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    Scanning charged beam particle beam microscope
    81.
    发明授权
    Scanning charged beam particle beam microscope 失效
    扫描束束束光束显微镜

    公开(公告)号：US3857034A

    公开(公告)日：1974-12-24

    申请号：US35808073

    申请日：1973-05-07

    Applicant: MAX PLANCK GESELLSCHAFT

    Inventor： HOPPE W

    IPC: H01J37/04 ,  H01J37/05 ,  H01J37/244 ,  H01J37/28 ,  H01J37/26 ,  G01N23/00

    CPC classification number: H01J37/04 ,  H01J37/05 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/2441 ,  H01J2237/24465 ,  H01J2237/2449 ,  H01J2237/24507 ,  H01J2237/24585

    Abstract: For dark-field imaging of the specimen, a scanning corpuscularbeam microscope is equipped with multiple annular apertures located between the beam source and the specimen on the one hand and between the specimen and the detector on the other hand. The areas of the multiple annular apertures conjointly i.e. complementarily cover the ray path. The aperture situated in front of the detector is surrounded by a wide, radiationtransmitting region. The invention affords utilizing for the generation of the image not only the rays scattered outside of the aperture cone but also a large part of the rays scattered within this cone.

    Abstract translation: 对于样品的暗场成像，扫描型红外光束显微镜在一方面和另一方面在样品和检测器之间配备有多个环形孔，位于光束源和样品之间。 多个环形孔的区域联合地即互补地覆盖光线路径。 位于检测器前面的孔被宽的辐射透射区域包围。 本发明不仅可以利用散射在孔锥外的光线，而且可以利用散射在该锥体内的大部分光线。

    Device for measuring very small electric currents
    82.
    发明授权
    Device for measuring very small electric currents 失效
    用于测量非常小的电流的装置

    公开(公告)号：US3839674A

    公开(公告)日：1974-10-01

    申请号：US36754573

    申请日：1973-06-06

    Applicant: PHILIPS CORP

    Inventor： BROUWER G

    IPC: G01R19/00 ,  H01J37/05 ,  H01J43/30 ,  G01R1/30 ,  G01R19/26

    CPC classification number: G01R19/0023 ,  H01J37/05 ,  H01J43/30

    Abstract: Apparatus for measuring an electric current of the order of magnitude of 10 13 amps and smaller which comprises an evacuated envelope having a cathode and a control electrode for converting the current into a flow of distinct electrons proportional to the current, and an electron multiplier and anode for converting each distinct electron into a pulse for measurement. The apparatus may also have a positive feedback circuit to increase the speed of response.

    Abstract translation: 用于测量10ns或更小的数量级的电流的装置，其包括具有阴极的抽真空的外壳和用于将电流转换成与电流成比例的不同电子流的控制电极，以及电子 乘法器和阳极，用于将每个不同的电子转换成用于测量的脉冲。 该装置还可以具有正反馈电路以增加响应速度。

    Mass dependent ion microscope having an array of small mass filters
    83.
    发明授权
    Mass dependent ion microscope having an array of small mass filters 失效
    具有小型过滤器阵列的大量依赖离子显微镜

    公开(公告)号：US3819941A

    公开(公告)日：1974-06-25

    申请号：US40643673

    申请日：1973-10-15

    Applicant: BENDIX CORP

    Inventor： CARRICO J

    IPC: G01Q30/16 ,  G01Q30/20 ,  H01J37/05 ,  H01J37/285 ,  H01J49/42 ,  H01J37/26

    CPC classification number: H01J37/285 ,  H01J37/05 ,  H01J49/0004 ,  H01J49/009 ,  H01J49/4215

    Abstract: A mass dependent ion microscope having an array of very small mass filters, interposed between the source of an ion image and an image transducer for transmitting on a point-for-point basis only ions of a predetermined mass-to-charge ratio, is described. The point-for-point transmission by the mass filter array preserves the image information of the original ion image and permits the filtered ion image to be visually observed on a phosphor screen or otherwise detected. The individual filter elements of the array may be either of the monopole or quadrupole structure fabricated from glass.

    Electron microscope comprising a velocity filter system
    84.
    发明授权
    Electron microscope comprising a velocity filter system 失效
    包含速度滤波系统的电子显微镜

    公开(公告)号：US3624393A

    公开(公告)日：1971-11-30

    申请号：US3624393D

    申请日：1970-07-13

    Applicant: SOPELEM

    Inventor： TORQUEBIAU EMILE

    IPC: H01J37/26 ,  G01Q20/02 ,  G01Q30/02 ,  H01J37/05 ,  H01J37/12 ,  H01J37/14

    CPC classification number: H01J37/05

    Abstract: In an electron microscope having a velocity filtering system involving reflection in a prism, the normal objective lens is replaced by a complex lens comprising three electrostatic lens elements. This arrangement enables the order of image and diffraction diagram in the propagation path to be reversed, so that the diffraction diagram can be filtered as well as the image.

    Atom probe field microscope having means for separating the ions according to mass
    85.
    发明授权
    Atom probe field microscope having means for separating the ions according to mass 失效
    具有根据质量分离离子的手段的原子探针场显微镜

    公开(公告)号：US3602710A

    公开(公告)日：1971-08-31

    申请号：US3602710D

    申请日：1969-05-07

    Applicant: RESEARCH CORP

    Inventor： MUELLER ERWIN W

    IPC: G01Q30/12 ,  G01Q80/00 ,  H01J37/05 ,  H01J37/285 ,  H01J49/30 ,  H01J39/34

    CPC classification number: H01J49/30 ,  H01J37/05 ,  H01J37/285

    Abstract: A field ion microscope capable of isolating and analyzing one or a few atoms of a specimen comprises a field ion microscope section including an emitter tip mounting the specimen to be examined, an apertured screen in the path of the beam of ions emitted by the specimen and means for adjusting the path traversed by the ion beam with respect to the aperture in the screen to cause a selected area of the beam to pass through the aperture and an ion detector positioned in the path of ions passing through the aperture. The path of the ion beam emitted by the specimen by the application of a high voltage may be altered by beam-deflecting means adjacent the beam path or by varying the angular disposition of the emitter tip with respect to the image screen, or the beam may be allowed to drift through a long tube and measured in its time-of-flight in each case using a detector of single particle sensitivity.

    Energy filter for use in the implantation of ions into a substrate
    89.
    发明授权
    Energy filter for use in the implantation of ions into a substrate 有权

    公开(公告)号：US12266499B2

    公开(公告)日：2025-04-01

    申请号：US17631186

    申请日：2020-07-30

    Applicant: MI2-FACTORY GMBH

    Inventor： Constantin Csato ,  Florian Krippendorf

    IPC: H01J37/05 ,  G21K1/10

    Abstract: The energy filter for use in the implantation of ions into a substrate is micropatterned for establishing, in the substrate, a dopant depth profile and/or defect depth profile brought about by the implantation, and has two or more layers or layer sections which are arranged one after another in the height direction of the energy filter. The energy filter also has a plurality of cavities each of which arranged between at least two layers or layer sections, with interior walls bounding the cavities and joining the at least two layers or layer sections to one another.

    Electron Filter
    90.
    发明申请
    Electron Filter 有权

    公开(公告)号：US20250087449A1

    公开(公告)日：2025-03-13

    申请号：US18826469

    申请日：2024-09-06

    Applicant: Oxford Instruments Nanotechnology Tools Limited

    Inventor： Peter Statham

    IPC: H01J37/244 ,  H01J37/05 ,  H01J37/28

    Abstract: An X-ray detector adapted to reduce the transmission of backscattered electrons from a specimen therethrough is provided, the X-ray detector comprising: a detection element, and a filter positioned between the specimen and the detection element in use, the filter comprising a first material layer formed from an electrically insulating material and a second material layer formed from an electrically conductive material, the second material layer being arranged on a side of the first material layer closest to the detection element, wherein the X-ray detector is adapted such that the second material layer is electrically connectable, when in use, to a reference potential so as to shield the detection element from an electric field attributable to a build-up of charge in the first material layer due to incident electrons in use.

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