Sulphonium salt initiators
    1.
    发明授权
    Sulphonium salt initiators 有权
    锍盐引发剂

    公开(公告)号:US08512934B2

    公开(公告)日:2013-08-20

    申请号:US12681784

    申请日:2008-09-29

    摘要: Compounds of the formula (I), wherein X is a single bond, CRaRb O, S, NRC, NCORC, CO, SO or SO2; L, L1, L2, L3, L4, L5, L6, L7 and L8 are for example hydrogen, R1 or COT; T denotes T1 or O-T2; T1 and T2 for example are hydrogen, C1-C20alkyl, C3-C12cycloalkyl, C2-C20alkenyl, C5-C12cycloalkenyl, C6-C14aryl, C3-C12heteroaryl, C1-C20alkyl substituted by one or more D, C2-C20alkyl interrupted by one or more E, C2-C20alkyl substituted by one or more D and interrupted by one or more E or Q; R1, R2, R3, R4, Ra, Rb and Rc are T1; D is for example R5, OR5, SR5 or Q1; E is for example O, S, COO or Q2; R5 and R6 for example are hydrogen, C1-C12alkyl or phenyl; Q is for example C6-C12bicycloalkyl, C6-C12bicycloalkenyl or C6-C12tricycloalkyl; Q1 is for example, C6-C14aryl or C3-C12heteroaryl; Q2 is for example C6-C14arylene or C3-C12heteroarylene; Y is an anion; and M is a cation; provided that at least one of L, L1, L2, L3, L4, L5, L6, L7 and L8 is other than hydrogen; and provided that (i) at least one of T1 or T2 is a group Q; or (ii) at least one D is a group Q1; or (iii) at least one E is a group Q2; are suitable as photolatent catalysts.

    摘要翻译: 式(I)化合物,其中X为单键,CRaRbO,S,NRC,NCORC,CO,SO或SO2; L,L1,L2,L3,L4,L5,L6,L7和L8例如为氢,R1或COT; T表示T1或O-T2; 例如,T 1和T 2是氢,C 1 -C 20烷基,C 3 -C 12环烷基,C 2 -C 20烯基,C 5 -C 12环烯基,C 6 -C 14芳基,C 3 -C 12杂芳基,被一个或多个D,C 2 -C 20烷基取代的C 1 -C 20烷基,被一个或多个 E,被一个或多个D取代并被一个或多个E或Q中断的C 2 -C 20烷基; R1,R2,R3,R4,Ra,Rb和Rc为T1; D是例如R5,OR5,SR5或Q1; E例如为O,S,COO或Q2; R5和R6例如是氢,C1-C12烷基或苯基; Q是例如C 6 -C 12二环烷基,C 6 -C 12双环烯基或C 6 -C 12三环烷基; Q1是例如C 6 -C 14芳基或C 3 -C 12杂芳基; Q2是例如C 6 -C 14亚芳基或C 3 -C 12杂芳基; Y是阴离子; M是阳离子; 条件是L,L1,L2,L3,L4,L5,L6,L7和L8中的至少一个不是氢; 并且(i)T1或T2中的至少一个是组Q; 或(ii)至少一个D为基团Q1; 或(iii)至少一个E为基团Q2; 适合作为光催化剂。

    SULFONIUM DERIVATIVES AND THE USE THEROF AS LATENT ACIDS
    2.
    发明申请
    SULFONIUM DERIVATIVES AND THE USE THEROF AS LATENT ACIDS 审中-公开
    磺胺衍生物及其作为酸性物质的用途

    公开(公告)号:US20110171569A1

    公开(公告)日:2011-07-14

    申请号:US12996795

    申请日:2009-06-02

    CPC分类号: C07D339/08 C07D327/08

    摘要: Compounds of the formula (I), wherein R1, R2 and R3 for example are hydrogen, halogen, CN, C1-C18alkyl, C1-C10 haloalkyl, (CO)R8, (CO)OR4, or (CO)NR5R6; Y is O, S or CO; D2, D3 and D4 for example are a direct bond, O, S, NR7, CO, O(CO), (CO)O, S(CO), (CO)S, NR7(CO), (CO)NR7, SO, SO2, or OSO2, C1-C18alkylene, C3-C30cycloalkylene, C2-C12alkenylene, C4-C30cycloalkenylene, Ar1; Ar1, Ar2 and Ar3 are for example phenylene, R4, R5, R6, R7 and R8 are for example hydrogen, C3-C30-cycloalkyl, C1-C18alkyl, C1-C10haloalkyl, C2-C12alkenyl, C4-C30cycloalkenyl, phenyl-C1C3-alkyl; X− is Formulae (IA), (IB) or (IC); R10 is for example C1-C18alkyl, C1-C10haloalkyl, camphoryl, phenyl-C1-C3alkyl, C3-C30cycloalkyl; and R11, R12, R13, R14 and R15 are for example C1-C10haloalkyl; are useful as polymerizable photolatent acids.

    摘要翻译: 式(I)化合物,其中R1,R2和R3例如是氢,卤素,CN,C1-C18烷基,C1-C10卤代烷基,(CO)R8,(CO)OR4或(CO)NR5R6; Y为O,S或CO; D2,D3和D4例如是直接键合,O,S,NR7,CO,O(CO),(CO)O,S(CO),(CO)S,NR7(CO) SO,SO 2或OSO 2,C 1 -C 18亚烷基,C 3 -C 30亚环烷基,C 2 -C 12亚烯基,C 4 -C 30环亚烯基,Ar 1; Ar 1,Ar 2和Ar 3是例如亚苯基,R 4,R 5,R 6,R 7和R 8是例如氢,C 3 -C 30 - 环烷基,C 1 -C 18烷基,C 1 -C 10卤代烷基,C 2 -C 12烯基,C 4 -C 30环烯基,苯基-C 1 -C 3 - 烷基; X-是式(IA),(IB)或(IC); R 10例如为C 1 -C 18烷基,C 1 -C 10卤代烷基,樟脑基,苯基-C 1 -C 3烷基,C 3 -C 30环烷基; R 11,R 12,R 13,R 14和R 15例如为C 1 -C 10卤代烷基; 可用作可聚合的光潜酸。

    SULPHONIUM SALT INITIATORS
    3.
    发明申请
    SULPHONIUM SALT INITIATORS 审中-公开
    硫酸钡发射器

    公开(公告)号:US20100297541A1

    公开(公告)日:2010-11-25

    申请号:US12681786

    申请日:2008-09-29

    摘要: Compounds of the formula (I), wherein X is a single bond, CRaRbO, S, NRc or NCORc; Z is formula (II) or C3-C20heteroaryl; L, L1, L2, L3, L4, L5, L6, L7 and L8 for example independently of one another are hydrogen or an organic substituent; Ra, Rb and Rc independently of one another are hydrogen or an organic substituent; R is for example is C5-C20heteroaryl or C6-C14 aryl; and Y is an inorganic or organic anion; are suitable as photolatent acid generators.

    摘要翻译: 式(I)化合物,其中X为单键,CRaRbO,S,NRc或NCORc; Z是式(II)或C 3 -C 20杂芳基; L,L1,L2,L3,L4,L5,L6,L7和L8例如彼此独立地为氢或有机取代基; R a,R b和R c彼此独立地是氢或有机取代基; R是例如C 5 -C 20杂芳基或C 6 -C 14芳基; Y为无机或有机阴离子; 适合作为光潜酸产生剂。

    Halogenated oxime derivatives and the use therof as latent acids
    4.
    发明申请
    Halogenated oxime derivatives and the use therof as latent acids 有权
    卤代肟衍生物和作为潜伏酸使用

    公开(公告)号:US20090042114A1

    公开(公告)日:2009-02-12

    申请号:US12154333

    申请日:2008-05-22

    摘要: Compounds of the formula I or II wherein R1 is C1-C10haloalkylsulfonyl, halobenzenesulfonyl, C2-C10haloalkanoyl, halobenzoyl; R2 is halogen or C1-C10haloalkyl; Ar1 is phenyl, biphenylyl, fluorenyl, naphthyl, anthracyl, phenanthryl, or heteroaryl, all of which are optionally substituted; Ar′1 is for example phenylene, naphthylene, diphenylene, heteroarylene, oxydiphenylene, phenylene-D-D1-D-phenylene or —Ar″1-A1-Y1-A1-Ar″1—; wherein these radicals optionally are substituted; Ar″1 is phenylene, naphthylene, anthracylene, phenanthrylene, or heteroarylene, all optionally substituted; A1 is for example a direct bond, —O—, —S—, or —NR6—; Y1 inter alia is C1-C18alkylene; X is halogen; D is for example —O—, —S— or —NR6—; D1 inter alia is C1-C18alkylene; are particularly suitable as photolatent acids in ArF resist technology.

    摘要翻译: 式I或II的化合物,其中R 1是C 1 -C 10卤代烷基磺酰基,卤代苯磺酰基,C 2 -C 10卤代烷酰基,卤代苯甲酰基; R2是卤素或C1-C10卤代烷基; Ar1是苯基,联苯基,芴基,萘基,蒽基,菲基或杂芳基,它们都是任选被取代的; Ar'1例如为亚苯基,亚萘基,亚二苯基,亚杂芳基,氧联二苯基,亚苯基-D-D1-D-phenylene或-Ar''1-A1-Y1-A1-Ar'1,1- 其中这些基团任选被取代; Ar 1是亚苯基,亚萘基,亚蒽基,亚菲基或亚杂芳基,全部被取代; A1是例如直接键,-O - , - S - 或-NR 6 - ; Y1特别是C 1 -C 18亚烷基; X是卤素; D是例如-O - , - S-或-NR 6 - ; D1特别是C 1 -C 18亚烷基; 在ArF抗蚀剂技术中特​​别适合作为光潜酸。

    Photoinitiators and their applications
    6.
    发明授权
    Photoinitiators and their applications 失效
    光引发剂及其应用

    公开(公告)号:US06673850B1

    公开(公告)日:2004-01-06

    申请号:US09959174

    申请日:2001-10-18

    IPC分类号: C08F246

    摘要: Photoinitiators of formula (Ia) or (Ib) having chain transfer groups, wherein n is 1 or 2; PI is for example a group of formula (IIa); PI′ inter alia is a group of formula (IIIa); Ar is for example phenyl; Ar2 is inter alia phenylene; R1 and R2 are for example C1-C8alkyl, or R1 and R2 together C2-C9alkylene; M1 inter alia is —NR3R4 or —OH; M1′ is for example a group (c); R3′ is a direct bond, C1-C12alkylene, or phenylene; R3 is for example hydrogen, or C1-C12alkyl; R4 is e.g. C1-C12alkyl; A1 and A2 are for example a direct bond; CT is a chain transfer group; are useful for the preparation of macrophotoinitiators which can be employed for preparing block copolymers.

    摘要翻译: 具有链转移基团的式(Ia)或(Ib)的光引发剂,其中n为1或2; PI是例如式(IIa)的一组; PI“特别是一组式(IIIa); Ar是例如苯基; Ar2尤其是亚苯基; R 1和R 2例如是C 1 -C 8烷基,或者R 1和R 2一起是C 2 -C 9亚烷基; M1特别是-NR 3 R 4或-OH; M1'例如是一组(c); R3'是直接键,C1-C12亚烷基或亚苯基; R3是例如氢或C1-C12烷基; R4是例如 C 1 -C 12烷基; A1和A2例如是直接键; CT是链转移组; 可用于制备可用于制备嵌段共聚物的大分子引发剂。

    Iodonium salts as latent acid donors
    7.
    发明授权
    Iodonium salts as latent acid donors 有权
    碘盐作为潜酸供体

    公开(公告)号:US06306555B1

    公开(公告)日:2001-10-23

    申请号:US09740205

    申请日:2000-12-18

    IPC分类号: G03F7004

    摘要: Radiation-sensitive compositions comprising (a1) a cationically or acid-catalytically polymerisable or crosslinkable compound or (a2) a compound that increases its solubility in a developer under the action of acid; and (b) at least one diaryliodonium salt of formula I X is branched C3-C20alkyl or C3-C8cycloalkyl; X1 is hydrogen, linear C1-C20alkyl, branched C3-C20alkyl or C3-C8cycloalkyl; with the proviso that the sum of the carbon atoms in X and X1 is at least 4; Y is linear C1-C10alkyl, branched C3-C10alkyl or C3-C8cycloalkyl; A− is a non-nucleophilic anion, selected from the group (BF4)−, (SbF6)−, (PF6)−, (B(C6F5))4−, C1-C20alkylsulfonate, C2-C20haloalkylsulfonate, unsubstituted C6-C10arylsulfonate, camphorsulfonate, and C6-C10arylsulfonate substituted by halogen, NO2, C1-C12alkyl, C1-C12halo-alkyl, C1-C12alkoxy or by COOR1; and R1 is C1-C20alkyl, phenyl, benzyl; or phenyl mono- or poly-substituted by C1-C12alkyl, C1-C12alkoxy or by halogen; with the proviso that the two phenyl rings on the iodine atom are not identically substituted.

    摘要翻译: 辐射敏感性组合物,其包含(a1)阳离子或酸可催化聚合或交联的化合物或(a2)在酸的作用下增加其在显影剂中的溶解度的化合物; 和(b)式IX的至少一种二芳基碘鎓盐是支链C 3 -C 20烷基或C 3 -C 8环烷基; X 1是氢,直链C 1 -C 20烷基,支链C 3 -C 20烷基或C 3 -C 8环烷基; 条件是X和X 1中的碳原子总数至少为4; Y为直链C 1 -C 10烷基,支链C 3 -C 10烷基或C 3 -C 8环烷基; A-为非亲核阴离子,选自(BF 4 ) - ,(SbF 6) - ,(PF 6) - ,(B(C 6 F 5))4-,C 1 -C 20烷基磺酸酯,C 2 -C 20卤代烷基磺酸酯,未取代的C 6 -C 10芳基磺酸酯,樟脑磺酸酯和C 6 -C 10芳基磺酸酯,被卤素, ,C 1 -C 12卤代烷基,C 1 -C 12烷氧基或COOR 1; 并且R 1是C 1 -C 20烷基,苯基,苄基; 或被C 1 -C 12烷基,C 1 -C 12烷氧基或卤素单取代或多取代的苯基;条件是碘原子上的两个苯环不同等取代。

    Latent acids and their use
    9.
    发明申请
    Latent acids and their use 有权
    潜在酸及其用途

    公开(公告)号:US20110217654A1

    公开(公告)日:2011-09-08

    申请号:US13028323

    申请日:2011-02-16

    摘要: The invention pertains to a compound generating an acid of the formula I or II, for instance corresponding sulfonium and iodonium salts, as well as corresponding sulfonyloximes wherein X is CH2 or CO; Y is O, NR4, S, O(CO), O(CO)O, O(CO)NR4, OSO2, O(CS), or O(CS)NR4; R1 is for example C1-C18alkyl, C1-C10haloalkyl, C2-C12alkenyl, C4-C30cycloalkenyl, phenyl-C1-C3-alkyl, C3-C30cycloalkyl, C3-C30cycloalkyl-C1-C18alkyl, interrupted C2-C18alkyl, interrupted C3-C30cycloalkyl, interrupted C3-C30cycloalkyl-C1-C18alkyl, interrupted C4-C30cycloalkenyl, phenyl, naphthyl, anthracyl, phenanthryl, biphenylyl, fluorenyl or heteroaryl, all unsubstituted or are substituted; or R1 is NR12R13; R2 and R3 are for example C3-C30cycloalkylene, C3-C30cycloalkyl-C1-C18alkylene, C1-C18alkylene, C1-C10haloalkylene, C2-C12alkenylene, C4-C30cycloalkenylene, phenylene, naphthylene, anthracylene, phenanthrylene, biphenylene or heteroarylene; all unsubstituted or substituted; R4 is for example C3-C30cycloalkyl, C3-C30cycloalkyl-C1-C18alkyl, C1-C18alkyl, C1-C10haloalkyl, C2-C12alkenyl, C4-C30cycloalkenyl, phenyl-C1-C3-alkyl; R12 and R13 are for example C3-C30cycloalkyl, C3-C30cycloalkyl-C1-C18alkyl, C1-C18alkyl, C1-C10haloalkyl, C2-C12alkenyl, C4-C30cycloalkenyl, phenyl-C1-C3-alkyl, Ar, (CO)R15, (CO)OR15 or SO2R15; and Ar is phenyl, biphenylyl, fluorenyl, naphthyl, anthracyl, phenanthryl or heteroaryl, all unsubstituted or substituted.

    摘要翻译: 本发明涉及产生式I或II的酸的化合物,例如相应的锍盐和碘鎓盐,以及其中X是CH 2或CO的相应的磺酰肟; Y是O,NR4,S,O(CO),O(CO)O,O(CO)NR4,OSO2,O(CS)或O(CS)NR4; R 1是例如C 1 -C 18烷基,C 1 -C 10卤代烷基,C 2 -C 12烯基,C 4 -C 30环烯基,苯基-C 1 -C 3烷基,C 3 -C 30环烷基,C 3 -C 30环烷基-C 1 -C 18烷基,间断的C 2 -C 18烷基,间断的C 3 -C 30环烷基, 间断的C 3 -C 30环烷基-C 1 -C 18烷基,间断的C 4 -C 30环烯基,苯基,萘基,蒽基,菲基,联苯基,芴基或杂芳基,全部未取代或被取代; 或R1是NR12R13; R2和R3是例如C 3 -C 30亚环烷基,C 3 -C 30环烷基-C 1 -C 18亚烷基,C 1 -C 18亚烷基,C 1 -C 10卤代亚烷基,C 2 -C 12亚烯基,C 4 -C 30亚环烯基,亚苯基,亚萘基,亚蒽基,亚菲基,亚联苯基或亚杂芳基。 全部未取代或取代; R4是例如C 3 -C 30环烷基,C 3 -C 30环烷基-C 1 -C 18烷基,C 1 -C 18烷基,C 1 -C 10卤代烷基,C 2 -C 12链烯基,C 4 -C 30环烯基,苯基-C 1 -C 3烷基; R 12和R 13例如为C 3 -C 30环烷基,C 3 -C 30环烷基-C 1 -C 18烷基,C 1 -C 18烷基,C 1 -C 10卤代烷基,C 2 -C 12烯基,C 4 -C 30环烯基,苯基-C 1 -C 3烷基,Ar,(CO)R 15 CO)OR15或SO2R15; 并且Ar是苯基,联苯基,芴基,萘基,蒽基,菲基或杂芳基,全部是未取代或取代的。

    Oxime derivatives and use thereof as latent acids
    10.
    发明授权
    Oxime derivatives and use thereof as latent acids 有权
    肟衍生物及其用作潜伏酸

    公开(公告)号:US07687220B2

    公开(公告)日:2010-03-30

    申请号:US11632687

    申请日:2005-07-11

    IPC分类号: G03F7/028 C07C259/08

    摘要: The invention pertain to novel photoacid generator compounds of the formula I, II or III wherein R1 is for example C1-C18alkylsulfonyl or phenylsulfonyl, phenyl-C1-C3alkylsulfonyl, , naphthylsulfonyl, anthracylsulfonyl or phenanthrylsulfonyl, all optionally substituted, or R1 is a group X1, X2 and X3 independently of each other are O or S; R′1, is e.g. phenylenedisulfonyl, naphthylenedisulfonyl, diphenylenedisulfonyl, or oxydiphenylenedisulfonyl, all optionally substituted; R2 is halogen or C1-C10haloalkyl; X is halogen; Ar1 is for example biphenylyl or fluorenyl, or is substituted naphthyl; Ar′1 is heteroarylene, optionally substituted; R8, R9, R10 and R11 for example are C1-C6alkyl which is unsubstituted or substituted by halogen; or R8, R9 and R10 are phenyl which is unsubstituted or substituted by C1-C4alkyl or halogen; or R10 and R11 together are 1,2-phenylene or C2-C6alkylene which is unsubstituted or substituted by C1-C4alkyl or halogen.

    摘要翻译: 本发明涉及式I,II或III的新型光致酸产生剂化合物,其中R 1为例如C 1 -C 18烷基磺酰基或苯基磺酰基,苯基-C 1 -C 3烷基磺酰基,萘基磺酰基,蒽磺酰基或菲基磺酰基,均为任选取代的,或者R 1为基团X 1 ,X2和X3彼此独立地为O或S; R'1,例如 亚苯基二磺酰基,亚苯基二磺酰基,二苯基二磺酰基或氧基二苯基二磺酰基,全部任选被取代; R2是卤素或C1-C10卤代烷基; X是卤素; Ar1为例如联苯基或芴基,或为取代的萘基; Ar'1是杂亚芳基,任选取代; R8,R9,R10和R11例如是未被取代或被卤素取代的C1-C6烷基; 或R 8,R 9和R 10为未被取代或被C 1 -C 4烷基或卤素取代的苯基; 或R 10和R 11一起是1,2-亚苯基或未被取代或被C 1 -C 4烷基或卤素取代的C 2 -C 6亚烷基。