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公开(公告)号:US20220344134A1
公开(公告)日:2022-10-27
申请号:US17861324
申请日:2022-07-11
申请人: Muhannad MUSTAFA , Muhammad M. RASHEED , Yu LEI , Avgerinos V. GELATOS , Vikash BANTHIA , Victor H. CALDERON , Shi Wei TOH , Yung-Hsin LEE , Anindita SEN
发明人: Muhannad MUSTAFA , Muhammad M. RASHEED , Yu LEI , Avgerinos V. GELATOS , Vikash BANTHIA , Victor H. CALDERON , Shi Wei TOH , Yung-Hsin LEE , Anindita SEN
IPC分类号: H01J37/32
摘要: Methods and apparatus for processing substrates are provided herein. In some embodiments, a process kit for a substrate support includes: an upper edge ring made of quartz and having an upper surface and a lower surface, wherein the upper surface is substantially planar and the lower surface includes a stepped lower surface to define a radially outermost portion and a radially innermost portion of the upper edge ring.
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公开(公告)号:US20220245864A1
公开(公告)日:2022-08-04
申请号:US17586714
申请日:2022-01-27
申请人: Yi-Ching Tu , Po-Chun Liu , Kai-Yu Lei , Dai-Yun Tsai
发明人: Yi-Ching Tu , Po-Chun Liu , Kai-Yu Lei , Dai-Yun Tsai
摘要: A generating method of conference image and an image conference system are provided. In the method, a user and one or more tags in a captured actual image are identified. The moving behavior of the user is tracked, and the position of the viewing range in the actual image is adjusted according to the moving behavior. The virtual image corresponding to the tag is synthesized according to the position relation between the user and the tag, to generate a conference image.
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公开(公告)号:US09330939B2
公开(公告)日:2016-05-03
申请号:US13786644
申请日:2013-03-06
申请人: Bhushan N. Zope , Avgerinos V. Gelatos , Bo Zheng , Yu Lei , Xinyu Fu , Srinivas Gandikota , Sang-Ho Yu , Mathew Abraham
发明人: Bhushan N. Zope , Avgerinos V. Gelatos , Bo Zheng , Yu Lei , Xinyu Fu , Srinivas Gandikota , Sang-Ho Yu , Mathew Abraham
IPC分类号: H01L21/76 , H01L21/48 , H01L21/02 , H01L21/768 , H01L21/285
CPC分类号: H01L21/76879 , H01L21/02057 , H01L21/2855 , H01L21/28556 , H01L21/4846 , H01L21/76814 , H01L21/76843 , H01L21/76846 , H01L21/76856 , H01L21/76877 , H01L21/76883 , H01L23/53209 , H01L23/5329 , H01L29/66621
摘要: Methods for depositing a contact metal layer in contact structures of a semiconductor device are provided. In one embodiment, a method for depositing a contact metal layer for forming a contact structure in a semiconductor device is provided. The method comprises performing a cyclic metal deposition process to deposit a contact metal layer on a substrate and annealing the contact metal layer disposed on the substrate. The cyclic metal deposition process comprises exposing the substrate to a deposition precursor gas mixture to deposit a portion of the contact metal layer on the substrate, exposing the portion of the contact metal layer to a plasma treatment process, and repeating the exposing the substrate to a deposition precursor gas mixture and exposing the portion of the contact metal layer to a plasma treatment process until a predetermined thickness of the contact metal layer is achieved.
摘要翻译: 提供了在半导体器件的接触结构中沉积接触金属层的方法。 在一个实施例中,提供了一种在半导体器件中沉积用于形成接触结构的接触金属层的方法。 该方法包括进行循环金属沉积工艺,以将接触金属层沉积在衬底上并退火设置在衬底上的接触金属层。 循环金属沉积工艺包括将衬底暴露于沉积前体气体混合物以将接触金属层的一部分沉积在衬底上,将接触金属层的该部分暴露于等离子体处理工艺,并重复将衬底暴露于 沉积前体气体混合物,并将接触金属层的部分暴露于等离子体处理工艺,直到实现接触金属层的预定厚度。
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公开(公告)号:US08671888B1
公开(公告)日:2014-03-18
申请号:US13669469
申请日:2012-11-06
申请人: Ping Yu Lei , Cheng Han Hsiao
发明人: Ping Yu Lei , Cheng Han Hsiao
IPC分类号: A01K1/01
CPC分类号: A01K1/0121 , A01K1/0114
摘要: A cat toilet device includes a bottom part, a seat and a top part. The seat has a lip extending inward therefrom so as to support the top part. The top part has multiple apertures and a side hole is defined through a side of the top part. The cat is trained to use the cat toilet device to save the need of the cat litter. A slot is defined in the top face of the seat and a cup is engaged with the slot so as to receive tools for clearing the cat toilet.
摘要翻译: 猫厕所装置包括底部,座椅和顶部。 座椅具有从其向内延伸的唇部,以支撑顶部。 顶部具有多个孔,并且侧孔定义在顶部的一侧。 猫被训练使用猫厕所装置来节省猫垫的需要。 在座椅的顶面中限定一个狭槽,并且一个杯子与槽接合,以便接收用于清除猫厕所的工具。
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公开(公告)号:US20140017408A1
公开(公告)日:2014-01-16
申请号:US13930194
申请日:2013-06-28
申请人: Srinivas Gandikota , Xinliang Lu , Shih Chung Chen , Wei Tang , Jing Zhou , Seshadri Ganguli , David Thompson , Jeffrey W. Anthis , Atif Noori , Faruk Gungor , Dien-Yeh Wu , Mei Chang , Xinyu Fu , Yu Lei
发明人: Srinivas Gandikota , Xinliang Lu , Shih Chung Chen , Wei Tang , Jing Zhou , Seshadri Ganguli , David Thompson , Jeffrey W. Anthis , Atif Noori , Faruk Gungor , Dien-Yeh Wu , Mei Chang , Xinyu Fu , Yu Lei
IPC分类号: C23C18/00
CPC分类号: C23C18/00 , C23C16/08 , C23C16/18 , C23C16/45527 , C23C16/45534 , C23C16/45553
摘要: Provided are methods of depositing films comprising alloys of aluminum, which may be suitable as N-metal films. Certain methods comprise exposing a substrate surface to a metal halide precursor comprising a metal halide selected from TiCl4, TaCl5 and HfCl4 to provide a metal halide at the substrate surface; purging metal halide; exposing the substrate surface to an alkyl aluminum precursor comprising one or more of dimethyaluminum hydride, diethylhydridoaluminum, methyldihydroaluminum, and an alkyl aluminum hydrides of the formula [(CxHy)3-aAlHa]n, wherein x has a value of 1 to 3, y has a value of 2x+2, a has a value of 1 to 2, and n has a value of 1 to 4; and exposing the substrate surface to an alane-containing precursor comprising one or more of dimethylethylamine alane, methylpyrrolidinealane, di(methylpyrolidine)alane, and trimethyl amine alane borane. Other methods comprise exposing a substrate surface to a metal precursor and trimethyl amine alane borane.
摘要翻译: 提供了沉积包括铝合金的膜的方法,其可以适合作为N-金属膜。 某些方法包括将衬底表面暴露于包含选自TiCl 4,TaCl 5和HfCl 4的金属卤化物的金属卤化物前体,以在衬底表面提供金属卤化物; 清洗金属卤化物; 将基材表面暴露于包含一种或多种二氢化铝氢化物,二乙基氢化铝,甲基二氢铝和式[(C x H y)3-a AlHa] n的烷基铝氢化物的烷基铝前体,其中x具有1至3的值,y 具有2x + 2的值,a具有1至2的值,并且n具有1至4的值; 并将基材表面暴露于含有二甲基乙基胺丙烷,甲基吡咯烷烃,二(甲基吡咯烷)甲烷和三甲基胺丙烷硼烷中的一种或多种的含Alane的前体。 其他方法包括将基底表面暴露于金属前体和三甲基胺丙烷硼烷。
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公开(公告)号:US20130003608A1
公开(公告)日:2013-01-03
申请号:US13533843
申请日:2012-06-26
IPC分类号: H04L12/28
CPC分类号: H04L12/462 , H04L45/66 , H04L49/351 , H04L49/354
摘要: One embodiment of the present invention provides a switch. The switch includes a local database, a packet processor, a data management module, and a tree construction module. The packet processor extracts spanning tree information associated with a remote switch. The data management module stores the extracted spanning tree information in the local database. The tree construction module assigns an interface state associated with a spanning tree to a local interface based on the extracted spanning tree information.
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公开(公告)号:US20120258602A1
公开(公告)日:2012-10-11
申请号:US13082968
申请日:2011-04-08
申请人: Anantha K. Subramani , John C. Forster , Seshadri Ganguli , Michael S. Jackson , Xinliang Lu , Wei W. Wang , Xinyu Fu , Yu Lei
发明人: Anantha K. Subramani , John C. Forster , Seshadri Ganguli , Michael S. Jackson , Xinliang Lu , Wei W. Wang , Xinyu Fu , Yu Lei
IPC分类号: H01L21/31
CPC分类号: C23C16/08 , C23C16/45542 , H01L21/28079 , H01L21/28518 , H01L21/28556 , H01L21/28562 , H01L21/32051 , H01L21/76843 , H01L29/495 , H01L29/513 , H01L29/517
摘要: Methods for formation and treatment of pure metal layers using CVD and ALD techniques are provided. In one or more embodiments, the method includes forming a metal precursor layer and treating the metal precursor layer to a hydrogen plasma to reduce the metal precursor layer to form a metal layer. In one or more embodiments, treating the metal precursor layer includes exposing the metal precursor layer to a high frequency-generated hydrogen plasma. Methods of preventing a hydrogen plasma from penetrating a metal precursor layer are also provided.
摘要翻译: 提供了使用CVD和ALD技术形成和处理纯金属层的方法。 在一个或多个实施方案中,该方法包括形成金属前体层并将金属前体层处理成氢等离子体以还原金属前体层以形成金属层。 在一个或多个实施方案中,处理金属前体层包括将金属前体层暴露于高频产生的氢等离子体。 还提供了防止氢等离子体渗透金属前体层的方法。
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公开(公告)号:US07802965B2
公开(公告)日:2010-09-28
申请号:US11332397
申请日:2006-01-17
申请人: Wen-Shi Huang , Kuo-Cheng Lin , Li-Kuang Tan , Tsung-Yu Lei , Wen-Ha Liu
发明人: Wen-Shi Huang , Kuo-Cheng Lin , Li-Kuang Tan , Tsung-Yu Lei , Wen-Ha Liu
IPC分类号: F04D29/52
CPC分类号: F04D25/0613 , F04D29/526
摘要: A cooling fan with high heat-dissipating performance includes a plurality of blades; and a frame for receiving the blades therein, wherein the frame has a reduced height for exposing the blades to outside of the frame so as to allow air to enter into the frame via a top portion and a peripheral portion of the blades to improve air introduction and heat dissipating efficiency of the cooling fan. A cover may be mounted to a top surface of the frame, and formed with a plurality of openings for allowing air to enter into the frame through the openings; such an arrangement cam effectively enhance air intake and working efficiency of the cooling fan.
摘要翻译: 具有高散热性能的冷却风扇包括多个叶片; 以及用于在其中接收叶片的框架,其中框架具有降低的高度,用于将叶片暴露于框架外部,以便空气经由叶片的顶部和周边部分进入框架以改善空气引入 和散热风扇的散热效率。 盖可以安装到框架的顶表面,并且形成有多个开口,用于允许空气通过开口进入框架; 这种布置凸轮有效地提高了冷却风扇的进气和工作效率。
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公开(公告)号:US07416386B2
公开(公告)日:2008-08-26
申请号:US11699009
申请日:2007-01-29
申请人: Shih-Hua Ho , Hao-Ming Chen , Tsung-Yu Lei , Wen-Shi Huang
发明人: Shih-Hua Ho , Hao-Ming Chen , Tsung-Yu Lei , Wen-Shi Huang
IPC分类号: F04D29/54
CPC分类号: F04D29/526 , F04D25/0613 , F04D29/545
摘要: A heat dissipation apparatus. A fan frame includes an air inlet, an air outlet, a passage, and a curved expansion portion. The air inlet is opposite the air outlet. The passage is between the air inlet and the air outlet, guiding airflow from the air inlet to the air outlet. The curved expansion portion is radially and outwardly extended from an inner peripheral wall of the passage at the air inlet or air outlet. An impeller is disposed in the fan frame and includes a plurality of blades. Each blade is disposed in the passage and includes an extension end extending to the curved expansion portion.
摘要翻译: 散热装置。 风扇框架包括空气入口,空气出口,通道和弯曲的膨胀部分。 进气口与出风口相对。 通道位于进气口和出气口之间,引导气流从空气入口到出风口。 弯曲的膨胀部分在空气入口或空气出口处从通道的内周壁径向向外延伸。 叶轮设置在风扇框架中并且包括多个叶片。 每个叶片设置在通道中并且包括延伸到弯曲膨胀部分的延伸端。
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公开(公告)号:US07387496B2
公开(公告)日:2008-06-17
申请号:US10827285
申请日:2004-04-20
申请人: Te-Fu Chen , Tsung-Yu Lei , Kuo-Cheng Lin , Wen-Shi Huang
发明人: Te-Fu Chen , Tsung-Yu Lei , Kuo-Cheng Lin , Wen-Shi Huang
IPC分类号: F04D29/38
CPC分类号: F04D29/283
摘要: A fan assembly and impeller thereof. The fan assembly includes a plurality of blades and a hub. The hub includes an upper surface and a center point. The blades have bottom portions arranged in a circle on the upper surface with respect to the center point.
摘要翻译: 风扇组件及其叶轮。 风扇组件包括多个叶片和毂。 轮毂包括上表面和中心点。 叶片具有相对于中心点在上表面上以圆形布置的底部部分。
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