei Gao ,  Guanxiong Li ,  Ming Mao ,  Chih-Ching Hu ,  Guanghong Luo ,  Miao Wang ,  Zhihong Zhang ,  Anup G. Roy

发明人： Wei Gao ,  Guanxiong Li ,  Ming Mao ,  Chih-Ching Hu ,  Guanghong Luo ,  Miao Wang ,  Zhihong Zhang ,  Anup G. Roy

IPC分类号： G11B5/127 ,  H04R31/00

CPC分类号： G11B5/3903 ,  G01R33/093 ,  G11B5/3163

摘要： A read sensor for a transducer is fabricated. The transducer has a field region and a sensor region corresponding to the sensor. A sensor stack is deposited. A hybrid mask including hard and field masks is provided. The hard mask includes a sensor portion covering the sensor region and a field portion covering the field region. The field mask covers the field portion of the hard mask. The field mask exposes the sensor portion of the hard mask and part of the sensor stack between the sensor and field regions. The sensor is defined from the sensor stack in a track width direction. Hard bias layer(s) are deposited. Part of the hard bias layer(s) resides on the field mask. Part of the hard bias layer(s) adjoining the sensor region is sealed. The field mask is lifted off. The transducer is planarized.

摘要翻译： 制造用于换能器的读取传感器。 传感器具有对应于传感器的场区域和传感器区域。 传感器堆叠被沉积。 提供了包括硬掩模和磁场掩模的混合掩模。 硬掩模包括覆盖传感器区域的传感器部分和覆盖场区域的场部分。 场掩模覆盖硬掩模的场部分。 场掩模将传感器和场区域之间的硬掩模的传感器部分和传感器堆叠的一部分暴露。 传感器从传感器堆叠在轨道宽度方向上定义。 硬偏置层被沉积。 硬偏置层的一部分位于场掩模上。 邻近传感器区域的一部分硬偏压层被密封。 场地面罩被提起。 传感器平坦化。

公开(公告)号：US08760823B1

公开(公告)日：2014-06-24

申请号：US13332313

申请日：2011-12-20

申请人： Laurence L. Chen ,  Anup G. Roy ,  Yunfei Ding ,  Ming Mao ,  Amritpal S. Rana ,  Daniele Mauri

发明人： Laurence L. Chen ,  Anup G. Roy ,  Yunfei Ding ,  Ming Mao ,  Amritpal S. Rana ,  Daniele Mauri

IPC分类号： G11B5/39

CPC分类号： G11B5/3903 ,  G11B5/3912 ,  G11B5/3932 ,  G11B5/398

摘要： A method and system provide a magnetic transducer having an air-bearing surface (ABS). The magnetic transducer includes a first shield, a read sensor, at least one soft magnetic bias structure and at least one hard bias structure. The read sensor includes a sensor layer that has at least one edge in the track width direction along the ABS. The soft magnetic bias structure(s) are adjacent to the edge(s) of the sensor layer. The soft magnetic bias structure has a first permeability. The soft bias structure(s) are between the read sensor and the hard bias structure(s). The hard bias structure(s) are adjacent to a portion of the soft bias structure(s) and have a second permeability. The first permeability is at least ten multiplied by the second permeability.

摘要翻译： 一种方法和系统提供具有空气轴承表面（ABS）的磁换能器。 磁换能器包括第一屏蔽，读取传感器，至少一个软磁偏置结构和至少一个硬偏压结构。 读取传感器包括沿ABS沿轨道宽度方向具有至少一个边缘的传感器层。 软磁偏置结构与传感器层的边缘相邻。 软磁偏置结构具有第一磁导率。 柔性偏置结构位于读取传感器和硬偏置结构之间。 硬偏压结构与软偏压结构的一部分相邻并且具有第二磁导率。 第一渗透率至少为乘以第二渗透率的十倍。

公开(公告)号：US08547667B1

公开(公告)日：2013-10-01

申请号：US12324735

申请日：2008-11-26

申请人： Anup Ghosh Roy ,  Ming Mao ,  Mahendra Pakala

发明人： Anup Ghosh Roy ,  Ming Mao ,  Mahendra Pakala

IPC分类号： G11B5/127

CPC分类号： G11B5/3932

摘要： A method and system for providing a magnetic transducer is described. The method and system include providing a seed layer and providing at least one adjustment layer on the seed layer. The method and system also include providing a hard bias structure on the at least one adjustment layer. The seed layer has a first template including a first template dimension and a first texture. The at least one adjustment layer has a second template including a second template dimension and a second texture. The hard bias structure has a third template including a third template dimension and a third texture. The second template is between the first template and the third template.

摘要翻译： 描述了一种用于提供磁换能器的方法和系统。 该方法和系统包括提供种子层并在种子层上提供至少一个调节层。 该方法和系统还包括在至少一个调节层上提供硬偏压结构。 种子层具有包括第一模板尺寸和第一纹理的第一模板。 所述至少一个调整层具有包括第二模板尺寸和第二纹理的第二模板。 硬偏置结构具有包括第三模板尺寸和第三纹理的第三模板。 第二个模板位于第一个模板和第三个模板之间。

公开(公告)号：US07405085B2

公开(公告)日：2008-07-29

申请号：US10943510

申请日：2004-09-15

申请人： Jacques Constant Stefan Kools ,  Ming Mao ,  Thomas Schneider ,  Jinsong Wang ,  Michael Gutkin

发明人： Jacques Constant Stefan Kools ,  Ming Mao ,  Thomas Schneider ,  Jinsong Wang ,  Michael Gutkin

IPC分类号： H01L21/00

CPC分类号： H01L27/222 ,  H01L43/08 ,  H01L43/12

摘要： An amorphous soft magnetic thin film material for forming shielding and keeper applications in MRAM devices. The amorphous soft magnetic material may be deposited using Physical Vapor Deposition (PVD) in the presence of a magnetic field, in order to form shielding layers and keepers in a multi-layer metallization process. The soft magnetic material may be an amorphous metallic alloy, such as CoZrX, where X may be Ta, Nb, Pd and/or Rh.

摘要翻译： 用于在MRAM器件中形成屏蔽和保持器应用的无定形软磁薄膜材料。 可以在存在磁场的情况下使用物理气相沉积（PVD）沉积非晶软磁材料，以便在多层金属化工艺中形成屏蔽层和保持器。 软磁性材料可以是非晶金属合金，例如CoZrX，其中X可以是Ta，Nb，Pd和/或Rh。

公开(公告)号：US20070209932A1

公开(公告)日：2007-09-13

申请号：US11372517

申请日：2006-03-10

申请人： Piero Sferlazzo ,  Ming Mao ,  Jinliang Chen ,  David Felsenthal ,  Robert Hieronymi ,  Miroslav Eror

发明人： Piero Sferlazzo ,  Ming Mao ,  Jinliang Chen ,  David Felsenthal ,  Robert Hieronymi ,  Miroslav Eror

IPC分类号： C23C14/00

CPC分类号： C23C14/352 ,  C23C14/505 ,  C23C14/568 ,  C23C14/5833

摘要： The present invention relates to a sputter deposition system and to methods of use thereof for processing substrates using planetary sputter deposition methods. The sputter deposition system includes a deposition chamber having an azimuthal axis. A rotatable member is situated in the chamber and includes a plurality of magnetrons provided thereon. Each magnetron includes a corresponding one of a plurality of sputtering targets. The rotatable member is configured to position each of the magnetrons to direct sputtered material from the corresponding one of the sputtering targets to a deposition zone defined in the deposition chamber. A transport mechanism is situated in the deposition chamber and includes an arm rotatable about the azimuthal axis. A substrate holder is attached to the arm of the transport mechanism and supports the substrate as the arm rotates the substrate holder to intersect the deposition zone for depositing sputtered material on the substrate.

摘要翻译： 溅射沉积系统技术领域本发明涉及一种溅射沉积系统及其使用方法，用于使用行星式溅射沉积方法来处理衬底 溅射沉积系统包括具有方位角轴的沉积室。 可旋转构件位于腔室中并且包括设置在其上的多个磁控管。 每个磁控管包括多个溅射靶中相应的一个。 可旋转构件被构造成定位每个磁控管以将溅射的材料从相应的一个溅射靶引导到在沉积室中限定的沉积区。 输送机构位于沉积室中并且包括可围绕方位轴线旋转的臂。 衬底保持器附接到输送机构的臂上并且当臂旋转衬底保持器以与沉积区相交以在基底上沉积溅射材料时支撑衬底。

公开(公告)号：US20060216548A1

公开(公告)日：2006-09-28

申请号：US11086133

申请日：2005-03-22

申请人： Ming Mao ,  Randhir Bubber ,  Thomas Schneider

发明人： Ming Mao ,  Randhir Bubber ,  Thomas Schneider

IPC分类号： C23C16/00 ,  B32B9/00

CPC分类号： H01L21/022 ,  C23C16/402 ,  C23C16/45529 ,  C23C26/00 ,  C23C28/00 ,  C23C28/04 ,  H01L21/02164 ,  H01L21/02178 ,  H01L21/0228 ,  H01L21/3142 ,  H01L21/31608 ,  H01L21/31616

摘要： A nanolaminate thin film and a method for forming the same using atomic layer deposition are disclosed. The method includes forming an aluminum oxide layer having a first thickness on at least a portion of a substrate surface by sequentially pulsing a first precursor and a first reactant into an enclosure containing the substrate. A layer of silicon dioxide is formed on at least a portion of the aluminum oxide layer by sequentially pulsing a second precursor and a second reactant into the enclosure to form a nanolaminate thin film.

摘要翻译： 公开了一种纳米氨酸盐薄膜及其使用原子层沉积法形成该薄膜的方法。 该方法包括通过将第一前体和第一反应物顺序地脉冲到包含衬底的外壳中，在衬底表面的至少一部分上形成具有第一厚度的氧化铝层。 通过将第二前体和第二反应物顺序地脉冲到外壳中以形成纳米级的薄膜，在氧化铝层的至少一部分上形成二氧化硅层。

公开(公告)号：US07071118B2

公开(公告)日：2006-07-04

申请号：US10706637

申请日：2003-11-12

申请人： Jacques C. S. Kools ,  Randhir Bubber ,  Ming Mao ,  Thomas Andrew Schneider ,  Jinsong Wang

发明人： Jacques C. S. Kools ,  Randhir Bubber ,  Ming Mao ,  Thomas Andrew Schneider ,  Jinsong Wang

IPC分类号： H01L21/31

CPC分类号： C23C16/45544 ,  C23C16/45565 ,  C23C16/45591

摘要： A method and apparatus for fabricating a conformal thin film on a substrate are disclosed. The method includes introducing a gas from a gas inlet into an expansion volume associated with an atomic layer deposition (ALD) system. The gas is flowed through a diffuser plate adjacent to the expansion volume and a reaction chamber. The diffuser plate includes a protrusion located opposite the gas inlet and the protrusion reduces turbulence in the expansion volume.

摘要翻译： 公开了一种用于在基板上制造保形薄膜的方法和装置。 该方法包括将气体从气体入口引入与原子层沉积（ALD）系统相关联的膨胀体积中。 气体通过与膨胀容积相邻的扩散板和反应室流动。 扩散板包括与气体入口相对的突出部，并且突起减少了膨胀体积中的湍流。

公开(公告)号：US20070045102A1

公开(公告)日：2007-03-01

申请号：US11209907

申请日：2005-08-23

申请人： Chih-Ling Lee ,  Adrian Devasahayam ,  Ming Mao ,  Chih-Ching Hu ,  Vincent Ip ,  Piero Sferlazzo

发明人： Chih-Ling Lee ,  Adrian Devasahayam ,  Ming Mao ,  Chih-Ching Hu ,  Vincent Ip ,  Piero Sferlazzo

IPC分类号： C23C14/00

CPC分类号： C23C14/352 ,  C23C14/165

摘要： An improved planetary sputter deposition method for sputter depositing an alloy on a substrate wherein the sputter deposited amount, or thickness, of a specific material of the alloy can be controlled so that different substrates can be provided with an alloy having a different composition, i.e. having different percentages of the same materials, thus, reducing the costs of stockpiling multiple alloy targets. The method generally includes providing a substrate and a plurality of targets with each of the plurality of targets being composed of one or more magnetic materials. The targets are sputtered, in sequence, to deposit each of the materials of the plurality of targets on the substrate to provide at least one laminate defining an alloy.

摘要翻译： 一种用于在基板上溅射沉积合金的改进的行星溅射沉积方法，其中可以控制合金的特定材料的溅射沉积量或厚度，使得可以提供具有不同组成的合金，即具有 不同百分比的相同材料，从而降低储存多种合金靶材的成本。 该方法通常包括提供基底和多个靶，其中多个靶中的每一个由一个或多个磁性材料构成。 按顺序溅射靶，以将多个靶材的每种材料沉积在基底上，以提供限定合金的至少一个层压板。