公开(公告)号：US08126255B2

公开(公告)日：2012-02-28

申请号：US12234201

申请日：2008-09-19

申请人： Kris Bhaskar ,  Chetana Bhaskar ,  Ashok Kulkarni ,  Eliezer Rosengaus ,  Cecelia Campochiaro ,  Chris Maher ,  Brian Duffy ,  Aneesh Khullar ,  Alpa Kohli ,  Lalita A. Balasubramanian ,  Santosh Bhattacharyya ,  Mohan Mahadevan

发明人： Kris Bhaskar ,  Chetana Bhaskar ,  Ashok Kulkarni ,  Eliezer Rosengaus ,  Cecelia Campochiaro ,  Chris Maher ,  Brian Duffy ,  Aneesh Khullar ,  Alpa Kohli ,  Lalita A. Balasubramanian ,  Santosh Bhattacharyya ,  Mohan Mahadevan

IPC分类号： G06K9/00

CPC分类号： G06T7/001 ,  G06T1/20 ,  G06T2207/30148

摘要： Various systems and methods for creating persistent data for a wafer and using persistent data for inspection-related functions are provided. One system includes a set of processor nodes coupled to a detector of an inspection system. Each of the processor nodes is configured to receive a portion of image data generated by the detector during scanning of a wafer. The system also includes an array of storage media separately coupled to each of the processor nodes. The processor nodes are configured to send all of the image data or a selected portion of the image data received by the processor nodes to the arrays of storage media such that all of the image data or the selected portion of the image data generated by the detector during the scanning of the wafer is stored in the arrays of the storage media.

摘要翻译： 提供了用于创建晶片的持久数据并使用持久数据进行检查相关功能的各种系统和方法。 一个系统包括耦合到检查系统的检测器的一组处理器节点。 每个处理器节点被配置为在扫描晶片期间接收由检测器产生的图像数据的一部分。 该系统还包括分开耦合到每个处理器节点的存储介质阵列。 处理器节点被配置为将由处理器节点接收的图像数据的所有图像数据或选定部分发送到存储介质阵列，使得由检测器生成的图像数据或图像数据的所选部分 在扫描晶片期间存储在存储介质的阵列中。

公开(公告)号：US20090080759A1

公开(公告)日：2009-03-26

申请号：US12234201

申请日：2008-09-19

申请人： Kris Bhaskar ,  Chetana Bhaskar ,  Ashok Kulkarni ,  Eliezer Rosengaus ,  Cecilia Campochiaro ,  Chris Maher ,  Brian Duffy ,  Aneesh Khullar ,  Alpa Kohli ,  Lalita A. Balasubramanian ,  Santosh Bhattacharyya ,  Mohan Mahadevan

发明人： Kris Bhaskar ,  Chetana Bhaskar ,  Ashok Kulkarni ,  Eliezer Rosengaus ,  Cecilia Campochiaro ,  Chris Maher ,  Brian Duffy ,  Aneesh Khullar ,  Alpa Kohli ,  Lalita A. Balasubramanian ,  Santosh Bhattacharyya ,  Mohan Mahadevan

IPC分类号： G06K9/00

CPC分类号： G06T7/001 ,  G06T1/20 ,  G06T2207/30148

摘要： Various systems and methods for creating persistent data for a wafer and using persistent data for inspection-related functions are provided. One system includes a set of processor nodes coupled to a detector of an inspection system. Each of the processor nodes is configured to receive a portion of image data generated by the detector during scanning of a wafer. The system also includes an array of storage media separately coupled to each of the processor nodes. The processor nodes are configured to send all of the image data or a selected portion of the image data received by the processor nodes to the arrays of storage media such that all of the image data or the selected portion of the image data generated by the detector during the scanning of the wafer is stored in the arrays of the storage media.

摘要翻译： 提供了用于创建晶片的持久数据并使用持久数据进行检查相关功能的各种系统和方法。 一个系统包括耦合到检查系统的检测器的一组处理器节点。 每个处理器节点被配置为在扫描晶片期间接收由检测器产生的图像数据的一部分。 该系统还包括分开耦合到每个处理器节点的存储介质阵列。 处理器节点被配置为将由处理器节点接收的图像数据的所有图像数据或选定部分发送到存储介质阵列，使得由检测器生成的图像数据或图像数据的所选部分 在扫描晶片期间存储在存储介质的阵列中。

公开(公告)号：US5502306A

公开(公告)日：1996-03-26

申请号：US214377

申请日：1994-03-17

申请人： Dan Meisburger ,  Alan D. Brodie ,  Curt Chadwick ,  Anil Desai ,  Hans Dohse ,  Dennis Emge ,  John Greene ,  Ralph Johnson ,  Ming-Yie Ling ,  John McMurtry ,  Barry Becker ,  Ray Paul ,  Mike Robinson ,  Richard Simmons ,  David E. A. Smith ,  John Taylor ,  Lee Veneklasen ,  Dean Walters ,  Paul Wieczorek ,  Sam Wong ,  April Dutta ,  Surendra Lele ,  Kirkwood Rough ,  Henry Pearce-Percy ,  Jack Y. Jau ,  Chun C. Lin ,  Hoi T. Nguyen ,  Yen-Jen Oyang ,  Timothy L. Hutcheson ,  David J. Clark ,  Chung-Shih Pan ,  Chetana Bhaskar ,  Chris Kirk ,  Eric Munro

发明人： Dan Meisburger ,  Alan D. Brodie ,  Curt Chadwick ,  Anil Desai ,  Hans Dohse ,  Dennis Emge ,  John Greene ,  Ralph Johnson ,  Ming-Yie Ling ,  John McMurtry ,  Barry Becker ,  Ray Paul ,  Mike Robinson ,  Richard Simmons ,  David E. A. Smith ,  John Taylor ,  Lee Veneklasen ,  Dean Walters ,  Paul Wieczorek ,  Sam Wong ,  April Dutta ,  Surendra Lele ,  Kirkwood Rough ,  Henry Pearce-Percy ,  Jack Y. Jau ,  Chun C. Lin ,  Hoi T. Nguyen ,  Yen-Jen Oyang ,  Timothy L. Hutcheson ,  David J. Clark ,  Chung-Shih Pan ,  Chetana Bhaskar ,  Chris Kirk ,  Eric Munro

IPC分类号： G01B15/00 ,  G01B15/08 ,  G01N23/04 ,  G01N23/203 ,  G01N23/225 ,  G01R31/307 ,  G03F1/08 ,  G03F1/16 ,  H01J37/147 ,  H01J37/20 ,  H01J37/22 ,  H01J37/244 ,  H01J37/28 ,  H01L21/027 ,  H01L21/66 ,  H01J37/26

CPC分类号： H01J37/28 ,  G01R31/307 ,  H01J2237/063 ,  H01J2237/184 ,  H01J2237/204 ,  H01J2237/24495 ,  H01J2237/30438

摘要： There is disclosed numerous embodiments of a method and apparatus for a particle scanning system and an automatic inspection system. In each of these a particle beam is directed at the surface of a substrate for scanning that substrate. Also included are a selection of detectors to detect at least one of the secondary particles, back-scattered particles and transmitted particles from the substrate. The substrate is mounted on an x-y stage to provide it with at least one degree of freedom while the substrate is being scanned by the/particle beam. The substrate is also subjected to an electric field on it's surface to accelerate the secondary particles. The system also has the capability to accurately measure the position of the substrate with respect to the charged particle beam. Additionally, there is an optical alignment means for initially aligning the substrate beneath the,particle beam means. To function most efficiently there is also a vacuum means for evacuating and repressurizing a chamber containing the substrate. The vacuum means can be used to hold one substrate at vacuum while a second one is being loaded/unloaded, evacuated or repressurized. Alternately, the vacuum means can simultaneously evacuate a plurality of substrates prior to inspection and repressurize of the same plurality of substrates following inspection. In the inspection configuration, there is also a comparison means for comparing the pattern on the substrate with a second pattern.

摘要翻译： 公开了用于粒子扫描系统和自动检查系统的方法和装置的许多实施例。 在其中的每一个中，粒子束被引导到用于扫描该衬底的衬底的表面。 还包括一些检测器，用于检测来自基底的二次粒子，背散射粒子和透射粒子中的至少一个。 衬底被安装在x-y平台上，以在衬底被/粒子束扫描的过程中提供至少一个自由度。 衬底也在其表面上经受电场以加速次级颗粒。 该系统还具有准确地测量衬底相对于带电粒子束的位置的能力。 另外，存在用于最初对准在粒子束装置下面的衬底的光学对准装置。 为了最有效地起作用，还有一种用于对含有基底的腔室进行抽空和再加压的真空装置。 真空装置可用于将一个基板保持在真空状态，而第二个装载/卸载，抽真空或再加压。 或者，真空装置可以在检查之后同时抽空多个基板，同时在检查之后检查并重新加压相同的​​多个基板。 在检查配置中，还存在用于将衬底上的图案与第二图案进行比较的比较装置。