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公开(公告)号：US20240153797A1
公开(公告)日：2024-05-09
申请号：US18387524
申请日：2023-11-07
发明人： Gengoro Ogura , Toshihiro Kawai
IPC分类号： H01L21/67
CPC分类号： H01L21/67196
摘要： An EFEM includes a housing including a transfer chamber in which a processing target object is transferred, and a connection module provided between the transfer chamber and a front chamber, wherein the housing includes a rear member having a housing-side opening through which the processing target object is capable of passing, the connection module includes a first frame part arranged around the housing-side opening and pressed by a transfer chamber-side surface of the rear member, a second frame part provided in the front chamber and arranged around a front chamber-side opening, and connected to the first frame part, and a sealing part configured to seal the second frame part and the front chamber, and the sealing part includes a flexible portion capable of expanding and contracting at least in a predetermined direction, and an enclosure portion connected to the flexible portion and configured to enclose the front chamber-side opening.
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公开(公告)号：US20240137628A1
公开(公告)日：2024-04-25
申请号：US18381117
申请日：2023-10-16
发明人： Keigo Sato , Yuji Miyashita , Katsumi Yasuda
CPC分类号： H04N23/45 , G06T7/0004 , H01L21/67265 , G06T2207/30148
摘要： The load port includes a FOUP configured to accommodate a plurality of substrates in multiple stages, cameras configured to image each of the substrates accommodated in the FOUP and including a low-magnification camera with a wide horizontal angle of view and a high-magnification camera with a narrow horizontal angle of view, and a CPU configured to detect the accommodation state of each of the substrates based on the imaging data acquired from the low-magnification camera and the high-magnification camera, respectively.
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公开(公告)号：US11909339B2
公开(公告)日：2024-02-20
申请号：US17798110
申请日：2021-02-25
发明人： Yoji Masui
摘要： In a resonance suppression control device that controls suppression of vibrations in a resonance frequency in each vibration mode of a control target having a plurality of vibration modes, a configuration that is simple, and can suppress vibrations in a resonance frequency in the plurality of vibration modes is provided. A control device is a resonance suppression control device that controls suppression of vibrations in a resonance frequency in each vibration mode of a control target having a plurality of vibration modes. The control device includes a plurality of feedback loops that provide negative feedback of output of the control target corresponding to the plurality of vibration modes to an input side. The plurality of feedback loops respectively include band-pass filters that extract one or more vibration modes from the plurality of vibration modes, phase compensators, and amplitude adjusters. The band-pass filters and the phase compensators function as differentiators.
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公开(公告)号：US11823923B2
公开(公告)日：2023-11-21
申请号：US17860202
申请日：2022-07-08
IPC分类号： H01L21/67 , F24F13/28 , F24F7/06 , B01D53/04 , B65G49/07 , H01L21/677 , F24F3/167 , F24F7/08 , H01L21/673 , F24F7/003 , B01D53/40 , B01D53/42 , C12M1/12 , F24F6/00 , H01L21/687
CPC分类号： H01L21/67196 , B01D53/04 , B01D53/40 , B01D53/42 , B65G49/07 , C12M37/00 , F24F3/167 , F24F6/00 , F24F7/003 , F24F7/06 , F24F7/065 , F24F7/08 , F24F13/28 , H01L21/67017 , H01L21/67389 , H01L21/67393 , H01L21/67766 , H01L21/68707 , B01D2258/02
摘要： To provide a transfer chamber capable of replacing a chemical filter without affecting an internal atmosphere, and shortening or eliminating stop time of a transfer process of a wafer (W) associated with replacement of the chemical filter.
The transfer chamber transfers the wafer (W) to or from a processing device (6) by using a transfer robot (2) provided thereinside, and includes a circulation path (CL1) formed inside of a transfer chamber (1) to circulate gas, a chemical filter unit (7) provided in the midstream of the circulation path (CL1), and a connecting and disconnecting means (8) which switches connection and disconnection of the chemical filter unit (7) to and from the circulation path (CL1).-
公开(公告)号：US11713440B2
公开(公告)日：2023-08-01
申请号：US16723416
申请日：2019-12-20
摘要： According to one embodiment of the present disclosure, a cell culture system includes: a cell culture container; a liquid storage part configured to store a liquid including a culture medium or a reagent to be supplied to the cell culture container; and a cell collection part configured to collect cells cultured in the cell culture container, wherein the cell culture container, the liquid storage part, and the cell collection part are connected by spatially closed-system lines at least during a period from feeding of the liquid to the cell culture container to removal of the cultured cells, and wherein the cell culture container is arranged in an incubator in a form of a multistage shelf including a liquid supply/discharge port.
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公开(公告)号：US11610797B2
公开(公告)日：2023-03-21
申请号：US17297509
申请日：2019-11-25
发明人： Yasushi Taniyama , Toshihiro Kawai
IPC分类号： H01L21/677 , B65G1/04 , F24F13/06 , H01L21/687 , B25J11/00
摘要： A wafer stocker is capable of further improving an environment around wafers. The wafer stocker includes a housing, a loading device provided on a front surface of the housing, a wafer cassette shelf arranged in the housing, a wafer transfer robot configured to move the wafers from a transfer container mounted on the loading device to a wafer cassette in the wafer cassette shelf, a wafer cassette delivery device configured to move the wafer cassette in the wafer cassette shelf to a stage having a different height, and a fan filter unit configured to generate a laminar flow in a wafer transfer space and in a wafer cassette transfer space.
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公开(公告)号：US20220336245A1
公开(公告)日：2022-10-20
申请号：US17761816
申请日：2020-09-23
IPC分类号： H01L21/677 , B65G47/248
摘要： There is provided a technique capable of efficiently transporting a plurality of objects between a storage container configured to store the plurality of objects and a processing apparatus configured to collectively process the plurality of objects. A transport system 1 for transporting a plurality of objects between a storage container 9 configured to store the plurality of objects and a processing apparatus 2 configured to collectively process the plurality of objects held on a tray 8, includes: a mounting part 31 on which the storage container 9 is mounted; a stage 41 on which the plurality of objects are mounted; a tray support part 51 configured to support the tray 8; a first transport device 44 configured to transport the plurality of objects between the storage container 9 mounted on the mounting part 31 and the stage 41; and a second transport device 53 configured to transport the plurality of objects between the stage 41 and the tray 8 supported by the tray support part 51.
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公开(公告)号：US20220243161A1
公开(公告)日：2022-08-04
申请号：US17586153
申请日：2022-01-27
发明人： Daichi Horii , Yasumichi Mieno , Haruki Takeuchi
摘要： A cell culture device includes: a base; a rotary table attached to the base; a container holding member attached to the rotary table and configured to hold a cell culture container; and a drive mechanism configured to rotatably drive the rotary table around a first axis and the container holding member around a second axis, wherein a liquid port to which a liquid tube is connected is arranged on an outer peripheral surface of the cell culture container, wherein a first predetermined portion of the liquid tube is positioned on the container holding member by a first positioning member, wherein a second predetermined portion of the liquid tube is positioned on the rotary table by a second positioning member, and wherein the first positioning member is rotatably attached to the container holding member.
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公开(公告)号：US11202399B2
公开(公告)日：2021-12-14
申请号：US16469265
申请日：2018-01-10
发明人： Susumu Irie
摘要： The present invention provides a mounter air controller capable of executing appropriate air control associated with replacement of a nozzle without stopping operation of a mounter. This mounter air controller includes: a flow rate adjustment mechanism 4 mounted on a head module HM of the mounter; and control means 5 that controls this flow rate adjustment mechanism 4. The flow rate adjustment mechanism 4 is interposed between a positive-pressure region and a nozzle n and has a function capable of continuously changing a flow rate of passing air. The control means 5 is configured to bring the nozzle n to have a negative pressure and then control the flow rate in the flow rate adjustment mechanism 4 on the basis of an applied voltage or an applied current, which is determined in advance, so as to supply the air to the nozzle n.
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公开(公告)号：US11187301B2
公开(公告)日：2021-11-30
申请号：US16952265
申请日：2020-11-19
发明人： Hiroki Tanioka
摘要： There is provided a mechanical paradox planetary gear mechanism, including: a sun gear configured to be rotatable together with rotation of an input shaft; a plurality of first planetary gears arranged around the sun gear at equal intervals, and configured to rotate about their own axes while revolving around the sun gear in a state in which the first planetary gears mesh with the sun gear; a first internal gear arranged around the plurality of first planetary gears, and configured to mesh with the plurality of first planetary gears; a second internal gear arranged in the same axis as the first internal gear; and a plurality of second planetary gears respectively arranged on the same axes as the plurality of first planetary gears, and configured to mesh with the second internal gear.
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