发明申请
US20130187200A1 TRANSISTOR-BASED PARTICLE DETECTION SYSTEMS AND METHODS 有权
基于晶体管的粒子检测系统和方法

TRANSISTOR-BASED PARTICLE DETECTION SYSTEMS AND METHODS
摘要:
Transistor-based particle detection systems and methods may be configured to detect charged and non-charged particles. Such systems may include a supporting structure contacting a gate of a transistor and separating the gate from a dielectric of the transistor, and the transistor may have a near pull-in bias and a sub-threshold region bias to facilitate particle detection. The transistor may be configured to change current flow through the transistor in response to a change in stiffness of the gate caused by securing of a particle to the gate, and the transistor-based particle detection system may configured to detect the non-charged particle at least from the change in current flow.
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