Invention Grant
- Patent Title: Methods and systems for simultaneously fabricating multi-frequency MEMS devices
- Patent Title (中): 同时制造多频MEMS器件的方法和系统
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Application No.: US10360962Application Date: 2003-02-07
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Publication No.: US06978673B2Publication Date: 2005-12-27
- Inventor: Burgess R. Johnson , Max C. Glenn , William P. Platt , David K. Arch , Mark W. Weber
- Applicant: Burgess R. Johnson , Max C. Glenn , William P. Platt , David K. Arch , Mark W. Weber
- Applicant Address: US NJ Morristown
- Assignee: Honeywell International, Inc.
- Current Assignee: Honeywell International, Inc.
- Current Assignee Address: US NJ Morristown
- Agency: Armstrong Teasdale LLP
- Agent Andrew Abeyta, Esq.
- Main IPC: G01C19/5656
- IPC: G01C19/5656 ; G01P9/04
Abstract:
A method for providing micro-electromechanical systems (MEMS) devices with multiple motor frequencies and uniform motor-sense frequency separation is described. The devices each include at least one proof mass, each proof mass being connected to a substrate by a system of suspensions. The method includes controlling the resonant frequencies of the MEMS device by adjusting at least two of a mass of the proof masses, a bending stiffness of the proof masses, a length of the suspensions, and a width of the suspensions.
Public/Granted literature
- US20040154400A1 Methods and systems for simultaneously fabricating multi-frequency MEMS devices Public/Granted day:2004-08-12
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