Invention Grant
- Patent Title: Method for fabricating a read sensor for a read transducer
- Patent Title (中): 读取传感器的读取传感器的制造方法
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Application No.: US13309357Application Date: 2011-12-01
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Publication No.: US08607438B1Publication Date: 2013-12-17
- Inventor: Wei Gao , Guanxiong Li , Ming Mao , Chih-Ching Hu , Guanghong Luo , Miao Wang , Zhihong Zhang , Anup G. Roy
- Applicant: Wei Gao , Guanxiong Li , Ming Mao , Chih-Ching Hu , Guanghong Luo , Miao Wang , Zhihong Zhang , Anup G. Roy
- Applicant Address: US CA Fremont
- Assignee: Western Digital (Fremont), LLC
- Current Assignee: Western Digital (Fremont), LLC
- Current Assignee Address: US CA Fremont
- Main IPC: G11B5/127
- IPC: G11B5/127 ; H04R31/00

Abstract:
A read sensor for a transducer is fabricated. The transducer has a field region and a sensor region corresponding to the sensor. A sensor stack is deposited. A hybrid mask including hard and field masks is provided. The hard mask includes a sensor portion covering the sensor region and a field portion covering the field region. The field mask covers the field portion of the hard mask. The field mask exposes the sensor portion of the hard mask and part of the sensor stack between the sensor and field regions. The sensor is defined from the sensor stack in a track width direction. Hard bias layer(s) are deposited. Part of the hard bias layer(s) resides on the field mask. Part of the hard bias layer(s) adjoining the sensor region is sealed. The field mask is lifted off. The transducer is planarized.
Information query
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