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24 条记录 (耗时 0.017 秒)

    Force sensor with attached mass
    1.
    发明授权
    Force sensor with attached mass 失效
    强力传感器附带质量

    公开(公告)号：US4891985A

    公开(公告)日：1990-01-09

    申请号：US920899

    申请日：1986-10-16

    申请人： Max C. Glenn

    发明人： Max C. Glenn

    IPC分类号： G01L1/18 ,  G01P15/08 ,  G01P15/09 ,  G01P15/12

    CPC分类号： G01P15/0802 ,  G01L1/18 ,  G01P15/0922 ,  G01P15/123

    摘要： A sensor comprising a die having a sensing portion. The sensor further comprises apparatus for enhancing the sensitivity of the sensing portion, the apparatus for enhancing comprising a mass rigidly attached to a portion of the die. The sensor also comprises two mechanical stops. One stop includes a portion of the die, and the other stop is rigidly spaced away from the die. Movement of the mass is limited by the two stops.

    摘要翻译： 一种传感器，包括具有感测部分的模具。 传感器还包括用于提高感测部分的灵敏度的装置，该增强装置包括刚性地连接到模具的一部分的质量。 传感器还包括两个机械止动件。 一个止动件包括模具的一部分，另一个止动件与模具刚性地间隔开。 质量的运动受到两站的限制。

    Chip packaging systems and methods
    2.
    发明授权
    Chip packaging systems and methods 有权
    芯片封装系统和方法

    公开(公告)号：US07314777B2

    公开(公告)日：2008-01-01

    申请号：US10988799

    申请日：2004-11-15

    申请人： Jon B. DCamp ,  Harlan L. Curtis ,  Lori A. Dunaway ,  Max C. Glenn

    发明人： Jon B. DCamp ,  Harlan L. Curtis ,  Lori A. Dunaway ,  Max C. Glenn

    IPC分类号： H01L21/50 ,  H01L21/48 ,  H01L21/44 ,  H01L23/12 ,  H05K3/30

    CPC分类号： B81C1/00333 ,  H01L21/50 ,  H01L21/67121 ,  H01L21/67126 ,  Y10T29/53178 ,  Y10T29/53183

    摘要： An automated process for performing MEMS packaging including automatically attaching a die to a chip carrier, resulting in a chip carrier assembly, automatically moving the chip carrier assembly into a vacuum chamber, wherein the vacuum chamber includes one or more lids therein, automatically securing a lid to the chip carrier assembly within the vacuum chamber, thereby forming a packaged die, and automatically removing the packaged die from the vacuum chamber. Unique vacuum chambers suitable for MEMS packaging are also disclosed.

    摘要翻译： 一种用于执行MEMS封装的自动化过程，包括将芯片自动附接到芯片载体，导致芯片载体组件，自动将芯片载体组件移动到真空室中，其中真空室包括一个或多个盖，自动固定盖 到真空室内的芯片载体组件，从而形成封装的模具，并自动从真空室中移除封装的模具。 还公开了适用于MEMS封装的独特真空室。

    Methods and apparatus for particle reduction in MEMS devices
    3.
    发明授权
    Methods and apparatus for particle reduction in MEMS devices 失效
    MEMS器件中颗粒减少的方法和装置

    公开(公告)号：US07297573B2

    公开(公告)日：2007-11-20

    申请号：US11280040

    申请日：2005-11-16

    申请人： Jon B. DCamp ,  Harlan L. Curtis ,  Lori A. Dunaway ,  Max C. Glenn

    发明人： Jon B. DCamp ,  Harlan L. Curtis ,  Lori A. Dunaway ,  Max C. Glenn

    IPC分类号： H01L23/12

    CPC分类号： B81B7/0038 ,  G01C19/5719 ,  G01P1/023

    摘要： A method for assembling a micro-electromechanical system (MEMS) device that includes a micro-machine is described. The method comprises forming the micro-machine on a die, the die having a top surface and a bottom surface, providing a plurality of die bonding pedestals on a surface of a housing, and mounting at least one of the top surface of the die and components of the micro-machine to the die bonding pedestals such that a bottom surface of the die at least partially shields components of the micro-machine from loose gettering material.

    摘要翻译： 描述了一种用于组装包括微型机器的微机电系统（MEMS）装置的方法。 该方法包括在模具上形成微机器，模具具有顶表面和底表面，在壳体的表面上提供多个芯片接合基座，并且安装模具的顶表面中的至少一个和 微型机器的组件到模具接合基座，使得模具的底表面至少部分地将微机器的部件屏蔽松散的吸气材料。

    Pressure transducer
    6.
    发明授权
    Pressure transducer 失效
    压力传感器

    公开(公告)号：US4665754A

    公开(公告)日：1987-05-19

    申请号：US721106

    申请日：1985-04-08

    申请人： Max C. Glenn ,  Raymond F. McMullen ,  David B. Wamstad

    发明人： Max C. Glenn ,  Raymond F. McMullen ,  David B. Wamstad

    IPC分类号： G01L9/00 ,  G01L9/06

    CPC分类号： G01L19/0084 ,  G01L19/0038 ,  G01L9/0054 ,  Y10T29/49103

    摘要： Disclosed is a pressure transducer comprising a pressure sensitive silicon die having a front side exposing piezoresistive means and a back side for receiving pressure from a pressure medium. The transducer further comprises a pressure vessel having an aperture and apparatus including a hermetic seal for mounting the die with the front side of the die facing the aperture. In this manner, the die is compressed toward the pressure vessel when positive pressure is applied to the back side of the die by the pressure medium.

    摘要翻译： 公开了一种压力传感器，其包括具有正面暴露压阻装置的压敏硅模具和用于从压力介质接收压力的背面。 换能器还包括具有孔和压力容器，压力容器包括用于将模具安装在模具的前侧面上的气密密封件。 以这种方式，当通过压力介质将正压力施加到模具的背面时，模具被压向压力容器。

    Methods and systems for simultaneously fabricating multi-frequency MEMS devices
    7.
    发明授权
    Methods and systems for simultaneously fabricating multi-frequency MEMS devices 失效
    同时制造多频MEMS器件的方法和系统

    公开(公告)号：US06978673B2

    公开(公告)日：2005-12-27

    申请号：US10360962

    申请日：2003-02-07

    申请人： Burgess R. Johnson ,  Max C. Glenn ,  William P. Platt ,  David K. Arch ,  Mark W. Weber

    发明人： Burgess R. Johnson ,  Max C. Glenn ,  William P. Platt ,  David K. Arch ,  Mark W. Weber

    IPC分类号： G01C19/5656 ,  G01P9/04

    CPC分类号： G01C19/5656 ,  G01R33/0286

    摘要： A method for providing micro-electromechanical systems (MEMS) devices with multiple motor frequencies and uniform motor-sense frequency separation is described. The devices each include at least one proof mass, each proof mass being connected to a substrate by a system of suspensions. The method includes controlling the resonant frequencies of the MEMS device by adjusting at least two of a mass of the proof masses, a bending stiffness of the proof masses, a length of the suspensions, and a width of the suspensions.

    摘要翻译： 描述了一种用于提供具有多个电动机频率和均匀的电动机感测频率间隔的微机电系统（MEMS）装置的方法。 这些装置各自包括至少一个检验质量块，每个检验质量块通过悬浮系统连接到基底。 该方法包括通过调节质量块，质量块的弯曲刚度，悬架的长度和悬架的宽度中的至少两个来控制MEMS装置的谐振频率。

    High-G acceleration protection by caging
    9.
    发明授权
    High-G acceleration protection by caging 失效

    公开(公告)号：US06782748B2

    公开(公告)日：2004-08-31

    申请号：US10292785

    申请日：2002-11-12

    申请人： Mark W. Weber ,  William A. Harris ,  Max C. Glenn

    发明人： Mark W. Weber ,  William A. Harris ,  Max C. Glenn

    IPC分类号： G01P1510

    CPC分类号： B81B7/0012 ,  G01C19/5719 ,  G01P15/08 ,  G01P15/097 ,  G01P2015/0814

    摘要： For use in a MEMS device having a suspended proof mass, a method and apparatus for securing the MEMS device during a period of high acceleration. The method may include applying a DC voltage between the proof mass and a non-suspended structure of the device. The non-suspended structure may be mounted on a substrate, and the substrate or the non-suspended structure may be electrically isolated from the proof mass by an insulating layer or by one or more islands. Applying the DC voltage creates an electrostatic force that moves the proof mass toward (or holds the proof mass near) the substrate. Movement of the proof mass may be limited by mechanical contact between the proof mass and the insulating layer, the one or more islands, or by a cage mounted on the substrate during the period of high acceleration.

    Multiple level miniature electromechanical accelerometer switch
    10.
    发明授权
    Multiple level miniature electromechanical accelerometer switch 失效
    多级微型机电加速度计开关

    公开(公告)号：US4855544A

    公开(公告)日：1989-08-08

    申请号：US239482

    申请日：1988-09-01

    申请人： Max C. Glenn

    发明人： Max C. Glenn

    IPC分类号： G01P15/08 ,  G01P15/135 ,  H01H1/00 ,  H01H35/14

    CPC分类号： H01H35/14 ,  G01P15/0802 ,  G01P15/135 ,  H01H1/0036 ,  G01P2015/0828

    摘要： An accelerometer switch which has cantilever beams carrying integral end masses formed in a silicon die which is sandwiched between a contact plate and a support plate. Each beam provides switching at a different threshold acceleration level. The fixed contact face of the contact plate is configured with a relief space to permit accelerometer switch operation even though the input acceleration is off-normal and there is twisting of the accelerometer beam.

    摘要翻译： 一种加速度计开关，其具有承载在硅模中形成的整体端块的悬臂梁，该芯片夹在接触板和支撑板之间。 每个波束提供不同阈值加速度级别的切换。 接触板的固定接触面配置有释放空间，以允许加速度计切换操作，即使输入加速度不正常并且加速度计束扭转。