公开(公告)号：US10811233B2

公开(公告)日：2020-10-20

申请号：US15673403

申请日：2017-08-09

Applicant: APPLIED MATERIALS, INC.

Inventor： Andrew Nguyen ,  Xue Yang Chang ,  Haitao Wang ,  Kei-Yu Ko ,  Reza Sadjadi

IPC: H01J37/32

Abstract: Process chambers having a tunable showerhead and a tunable liner are disclosed herein. In some embodiments, a processing chamber includes a showerhead; a chamber liner; a first impedance circuit coupled to the showerhead to tune an impedance of the showerhead; a second impedance circuit coupled to the chamber liner to tune an impedance of the chamber liner; and a controller coupled to the first and second impedance circuits to control relative impedances of the showerhead and the chamber liner.