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    Pixelated capacitance controlled ESC
    1.
    发明授权
    Pixelated capacitance controlled ESC 有权
    像素化电容控制ESC

    公开(公告)号：US09536769B1

    公开(公告)日：2017-01-03

    申请号：US15268087

    申请日：2016-09-16

    Applicant: Applied Materials, Inc.

    Inventor： Reza Sadjadi ,  Wendell Glen Boyd, Jr. ,  Vijay D. Parkhe ,  Maxim Mikhailovich Noginov

    IPC: H01L21/683 ,  H01L27/12 ,  H01J37/32 ,  H01L21/67

    CPC classification number: H01L21/28556 ,  C23C16/00 ,  G06K2009/00738 ,  H01J37/32697 ,  H01J37/32715 ,  H01J2237/334 ,  H01L21/02252 ,  H01L21/02274 ,  H01L21/0228 ,  H01L21/0262 ,  H01L21/265 ,  H01L21/3065 ,  H01L21/31116 ,  H01L21/31138 ,  H01L21/32136 ,  H01L21/67063 ,  H01L21/67103 ,  H01L21/6833 ,  H01L27/1255 ,  H01L29/93 ,  H04N7/181 ,  H04N7/188

    Abstract: Implementations described herein provide a chucking circuit for a pixilated electrostatic chuck which enables both lateral and azimuthal tuning of the RF coupling between an electrostatic chuck and a substrate placed thereon. In one embodiment, a chucking circuit for an electrostatic chuck (ESC) has one or more chucking electrodes disposed in a dielectric body of the ESC, a plurality of pixel electrodes disposed in the dielectric body, and a chucking circuit having the one or more chucking electrodes and the plurality of pixel electrodes, the chucking circuit operable to electrostatically chuck a substrate to a workpiece support surface of the ESC, the chucking circuit having a plurality of secondary circuits, wherein each secondary circuit includes at least one capacitor of a plurality of capacitors, each secondary circuit is configured to independently control an impedance between one of the pixel electrodes and a ground.

    Abstract translation: 本文所述的实施例提供了用于像素化静电卡盘的夹持电路，其能够在静电卡盘和放置在其上的基板之间的RF耦合的侧向和方位调谐。 在一个实施例中，用于静电卡盘（ESC）的夹紧电路具有设置在ESC的电介质体中的一个或多个夹持电极，设置在电介质体中的多个像素电极以及具有一个或多个卡盘 电极和多个像素电极，所述夹持电路可操作以将基板静电吸附到ESC的工件支撑表面，所述夹持电路具有多个次级电路，其中每个次级电路包括多个电容器中的至少一个电容器 每个次级电路被配置为独立地控制像素电极之一和地之间的阻抗。

    Process chamber having tunable showerhead and tunable liner
    4.
    发明授权
    Process chamber having tunable showerhead and tunable liner 有权

    公开(公告)号：US10811233B2

    公开(公告)日：2020-10-20

    申请号：US15673403

    申请日：2017-08-09

    Applicant: APPLIED MATERIALS, INC.

    Inventor： Andrew Nguyen ,  Xue Yang Chang ,  Haitao Wang ,  Kei-Yu Ko ,  Reza Sadjadi

    IPC: H01J37/32

    Abstract: Process chambers having a tunable showerhead and a tunable liner are disclosed herein. In some embodiments, a processing chamber includes a showerhead; a chamber liner; a first impedance circuit coupled to the showerhead to tune an impedance of the showerhead; a second impedance circuit coupled to the chamber liner to tune an impedance of the chamber liner; and a controller coupled to the first and second impedance circuits to control relative impedances of the showerhead and the chamber liner.

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