Hinged plate
    3.
    外观设计

    公开(公告)号:USD1040867S1

    公开(公告)日:2024-09-03

    申请号:US29835579

    申请日:2022-04-20

    摘要: FIG. 1 is a perspective view of a hinged plate, showing a new design;
    FIG. 2 is a front elevation view thereof;
    FIG. 3. is a rear elevation view thereof;
    FIG. 4. is a left elevation view thereof;
    FIG. 5. is a right elevation view thereof;
    FIG. 6. is a top plan view thereof;
    FIG. 7. is a bottom plan view thereof; and,
    FIG. 8. is a perspective view of the hinged plate in an open state.

    Plasma processing apparatus
    6.
    发明授权

    公开(公告)号:US11948776B2

    公开(公告)日:2024-04-02

    申请号:US17641503

    申请日:2021-01-21

    IPC分类号: H01J37/00 H01J37/32 H05H1/46

    摘要: A plasma processing apparatus adapted to reduce non-uniformity of plasma distribution in a process chamber and to adjust the plasma distribution to “centrally high density”, “circumferentially high density”, or “uniform density” in accordance with a desired etching process, a process chamber; a radio frequency power source; a rectangular waveguide; and a circular waveguide connected to the rectangular waveguide, in which the rectangular waveguide includes an upper rectangular waveguide and a lower rectangular waveguide formed by vertically dividing the rectangular waveguide; and a cutoff section which cuts off the microwave frequency power and which has a dielectric body. The circular waveguide includes an inner waveguide connected to the upper rectangular waveguide and formed inside; and an outer waveguide connected to the lower rectangular waveguide and formed on an outer side of the inner waveguide. The cutoff section has a width narrower than those of the rectangular waveguides except the cutoff section.

    Test method and dispensing device

    公开(公告)号:US11879902B2

    公开(公告)日:2024-01-23

    申请号:US17268347

    申请日:2019-08-05

    IPC分类号: G01N35/00 G01N35/10

    摘要: An object of the present invention is to provide a test method capable of efficiently performing a step of evaluating a surface state of a dispensing probe provided in a dispensing apparatus. In the test method according to the present invention, a first solution in which a coloring matter is dissolved is dispensed to a first container in advance by a first dispensing probe, a second solution in which a coloring matter is not dissolved is dispensed to a second container in advance by the first dispensing probe and then the first solution and the second solution are respectively sucked and discharged by a second dispensing probe. After that, a surface state of the second dispensing probe is evaluated by acquiring an amount of the coloring matter collected by the second solution (see FIG. 2).