Wafer dicing device and method
    3.
    发明授权
    Wafer dicing device and method 失效
    晶圆切片装置及方法

    公开(公告)号:US06737606B2

    公开(公告)日:2004-05-18

    申请号:US10118666

    申请日:2002-07-09

    IPC分类号: B23K2638

    摘要: Methods and devices for cutting workpieces, which include a laser adapted to at least partially cut a workpiece, are described. The workpiece is a wafer having a plurality dies each with an integrated circuit. A mechanical cutter follows the laser and engages the workpiece. An embodiment of the mechanical cutter includes a cutting blade adapted to complete a cut through a workpiece. A method includes a two-pass cutting procedure. The first pass is made by a laser, which scribes the workpiece. The second pass is made by the mechanical cutter. In an embodiment, the mechanical cutter follows the scribe created by the laser. In an embodiment, the workpiece is supported by a table. The workpiece moves relative to the laser and the mechanical cutter.

    摘要翻译: 描述用于切割工件的方法和装置,其包括适于至少部分地切割工件的激光器。 工件是具有多个具有集成电路的管芯的晶片。 机械切割机跟随激光并与工件接合。 机械切割机的一个实施例包括适于完成穿过工件的切割的切割刀片。 一种方法包括双程切割程序。 第一次通过激光雕刻工件。 第二遍由机械切割机制成。 在一个实施例中,机械切割器遵循由激光产生的划痕。 在一个实施例中,工件由工作台支撑。 工件相对于激光和机械切割器移动。

    Method for cutting semiconductor wafers
    4.
    发明授权
    Method for cutting semiconductor wafers 失效
    切割半导体晶圆的方法

    公开(公告)号:US06576531B2

    公开(公告)日:2003-06-10

    申请号:US09944281

    申请日:2001-08-30

    IPC分类号: H01L21301

    摘要: Improperly mounted wafer saw blades can damage wafers cut or diced with the blades. Embodiments of this invention employ sensors to measure a distance to the blade to help indicate if the blade is improperly mounted. In one method of the invention, the distance to the blade face is measured as the blade is rotated and a variance in this measured distance is determined. If the variance is no greater than a predetermined maximum, the blade may be used to cut the wafer. In one apparatus of the invention, a wafer saw include a blade and a sensor. The sensor is adapted to monitor a distance to a face of the rotating blade. A processor coupled to the sensor may indicate if the distance to the face of the blade as it rotates deviates too far from a baseline position of the blade face.

    摘要翻译: 不正确安装的晶圆锯片可能会损坏刀片切割或切割的晶圆。 本发明的实施例使用传感器来测量与叶片的距离,以帮助指示叶片是否被不正确地安装。 在本发明的一种方法中,当叶片旋转时测量到叶片面的距离,并确定该测量距离的方差。 如果方差不大于预定的最大值,则刀片可用于切割晶片。 在本发明的一个装置中,晶片锯包括刀片和传感器。 该传感器适用于监测与旋转叶片面对的距离。 耦合到传感器的处理器可以指示当叶片旋转的距离是否偏离叶片面的基线位置太远时。