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1.发明授权Method and system for precisely positioning a waist of a material-processing laser beam to process microstructures within a laser-processing site 有权用于精确定位材料处理激光束的腰部以处理激光加工部位内的微结构的方法和系统公开(公告)号：US06483071B1
公开(公告)日：2002-11-19
申请号：US09572925
申请日：2000-05-16
IPC分类号： B23K2602
CPC分类号： B23K26/046 , B23K26/02 , B23K26/04 , B23K26/043 , B23K26/0853 , B23K2101/40 , G03F7/70041 , G03F7/70725
摘要： A high-speed method and system for precisely positioning a waist of a material-processing laser beam to dynamically compensate for local variations in height of microstructures located on a plurality of objects spaced apart within a laser-processing site are provided. In the preferred embodiment, the microstructures are a plurality of conductive lines formed on a plurality of memory dice of a semiconductor wafer. The system includes a focusing lens subsystem for focusing a laser beam along an optical axis substantially orthogonal to a plane, an x-y stage for moving the wafer in the plane, and a first air bearing sled for moving the focusing lens subsystem along the optical axis. The reference data is generated by the system which includes a modulator for reducing power of the material-processing laser beam to obtain a probe laser beam to measure height of the semiconductor wafer at a plurality of locations about the site to obtain reference height data. A computer computes a reference surface based on the reference height data. A trajectory planner generates trajectories for the wafer and the waist of the laser beam based on the reference surface.
摘要翻译： 提供了一种用于精确定位材料处理激光束的腰部以动态地补偿位于激光加工部位内间隔开的多个物体上的微结构的局部高度变化的高速方法和系统。 在优选实施例中，微结构是形成在半导体晶片的多个存储芯片上的多条导线。 该系统包括聚焦透镜子系统，用于沿着基本上垂直于平面的光轴聚焦激光束，用于在平面中移动晶片的x-y级，以及用于沿着光轴移动聚焦透镜子系统的第一空气轴承滑座。 参考数据由包括用于降低材料处理激光束的功率的调制器的系统产生，以获得探针激光束，以测量位于该位置的多个位置处的半导体晶片的高度，以获得参考高度数据。 计算机基于参考高度数据计算参考曲面。 轨迹计划器基于参考表面产生晶片和激光束的腰部的轨迹。
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2.发明授权Method and system for precisely positioning a waist of a material-processing laser beam to process microstructures within a laser-processing site 有权用于精确定位材料处理激光束的腰部以处理激光加工部位内的微结构的方法和系统公开(公告)号：US07176407B2
公开(公告)日：2007-02-13
申请号：US11114520
申请日：2005-04-26
IPC分类号： B23K26/02
CPC分类号： B23K26/046 , B23K26/02 , B23K26/04 , B23K26/043 , B23K26/0853 , B23K2101/40 , G03F7/70041 , G03F7/70725
摘要： A high-speed method and system for precisely positioning a waist of a material-processing laser beam to dynamically compensate for local variations in height of microstructures located on a plurality of objects spaced apart within a laser-processing site are provided. In the preferred embodiment, the microstructures are a plurality of conductive lines formed on a plurality of memory dice of a semiconductor wafer. The system includes a focusing lens subsystem for focusing a laser beam along an optical axis substantially orthogonal to a plane, an x-y stage for moving the wafer in the plane, and a first air bearing sled for moving the focusing lens subsystem along the optical axis.
摘要翻译： 提供了一种用于精确定位材料处理激光束的腰部以动态地补偿位于激光加工部位内间隔开的多个物体上的微结构的局部高度变化的高速方法和系统。 在优选实施例中，微结构是形成在半导体晶片的多个存储芯片上的多条导线。 该系统包括聚焦透镜子系统，用于沿着基本上垂直于平面的光轴聚焦激光束，用于在平面中移动晶片的x-y级，以及用于沿着光轴移动聚焦透镜子系统的第一空气轴承滑座。
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公开(公告)号：US06744228B1
公开(公告)日：2004-06-01
申请号：US09613833
申请日：2000-07-11
IPC分类号： H01L2168
CPC分类号： H02K41/031 , H02K7/08 , H02K7/14 , H02K16/00 , H02K2201/18
摘要： A high-speed precision positioning apparatus has a stage supported by a platen. The stage is driven by a plurality of drive motors that are co-planar with the stage and arranged symmetrically around the stage. The drive motors apply drive forces directly to the stage without any mechanical contact to the stage. The drive forces impart planar motion to the stage in at least three degrees of freedom of motion. In the remaining three degrees of freedom the motion is constrained by a plurality of fluid bearings that operate between the stage and the platen. The drive motors are configured as magnets, attached to the stage, moving in a gap formed in-between top and bottom stationary coils. Integral force cancellation is implemented by a force cancellation system that applies cancellation forces to the stage. The cancellation forces, which are co-planar with a center of gravity of the stage and any components that move with the stage, cancel forces generated by planar motion of the stage. Interferometric encoders are used as position detectors.
摘要翻译： 高速精密定位装置具有由压板支撑的台架。 舞台由与舞台共面并且围绕舞台对称地布置的多个驱动电动机驱动。 驱动电机将驱动力直接施加到载物台上，而不会与载物台接触。 驱动力以至少三个自由度赋予平台运动。 在剩余的三个自由度中，运动由在台架和压板之间操作的多个流体轴承约束。 驱动电动机被配置为附接到平台的磁体，在形成在顶部和底部固定线圈之间的间隙中移动。 积分力消除由力消除系统实现，该系统将抵消力施加到舞台。 与舞台的重心和与舞台一起移动的任何组件共平行的消除力消除了舞台的平面运动产生的力。 干涉测量编码器用作位置检测器。
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公开(公告)号：US4571718A
公开(公告)日：1986-02-18
申请号：US629875
申请日：1984-07-11
IPC分类号： G11B7/0037 , G11B17/03 , G11B23/03 , G11B7/00
CPC分类号： G11B23/0321 , G11B17/03 , G11B7/0037
摘要： Structure is provided for separately sealing an optical disk cartridge and cooperating apparatus closed when the cartridge and apparatus are not operatively engaged for intended use, and for opening the cartridge and apparatus to each other while jointly closing them from the environment when they are so engaged. The optical disk includes a magnetically attractable hub bearing a compliant annular seal. The disk-containing cartridge is permanently closed except for a central drive-access opening in one wall thereof that is bounded by a circular rim concentrically aligned with the hub seal. Magnetic means on that wall atrract the hub and thereby draw its seal into firm contact with the rim, to seal the opening closed whenever the cartridge is not in use. The cooperating apparatus includes a drive spindle that is bounded by a circular flange also concentrically aligned with the hub seal. Associated mechanism engages the spindle axially with the hub so as to move the flange into contact with the hub seal while moving the seal out of contact with the rim. Encircling the spindle is a resiliently flexible housing member bearing a compliant annular seal concentrically aligned with both the flange and the rim. The housing member is biased toward the flange and rim so as to urge its seal into contact with either the flange, to seal the housing closed whenever the spindle is not engaged with the hub, or the rim, to seal the housing to the cartridge when the spindle is so engaged.
摘要翻译： 提供结构用于在盒和设备未被操作地接合用于预期用途时分开密封光盘盒和协作设备，并且当盒子和设备如此啮合时将盒和设备彼此打开，同时将它们从环境中关闭。 该光盘包括一个带有柔性环形密封件的磁吸引轮毂。 除了在其一个壁中的中心驱动器进入开口外，包含盘的盒被永久关闭，该中心驱动器进入开口由与轮毂密封件同心对准的圆形边缘限定。 该壁上的磁性装置倾斜毂，从而将其密封件与边缘牢固接触，以便在不使用墨盒时密封开口。 配合装置包括驱动心轴，该驱动心轴由圆形凸缘限定，同时与轮毂密封件对齐。 相关联的机构使主轴与轮毂轴向接合，以便使凸缘与轮毂密封件接触，同时使密封件与边缘脱离接触。 围绕主轴的是弹性柔性的壳体构件，其承载与凸缘和轮辋同心对准的柔性环形密封件。 壳体构件被朝向凸缘和边缘偏压，以便促使其密封件与凸缘接触，以便每当主轴不与毂或边缘接合时将壳体密封，以将壳体密封到盒体上 主轴如此啮合。
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5.发明授权公开(公告)号：US07015418B2
公开(公告)日：2006-03-21
申请号：US10438533
申请日：2003-05-15
IPC分类号： B23K26/00
CPC分类号： B23K26/04 , B23K26/042 , B23K26/043 , B23K26/0853 , B23K26/361 , B23K26/40 , B23K26/705 , B23K2101/007 , B23K2101/40 , B23K2103/50 , G06K1/126 , H01C17/242 , H01L21/67282 , H01L21/681 , H01L23/544 , H01L2223/5442 , H01L2223/54453 , H01L2223/54473 , H01L2223/5448 , H01L2924/0002 , H01L2924/00
摘要： A method of calibrating a laser marking system includes calibrating a laser marking system in three dimensions. The step of calibrating includes storing data corresponding to a plurality of heights. A position measurement of a workpiece is obtained to be marked. Stored calibration data is associated with the position measurement. A method and system for calibrating a laser processing or marking system is provided. The method includes: calibrating a laser marker over a marking field; obtaining a position measurement of a workpiece to be marked; associating stored calibration data with the position measurement; relatively positioning a marking beam and the workpiece based on at least the associated calibration data; and calibrating a laser marking system in at least three degrees of freedom. The step of calibrating includes storing data corresponding to a plurality of positions and controllably and relatively positioning a marking beam based on the stored data corresponding to the plurality of positions.
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公开(公告)号：US06949844B2
公开(公告)日：2005-09-27
申请号：US10747552
申请日：2003-12-29
IPC分类号： G01B11/00 , G01B21/00 , G01S17/06 , G05D3/00 , G12B5/00 , H01L21/027 , H01L21/68 , H02K41/03 , H02K21/00
CPC分类号： H02K41/031 , H02K7/08 , H02K7/14 , H02K16/00 , H02K2201/18
摘要： A high-speed precision positioning apparatus has a stage supported by a platen. The stage is driven by a plurality of drive motors that are co-planar with the stage and arranged symmetrically around the stage. The drive motors apply drive forces directly to the stage without any mechanical contact to the stage. The drive forces impart planar motion to the stage in at least three degrees of freedom of motion. In the remaining three degrees of freedom the motion is constrained by a plurality of fluid bearings that operate between the stage and the platen. The drive motors are configured as magnets, attached to the stage, moving in a gap formed in-between top and bottom stationary coils. Integral force cancellation is implemented by a force cancellation system that applies cancellation forces to the stage. The cancellation forces, which are co-planar with a center of gravity of the stage and any components that move with the stage, cancel forces generated by planar motion of the stage. Interferometric encoders are used as position detectors.
摘要翻译： 高速精密定位装置具有由压板支撑的台架。 舞台由与舞台共面并且围绕舞台对称地布置的多个驱动电动机驱动。 驱动电机将驱动力直接施加到载物台上，而不会与载物台接触。 驱动力以至少三个自由度赋予平台运动。 在剩余的三个自由度中，运动由在台架和压板之间操作的多个流体轴承约束。 驱动电动机被配置为附接到平台的磁体，在形成在顶部和底部固定线圈之间的间隙中移动。 积分力消除由力消除系统实现，该系统将抵消力施加到舞台。 与舞台的重心和与舞台一起移动的任何组件共平行的消除力消除了舞台的平面运动产生的力。 干涉测量编码器用作位置检测器。
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7.发明授权Method and system for precisely positioning a waist of a material-processing laser beam to process microstructures within a laser-processing site 有权用于精确定位材料处理激光束的腰部以处理激光加工部位内的微结构的方法和系统公开(公告)号：US06573473B2
公开(公告)日：2003-06-03
申请号：US10001104
申请日：2001-11-02
IPC分类号： B23K2602
CPC分类号： B23K26/046 , B23K26/02 , B23K26/04 , B23K26/043 , B23K26/0853 , B23K2101/40 , G03F7/70041 , G03F7/70725
摘要： A high-speed method and system for precisely positioning a waist of a material-processing laser beam to dynamically compensate for local variations in height of microstructures located on a plurality of objects spaced apart within a laser-processing site are provided. In the preferred embodiment, the microstructures are a plurality of conductive lines formed on a plurality of memory dice of a semiconductor wafer. The system includes a focusing lens subsystem for focusing a laser beam along an optical axis substantially orthogonal to a plane, an x-y stage for moving the wafer in the plane, and a first air bearing sled for moving the focusing lens subsystem along the optical axis.
摘要翻译： 提供了一种用于精确定位材料处理激光束的腰部以动态地补偿位于激光加工部位内间隔开的多个物体上的微结构的局部高度变化的高速方法和系统。 在优选实施例中，微结构是形成在半导体晶片的多个存储芯片上的多个导线。 该系统包括聚焦透镜子系统，用于沿着基本上垂直于平面的光轴聚焦激光束，用于在平面中移动晶片的x-y级，以及用于沿着光轴移动聚焦透镜子系统的第一空气轴承滑座。
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8.发明授权公开(公告)号：US07469831B2
公开(公告)日：2008-12-30
申请号：US11514660
申请日：2006-10-27
IPC分类号： G06K7/10
CPC分类号： G06K1/126 , B23K26/0624 , B23K26/0676 , B23K26/355 , B23K26/361 , B23K26/40 , B23K2103/50 , B33Y80/00 , B41M5/24 , H01L23/544 , H01L2223/54406 , H01L2223/54413 , H01L2223/54426 , H01L2223/54433 , H01L2223/54453 , H05K1/0266 , H05K3/0026
摘要： A laser-based method and system for processing targeted surface material and article produced thereby are provided. The system processes the targeted surface material within a region of a workpiece while avoiding undesirable changes to adjacent non-targeted material. The system includes a primary laser subsystem including a primary laser source for generating a pulsed laser output including at least one pulse having a wavelength and a pulse width less than 1 ns. A delivery subsystem irradiates the targeted surface material of the workpiece with the pulsed laser output including the at least one pulse to texture the targeted surface material. The pulsed laser output has sufficient total fluence to initiate ablation within at least a portion of the targeted surface material and the pulse width is short enough such that the region and the non-targeted material surrounding the material are substantially free of slag.
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公开(公告)号：US06144118A
公开(公告)日：2000-11-07
申请号：US156895
申请日：1998-09-18
IPC分类号： G01B11/00 , G01B21/00 , G01S17/06 , G05D3/00 , G12B5/00 , H01L21/027 , H01L21/68 , H02K41/03 , H01L21/00
CPC分类号： H02K41/031 , H02K16/00 , H02K2201/18 , H02K7/08 , H02K7/14
摘要： A high-speed precision positioning apparatus has a stage supported by a platen. The stage is driven by a plurality of drive motors that are co-planar with the stage and arranged symmetrically around the stage. The drive motors apply drive forces directly to the stage without any mechanical contact to the stage. The drive forces impart planar motion to the stage in at least three degrees of freedom of motion. In the remaining three degrees of freedom the motion is constrained by a plurality of fluid bearings that operate between the stage and the platen. The drive motors are configured as magnets, attached to the stage, moving in a gap formed in-between top and bottom stationary coils. Integral force cancellation is implemented by a force cancellation system that applies cancellation forces to the stage. The cancellation forces, which are co-planar with a center of gravity of the stage and any components that move with the stage, cancel forces generated by planar motion of the stage. Interferometric encoders are used as position detectors.
摘要翻译： 高速精密定位装置具有由压板支撑的台架。 舞台由与舞台共面并且围绕舞台对称地布置的多个驱动电动机驱动。 驱动电机将驱动力直接施加到载物台上，而不会与载物台接触。 驱动力以至少三个自由度赋予平台运动。 在剩余的三个自由度中，运动由在台架和压板之间操作的多个流体轴承约束。 驱动电动机被配置为附接到平台的磁体，在形成在顶部和底部固定线圈之间的间隙中移动。 积分力消除由力消除系统实现，该系统将抵消力施加到舞台。 与舞台的重心和与舞台一起移动的任何组件共平行的消除力消除了舞台的平面运动产生的力。 干涉测量编码器用作位置检测器。
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