公开(公告)号：US20100270595A1

公开(公告)日：2010-10-28

申请号：US12765339

申请日：2010-04-22

申请人： Christoph Wilbertz ,  Heinz-Peter Frerichs ,  Ingo Freund

发明人： Christoph Wilbertz ,  Heinz-Peter Frerichs ,  Ingo Freund

IPC分类号： H01L21/30 ,  H01L29/66

CPC分类号： G01N27/4143

摘要： A device for detecting a gas or gas mixture has a first and a second gas sensor. The first gas sensor is a MOSFET, which comprises a first source, a first drain, a first channel zone disposed between the latter elements, and a first gas sensitive layer capacitively coupled to the first channel zone that contains palladium and reacts to a change in the concentration of the gas to be detected with a change in its work function. The second gas sensor has, in a semiconductor substrate, a second source, a second drain, and a second channel zone between the latter elements, which is capacitively coupled via an air gap to a suspended gate. The latter comprises a second gas sensitive layer that reacts to a change in the concentration of the gas to be detected with a change in its work function. The second gas sensitive layer is arranged on a support layer and faces the air gap. The support layer is formed by another semiconductor substrate, and the first gas sensor is integrated in the front side of the second semiconductor substrate facing away from the air gap.

摘要翻译： 用于检测气体或气体混合物的装置具有第一和第二气体传感器。 第一气体传感器是MOSFET，其包括第一源极，第一漏极，设置在后一个元件之间的第一沟道区，以及电容耦合到第一沟道区的第一气体敏感层，其包含钯并且对第 随着工作功能的变化，要检测的气体的浓度。 第二气体传感器在半导体衬底中具有在后一个元件之间的第二源极，第二漏极和第二沟道区域，其经由空气间隙电容耦合到悬浮栅极。 后者包括第二气体敏感层，其随着其功能的变化而响应待检测气体的浓度的变化。 第二气体敏感层布置在支撑层上并面向气隙。 支撑层由另一个半导体衬底形成，并且第一气体传感器集成在第二半导体衬底的远离气隙的前侧。

公开(公告)号：US20080138829A1

公开(公告)日：2008-06-12

申请号：US11665169

申请日：2005-10-12

申请人： Mirko Lehmann ,  Ingo Freund ,  Holger Klapproth ,  Sonja Mohry

发明人： Mirko Lehmann ,  Ingo Freund ,  Holger Klapproth ,  Sonja Mohry

IPC分类号： G01N21/76 ,  G01N33/543 ,  G01N33/53

CPC分类号： G01N33/54373

摘要： The invention relates to a method for detecting and/or determining the concentration of a ligand contained in a solution to be analyzed, during which a receptor, which can enter into a specific bond with the ligand, is immobilized on a semiconductor chip at a test location. In order to bind the ligand to the receptor, the solution is applied to the test location. A luminescence radiation or a color change is generated according to the binding of the ligand to the receptor. A radiation measurement signal is picked up with the aid of a radiation receiver integrated in the semiconductor chip, whereas the solution and/or an auxiliary liquid that does not contain the luminophore is in contact with the radiation receiver. While the generation of luminescence radiation is prevented and the radiation receiver is in contact with the auxiliary liquid and/or with a substitute liquid, a darkness measurement signal is measured for the radiation receiver. The radiation measurement signal is compensated for with the darkness measurement signal

摘要翻译： 本发明涉及一种用于检测和/或确定待分析溶液中所含配体的浓度的方法，在该方法中，可以与配体进入特定键的受体在测试中固定在半导体芯片上 位置。 为了将配体结合到受体，将溶液施加到测试位置。 根据配体与受体的结合产生发光辐射或颜色变化。 借助于集成在半导体芯片中的辐射接收器拾取辐射测量信号，而不包含发光体的溶液和/或辅助液体与辐射接收器接触。 虽然防止了发光辐射的产生并且辐射接收器与辅助液体和/或替代液体接触，但是对辐射接收器测量了暗度测量信号。 用黑度测量信号补偿辐射测量信号

公开(公告)号：US20050155411A1

公开(公告)日：2005-07-21

申请号：US10504738

申请日：2003-02-07

申请人： Markus Rogalla ,  Ingo Freund ,  Mirko Lehmann

发明人： Markus Rogalla ,  Ingo Freund ,  Mirko Lehmann

IPC分类号： G12B9/04 ,  B81B7/00 ,  G01N35/00 ,  H05K5/00 ,  H05K7/14 ,  G01N27/414

CPC分类号： B81B7/0061

摘要： In a method for producing a sensor arrangement and the resulting sensor arrangement, a sensor is provided on or in a chip and the chip is covered with a protective cover, the cover being an interface between the sensor and the environment. An adhesive layer is provided between the chip and the protective cover, the adhesive layer alone or together with the protective cover being an interface between the sensor and the environment. The protective cover and/or the adhesive layer may have a channel formed therein, the channel functioning as the reception channel for a sensor. In an alternative embodiment, the protective cover placed on a wafer with several chips, and the wafer is cut up to produce the individual chips with the protective cover. Thus, a sensor arrangement may have the protective cover applied to the individual chip after the chip is cut from the wafer, or the protective cover may be applied to the wafer, and the wafer and cover are then cut up into the individual chips and corresponding covers. The channel leading from one side of the arrangement to the sensor may be taken through the adhesive layer, through the protective cover, or through both. A hole may be formed in the protective cover above the sensor, with the sensor lying loosely in the hole. The reaction volume may be determined by the dimensions of the hole.

摘要翻译： 在用于制造传感器装置和所得到的传感器装置的方法中，传感器设置在芯片上或芯片中，并且芯片被保护盖覆盖，盖是传感器和环境之间的接口。 粘合剂层设置在芯片和保护盖之间，粘合剂层单独或与保护罩一起作为传感器和环境之间的界面。 保护盖和/或粘合剂层可以具有形成在其中的通道，该通道用作传感器的接收通道。 在替代实施例中，将保护盖放置在具有几个芯片的晶片上，并且切割晶片以用保护盖产生单独的芯片。 因此，在从晶片切割芯片之后，传感器装置可以具有施加到单个芯片的保护盖，或者可以将保护盖施加到晶片，然后将晶片和盖切割成各个芯片，并且对应于 盖子。 从布置的一侧引导到传感器的通道可以穿过粘合剂层，通过保护盖，或者通过两者。 可以在传感器上方的保护罩中形成孔，传感器松动地位于孔中。 反应体积可以由孔的尺寸确定。

公开(公告)号：US08329104B2

公开(公告)日：2012-12-11

申请号：US12146644

申请日：2008-06-26

申请人： Mirko Lehmann ,  Ingo Freund ,  Sonja Mohry ,  Holger Klapproth

发明人： Mirko Lehmann ,  Ingo Freund ,  Sonja Mohry ,  Holger Klapproth

IPC分类号： G01N15/06 ,  G01N33/00 ,  G01N33/48 ,  C12Q1/00 ,  G01N33/53 ,  G01N33/566 ,  G01N33/543

CPC分类号： G01N33/54373 ,  G01D3/08 ,  G01N27/414 ,  G01N27/4163 ,  G01N33/0032

摘要： A measurement device has at least one sensor for detecting a parameter, a data storage unit, and a power supply for said sensor and data storage unit. In addition to the first sensor, the measurement device has at least one second sensor connected to the power supply and to the data storage unit. The second sensor is provided for detecting a physical quantity acting on the first sensor and is capable of permanently altering the measurement characteristic of the first sensor. An evaluator functions coactively with the second sensor and the data storage unit so that the permanent alteration of the measurement characteristic of the first sensor is recordable as a function of the measurement signal of the second sensor.

摘要翻译： 测量装置具有用于检测参数的至少一个传感器，用于所述传感器和数据存储单元的数据存储单元和电源。 除了第一传感器之外，测量装置具有连接到电源和数据存储单元的至少一个第二传感器。 提供第二传感器用于检测作用在第一传感器上的物理量，并且能够永久地改变第一传感器的测量特性。 评估器与第二传感器和数据存储单元共同作用，使得可以根据第二传感器的测量信号来记录第一传感器的测量特性的永久变化。

公开(公告)号：US07777283B2

公开(公告)日：2010-08-17

申请号：US11791501

申请日：2004-11-26

申请人： Mirko Lehmann ,  Ingo Freund

发明人： Mirko Lehmann ,  Ingo Freund

IPC分类号： H01L29/00

CPC分类号： G01N27/4148

摘要： An electric component comprising a sensor and/or actuator chip with a substrate on which a passivating layer and a sensor and/or actuator structure consisting of an active surface area is arranged. The chip is surrounded by an encapsulation having an opening which forms an access to the at least one active surface area. A layer stack is arranged on the substrate, said stack of layers comprising from the passivating layer to the substrate at least one first strip conductor layer, a first electric insulating layer, a second strip conductor layer and a second electric insulating layer. The first conductor strip layer is fully arranged outside the area of the chip covered by the opening. At least one conductor strip of the second conductor strip layer is connected to the sensor and/or actuator structure.

摘要翻译： 一种电气部件，包括具有衬底的传感器和/或致动器芯片，其上布置有由活性表面积组成的钝化层和传感器和/或致动器结构。 芯片由具有开口的封装围绕，该开口形成对至少一个有源表面区域的访问。 层叠在衬底上，层叠层包括至少一个第一带状导体层，第一电绝缘层，第二带状导体层和第二电绝缘层，从钝化层到衬底。 第一导体带层完全布置在由开口覆盖的芯片的区域的外部。 第二导体带层的至少一个导体条连接到传感器和/或致动器结构。

公开(公告)号：US20090175764A1

公开(公告)日：2009-07-09

申请号：US12146644

申请日：2008-06-26

申请人： Mirko Lehmann ,  Ingo Freund ,  Sonja Mohry ,  Holger Klapproth

发明人： Mirko Lehmann ,  Ingo Freund ,  Sonja Mohry ,  Holger Klapproth

IPC分类号： B01J19/00

CPC分类号： G01N33/54373 ,  G01D3/08 ,  G01N27/414 ,  G01N27/4163 ,  G01N33/0032

摘要： A measurement device has at least one sensor for detecting a parameter, a data storage unit, and a power supply for said sensor and data storage unit. In addition to the first sensor, the measurement device has at least one second sensor connected to the power supply and to the data storage unit. The second sensor is provided for detecting a physical quantity acting on the first sensor and is capable of permanently altering the measurement characteristic of the first sensor. An evaluator functions coactively with the second sensor and the data storage unit so that the permanent alteration of the measurement characteristic of the first sensor is recordable as a function of the measurement signal of the second sensor.

摘要翻译： 测量装置具有用于检测参数的至少一个传感器，用于所述传感器和数据存储单元的数据存储单元和电源。 除了第一传感器之外，测量装置具有连接到电源和数据存储单元的至少一个第二传感器。 提供第二传感器用于检测作用在第一传感器上的物理量，并且能够永久地改变第一传感器的测量特性。 评估器与第二传感器和数据存储单元共同作用，使得可以根据第二传感器的测量信号来记录第一传感器的测量特性的永久变化。

公开(公告)号：US20080145922A1

公开(公告)日：2008-06-19

申请号：US11952219

申请日：2007-12-07

申请人： Mirko Lehmann ,  Martin Brischwein ,  Werner Baumann ,  Ralf Ehret ,  Ingo Freund

发明人： Mirko Lehmann ,  Martin Brischwein ,  Werner Baumann ,  Ralf Ehret ,  Ingo Freund

IPC分类号： C12M1/00

CPC分类号： C12M41/46 ,  C12M27/02 ,  C12M33/04

摘要： A device (1) for the carrying out of investigations on cell cultures (2) which take place in a liquid culture medium (4). The device possesses at least a receptacle (3) to contain the culture medium (4) including the cell culture (2), wherein one or more sensors (6) for measurement of the cell culture activities is provided and wherein the receptacle (3) has at least an opening for the adding and the removal of liquid culture medium (4) and the like. A separating element (7) can be introduced into the open upper part of the receptacle (3) and can be brought within the said receptacle (3) in a position close to the bottom (5), in which the said separating element (7) makes a boundary forming a partial space (8) which has a small volume in relation to the entire volume of the receptacle (3). Further, a flow channel (9) is provided, which first, communicates with the small volume partial space (8), and second, communicates with the said reservoir (14). This flow channel (9) and/or the sensors (6) are placed in the area of the small volume partial space (8). By means of the capability for adjustment of the separating element (7) as to its distance from the bottom of the receptacle (3), in the neighborhood of the cell culture (2) a microreaction volume exactly fitting the current requirements can be adjusted. By means of the flow channel (9), the cell culture (2) in the small volume partial space (8) stands in fluid communication with that in the reservoir. For the regeneration of the cell culture solution in the small volume partial space, the separating element (7) can be elevated and depressed, or it is possible, to inject into the small volume partial space of the receptacle (3) a quantity of liquid and by means of a through-flow channel. In this case, a convective mixing of fresh and spent medium takes place through the flow channel (9) between the small volume partial space and the reservoir (14).

公开(公告)号：US20050158848A1

公开(公告)日：2005-07-21

申请号：US10511192

申请日：2003-04-10

申请人： Ulrich Sieben ,  Ingo Freund ,  Holger Klapproth

发明人： Ulrich Sieben ,  Ingo Freund ,  Holger Klapproth

IPC分类号： B01J20/32 ,  C09D125/06 ,  C09D179/08 ,  C09D201/00 ,  G01N33/543 ,  G01N37/00 ,  C12M1/34 ,  B05D3/00

CPC分类号： B01J20/3204 ,  B01J20/103 ,  B01J20/28011 ,  B01J20/3257 ,  B01J20/327 ,  B01J20/3272 ,  B01J20/3274 ,  B01J20/3276 ,  B01J20/3289 ,  G01N33/54393

摘要： In a method for immobilizing molecules on a surface, a layer of a hydrophobic, e.g., a non-swelling polymer, may be applied to the surface and molecules are immobilized on a surface of the polymer layer. The hydrophobic polymers may be polyimide or polystyrene, and the surface to which the polymer layer is applied may be made of an inorganic material, e.g., a semiconductor material (silicon), a semiconducting oxide (silicon dioxide), glass, nitride, or ceramic. Hydrophobic polymers such as polyimide or polystyrene can be applied to the surface of an inorganic support with conventional methods. Further, they electrically insulate the support with respect to the molecules applied to the surface of the polymer layer or substances associated with these molecules. Thus, electrical sensors and processor circuits can be integrated into the support without any detrimental effect on their function due to molecules and substances applied to the surface of the polymer layer.

摘要翻译： 在将分子固定在表面上的方法中，可以将一层疏水的，例如不溶胀的聚合物施加到表面上，并将分子固定在聚合物层的表面上。 疏水聚合物可以是聚酰亚胺或聚苯乙烯，并且施加聚合物层的表面可以由无机材料制成，例如半导体材料（硅），半导体氧化物（二氧化硅），玻璃，氮化物或陶瓷 。 疏水性聚合物如聚酰亚胺或聚苯乙烯可以用常规方法施加到无机载体的表面上。 此外，它们相对于施加到聚合物层的表面上的分子或与这些分子相关联的物质将载体电绝缘。 因此，电传感器和处理器电路可以集成到支撑件中，而不会由于施加到聚合物层表面的分子和物质而对它们的功能产生不利影响。

公开(公告)号：US06368851B1

公开(公告)日：2002-04-09

申请号：US09321458

申请日：1999-05-27

申请人： Werner Baumann ,  Ralf Ehret ,  Mirko Lehmann ,  Günter Igel ,  Hans-Jürgen Gahle ,  Bernhard Wolf ,  Ulrich Sieben ,  Ingo Freund ,  Martin Brischwein

发明人： Werner Baumann ,  Ralf Ehret ,  Mirko Lehmann ,  Günter Igel ,  Hans-Jürgen Gahle ,  Bernhard Wolf ,  Ulrich Sieben ,  Ingo Freund ,  Martin Brischwein

IPC分类号： C12M142

CPC分类号： C12N15/89 ,  C12M35/02 ,  C12M35/04 ,  C12M35/08 ,  C12N13/00

摘要： A method is provided for measuring a state variable of a biological cell (3) located in a nutrient medium (2) and supported on and adhering to a support area (5). Within the support area (5) for the cell (3) and at a distance from the support area edge, an opening is made in the membrane of the cell (3). The edge of the cell membrane that surrounds the opening and adheres to the support area (5) seals off the liquid found inside the cell (3) from the nutrient medium (2). Through the opening the state variable (2) is measured. An apparatus for performing the method is also provided.

摘要翻译： 提供了一种用于测量位于营养介质（2）中并被支撑并附着到支撑区域（5）上的生物体（3）的状态变量的方法。 在电池（3）的支撑区域（5）内并且距离支撑区域边缘一定距离处，在电池（3）的膜中形成开口。 围绕开口并附着到支撑区域（5）的细胞膜的边缘将从细胞（3）内发现的液体与营养培养基（2）密封。 通过打开状态变量（2）进行测量。 还提供了一种用于执行该方法的装置。

公开(公告)号：US08324913B2

公开(公告)日：2012-12-04

申请号：US12594510

申请日：2008-04-02

申请人： Mirko Lehmann ,  Heinz-Peter Frerichs ,  Ingo Freund

发明人： Mirko Lehmann ,  Heinz-Peter Frerichs ,  Ingo Freund

IPC分类号： G01R27/08 ,  G01N19/00

CPC分类号： G01N27/414 ,  G01N25/56

摘要： The invention relates to a moisture sensor which comprises a receiving area on its surface for a moisture film, the layer thickness of which is dependent on the relative humidity in the surrounding of the receiving area. The moisture sensor has a signal source which is connected to at least one control electrode at at least one infeed, the electrode abutting the receiving area, for providing a control voltage to the moisture film. The moisture sensor comprises at least one potential sensor which has at least one sensor area, under the receiving area, which is spaced apart from the at least one infeed. The sensor area is electrically insulated from the receiving area by an insulation layer, located between the sensor area and the receiving area, in such a way that an electrical potential can be capacitively detected by means of the potential sensor, the potential being dependent on the layer thickness of the moisture film and the control voltage.

摘要翻译： 本发明涉及一种水分传感器，其包括在其表面上的用于湿膜的接收区域，其层厚度取决于接收区域周围的相对湿度。 水分传感器具有信号源，该信号源在至少一个进给处连接到至少一个控制电极，电极邻接接收区域，以提供对湿气膜的控制电压。 湿度传感器包括至少一个在至少一个传感器区域的电位传感器，该传感器区域在与至少一个进料间隔开的接收区域下方。 传感器区域通过位于传感器区域和接收区域之间的绝缘层与接收区域电绝缘，使得电位可以通过电位传感器电容性地检测，电位取决于 水分膜的层厚度和控制电压。