FET type gas-sensitive device having horizontal floating gate

    公开(公告)号:US09903834B2

    公开(公告)日:2018-02-27

    申请号:US14073091

    申请日:2013-11-06

    IPC分类号: G01N27/403 G01N27/414

    CPC分类号: G01N27/4143

    摘要: A FET type gas-sensitive device has a floating electrode formed in a horizontal direction. The device achieves noise reduction, process simplification, pollution control, sensing speed improvement, various sensing material applicability and mechanical stability etc. in comparison with a gas-sensitive device that is vertically stacked with a floating electrode, a sensing material layer and a control electrode. The device can be assembled easily with a plurality of gas-sensitive devices being operated by various sensing mechanisms in one substrate.

    Layer system
    3.
    发明授权
    Layer system 有权
    层系统

    公开(公告)号:US09500620B2

    公开(公告)日:2016-11-22

    申请号:US14507428

    申请日:2014-10-06

    申请人: Micronas GmbH

    IPC分类号: G01N27/403 G01N27/414

    摘要: A layer system having a layer region, whereby the layer region has a single-crystal silicon substrate with a front side and a back side, and whereby a textured surface is formed on the front side and the textured surface has a topography with different heights and a thin film layer of a metal oxide and/or an oxide ceramic is formed on the textured surface, whereby the thin film layer covers the textured surface only partially.

    摘要翻译: 具有层区域的层系统,由此该层区域具有具有正面和背面的单晶硅衬底,并且由此在前侧形成纹理化表面,并且纹理表面具有不同高度的形貌, 在纹理表面上形成金属氧化物和/或氧化物陶瓷的薄膜层,由此薄膜层仅部分地覆盖纹理表面。

    Device for detecting at least one gaseous analyte and method for the production thereof
    4.
    发明授权
    Device for detecting at least one gaseous analyte and method for the production thereof 有权
    用于检测至少一种气态分析物的装置及其制备方法

    公开(公告)号:US09423377B2

    公开(公告)日:2016-08-23

    申请号:US14945211

    申请日:2015-11-18

    申请人: Robert Bosch GmbH

    摘要: A device for detecting at least one gaseous analyte comprises a detection section including a semiconductor substrate and at least one sensor element, which is arranged on the semiconductor substrate. The at least one sensor element includes two electrodes and a solid electrolyte layer arranged between the electrodes. The device also comprises a protective cap configured to cover the at least one sensor element, and at least one temperature-control unit configured for temperature control of the protective cap. The at least one temperature-control unit is arranged on the protective cap. The protective cap is formed from a semiconductor material. The device further comprises a diffusion section having a plurality of passage openings for the gaseous analyte arranged at least in a partial section of the protective cap.

    摘要翻译: 用于检测至少一种气态分析物的装置包括检测部分,其包括半导体衬底和布置在半导体衬底上的至少一个传感器元件。 所述至少一个传感器元件包括两个电极和布置在所述电极之间的固体电解质层。 该装置还包括构造成覆盖至少一个传感器元件的保护盖,以及被配置用于保护盖的温度控制的至少一个温度控制单元。 至少一个温度控制单元设置在保护盖上。 保护盖由半导体材料形成。 该装置还包括扩散部分,该扩散部分具有多个用于气体分析器的通道开口,该通气开口至少布置在保护帽的部分部分中。

    Chemical detection device having multiple flow channels
    5.
    发明授权
    Chemical detection device having multiple flow channels 有权
    具有多个流动通道的化学检测装置

    公开(公告)号:US08983783B2

    公开(公告)日:2015-03-17

    申请号:US13861237

    申请日:2013-04-11

    摘要: The described embodiments may provide a chemical detection circuit that may comprise a plurality of first output circuits at a first side and a plurality of second output circuits at a second side of the chemical detection circuit. The chemical detection circuit may further comprise a plurality of tiles of pixels each placed between respective pairs of first and second output circuits. Each tile may include four quadrants of pixels. Each quadrant may have columns with designated first columns interleaved with second columns. Each first column may be coupled to a respective first output circuit in first and second quadrants, and to a respective second output circuit in third and fourth quadrants. Each second column may be coupled to a respective second output circuit in first and second quadrants, and to a respective first output circuit in third and fourth quadrants.

    摘要翻译: 所描述的实施例可以提供化学检测电路,其可以包括在第一侧的多个第一输出电路和在化学检测电路的第二侧的多个第二输出电路。 化学检测电路还可以包括多个像素瓦片,每个瓷砖分别放置在相应的第一和第二输出电路对之间。 每个瓦片可以包括四个像素象限。 每个象限可以具有与第二列交错的指定的第一列的列。 每个第一列可以耦合到第一和第二象限中的相应的第一输出电路,以及耦合到第三和第四象限中的相应的第二输出电路。 每个第二列可以耦合到第一和第二象限中的相应的第二输出电路,以及耦合到第三和第四象限中的相应的第一输出电路。

    SENSOR FOR SENSING THE PRESENCE OF AT LEAST ONE FLUIDUM
    7.
    发明申请
    SENSOR FOR SENSING THE PRESENCE OF AT LEAST ONE FLUIDUM 有权
    传感器用于感测至少一个流体的存在

    公开(公告)号:US20130334061A1

    公开(公告)日:2013-12-19

    申请号:US13909937

    申请日:2013-06-04

    IPC分类号: G01N27/414

    CPC分类号: G01N27/4146 G01N27/4143

    摘要: A Sensor for sensing the presence of at least one fluidum in a space adjoining the sensor is disclosed. In one aspect, the sensor has a two-dimensional electron gas (2DEG) layer stack, a gate electrode overlaying at least part of the 2DEG layer stack for electrostatically controlling electron density of a 2DEG in the 2DEG layer stack and a source and a drain electrode contacting the 2DEG layer stack for electrically contacting the 2DEG, wherein a detection opening is provided in between the gate electrode and the 2DEG layer stack and wherein the detection opening communicates with the space through a detection opening inlet such that molecules of the fluidum can move from the adjoining space through the detection opening inlet into the detection opening where they can measurably alter a electric characteristic of the 2DEG.

    摘要翻译: 公开了一种用于感测在邻近传感器的空间中存在至少一个流体的传感器。 在一个方面,传感器具有二维电子气(2DEG)层堆叠,覆盖至少部分2DEG层堆叠的栅电极,用于静电控制2DEG层堆叠中的2DEG的电子密度,以及源极和漏极 电极与2DEG层堆叠接触以电接触2DEG,其中检测开口设置在栅电极和2DEG层堆之间,并且其中检测开口通过检测开口入口与空间连通,使得流体的分子可以移动 从相邻的空间通过检测开口入口进入检测开口,在那里它们可以可测量地改变2DEG的电特性。

    TRANSISTOR-BASED PARTICLE DETECTION SYSTEMS AND METHODS
    8.
    发明申请
    TRANSISTOR-BASED PARTICLE DETECTION SYSTEMS AND METHODS 有权
    基于晶体管的粒子检测系统和方法

    公开(公告)号:US20130187200A1

    公开(公告)日:2013-07-25

    申请号:US13748171

    申请日:2013-01-23

    IPC分类号: G01N27/414

    CPC分类号: G01N27/4143

    摘要: Transistor-based particle detection systems and methods may be configured to detect charged and non-charged particles. Such systems may include a supporting structure contacting a gate of a transistor and separating the gate from a dielectric of the transistor, and the transistor may have a near pull-in bias and a sub-threshold region bias to facilitate particle detection. The transistor may be configured to change current flow through the transistor in response to a change in stiffness of the gate caused by securing of a particle to the gate, and the transistor-based particle detection system may configured to detect the non-charged particle at least from the change in current flow.

    摘要翻译: 基于晶体管的粒子检测系统和方法可以被配置为检测带电和非带电粒子。 这样的系统可以包括与晶体管的栅极接触并将栅极与晶体管的电介质分开的支撑结构,并且晶体管可以具有接近的引入偏置和亚阈值区域偏置以促进颗粒检测。 晶体管可以被配置为响应于通过将颗粒固定到栅极而引起的门的刚度变化来改变通过晶体管的电流,并且基于晶体管的颗粒检测系统可以被配置为检测位于 最不利于当前流量的变化。

    Methods for operating an array column integrator
    10.
    发明授权
    Methods for operating an array column integrator 有权
    操作数组列积分器的方法

    公开(公告)号:US08432150B2

    公开(公告)日:2013-04-30

    申请号:US13421721

    申请日:2012-03-15

    申请人: Peter Levine

    发明人: Peter Levine

    IPC分类号: G01R27/00

    摘要: Methods are described for reading a chemically-sensitive field-effect transistor (chemFET) with an improved signal-to-noise ratio. In one embodiment, a method is described for reading a chemFET having a first terminal and a second terminal, and a floating gate coupled to a passivation layer. The method includes biasing the first terminal of the chemFET to a first bias voltage during a read interval. The second terminal of the chemFET is coupled to a data line during the read interval. A current is induced through the chemFET via the data line. An output signal proportional to an integral of a voltage or current on the data line is generated in response to the induced current through the chemFET during the read interval.

    摘要翻译: 描述了用于读取具有改善的信噪比的化学敏感场效应晶体管(chemFET)的方法。 在一个实施例中,描述了一种用于读取具有第一端子和第二端子的chemFET以及耦合到钝化层的浮动栅极的方法。 该方法包括在读取间隔期间将chemFET的第一端偏压到第一偏置电压。 chemFET的第二个端子在读取间隔期间耦合到数据线。 通过chemFET通过数据线感应出电流。 响应于在读取间隔期间通过chemFET的感应电流,产生与数据线上的电压或电流的积分成比例的输出信号。