公开(公告)号：US08062423B2

公开(公告)日：2011-11-22

申请号：US12153545

申请日：2008-05-21

申请人： Shiow-Jeng Lew

发明人： Shiow-Jeng Lew

IPC分类号： C30B11/02 ,  C30B28/06

CPC分类号： C30B11/003 ,  C30B11/002 ,  C30B29/06 ,  Y10T117/10 ,  Y10T117/1004 ,  Y10T117/1008 ,  Y10T117/1016 ,  Y10T117/1024 ,  Y10T117/1092

摘要： A crystal-growing furnace with a convectional cooling structure includes a furnace body, a heating room, and at least one heater. The heating room is accommodated in the furnace body, and includes an upper partition, a plurality of side partitions, and a lower partition. The upper partition is provided with an upper opening, and the lower partition with a central opening. Further, the heating room is provided with an upper door, a lower door, an upper driver, and a lower driver. When silicon slurry is to be cooled and solidified, cooling gaseous stream flows into a lower portion of the heating room through the central opening. Then the upper opening is opened by the upper door which is driven by the upper driver, so that heated gaseous stream is discharged from the upper opening and flows downward along furnace inside wall, and flows back to the heating room from the central opening. Therefore, an automatic convectional circulating cooling flow field can be formed, such that the silicon slurry can be cooled quickly with time saved and production efficiency improved. Further, in the process of cooling and crystal growing from the silicon slurry, solidification and crystallization start from bottom to upward of the silicon slurry, such that inner stress and corner fracture may not be occurred to the silicon crystal ingots, and that a desirable quality of the silicon crystal ingots can be obtained.

摘要翻译： 具有对流冷却结构的晶体生长炉包括炉体，加热室和至少一个加热器。 加热室容纳在炉体中，并且包括上隔板，多个侧隔板和下隔板。 上隔板设置有上开口，下隔板具有中心开口。 此外，加热室设有上门，下门，上司机和下司机。 当硅浆被冷却和固化时，冷却气流通过中心开口流入加热室的下部。 然后上部开口由上部驱动的上部门打开，使得加热的气体流从上部开口排出并沿炉内壁向下流动，并从中心开口流回到加热室。 因此，可以形成自动对流循环冷却流场，从而能够快速冷却硅浆，并且提高生产效率。 此外，在从硅浆的冷却和晶体生长的过程中，从硅浆的底部向上开始固化和结晶，使得硅晶锭不会发生内应力和角断裂，并且所需质量 的硅晶锭。

公开(公告)号：US20090173277A1

公开(公告)日：2009-07-09

申请号：US12153917

申请日：2008-05-28

申请人： Shiow-Jeng Lew ,  Hur-Lon Lin

发明人： Shiow-Jeng Lew ,  Hur-Lon Lin

IPC分类号： C30B35/00

CPC分类号： C30B35/00 ,  C30B11/003 ,  C30B29/06 ,  Y10S117/90 ,  Y10T117/10 ,  Y10T117/1024 ,  Y10T117/1068

摘要： A cooling structure for the body of a crystal-growing furnace includes an upper body and a lower body. The upper body includes an outer upper shell and an inner upper shell, wherein an upper enclosing space is formed between the outer upper shell and the inner upper shell. The lower body includes an outer lower shell and an inner lower shell, wherein a lower enclosing space is formed between the outer lower shell and the inner lower shell. A plurality of water pipes are arranged, respectively, around the upper and the lower enclosing spaces, wherein plural spraying holes are provided on each of the water pipes. With the help of a pump, water from an outside water source is drawn through the spraying holes of the water pipes so as to cool down the body of the crystal-growing furnace. In adding an exhaust fan, warm air in the upper enclosing spaces can be driven out speedily. Further, in the upper and the lower enclosing spaces there are provided with emergent water pipes for showering more additional water to cool the body of the crystal-growing furnace in case of emergency such that further disaster can be avoided.

摘要翻译： 晶体生长炉体的冷却结构包括上体和下体。 上身包括外上壳体和内上壳体，其中在外上壳体和内上壳体之间形成上封闭空间。 下体包括外下壳体和内下壳体，其中在外下壳体和内下壳体之间形成下封闭空间。 多个水管分别设置在上封闭空间和下封闭空间周围，其中在每个水管上设置有多个喷射孔。 在泵的帮助下，来自外部水源的水通过水管的喷射孔被吸入，以冷却晶体生长炉的主体。 在添加排风扇时，可以快速地将上部封闭空间中的暖风吹出。 此外，在上封闭空间和下封闭空间中，设置有紧急水管，用于在紧急情况下淋浴更多的水以冷却晶体生长炉的主体，从而可以避免进一步的灾难。

公开(公告)号：US08303711B2

公开(公告)日：2012-11-06

申请号：US12219709

申请日：2008-07-28

申请人： Shiow-Jeng Lew ,  Hur-Lon Lin

发明人： Shiow-Jeng Lew ,  Hur-Lon Lin

IPC分类号： C30B15/00 ,  C30B21/06 ,  C30B27/02 ,  C30B28/10 ,  C30B30/04

CPC分类号： F27D11/02 ,  C30B11/003 ,  C30B29/06 ,  C30B35/00 ,  Y10T117/106 ,  Y10T117/1068

摘要： An electrode anchoring structure in a crystal-growing furnace includes at least one graphite electrode pillar, at least one metal electrode pillar, at least one anchoring base, and at least one locking nut, wherein the graphite electrode pillar is engaged with a nut base of the metal electrode pillar, and the at least one metal electrode pillar is, through the anchoring base, is secured to furnace wall. Therefore, the at least one graphite electrode pillar acts both as weight support and electrical-conducting electrode. Since the flange welded on furnace wall has a greater area exposed to the atmosphere, a desirable cooling effect can be achieved, and temperature drop can be expedited if water spray is performed. The anchoring base is provided with a resilient washer, such that a resilient force can be employed to adjust loading of each graphite electrode pillar in an axial direction.

摘要翻译： 晶体生长炉中的电极锚定结构包括至少一个石墨电极柱，至少一个金属电极柱，至少一个锚固底座和至少一个锁定螺母，其中石墨电极柱与螺母基座 金属电极柱和至少一个金属电极柱通过锚固基底固定在炉壁上。 因此，至少一个石墨电极柱作为重量支撑体和导电电极。 由于焊接在炉壁上的法兰具有暴露于大气中的较大面积，因此可以实现理想的冷却效果，并且如果进行喷水即可加快温度下降。 锚定基座设置有弹性垫圈，使得可以采用弹性力来调节每个石墨电极柱在轴向方向上的负载。

公开(公告)号：US07604698B2

公开(公告)日：2009-10-20

申请号：US12153917

申请日：2008-05-28

申请人： Shiow-Jeng Lew ,  Hur-Lon Lin

发明人： Shiow-Jeng Lew ,  Hur-Lon Lin

IPC分类号： C30B35/00

CPC分类号： C30B35/00 ,  C30B11/003 ,  C30B29/06 ,  Y10S117/90 ,  Y10T117/10 ,  Y10T117/1024 ,  Y10T117/1068

摘要： A cooling structure for the body of a crystal-growing furnace includes an upper body and a lower body. The upper body includes an outer upper shell and an inner upper shell, wherein an upper enclosing space is formed between the outer upper shell and the inner upper shell. The lower body includes an outer lower shell and an inner lower shell, wherein a lower enclosing space is formed between the outer lower shell and the inner lower shell. A plurality of water pipes are arranged, respectively, around the upper and the lower enclosing spaces, wherein plural spraying holes are provided on each of the water pipes. With the help of a pump, water from an outside water source is drawn through the spraying holes of the water pipes so as to cool down the body of the crystal-growing furnace. In adding an exhaust fan, warm air in the upper enclosing spaces can be driven out speedily. Further, in the upper and the lower enclosing spaces there are provided with emergent water pipes for showering more additional water to cool the body of the crystal-growing furnace in case of emergency such that further disaster can be avoided.

摘要翻译： 晶体生长炉体的冷却结构包括上体和下体。 上身包括外上壳体和内上壳体，其中在外上壳体和内上壳体之间形成上封闭空间。 下体包括外下壳体和内下壳体，其中在外下壳体和内下壳体之间形成下封闭空间。 多个水管分别设置在上封闭空间和下封闭空间周围，其中在每个水管上设置有多个喷射孔。 在泵的帮助下，来自外部水源的水通过水管的喷射孔被吸入，以冷却晶体生长炉的主体。 在添加排风扇时，可以快速地将上部封闭空间中的暖风吹出。 此外，在上封闭空间和下封闭空间中，设置有紧急水管，用于在紧急情况下淋浴更多的水以冷却晶体生长炉的主体，从而可以避免进一步的灾难。

公开(公告)号：US08066814B2

公开(公告)日：2011-11-29

申请号：US12153916

申请日：2008-05-28

申请人： Shiow-Jeng Lew ,  Hur-Lon Lin

发明人： Shiow-Jeng Lew ,  Hur-Lon Lin

IPC分类号： C30B11/00

CPC分类号： C30B11/002 ,  C30B28/06 ,  C30B29/06 ,  C30B35/002 ,  Y10T117/1004 ,  Y10T117/1008 ,  Y10T117/1024

摘要： A crystal-growing furnace having a slurry drainage duct structure includes a furnace body, a supporting table, a loading frame, a plurality of eaves elements, and a set of eaves gutters. The supporting table includes a table plate and a plurality of supporting posts. The loading frame includes a lower plate and four side plates, where four elongated eaves boards descend from sides of the lower plate. Four eaves gutters, having V-shaped grooves, are connected with one another and disposed beneath the four eaves elements correspondingly. Any high-temperature silicon slurry leaks from a furnace crucible will be guided by the elongated eaves boards into the V-shaped grooves of the eaves gutters to prevent the silicon slurry from flowing along the periphery of the table plate and down to the supporting posts.

摘要翻译： 具有浆料排出管道结构的晶体生长炉包括炉体，支撑台，装载框架，多个屋檐元件和一组檐槽。 支撑台包括台板和多个支撑柱。 装载框架包括下板和四个侧板，其中四个细长的屋檐板从下板的侧面下降。 具有V形槽的四个檐槽相互连接并且相应地设置在四个屋檐元件之下。 来自炉坩埚的任何高温硅浆泄漏将由细长的屋檐板引导到檐槽的V形槽中，以防止硅泥浆沿着台板的周边流动并向下流到支撑柱。

公开(公告)号：US07971836B2

公开(公告)日：2011-07-05

申请号：US12155031

申请日：2008-05-29

申请人： Shiow-Jeng Lew ,  Hur-Lon Lin

发明人： Shiow-Jeng Lew ,  Hur-Lon Lin

IPC分类号： A47B91/00 ,  C30B15/00 ,  H05B3/62

CPC分类号： C30B35/00 ,  C30B11/003 ,  C30B15/14 ,  C30B19/08 ,  Y10T117/10 ,  Y10T117/106 ,  Y10T117/1068

摘要： A supporting table having heaters inside a crystal-growing furnace includes a table plate and a plurality of supporting posts, wherein the supporting posts support the table plate and are, respectively, electrically connected with the heaters. Each supporting post includes, among others, a graphite electrode post, a metal electrode post, and an anchoring base. The supporting posts are each with its graphite electrode post screwed to a nut portion of the metal electrode post, and with the metal electrode post fixed to a wall of the crystal-growing furnace. The anchoring base includes, among others, a flange and an elastic washer, where the flange is welded to the wall of the furnace, and with the help of elasticity adjustment of the elastic washer, the supporting table can bear an equal distribution of loading from the supporting posts. To distribute weight of the supporting table and to stably secure the supporting table on the wall of the crystal-growing furnace will make a crucible in the furnace not easy to fall down so as to avoid incurring of public casualty. Further, to thin the table plate of the supporting table will facilitate a uniform transfer of heat to the crucible, and will facilitate a uniform crystal growth for silicon slurry when the crucible is cooled.

摘要翻译： 在晶体生长炉内部具有加热器的支撑台包括台板和多个支撑柱，其中支撑柱支撑台板并分别与加热器电连接。 每个支撑柱包括石墨电极柱，金属电极柱和锚固基座。 每个支撑柱的石墨电极柱都拧入金属电极柱的螺母部分，金属电极柱固定在晶体生长炉的壁上。 锚固基座尤其包括凸缘和弹性垫圈，其中凸缘焊接到炉壁上，并且借助于弹性垫圈的弹性调节，支撑台可承受相等的负载分配 支持岗位。 为了分配支撑台的重量并将支撑台稳定地固定在晶体生长炉的壁上将使炉中的坩埚不容易掉落，以免引起公共事故。 此外，为了使支撑台的台板变薄，将有助于将热量均匀地传递到坩埚，并且当坩埚被冷却时，将促进硅浆料的均匀的晶体生长。

公开(公告)号：US20090188426A1

公开(公告)日：2009-07-30

申请号：US12222078

申请日：2008-08-01

申请人： Shiow-Jeng Lew ,  Hur-Lon Lin

发明人： Shiow-Jeng Lew ,  Hur-Lon Lin

IPC分类号： C30B35/00

CPC分类号： C30B11/003 ,  C30B11/002 ,  C30B28/06 ,  C30B29/06 ,  Y10T117/1024

摘要： A crystal-growing furnace with a heating improvement structure includes a furnace body, a supporting table, a top heater, and a bottom heater. When the silicon material around the top heater is melted, molten silicon slurry will flow directly into the spacing among particles of the silicon material. This will expedite internal part of the silicon material to absorb energy. As a result, a desirable cycle will be established to expedite melting the whole silicon material in the crucible. The crucible is heated at the bottom thereof by the bottom heater directly so as to enhance efficiency in melting the silicon material in the crucible, and to save energy and time consumed by the crystal-growing furnace. Further, since both of the top and the bottom heaters are symmetrical with one another, the crucible can be heated uniformly. This not only saves energy and makes the heating job convenient, but also saves cost in manufacture.

摘要翻译： 具有加热改善结构的晶体生长炉包括炉体，支撑台，顶部加热器和底部加热器。 当顶部加热器周围的硅材料熔化时，熔融的硅浆料将直接流入硅材料颗粒之间的间隔。 这将加速硅材料的内部部分吸收能量。 结果，将建立一个理想的循环，以加速熔化坩埚中的整个硅材料。 坩埚通过底部加热器直接在其底部被加热，以提高坩埚中的硅材料的熔化效率，并节省了晶体生长炉所消耗的能量和时间。 此外，由于顶部和底部加热器都彼此对称，所以可以均匀地加热坩埚。 这不仅节省能源，而且使加热工作方便，而且节省了制造成本。

公开(公告)号：US20090175767A1

公开(公告)日：2009-07-09

申请号：US12153916

申请日：2008-05-28

申请人： Shiow-Jeng Lew ,  Hur-Lon Lin

发明人： Shiow-Jeng Lew ,  Hur-Lon Lin

IPC分类号： G05D23/00 ,  B01D9/00

CPC分类号： C30B11/002 ,  C30B28/06 ,  C30B29/06 ,  C30B35/002 ,  Y10T117/1004 ,  Y10T117/1008 ,  Y10T117/1024

摘要： A crystal-growing furnace having a slurry drainage duct structure includes a furnace body, a supporting table, a loading frame, a plurality of eaves elements, and a set of eaves gutters. The supporting table includes a table plate and a plurality of supporting posts. The loading frame includes a lower plate and four side plates, where four elongated eaves boards descend from sides of the lower plate. Four eaves gutters, having V-shaped grooves, are connected with one another and disposed beneath the four eaves elements correspondingly. Therefore, in case high-temperature silicon slurry leaks and drains from a crucible of the crystal-growing furnace, the silicon slurry will first be guided and flows along the elongated eaves boards and down into V-shaped grooves of the eaves gutters so as to prevent the silicon slurry from flowing along periphery of the table plate and down to the supporting posts, such that the supporting posts will not be broken and the crucible not fall down and the silicon slurry not flood. A receiving pan is additionally provided, at a lower body of the furnace body, for containing a great amount of the leaking silicon slurry so as to block the silicon slurry from flowing close to the supporting posts. This will protect the supporting posts from being damaged, and will prevent torsion and deformation incurred to the lower body due to impact of heat by the molten silicon slurry.

摘要翻译： 具有浆料排出管道结构的晶体生长炉包括炉体，支撑台，装载框架，多个屋檐元件和一组檐槽。 支撑台包括台板和多个支撑柱。 装载框架包括下板和四个侧板，其中四个细长的屋檐板从下板的侧面下降。 具有V形槽的四个檐槽相互连接并且相应地设置在四个屋檐元件之下。 因此，如果高温硅浆从晶体生长炉的坩埚泄漏并排出，则首先将硅浆引导并沿着细长的屋檐板流动并且下降到檐槽的V形槽中，以便 防止硅浆料流向台板的周边并向下流到支撑柱，使得支柱不会破裂，并且坩埚不会掉落，硅浆料不会流入。 另外在炉体的下体部设置容纳盘，用于容纳大量的硅浆泄漏，以便阻止硅浆料靠近支撑柱流动。 这样可以防止支撑柱受到损伤，并且防止由于熔融硅浆料的热量的冲击而引起的下体的扭转和变形。

公开(公告)号：US20090173275A1

公开(公告)日：2009-07-09

申请号：US12155031

申请日：2008-05-29

申请人： Shiow-Jeng Lew ,  Hur-Lon Lin

发明人： Shiow-Jeng Lew ,  Hur-Lon Lin

IPC分类号： F16M11/00

CPC分类号： C30B35/00 ,  C30B11/003 ,  C30B15/14 ,  C30B19/08 ,  Y10T117/10 ,  Y10T117/106 ,  Y10T117/1068

摘要： A supporting table having heaters inside a crystal-growing furnace includes a table plate and a plurality of supporting posts, wherein the supporting posts support the table plate and are, respectively, electrically connected with the heaters. Each supporting post includes, among others, a graphite electrode post, a metal electrode post, and an anchoring base. The supporting posts are each with its graphite electrode post screwed to a nut portion of the metal electrode post, and with the metal electrode post fixed to a wall of the crystal-growing furnace. The anchoring base includes, among others, a flange and an elastic washer, where the flange is welded to the wall of the furnace, and with the help of elasticity adjustment of the elastic washer, the supporting table can bear an equal distribution of loading from the supporting posts. To distribute weight of the supporting table and to stably secure the supporting table on the wall of the crystal-growing furnace will make a crucible in the furnace not easy to fall down so as to avoid incurring of public casualty. Further, to thin the table plate of the supporting table will facilitate a uniform transfer of heat to the crucible, and will facilitate a uniform crystal growth for silicon slurry when the crucible is cooled.

摘要翻译： 在晶体生长炉内部具有加热器的支撑台包括台板和多个支撑柱，其中支撑柱支撑台板并分别与加热器电连接。 每个支撑柱包括石墨电极柱，金属电极柱和锚固基座。 每个支撑柱的石墨电极柱都拧入金属电极柱的螺母部分，金属电极柱固定在晶体生长炉的壁上。 锚固基座尤其包括凸缘和弹性垫圈，其中凸缘焊接到炉壁上，并且借助于弹性垫圈的弹性调节，支撑台可承受相等的负载分配 支持岗位。 为了分配支撑台的重量并将支撑台稳定地固定在晶体生长炉的壁上将使炉中的坩埚不容易掉落，以免引起公共事故。 此外，为了使支撑台的台板变薄，将有助于将热量均匀地传递到坩埚，并且当坩埚被冷却时，将促进硅浆料的均匀的晶体生长。

公开(公告)号：US08101022B2

公开(公告)日：2012-01-24

申请号：US12219711

申请日：2008-07-28

申请人： Shiow-Jeng Lew ,  Hur-Lon Lin

发明人： Shiow-Jeng Lew ,  Hur-Lon Lin

IPC分类号： C30B15/00 ,  C30B21/06 ,  C30B27/02 ,  C30B28/10 ,  C30B30/04

CPC分类号： C30B35/00 ,  Y10T117/1016 ,  Y10T117/1024 ,  Y10T117/1068 ,  Y10T117/1072

摘要： A crystal-growing furnace system with an emergent pressure-release arrangement includes an isolated chamber and a furnace upper body. The top board is provided with an opening and three first guides, and the furnace upper body with a lower opening and three second guides, wherein the lower opening of the furnace upper body covers, correspondingly, on the opening of the top board. In case a crystal-growing furnace, combined oppositely by the furnace upper body and the furnace lower body, has an over-high internal pressure, the pressure will overcome the weight of, and lift up the furnace upper body. At this moment, the furnace upper body will slightly move upward and away from enclosing the furnace lower body, so that the over-high internal pressure in the furnace will be released immediately to prevent the furnace from being exploded and from resulting in public accidents.

摘要翻译： 具有紧急压力释放装置的晶体生长炉系统包括隔离室和炉上体。 顶板设置有开口和三个第一引导件，炉上部具有下开口和三个第二引导件，其中炉上体的下开口相应地覆盖在顶板的开口上。 如果结晶生长炉与炉体上部和炉体相反地组合，则内部压力过高，则压力将克服炉体的重量并提升炉体。 此时炉子上部稍微向上移动并远离包围炉体，从而立即释放炉内过高的内压，防止炉子爆炸，并引起公共事故。