公开(公告)号：US06426620B1

公开(公告)日：2002-07-30

申请号：US09307751

申请日：1999-05-10

Applicant: Motohisa Taguchi ,  Izuru Shinjo ,  Yuji Kawano ,  Tatsuya Fukami ,  Kazuhiko Tsutsumi ,  Yuuichi Sakai ,  Naoki Hiraoka ,  Yasuyoshi Hatazawa

Inventor： Motohisa Taguchi ,  Izuru Shinjo ,  Yuji Kawano ,  Tatsuya Fukami ,  Kazuhiko Tsutsumi ,  Yuuichi Sakai ,  Naoki Hiraoka ,  Yasuyoshi Hatazawa

IPC: G01B700

CPC classification number: G01R33/09

Abstract: A magnetic field sensing element comprises an underlayer formed on a substrate, a giant magnetoresistance element formed on the underlayer for detecting a change in a magnetic field, and an integrated circuit formed on the substrate for carrying out predetermined arithmetic processing based on a change in a magnetic field detected by the giant magnetoresistance element, wherein the giant magnetoresistance element and the integrated circuit are formed on the same surface.

Abstract translation: 磁场感测元件包括形成在基板上的底层，形成在用于检测磁场变化的底层上的巨磁阻元件，以及形成在基板上的集成电路，用于基于基板上的变化执行预定的算术处理 由巨磁阻元件检测的磁场，其中巨磁电阻元件和集成电路形成在同一表面上。

公开(公告)号：US5450380A

公开(公告)日：1995-09-12

申请号：US10502

申请日：1993-01-28

Applicant: Yukari Toide ,  Motohisa Taguchi ,  Kazuhiko Tsutsumi

Inventor： Yukari Toide ,  Motohisa Taguchi ,  Kazuhiko Tsutsumi

IPC: G11B7/24

CPC classification number: G11B7/24053

Abstract: An optical disk adapted to resist moisture absorption, warping and static charge is disclosed. The disk includes an SiO.sub.2 film coating over at least a portion of a disk substrate. Additionally, an optical disk having a magnetic film protected by a fluorocarbon polymer is disclosed. Either of such disks can be used individually or, alternatively, they can be used in a laminated structure having two disks laminated in a face-to-face relationship. The laminated structure can be covered with SiO.sub.2 film.

Abstract translation: 公开了一种适于抵抗吸湿，翘曲和静电的光盘。 盘包括至少部分盘基底上的SiO 2膜涂层。 另外，公开了具有被氟碳聚合物保护的磁性膜的光盘。 这些盘中的任何一个可以单独使用，或者可选地，它们可以用于具有以面对面关系层叠的两个盘的层压结构。 层压结构可以用SiO2膜覆盖。

公开(公告)号：US07786541B2

公开(公告)日：2010-08-31

申请号：US12067426

申请日：2006-08-30

Applicant: Shinichi Izuo ,  Motohisa Taguchi ,  Akira Yamashita ,  Yukihisa Yoshida

Inventor： Shinichi Izuo ,  Motohisa Taguchi ,  Akira Yamashita ,  Yukihisa Yoshida

IPC: H01L29/84

CPC classification number: G01L9/0047 ,  G01L9/0048 ,  G01L9/0054 ,  G01L19/04

Abstract: A semiconductor pressure sensor comprises a silicon support substrate (1), an insulating layer (2) formed on the silicon support substrate (1), and a silicon thin plate (3) formed on the insulating layer (2). A through-hole (1a) extending in the thickness direction of the silicon support substrate (1) is formed in the silicon support substrate (1). The silicon thin plate (3) located on an extension of the through-hole (1a) functions as a diaphragm (23) that is deformed by an external pressure. The insulating layer (2) remains over the entire lower surface of the diaphragm (23). The thickness of the insulating layer (2) decreases from the peripheral portion toward the central portion of the diaphragm (23). This provides the semiconductor pressure sensor capable of reducing both the offset voltage and the variation of output voltage caused by the variation of temperature and its fabrication method.

Abstract translation: 半导体压力传感器包括硅支撑基板（1），形成在硅支撑基板（1）上的绝缘层（2）和形成在绝缘层（2）上的硅薄板（3）。 在硅支撑基板（1）上形成在硅支撑基板（1）的厚度方向上延伸的通孔（1a）。 位于通孔（1a）的延伸部上的硅薄板（3）用作通过外部压力变形的隔膜（23）。 绝缘层（2）保持在隔膜（23）的整个下表面上。 绝缘层（2）的厚度从隔膜（23）的周边部分向中心部分减小。 这提供了半导体压力传感器能够降低偏移电压和由温度变化引起的输出电压的变化及其制造方法。

公开(公告)号：US20090140355A1

公开(公告)日：2009-06-04

申请号：US12067426

申请日：2006-08-30

Applicant: Shinichi Izuo ,  Motohisa Taguchi ,  Akira Yamashita ,  Yukihisa Yoshida

Inventor： Shinichi Izuo ,  Motohisa Taguchi ,  Akira Yamashita ,  Yukihisa Yoshida

IPC: H01L23/58 ,  H01L21/00

CPC classification number: G01L9/0047 ,  G01L9/0048 ,  G01L9/0054 ,  G01L19/04

Abstract: A semiconductor pressure sensor comprises a silicon support substrate (1), an insulating layer (2) formed on the silicon support substrate (1), and a silicon thin plate (3) formed on the insulating layer (2). A through-hole (1a) extending in the thickness direction of the silicon support substrate (1) is formed in the silicon support substrate (1). The silicon thin plate (3) located on an extension of the through-hole (1a) functions as a diaphragm (23) that is deformed by an external pressure. The insulating layer (2) remains over the entire lower surface of the diaphragm (23). The thickness of the insulating layer (2) decreases from the peripheral portion toward the central portion of the diaphragm (23). This provides the semiconductor pressure sensor capable of reducing both the offset voltage and the variation of output voltage caused by the variation of temperature and its fabrication method.

Abstract translation: 半导体压力传感器包括硅支撑基板（1），形成在硅支撑基板（1）上的绝缘层（2）和形成在绝缘层（2）上的硅薄板（3）。 在硅支撑基板（1）上形成在硅支撑基板（1）的厚度方向上延伸的通孔（1a）。 位于通孔（1a）的延伸部上的硅薄板（3）用作通过外部压力变形的隔膜（23）。 绝缘层（2）保持在隔膜（23）的整个下表面上。 绝缘层（2）的厚度从隔膜（23）的周边部分向中心部分减小。 这提供了半导体压力传感器能够降低偏移电压和由温度变化引起的输出电压的变化及其制造方法。

公开(公告)号：US06762672B2

公开(公告)日：2004-07-13

申请号：US10700637

申请日：2003-11-05

Applicant: Motohisa Taguchi ,  Masahiro Kawai

Inventor： Motohisa Taguchi ,  Masahiro Kawai

IPC: H01C304

CPC classification number: G01K1/16

Abstract: A supporting film is formed over an entire front surface of a base material, a heating resistor composed of a platinum film having a predetermined pattern is formed on the supporting film, and a protecting film is formed over an entire surface of the supporting film so as to cover the heating resistor. A heating structure having a diaphragm construction is constructed by forming a cavity under a region where the heating resistor is formed by removing a portion of the base material so as to extend to the supporting film from the rear surface side of the base material. The supporting film and the protecting film are each constituted by a silicon nitride film having an index of refraction of less than 2.25.

公开(公告)号：US06732583B1

公开(公告)日：2004-05-11

申请号：US10030426

申请日：2002-04-01

Applicant: Naoki Yasuda ,  Tatsuya Fukami ,  Motohisa Taguchi ,  Yuji Kawano

Inventor： Naoki Yasuda ,  Tatsuya Fukami ,  Motohisa Taguchi ,  Yuji Kawano

IPC: G01F168

CPC classification number: G01R33/09 ,  G01F1/6845 ,  Y10T428/31663

Abstract: The present invention provides a sensor element having a sensor substrate and a sensing portion supported by the sensor substrate. A resin film is provided between the sensor substrate and the sensing portion. The resin film has a high heat resistance to the temperature of the fabrication process and the use of sensor element, has excellent coverage of a three-dimensional structure, has a flat surface, applies a low stress to the sensing portion, is formed at low temperature, and prevents the sensing portion from being adversely affected in its fabrication process.

Abstract translation: 本发明提供一种传感器元件，其具有传感器基板和由传感器基板支撑的感测部分。 在传感器基板和检测部之间设置有树脂膜。 该树脂膜对制造工艺的温度和传感器元件的使用具有高的耐热性，具有优异的三维结构覆盖，具有平坦的表面，对感测部分施加低应力，形成在低 温度，并且防止感测部分在其制造过程中受到不利影响。

公开(公告)号：US06703132B1

公开(公告)日：2004-03-09

申请号：US09890103

申请日：2001-09-25

Applicant: Naoki Yasuda ,  Tatsuya Fukami ,  Motohisa Taguchi ,  Yuji Kawano

Inventor： Naoki Yasuda ,  Tatsuya Fukami ,  Motohisa Taguchi ,  Yuji Kawano

IPC: B32B900

CPC classification number: B81C1/00896 ,  G01F1/6845 ,  G01L9/0042 ,  G01N27/121 ,  G01P5/12 ,  G01P15/0802 ,  G01P15/125 ,  Y10T428/31663

Abstract: The invention provides a sensor element having a sensor substrate and a flat sensor portion supported by the sensor substrate in which the surface of the flat sensing portion is covered with a silicone resin film. The silicone resin film is excellent in step coverage of the flat sensing portion, having low stress applied to the sensing portion, can be formed at low temperature and can prevent the sensing portion from being effected with adverse influence even in the fabrication steps.

Abstract translation: 本发明提供一种传感器元件，其具有传感器基板和由传感器基板支撑的平坦传感器部分，其中平面感测部分的表面被硅树脂膜覆盖。 有机硅树脂膜在平坦感测部分的阶梯覆盖度优异，具有低应力施加到感测部分，可以在低温下形成，并且即使在制造步骤中也可以防止感测部分受到不利影响。

公开(公告)号：US06661221B2

公开(公告)日：2003-12-09

申请号：US10162180

申请日：2002-06-05

Applicant: Motohisa Taguchi ,  Izuru Shinjo ,  Yuji Kawano ,  Tatsuya Fukami ,  Kazuhiko Tsutsumi ,  Yuuichi Sakai ,  Naoki Hiraoka ,  Yasuyoshi Hatazawa

Inventor： Motohisa Taguchi ,  Izuru Shinjo ,  Yuji Kawano ,  Tatsuya Fukami ,  Kazuhiko Tsutsumi ,  Yuuichi Sakai ,  Naoki Hiraoka ,  Yasuyoshi Hatazawa

IPC: H01L4308

CPC classification number: G01R33/09

Abstract: A magnetic field sensing element comprises an underlayer formed on a substrate, a giant magnetoresistance element formed on the underlayer for detecting a change in a magnetic field, and an integrated circuit formed on the substrate for carrying out predetermined arithmetic processing based on a change in a magnetic field detected by the giant magnetoresistance element, wherein the giant magnetoresistance element and the integrated circuit are formed on the same surface.

公开(公告)号：US06615655B1

公开(公告)日：2003-09-09

申请号：US10031148

申请日：2002-01-17

Applicant: Yuichi Sakai ,  Akira Yamashita ,  Motohisa Taguchi ,  Tomoya Yamakawa ,  Masahiro Kawai ,  Kazuhiko Tsutsumi

Inventor： Yuichi Sakai ,  Akira Yamashita ,  Motohisa Taguchi ,  Tomoya Yamakawa ,  Masahiro Kawai ,  Kazuhiko Tsutsumi

IPC: G01F168

CPC classification number: G01F1/692 ,  G01F1/6845

Abstract: A flow rate detecting element measuring the flow rates of various fluids, particularly the intake air of an internal combustion engine. The flow rate detecting element has a thin film layer including a support film and a protective film on one surface of a flat substrate, a heating resistance section and a comparative resistance section thermosensitive resistor having patterns and located between the support film and the protective film. The flat substrate has a recess which penetrates the flat substrate in the thickness direction thereof and facing the heating resistance section and the comparative resistance section. A fluid flow passage communicates with the recess which faces the comparative resistance section for fluid flow into the recess. Flow rate or velocity of a fluid can be measured accurately using the heating resistance section according to the fluid temperature reported by the comparative resistance section.

Abstract translation: 流量检测元件，其测量各种流体的流量，特别是内燃机的进气。 流量检测元件具有在平坦基板的一个表面上包括支撑膜和保护膜的薄膜层，具有图案并位于支撑膜和保护膜之间的加热电阻部分和比较电阻部分热敏电阻器。 平面基板具有在其平坦基板的厚度方向上贯通平板状基板的面向加热电阻部和比较电阻部的凹部。 流体流动通道与面向比较电阻部分的凹部连通，以使流体流入凹部。 可以使用根据比较电阻部报告的流体温度的加热电阻部分精确地测量流体的流速或速度。

公开(公告)号：US5293373A

公开(公告)日：1994-03-08

申请号：US64731

申请日：1993-05-19

Applicant: Yukari Toide ,  Motohisa Taguchi ,  Yoshio Fujii

Inventor： Yukari Toide ,  Motohisa Taguchi ,  Yoshio Fujii

IPC: G11B7/24 ,  G11B7/26

CPC classification number: G11B7/24053 ,  G11B7/26

Abstract: An optical disk having a warp preventive film for preventing the warp of the substrate which does not exfoliate for a long period by forming the warp preventive film on a textured area on the substrate surface with a minute embossment, and a method of manufacturing the optical disk by controlling the plasma etching condition for forming a textured area for reinforcing the bonding force of the warp preventive film on the substrate surface, so that the warp preventive film being bonded after forming the textured area may not exfoliate for a long period.

Abstract translation: 一种具有防止被膜长时间不剥离的翘曲防止膜的光盘，其特征在于，在所述基板表面的微细纹理区域上形成所述经线性防止膜，并制造所述光盘的方法 通过控制用于形成纹理化区域的等离子体蚀刻条件来增强基板表面上的防翘膜的结合力，使得在形成纹理区域之后被接合的防翘膜可能不会长时间剥落。