公开(公告)号：US09136152B2

公开(公告)日：2015-09-15

申请号：US13410447

申请日：2012-03-02

申请人： Katsuhiko Oyama ,  Yasushi Takeuchi

发明人： Katsuhiko Oyama ,  Yasushi Takeuchi

IPC分类号： H01L21/677 ,  C23C16/458 ,  H01L21/673 ,  H01L21/687

CPC分类号： H01L21/67742 ,  C23C16/4583 ,  H01L21/67303 ,  H01L21/67309 ,  H01L21/67757 ,  H01L21/67766 ,  H01L21/67781 ,  H01L21/68707

摘要： A substrate transport apparatus includes a first fork which is disposed to be movable in a forward/backward direction to a substrate holding part to transport a stacked member to or receive the stacked member from the substrate holding part. A second fork is arranged to be reversible and disposed above the first fork to be movable in a forward/backward direction to an accommodating part that accommodates substrates and spacer members to transport a substrate or a spacer member between the accommodating part and the first fork. A first grip module is disposed on a first surface of the second fork to hold and support the substrate from an upward direction. A second grip module is disposed on the first surface of the second fork on the same side as the first grip module to hold and support the spacer member from an upward direction.

摘要翻译： 一种基板输送装置，包括：第一叉，其设置成能够向前/后方向移动到基板保持部，以将堆叠构件从基板保持部输送到或接收所述堆叠构件。 第二叉被布置为可逆的并且设置在第一叉上方，以可向前/向后方向移动到容纳部分的容纳部分，以容纳衬底和间隔构件，以将基片或间隔构件输送在容纳部分和第一叉之间。 第一夹持模块设置在第二叉的第一表面上，以从上方保持和支撑基板。 第二夹持模块设置在与第一夹持模块相同侧的第二叉的第一表面上，以从上方保持并支撑间隔构件。

公开(公告)号：US09053909B2

公开(公告)日：2015-06-09

申请号：US12547648

申请日：2009-08-26

申请人： Hitoshi Kato ,  Yasushi Takeuchi ,  Shigehiro Ushikubo ,  Hiroyuki Kikuchi

发明人： Hitoshi Kato ,  Yasushi Takeuchi ,  Shigehiro Ushikubo ,  Hiroyuki Kikuchi

IPC分类号： C23C16/50 ,  C23C16/505 ,  C23C16/509 ,  H01J37/32 ,  C23C16/455 ,  C23C16/452 ,  C23C16/458 ,  C23C16/06 ,  C23C16/22 ,  H01J1/00

CPC分类号： H01J37/32559 ,  C23C16/452 ,  C23C16/45517 ,  C23C16/45536 ,  C23C16/45551 ,  C23C16/45563 ,  C23C16/45565 ,  C23C16/45578 ,  C23C16/4584 ,  C23C16/50 ,  C23C16/505 ,  C23C16/509 ,  C23C16/5093 ,  H01J1/00 ,  H01J37/3244 ,  H01J37/32449

摘要： An activated gas injector includes a flow passage defining member partitioned into a gas activation passage and a gas introduction passage by a partition wall; a gas introduction port through which a process gas is introduced into the gas introduction passage; a pair of electrodes to be supplied with electrical power to activate the process gas, wherein the electrodes extend along the partition wall in the gas activation passage; through-holes formed in the partition wall and arranged along a longitudinal direction of the electrodes, wherein the through-holes allow the process gas to flow from the gas introduction passage to the gas activation passage; and gas ejection holes provided in the gas activation passage along the longitudinal direction of the electrodes, wherein the gas ejection holes allow the process gas activated in the gas activation passage to be ejected therefrom.

摘要翻译： 活性气体喷射器包括分隔成气体激活通道的流动通道限定部件和通过分隔壁的气体引入通道; 气体导入口，通过该气体导入口将工艺气体引入到气体导入通路内; 一对电极被供电以激活处理气体，其中电极沿着气体激活通道中的分隔壁延伸; 所述通孔形成在所述分隔壁上并且沿着所述电极的纵向方向布置，其中所述通孔允许所述工艺气体从所述气体引入通道流到所述气体激活通道; 以及沿着电极的纵向方向设置在气体致动通道中的气体喷射孔，其中气体喷射孔允许从气体激活通道中激活的处理气体从其喷射。

公开(公告)号：US20110162633A1

公开(公告)日：2011-07-07

申请号：US12987406

申请日：2011-01-10

申请人： Hisashi INOUE ,  Shunichi Matsumoto ,  Yasushi Takeuchi

发明人： Hisashi INOUE ,  Shunichi Matsumoto ,  Yasushi Takeuchi

IPC分类号： F24C1/00

CPC分类号： H01L21/67309 ,  C21D9/0068 ,  C23C16/56 ,  H01L21/67109

摘要： A heat treatment apparatus has a substrate holder with two holder constituting bodies that each have a plurality of columns and substrate holding sections. One of the holder constituting bodies holds substrates so that their front surfaces face upward, while the other holds the substrates so that their back surfaces face upward. At least one of the holder constituting bodies moves vertically to change the positions of the holder constituting bodies relative to each other. A distance between one of a first pair of vertically-adjacent substrates with respective front surfaces facing each other and the other of the first pair of substrates is set to ensure treatment uniformity and to be larger than a distance between one of a second pair of vertically-adjacent substrates with their respective back surfaces facing each other and the other of the second pair of substrates.

摘要翻译： 热处理设备具有一个具有两个保持器构成体的衬底保持器，每个保持器构成体具有多个列和衬底保持部。 保持器构造体中的一个保持基板，使得它们的前表面朝上，而另一个保持基板，使得它们的后表面朝上。 保持器构造体中的至少一个垂直移动以改变保持器构造体相对于彼此的位置。 第一对垂直相邻基板中的一个彼此相对的前表面和第一对基板之间的距离设定为确保处理均匀性并且大于第二对垂直方向之间的距离 相邻的基板，其各自的后表面彼此相对，另一个是第二对基板。

公开(公告)号：US20110155056A1

公开(公告)日：2011-06-30

申请号：US12969699

申请日：2010-12-16

申请人： Hitoshi KATO ,  Manabu HONMA ,  Yasushi TAKEUCHI

发明人： Hitoshi KATO ,  Manabu HONMA ,  Yasushi TAKEUCHI

IPC分类号： C23C16/458

CPC分类号： H01L21/68764 ,  C23C16/45538 ,  C23C16/45551 ,  H01L21/68771

摘要： A film deposition apparatus has a vacuum chamber in which a turntable placing plural substrates is rotated, the plural substrates come into contact with plural reaction gases supplied to plural process areas and thin films are deposited on surfaces of the plural substrates, and has plural reaction gas supplying portions for supplying the plural processing gases, a separation gas supplying portion for supplying a separation gas and an evacuation mechanism for ejecting the plural processing gases and the separation gas, wherein the plural process areas includes a first process area for causing a first reaction gas to adsorb on the surfaces of the plural substrates, and a second process area, having an area larger than the first process area, for causing the first reaction gas having adsorbed the surfaces of the plural substrates and a second reaction gas to react, and depositing the films on the surfaces of the plural substrates.

摘要翻译： 一种成膜装置具有：真空室，其中放置多个基板的转台旋转，多个基板与多个处理区域供应的多个反应气体接触，薄膜沉积在多个基板的表面上，并且具有多个反应气体 用于供给多种处理气体的供给部分，用于供给分离气体的分离气体供给部分和用于喷射多种处理气体和分离气体的排出机构，其中多个处理区域包括：第一处理区域，用于使第一反应气体 吸附在多个基板的表面上，以及具有比第一处理区域大的面积的第二处理区域，用于使吸附有多个基板的表面的第一反应气体和第二反应气体反应， 在多个基板的表面上的膜。

公开(公告)号：US07949269B2

公开(公告)日：2011-05-24

申请号：US12167999

申请日：2008-07-03

申请人： Yasushi Takeuchi

发明人： Yasushi Takeuchi

IPC分类号： G03G15/00 ,  G03G15/16

CPC分类号： G03G15/161 ,  G03G15/50 ,  G03G2215/1652

摘要： An image forming apparatus includes a black image forming unit that can be used in a black monochrome mode to form supply toner images corresponding to color patches and cause the supply toner images to be carried by an intermediate transfer belt. During the black monochrome mode, a fur brush comes into contact with the supply toner images, so that discharge products are removed from the fur brush. Thus, when the black monochrome mode ends and a full-color mode is returned, the color patches transferred to a secondary transfer roller can be sufficiently removed by single passage and no backside contamination of a recording material occurs.

摘要翻译： 图像形成装置包括黑色图像形成单元，其可以以黑色单色模式使用，以形成对应于色块的调色剂图像，并使供应调色剂图像由中间转印带承载。 在黑色单色模式期间，毛刷与供墨调色剂图像接触，从而从毛刷上除去放电产物。 因此，当黑色单色模式结束并且返回全色模式时，可以通过单次通过充分地去除转印到二次转印辊的色块，并且不会发生记录材料的背面污染。

公开(公告)号：US20110104395A1

公开(公告)日：2011-05-05

申请号：US12912910

申请日：2010-10-27

申请人： Takeshi KUMAGAI ,  Yasushi Takeuchi ,  Hitoshi Kato

发明人： Takeshi KUMAGAI ,  Yasushi Takeuchi ,  Hitoshi Kato

IPC分类号： C23C16/46 ,  C23C16/44 ,  B05D3/00

CPC分类号： C23C16/402 ,  C23C16/4401 ,  C23C16/45551 ,  C23C16/46

摘要： In a film deposition apparatus where bis (tertiary-butylamino) silane (BTBAS) gas is adsorbed on a wafer and then O3 gas is adsorbed on the wafer so that the BTBAS gas is oxidized by the O3 gas thereby depositing a silicon oxide film by rotating a turntable on which the wafer is placed, a laser beam irradiation portion is provided that is capable of irradiating a laser beam to an area spanning from one edge to another edge of a substrate receiving area of the turntable along a direction from an inner side to an outer side of the table.

摘要翻译： 在其中双（叔丁基氨基）硅烷（BTBAS））气体吸附在晶片上，然后O 3气体被吸附在晶片上的成膜装置中，使得BTBAS气体被O 3气体氧化，从而通过旋转沉积氧化硅膜 设置有晶片的转盘，设置有激光束照射部，该激光束照射部能够将激光照射到从转盘的基板接收区域的一边缘到另一边缘的区域，该区域沿着从内侧到 桌子的外侧。

公开(公告)号：US07650094B2

公开(公告)日：2010-01-19

申请号：US11262778

申请日：2005-11-01

申请人： Yuichi Yamamoto ,  Eiichi Motoyama ,  Yoshihito Osari ,  Kuniyasu Kimura ,  Hiroaki Tomiyasu ,  Takahiko Yamaoka ,  Jun Tomine ,  Yuichi Ikeda ,  Yasushi Takeuchi

发明人： Yuichi Yamamoto ,  Eiichi Motoyama ,  Yoshihito Osari ,  Kuniyasu Kimura ,  Hiroaki Tomiyasu ,  Takahiko Yamaoka ,  Jun Tomine ,  Yuichi Ikeda ,  Yasushi Takeuchi

IPC分类号： G03G15/00

CPC分类号： G03G15/5033 ,  G03G15/0131 ,  G03G15/161 ,  G03G15/5058 ,  G03G21/0005 ,  G03G2215/00042 ,  G03G2215/00059 ,  G03G2215/00063 ,  G03G2221/0005

摘要： An image forming apparatus includes an image bearing member; toner image formation means for forming a toner image on the image bearing member; removing means for removing deposited matter deposited on the image bearing member; detecting means for detecting a toner image to be detected, formed on the toner image formation means; control means for controlling a toner image forming condition of the toner image forming means in accordance with a result of detection of the toner image to be detected by the detecting means; the apparatus being operable in a mode in which the removing means operates to remove the deposition, and the detecting means operates to detect the toner image to be detected, executing means for executing an operation in the mode; and an operating portion for manually starting execution of the operation in the mode by the executing means.

摘要翻译： 图像形成装置包括：图像承载部件; 调色剂图像形成装置，用于在图像承载部件上形成调色剂图像; 用于去除沉积在图像承载部件上的沉积物的去除装置; 用于检测形成在调色剂图像形成装置上的要检测的调色剂图像的检测装置; 控制装置，用于根据由检测装置检测的调色剂图像的检测结果来控制调色剂图像形成装置的调色剂图像形成条件; 该装置可以以除去装置操作以移除沉积物的方式操作，并且检测装置操作以检测待检测的调色剂图像;执行装置，用于执行该模式的操作; 以及用于通过执行装置以该模式手动开始执行操作的操作部分。

公开(公告)号：US20090267714A1

公开(公告)日：2009-10-29

申请号：US12158545

申请日：2006-03-20

申请人： Masahiro Arioka ,  Yasushi Takeuchi

发明人： Masahiro Arioka ,  Yasushi Takeuchi

IPC分类号： H01H3/26 ,  H02H7/08

CPC分类号： H01H33/59 ,  H01H9/54 ,  H01H33/36

摘要： Provision is made for a switch-state monitoring device that not only monitors the state of a switch but also prevents a motor burnout. A switch-state monitoring device for a switch that opens and closes a main circuit by use of a motor is provided with an operating time measuring unit for detecting an operating time for the motor when the switch is opened or closed; a first determination unit for comparing an operating time for the motor detected by the operating time measuring unit with an continuous-operating-capable setting time for the motor and determining whether or not the operating time for the motor has exceeded the continuous-operating-capable setting time; a protection device for halting energization of the motor in the case where, based on an output of the first determination unit, it is determined that the operating time for the motor has exceeded the continuous-operating-capable setting time.

摘要翻译： 为开关状态监视设备提供了一个开关状态监视设备，它不仅监视交换机的状态，还防止电机烧坏。 用于通过使用电动机来打开和关闭主电路的开关的开关状态监视装置设置有操作时间测量单元，用于当开关打开或关闭时检测电动机的操作时间; 第一确定单元，用于将由操作时间测量单元检测到的电动机的操作时间与用于电动机的连续运行设置时间进行比较，并且确定电动机的操作时间是否已超过连续运行能力 凝固时间 在基于第一确定单元的输出确定电动机的运行时间已经超过连续运行能力的设定时间的情况下，停止电动机通电的保护装置。

公开(公告)号：US20090053665A1

公开(公告)日：2009-02-26

申请号：US11665645

申请日：2005-10-17

申请人： Kenjiro Haraki ,  Hiroyuki Yamamoto ,  Satoshi Uemura ,  Yuji Tsunoda ,  Yasushi Takeuchi ,  Hirofumi Kaneko

发明人： Kenjiro Haraki ,  Hiroyuki Yamamoto ,  Satoshi Uemura ,  Yuji Tsunoda ,  Yasushi Takeuchi ,  Hirofumi Kaneko

IPC分类号： F27D3/00

CPC分类号： H01L21/67769 ,  H01L21/67109 ,  Y10S414/14

摘要： A vertical heat treatment apparatus includes: at least one loading and unloading part 3 and 4 for loading and unloading a carrying container 2 containing a plurality of process objects W into and from said vertical heat treatment apparatus; a first storage part 5 that stores a plurality of carrying containers loaded into said vertical heat treatment apparatus via the loading and unloading part; a heat treatment furnace 7 that accommodates a holder 6 holding a plurality of process objects at multiple levels to perform a predetermined heat treatment to the process objects; and a transfer 8 part that supports thereon a carrying container for transferring process objects between the holder and the carrying container, wherein an upper loading and unloading part 3 and a lower loading and unloading part 4 are provided as said at least one loading and unloading part, and a second storage part 20 that stores a carrying container is disposed between the upper and lower loading and unloading parts. Either one of the loading and unloading parts 3, 4 is utilized as a third storage part 30 that stores a carrying container 2. The carrying container storage capacity may be increased and the throughput may be improved.

摘要翻译： 立式热处理装置包括：至少一个装载和卸载部分3和4，用于将包含多个处理物体W的承载容器2装载到所述垂直热处理装置中并从所述立式热处理装置中卸载; 第一存储部5，其经由装卸部存储装载到所述立式热处理装置中的多个搬运容器; 容纳多个处理对象的保持器6的热处理炉7，对处理对象进行预定的热处理; 以及在其上支撑用于在保持器和承载容器之间传送处理物体的承载容器的转移件8，其中上装载部件3和下装载部件4设置为所述至少一个装载和卸载部件 并且存储运载容器的第二存储部20设置在上下装载部分之间。 加载和卸载部件3,4中的任一个被用作存储携带容器2的第三存储部件30.可以增加承载容器的存储容量并且可以提高生产量。

公开(公告)号：US20090010668A1

公开(公告)日：2009-01-08

申请号：US12167999

申请日：2008-07-03

申请人： Yasushi Takeuchi

发明人： Yasushi Takeuchi

IPC分类号： G03G15/16

CPC分类号： G03G15/161 ,  G03G15/50 ,  G03G2215/1652

摘要： An image forming apparatus includes a black image forming unit that can be used in a black monochrome mode to form supply toner images corresponding to color patches and cause the supply toner images to be carried by an intermediate transfer belt. During the black monochrome mode, a fur brush comes into contact with the supply toner images, so that discharge products are removed from the fur brush. Thus, when the black monochrome mode ends and a full-color mode is returned, the color patches transferred to a secondary transfer roller can be sufficiently removed by single passage and no backside contamination of a recording material occurs.

摘要翻译： 图像形成装置包括黑色图像形成单元，其可以以黑色单色模式使用，以形成对应于色块的调色剂图像，并使供应调色剂图像由中间转印带承载。 在黑色单色模式期间，毛刷与供墨调色剂图像接触，从而从毛刷上除去放电产物。 因此，当黑色单色模式结束并且返回全色模式时，可以通过单次通过充分地去除转印到二次转印辊的色块，并且不会发生记录材料的背面污染。