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公开(公告)号：US20240291360A1
公开(公告)日：2024-08-29
申请号：US18587232
申请日：2024-02-26
发明人： Jayaraman kRISHNASAMY , Martin Hosek , Morteza Taghavi , Brett Guralnick , Ankur Gupta , Mark Talmer
CPC分类号： H02K15/022 , H02K1/146 , H02K5/165 , H02K11/25 , H02K21/24 , H02K2205/03
摘要： A method of making a stator includes providing a yoke, wherein the yoke comprises a spray-formed yoke; providing a tooth ring, wherein the tooth ring comprises a spray-formed tooth ring; separating portions of the tooth ring to form a plurality of teeth; arranging the separated teeth in a circular pattern, wherein each separated tooth is spaced from an adjacent tooth; inserting a coil over each separated tooth, wherein the coil includes two lead wires extending from a same face of each coil; locating the yoke onto the plurality of teeth; placing a housing onto the yoke; and connecting the coils to each other at the two lead wires extending from the same face of each coil.
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公开(公告)号：US11735466B2
公开(公告)日：2023-08-22
申请号：US16880056
申请日：2020-05-21
发明人： Scott Wilkas , Martin Hosek
CPC分类号： H01L21/68707 , B25J9/0087 , B25J9/02 , B25J9/105 , B25J9/1682 , B25J11/0095
摘要： An apparatus including a drive having motors and coaxial drive shafts; an arm assembly having a first arm and a second arm; and a controller. The first arm includes a first upper arm, a first forearm, a first end effector, and a first transmission, where the first transmission includes a non-circular pulley, and where the first upper arm and the first forearm have unequal effective lengths. The second arm includes a second upper arm, a second forearm, a second end effector, and a second transmission, where the second upper arm and the second forearm have substantially equal effective lengths. The controller is configured to cause the drive to extend and retract the arms to move an upper substrate and a lower substrate on the substrate holding areas such that the arm assembly and upper substrate do not travel over the lower substrate.
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公开(公告)号：US11697213B2
公开(公告)日：2023-07-11
申请号：US16788880
申请日：2020-02-12
发明人： Scott Wilkas
CPC分类号： B25J19/021 , B25J11/0095 , B25J19/026 , G01S13/881 , H01L21/67259
摘要： An apparatus including at least one emitter configured to emit energy; at least one receiver configured to receive the emitted energy, where the at least one emitter is mounted on at least one of: a robot arm, an end effector of the robot arm, a substrate on the robot arm, or a substrate process module, where the at least one receiver is mounted on at least one of: the robot arm, the end effector of the robot arm, the substrate on the robot arm, or the substrate process module.
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公开(公告)号：US20230198346A1
公开(公告)日：2023-06-22
申请号：US17963616
申请日：2022-10-11
发明人： Dennis Poole , Martin Hosek
IPC分类号： H02K11/22 , H02K5/22 , H02K7/10 , H02K5/00 , H02K5/10 , H02K41/03 , H02K21/44 , H02K5/128 , H02K9/22 , B25J9/12 , B25J13/08 , H02K3/30 , H02K3/44 , H02K15/12
CPC分类号： H02K11/22 , H02K5/225 , H02K7/1004 , H02K5/00 , H02K5/10 , H02K41/033 , H02K21/44 , H02K5/128 , H02K9/22 , B25J9/12 , B25J13/088 , H02K3/30 , H02K3/44 , H02K15/12 , Y10S901/23
摘要： An apparatus including a frame, an optical sensor connected to the frame, and an environment separation barrier. The frame is configured to be attached to a housing of a motor assembly proximate an aperture which extends through the housing. The optical sensor comprises a camera. The environment separation barrier is configured to be connected to the housing at the aperture, where the environment separation barrier is at least partially transparent and located relative to the camera to allow the camera to view an image inside the housing through the environment separation barrier and the aperture.
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公开(公告)号：US20220059379A1
公开(公告)日：2022-02-24
申请号：US17519057
申请日：2021-11-04
IPC分类号： H01L21/677 , F16C32/04 , H02J50/12 , H02J50/90 , H02J50/10
摘要： An apparatus including a first device configured to support at least one substrate thereon; and a first transport having the device connected thereto. The transport is configured to carry the device. The transport includes a plurality of supports which are movable relative to one another along a linear path; at least one magnetic bearing which at least partially couples the supports to one another. A first one of the magnetic bearings includes a first permanent magnet and a second magnet. The first permanent magnet is connected to a first one of the supports. A magnetic field adjuster is connected to the first support which is configured to move the first permanent magnet and/or vary influence of a magnetic field of the first permanent magnet relative to the second magnet.
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公开(公告)号：US10800050B2
公开(公告)日：2020-10-13
申请号：US15841675
申请日：2017-12-14
发明人： Martin Hosek , Tuan Ha , Christopher Hofmeister
IPC分类号： H01L21/677 , B25J19/00 , B25J9/04 , H05K7/20 , B25J11/00
摘要： An apparatus including a movable arm; a robot drive connected to the movable arm; and a heat transfer system. The robot drive includes a first drive configured to extend and retract the movable arm and a second drive configured to move the movable arm and the first drive along a linear path. The heat transfer system includes a first heat transfer member on the base and a second heat transfer member, where the heat transfer system is configured to transfer heat from the first drive to the first heat transfer member and then from the first heat transfer member to the second heat transfer member. The first heat transfer member travels with the base, and the first heat transfer member moves relative to the second heat transfer member as the base moves relative to the slide.
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公开(公告)号：US10593579B2
公开(公告)日：2020-03-17
申请号：US15841614
申请日：2017-12-14
IPC分类号： H01L21/677 , B25J9/04
摘要： A transport apparatus including a robot drive; an arm having a first end connected to the robot drive; and at least one end effector connected to a second end of the arm. The arm includes at least three links connected in series to form the arm. The arm is configured to be moved by the robot drive to move the at least one end effector among load locks and two or more sets of opposing process modules.
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公开(公告)号：US10543596B2
公开(公告)日：2020-01-28
申请号：US15803966
申请日：2017-11-06
IPC分类号： B25J9/04 , B25J18/04 , B25J15/00 , H01L21/677 , B25J9/10
摘要： An apparatus including a robot drive, a first arm having a first upper arm, a first forearm and a first end effector, where the first end effector comprises a first and second substrate support sections and a leg located between the first and second support sections which connects the substrate support sections to a wrist joint with the first forearm, and where a connection of the leg to the wrist joint is offset unequal distances relative to respective centerlines of the first and second substrate support sections, and a second arm having a second upper arm connected to the robot drive, where the first and second upper arms are connected to a first shaft of the robot drive to be rotated in unison, and where the wrist joint does not intersect the drive axis while the first arm is being extended and retracted.
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公开(公告)号：US10269606B2
公开(公告)日：2019-04-23
申请号：US14703216
申请日：2015-05-04
发明人： Martin Hosek
IPC分类号： H01L21/677 , B25J18/00 , B25J11/00 , B25J9/16 , H01L21/687 , B25J9/04
摘要： Providing a first movement including rotating a first arm about a rotational axis of a robot drive; rotating a second arm on the first arm, where the first and second arms form a robot arm, where the first and second arms are the only arms of the robot arm, where the robot arm has an end effector rotationally fixed to the second arm, and where the end effector is configured to support a substrate thereon for transporting the substrate by the robot arm; and controlling the rotating to provide a path of the end effector such that the end effector does not contact the substrate during the rotating. Providing a second movement including rotating the arms to provide an at least partially straight linear path of a center of the substrate relative to the rotational axis of the drive robot when the substrate is on the end effector.
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公开(公告)号：US10020704B2
公开(公告)日：2018-07-10
申请号：US15789382
申请日：2017-10-20
发明人： Martin Hosek , Tuan Ha , Christopher Hofmeister , Dennis Poole
IPC分类号： H02K11/00 , H02K5/128 , H02K5/22 , H02K21/44 , H02K41/03 , H02K5/00 , H02K9/22 , H02K3/30 , H02K3/44 , H02K15/12
CPC分类号： H02K5/128 , H02K3/30 , H02K3/44 , H02K5/00 , H02K5/225 , H02K9/22 , H02K15/12 , H02K21/44 , H02K41/033 , Y10S901/23
摘要： An apparatus including a motor housing which includes a plurality of electrical connector apertures through the motor housing; a plurality of first electrical connectors which include a projecting pin section; a plurality of second electrical connectors which include a socket section configured to receive a respective projecting pin section; and a casing configured to press the first electrical connectors against respective seals at the electrical connector apertures to seal the electrical connector apertures. The first electrical connectors project through the respective seals. The projecting pin sections are located in the respective socket sections of the second electrical connectors with a press-fit therebetween to thereby connect the first and second electrical connectors.
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