公开(公告)号：US06182675B2

公开(公告)日：2001-02-06

申请号：US09030818

申请日：1998-02-26

Applicant: Jiro Naka ,  Naohiko Fujino ,  Noriko Hirano ,  Junji Kobayashi ,  Kazuo Kuramoto

Inventor： Jiro Naka ,  Naohiko Fujino ,  Noriko Hirano ,  Junji Kobayashi ,  Kazuo Kuramoto

IPC: B08B302

CPC classification number: H01L21/67057 ,  H01L21/67051 ,  H01L22/12 ,  Y10S134/902

Abstract: A method for recovering impurities on a surface of a silicon wafer includes a first step of using a pretreatment solution to decompose an oxide film, a nitride film on an oxynitridation film formed at a peripheral portion on a surface of a silicon wafer and to remove impurities on the peripheral portion and a second step of recovering impurities on the surface of the wafer expect for the peripheral portion.

Abstract translation: 在硅晶片的表面上回收杂质的方法包括使用预处理溶液分解氧化膜的第一步骤，形成在硅晶片表面的周边部分上的氧氮化膜上的氮化物膜和除去杂质 并且在周边部分期望回收晶片表面上的杂质的第二步骤。

公开(公告)号：US6110291A

公开(公告)日：2000-08-29

申请号：US689313

申请日：1996-08-07

Applicant: Kenyu Haruta ,  Koichi Ono ,  Hitoshi Wakata ,  Mutsumi Tsuda ,  Yoshio Saito ,  Keisuke Nanba ,  Kazuyoshi Kojima ,  Tetsuya Takami ,  Akihiro Suzuki ,  Tomohiro Sasagawa ,  Kenichi Kuroda ,  Toshiyuki Oishi ,  Yukihiko Wada ,  Akihiko Furukawa ,  Yasuji Matsui ,  Akimasa Yuki ,  Takaaki Kawahara ,  Hideki Yabe ,  Taisuke Furukawa ,  Kouji Kise ,  Noboru Mikami ,  Tsuyoshi Horikawa ,  Tetsuo Makita ,  Kazuo Kuramoto ,  Naohiko Fujino ,  Hiroshi Kuroki ,  Tetsuo Ogama ,  Junji Tanimura

Inventor： Kenyu Haruta ,  Koichi Ono ,  Hitoshi Wakata ,  Mutsumi Tsuda ,  Yoshio Saito ,  Keisuke Nanba ,  Kazuyoshi Kojima ,  Tetsuya Takami ,  Akihiro Suzuki ,  Tomohiro Sasagawa ,  Kenichi Kuroda ,  Toshiyuki Oishi ,  Yukihiko Wada ,  Akihiko Furukawa ,  Yasuji Matsui ,  Akimasa Yuki ,  Takaaki Kawahara ,  Hideki Yabe ,  Taisuke Furukawa ,  Kouji Kise ,  Noboru Mikami ,  Tsuyoshi Horikawa ,  Tetsuo Makita ,  Kazuo Kuramoto ,  Naohiko Fujino ,  Hiroshi Kuroki ,  Tetsuo Ogama ,  Junji Tanimura

IPC: C23C14/02 ,  C23C14/08 ,  C23C14/22 ,  C23C14/28 ,  C23C14/34 ,  C23C14/54 ,  C23C14/56 ,  C23C14/00

CPC classification number: C23C14/087 ,  C23C14/022 ,  C23C14/22 ,  C23C14/28 ,  C23C14/3471 ,  C23C14/54 ,  C23C14/541 ,  C23C14/547 ,  C23C14/564 ,  Y10S505/732

Abstract: A thin film forming apparatus using laser includes a chamber (1), a target (5) placed therein, a laser light source (10) for emitting laser beam to target (5), and a substrate holder (3). When target (5) is irradiated with laser beam (16), a plume (15) is generated, and materials included in plume (15) are deposited on the surface of a substrate (2) held by substrate holder (3). The laser beam emitted from laser light source (10) has its cross section shaped to a desired shape when passed through a shielding plate (4804), for example, so that the surface of the target (5) is irradiated with the beam having uniform light intensity distribution. Therefore, a plume (15) having uniform density distribution of active particles is generated, and therefore a thin film of high quality can be formed over a wide area with uniform film quality, without damaging the substrate.

公开(公告)号：US5517027A

公开(公告)日：1996-05-14

申请号：US254771

申请日：1994-06-06

Applicant: Yoshitsugu Nakagawa ,  Fusami Soeda ,  Naohiko Fujino ,  Isamu Karino ,  Osamu Wada ,  Hiroshi Kurokawa ,  Koichiro Hori ,  Nobuyoshi Hattori ,  Masahiro Sekine ,  Masashi Ohmori ,  Kazuo Kuramoto ,  Junji Kobayashi

Inventor： Yoshitsugu Nakagawa ,  Fusami Soeda ,  Naohiko Fujino ,  Isamu Karino ,  Osamu Wada ,  Hiroshi Kurokawa ,  Koichiro Hori ,  Nobuyoshi Hattori ,  Masahiro Sekine ,  Masashi Ohmori ,  Kazuo Kuramoto ,  Junji Kobayashi

IPC: G01B7/34 ,  G01N21/88 ,  G01N21/94 ,  G01N27/00 ,  G01Q10/00 ,  G01Q20/02 ,  G01Q30/04 ,  G01Q30/06 ,  G01Q60/10 ,  G01Q60/24 ,  H01J37/00

CPC classification number: G01Q20/02 ,  B82Y35/00 ,  G01N21/94 ,  G01Q30/06 ,  Y10S977/868

Abstract: Method for detecting and examining a slightly irregular surface state is provided which includes the steps of: illuminating a surface of a sample with light beam for detecting the slightly irregular surface state; observing a variation of the light beam occurring due to the slightly irregular surface state to specify the location of the slightly irregular surface state in an x-y plane of the sample; making the location of a probe needle of a scanning probe microscope and the location of the slightly irregular surface state on the sample coincide with each other; and measuring a three-dimensional image of the slightly irregular surface state by means of the scanning probe microscope. The scanning probe microscope for use in the aforementioned method and a method for fabricating a semiconductor device or a liquid crystal display device which utilizes the aforementioned method are also provided.

Abstract translation: 提供了用于检测和检查稍微不规则的表面状态的方法，其包括以下步骤：用光束照射样品的表面以检测稍微不规则的表面状态; 观察由于略微不规则的表面状态而发生的光束的变化，以指定样品的x-y平面中略微不规则的表面状态的位置; 使扫描探针显微镜的探针的位置和样品上稍微不规则的表面状态的位置相互重合; 并通过扫描探针显微镜测量稍微不规则表面状态的三维图像。 还提供了用于上述方法的扫描探针显微镜以及利用上述方法制造半导体器件或液晶显示器件的方法。

公开(公告)号：US5318653A

公开(公告)日：1994-06-07

申请号：US906691

申请日：1992-06-30

Applicant: Yukari Toide ,  Kazuhiko Tsutsumi ,  Motohisa Taguchi ,  Kazuo Kuramoto ,  Masaru Tsuchihashi

Inventor： Yukari Toide ,  Kazuhiko Tsutsumi ,  Motohisa Taguchi ,  Kazuo Kuramoto ,  Masaru Tsuchihashi

IPC: B29C65/48 ,  G11B7/252 ,  G11B7/26 ,  B32B31/04 ,  G11B5/66

CPC classification number: B29C65/7847 ,  B29C65/483 ,  B29C65/485 ,  B29C66/452 ,  B29C66/83221 ,  B32B38/18 ,  G11B7/252 ,  G11B7/26 ,  B29C65/4815 ,  B29C65/484 ,  B29C65/4845 ,  B29C66/71 ,  B29C66/73921 ,  B29K2995/0032 ,  B29L2017/005 ,  B32B2309/06 ,  B32B2429/02 ,  Y10S428/90

Abstract: An optical disc comprises two facing disc units, at least one of which has a recording layer formed on its surface facing to the other disc unit. The disc units are bonded together by a layer of adhesive which may be a room-temperature curing thermosetting adhesive having a glass transition temperature higher than the upper limit of the range of temperatures of environments in which the disc may be used. Alternatively, the adhesive may be a room-temperature curing two-pack epoxy adhesive which comprises a bisphenol epoxy resin base agent and a modified aliphatic polyamine curing agent, and which has a viscosity of 100-1000 cps, a pot life of one hour or more, a cure shrinkage of 1.0% or less, a water absorption, after curing, of 0.2% or less, and a Shore hardness, after curing, of 80-90.

Abstract translation: 光盘包括两个相对的盘单元，其中至少一个具有形成在其面对另一个盘单元的表面上的记录层。 圆盘单元通过一层粘合剂粘合在一起，粘合剂层可以是玻璃化转变温度高于可以使用该盘的环境温度范围的上限的室温固化热固性粘合剂。 或者，粘合剂可以是包含双酚环氧树脂基剂和改性脂族多胺固化剂的室温固化双组分环氧粘合剂，其粘度为100-1000cps，适用期为1小时或 更优选为固化后的固化收缩率为1.0％以下，固化后的吸水率为0.2％以下，固化后的肖氏硬度为80〜90。

公开(公告)号：US5540967A

公开(公告)日：1996-07-30

申请号：US320571

申请日：1994-10-11

Applicant: Yukari Toide ,  Kazuhiko Tsutsumi ,  Motohisa Taguchi ,  Kazuo Kuramoto ,  Masaru Tsuchihashi

Inventor： Yukari Toide ,  Kazuhiko Tsutsumi ,  Motohisa Taguchi ,  Kazuo Kuramoto ,  Masaru Tsuchihashi

IPC: B29C65/48 ,  G11B7/252 ,  G11B7/26 ,  B32B3/02 ,  G11B5/66

CPC classification number: B29C65/7847 ,  B29C65/483 ,  B29C65/485 ,  B29C66/452 ,  B29C66/83221 ,  B32B38/18 ,  G11B7/252 ,  G11B7/26 ,  B29C65/4815 ,  B29C65/484 ,  B29C65/4845 ,  B29C66/71 ,  B29C66/73921 ,  B29K2995/0032 ,  B29L2017/005 ,  B32B2309/06 ,  B32B2429/02 ,  Y10S428/90

Abstract: An optical disc comprises two facing disc units, at least one of which has a recording layer formed on its surface facing to the other disc unit. The disc units are bonded together by a layer of adhesive which may be a room-temperature curing thermosetting adhesive having a glass transition temperature higher than the upper limit of the range of temperatures of environments in which the disc may be used. Alternatively, the adhesive may be a room-temperature curing two-pack epoxy adhesive which comprises a bisphenol epoxy resin base agent and a modified aliphatic polyamine curing agent, and which has a viscosity of 100-1000 cps, a pot life of one hour or more, a cure shrinkage of 1.0% or less, a water absorption, after curing, of 0.2% or less, and a Shore hardness, after curing, of 80-90.

Abstract translation: 光盘包括两个相对的盘单元，其中至少一个具有形成在其面对另一个盘单元的表面上的记录层。 圆盘单元通过一层粘合剂粘合在一起，粘合剂层可以是玻璃化转变温度高于可以使用该盘的环境温度范围的上限的室温固化热固性粘合剂。 或者，粘合剂可以是包含双酚环氧树脂基剂和改性脂族多胺固化剂的室温固化双组分环氧粘合剂，其粘度为100-1000cps，适用期为1小时或 更优选为固化后的固化收缩率为1.0％以下，固化后的吸水率为0.2％以下，固化后的肖氏硬度为80〜90。

公开(公告)号：US4061365A

公开(公告)日：1977-12-06

申请号：US635087

申请日：1975-11-25

Applicant: Toshio Nagano ,  Kazuo Kuramoto

Inventor： Toshio Nagano ,  Kazuo Kuramoto

IPC: B60R22/06 ,  B60R21/10

CPC classification number: B60R22/06

Abstract: The system consists of a knee protector covered with a cushioning layer and arranged stationarily in front of and distant from a seat and a passive safety belt assembly having a single belt. The belt assembly includes a guide rail which is arranged upwardly of the door adjacent the seat to extend generally in the longitudinal direction of the car and a carrier member slidably engaged with the rail. The belt is coupled with the carrier member, and one end of the belt is supported by the floor and located close to the rear end of the inboard side of the seat. A drive mechanism having a reversible motor under the control of a circuit including door switches brings the carrier member to the front end of the rail when the door is opened so that the belt is slackened and unobstructive to ingress, but to the rear end of the rail when the door is closed so that the belt is passed diagonally around the upper half of the occupant's body.

Abstract translation: 该系统由覆盖有缓冲层的膝盖保护器组成，并且静止地布置在座椅前方并远离座椅，以及具有单个皮带的被动安全带组件。 带组件包括导轨，该导轨布置在邻近座椅的门的上方，大致沿着轿厢的纵向方向延伸，以及与导轨可滑动地接合的托架构件。 带与承载构件联接，并且带的一端由地板支撑并且位于靠近座椅内侧的后端。 在包括门开关的电路的控制下，具有可逆电动机的驱动机构在门打开时将承载构件带到轨道的前端，使得带松弛并且不受阻碍地进入， 当门关闭时，导轨沿着乘员身体的上半部对角地通过。