Superconducting layer in contact with group III-V semiconductor layer
for wiring structure
    71.
    发明授权
    Superconducting layer in contact with group III-V semiconductor layer for wiring structure 失效
    与导体结构III-V族半导体层接触的超导层

    公开(公告)号:US5760463A

    公开(公告)日:1998-06-02

    申请号:US601646

    申请日:1996-02-14

    申请人: Tsunehiro Hato

    发明人: Tsunehiro Hato

    摘要: A superconductor device which includes a first wiring part and a second wiring part which together form a superconductive wiring. The first wiring part is arranged onto a substrate and is made of a superconductor material. The second wiring part is made of a non-oxide semiconductor material. The second wiring part is adjacent to the first wiring part and jointly forms a superconductive wiring with the first wiring part by becoming at least partly superconductive due to proximity effect with the first wiring part. The second wiring part has a smaller penetration length of magnetic field than that for the first wiring part. This structure enhances the propagation velocity of a signal within the superconductive wiring.

    摘要翻译: 一种超导体装置,其包括一起形成超导布线的第一布线部和第二布线部。 第一布线部分布置在基板上并且由超导体材料制成。 第二配线部由非氧化物半导体材料制成。 第二布线部分与第一布线部分相邻,并且由于与第一布线部分的接近效应,通过变得至少部分地超导而与第一布线部分共同形成超导布线。 第二配线部分具有比第一配线部分更小的磁场穿透长度。 这种结构增强了超导布线内信号的传播速度。

    Microwave plasma monitoring system for the elemental composition
analysis of high temperature process streams
    72.
    发明授权
    Microwave plasma monitoring system for the elemental composition analysis of high temperature process streams 失效
    微波等离子体监测系统,用于高温过程流的元素组成分析

    公开(公告)号:US5671045A

    公开(公告)日:1997-09-23

    申请号:US540575

    申请日:1995-10-06

    CPC分类号: G01N21/73

    摘要: Microwave-induced plasma for continuous, real time trace element monitoring under harsh and variable conditions. The sensor includes a source of high power microwave energy and a shorted waveguide made of a microwave conductive, high temperature capability refractory material communicating with the source of the microwave energy to generate a plasma. The high power waveguide is constructed to be robust in a hot, hostile environment. It includes an aperture for the passage of gases to be analyzed and a spectrometer is connected to receive light from the plasma. Provision is made for real time in situ calibration. The spectrometer disperses the light, which is then analyzed by a computer. The sensor is capable of making continuous, real time quantitative measurements of desired elements, such as the heavy metals lead and mercury. The invention may be incorporated into a high temperature process device and implemented in situ for example, such as with a DC graphite electrode plasma arc furnace. The invention further provides a system for the elemental analysis of process streams by removing particulate and/or droplet samples therefrom and entraining such samples in the gas flow which passes through the plasma flame. Introduction of and entraining samples in the gas flow may be facilitated by a suction pump, regulating gas flow, gravity or combinations thereof.

    摘要翻译: 微波诱导等离子体在恶劣条件下进行连续,实时的微量元素监测。 该传感器包括高功率微波能量源和由与微波能量源连通以产生等离子体的微波导电高温能耐火材料制成的短路波导。 高功率波导被构造为在热的,恶劣的环境中是坚固的。 它包括用于待分析气体通过的孔,并且连接光谱仪以接收来自等离子体的光。 经费用于实时在线校准。 光谱仪分散光,然后由计算机分析。 传感器能够对所需元素进行连续的实时定量测量,如重金属铅和汞。 本发明可以结合到高温工艺装置中并且例如用DC石墨电极等离子体电弧炉就地实现。 本发明还提供了一种用于通过从其中除去颗粒和/或液滴样品并将这些样品夹带在通过等离子体火焰的气流中进行元素分析工艺流的系统。 气流中的引入和夹带样品可以通过抽吸泵,调节气流,重力或其组合来促进。

    Monolithic integration of microwave silicon devices and low loss
transmission lines
    73.
    发明授权
    Monolithic integration of microwave silicon devices and low loss transmission lines 失效
    微波硅器件与低损耗输电线路的整体集成

    公开(公告)号:US5612556A

    公开(公告)日:1997-03-18

    申请号:US427761

    申请日:1995-04-25

    摘要: A monolithic integrated circuit capable of operation in the microwave range which is fabricated using silicon technology wherein transmission line interconnects are fabricated along with active devices on the same substrate. The transmission line is provided using polycrystalline silicon since it can have much higher resistivity than single crystal silicon. Accordingly, a circuit is provided wherein active devices are provided in single crystal silicon and interconnects are formed overlying polycrystalline silicon to provide transmission line interconnects between devices and obtain the desired high frequency response. This is accomplished by providing a highly doped silicon substrate of predetermined conductivity type having a less highly doped silicon layer thereon of the same conductivity type with an oxide layer over the less highly doped layer, forming mesas for formation therein of active elements in the structure having valleys between the mesas extending into the substrate, filling the valleys with very high resistivity polysilicon, forming an electrically insulating layer over the polysilicon, forming active elements with contacts thereto in the mesas and forming interconnects between contacts of the active elements extending over the high resistivity polysilicon regions and the electrically insulating material thereover.

    摘要翻译: 能够在微波范围内操作的单片集成电路,其使用硅技术制造,其中传输线互连与有源器件一起制造在同一衬底上。 传输线使用多晶硅提供,因为它可以具有比单晶硅高得多的电阻率。 因此,提供了一种电路,其中在单晶硅中提供有源器件,并且在多晶硅上形成互连以在器件之间提供传输线互连并获得期望的高频响应。 这是通过提供具有相同导电类型的具有相同导电类型的较低掺杂硅层的高掺杂硅衬底,在较高掺杂层上形成氧化物层,形成台面以在其中形成结构中的有源元件,其中具有 位于延伸到衬底中的台面之间的谷,用非常高电阻率的多晶硅填充谷,在多晶硅上形成电绝缘层,在台面中形成与其接触的有源元件,并且在高电阻率上延伸的有源元件的触点之间形成互连 多晶硅区域和其上的电绝缘材料。

    Joint device including superconductive probe-heads for capacitive
microwave coupling
    74.
    发明授权
    Joint device including superconductive probe-heads for capacitive microwave coupling 失效
    联合装置包括用于电容式微波耦合的超导探头

    公开(公告)号:US5543386A

    公开(公告)日:1996-08-06

    申请号:US202569

    申请日:1994-02-28

    摘要: A joint device structure for capacitive microwave coupling of a superconducting device arranged on a substrate with room temperature circuitry; including a superconducting wave guide of an oxide superconductor on said substrate from one side to the superconducting device launching microwave to the superconducting device, a pair of superconducting groundplanes of an oxide superconductor arranged at an end of the superconducting wave guide sandwiching the end of the superconducting wave guide with a little gap and a microwave probe-head connected to the room temperature circuitry arranged above the superconducting wave guide with a coupling gap having three probing pins corresponding to the superconducting wave guide and the superconducting groundplanes.

    摘要翻译: 一种用于将布置在基板上的超导装置与室温电路的电容性微波耦合的联合装置结构; 包括在所述衬底上的氧化物超导体的超导波导从一侧向发射微波的超导装置提供给超导装置,一对超导地平面布置在超导波导端部的超导波导中,该超导平面夹着超导结束 具有一点缝隙的波导管和连接到布置在超导波导上方的室温电路的微波探针头,具有耦合间隙,具有对应于超导波导和超导接地面的三个探针。

    Packaging architecture for phased arrays
    75.
    发明授权
    Packaging architecture for phased arrays 失效
    相控阵列的包装架构

    公开(公告)号:US5488380A

    公开(公告)日:1996-01-30

    申请号:US123086

    申请日:1993-09-20

    CPC分类号: H01Q21/0025 H01Q21/0087

    摘要: A dipole antenna is inserted into a waveguide to couple EM energy into and out of a waveguide. The dipole antenna is printed on a substrate of a module that contains electronic components. The substrate includes a coupled coplanar strip transmission line connecting the dipole antenna to a slotline. EM energy is electromagnetically coupled between the slotline and a microstrip transmission line. The EM energy is provided to and from the hermetically sealed electronic components by the microstrip transmission line.

    摘要翻译: 将偶极天线插入到波导中以将EM能量耦合到波导中和从波导传出。 将偶极天线印刷在包含电子部件的模块的基板上。 衬底包括将偶极天线连接到槽线的耦合共面条传输线。 EM能量在槽线和微带传输线之间电磁耦合。 通过微带传输线将EM能量提供给密封的电子部件。

    Microwave feedthrough apparatus
    76.
    发明授权
    Microwave feedthrough apparatus 失效
    微波馈通装置

    公开(公告)号:US5428327A

    公开(公告)日:1995-06-27

    申请号:US110583

    申请日:1993-08-23

    申请人: Inder J. Bahl

    发明人: Inder J. Bahl

    IPC分类号: H01L23/66 H01P1/00 H01P3/08

    摘要: An improved microwave feedthru apparatus is disclosed which provides enhanced performance over the 1-20 GHz frequency range. In its preferred embodiment the apparatus will be used to transmit microwave signals into and out of monolithic microwave integrated circuit (MMIC) packages. The apparatus utilizes a coplanar waveguide (CPW) transmission line section to guide the microwave signal through the wall of the package, substantially free of any in band resonance effects.

    摘要翻译: 公开了一种改进的微波馈电装置,其在1-20GHz频率范围内提供增强的性能。 在其优选实施例中,装置将用于将微波信号发射到单片微波集成电路(MMIC)封装中和从单片微波集成电路(MMIC)封装中传出。 该装置利用共面波导(CPW)传输线部分引导微波信号通过封装的壁,基本上没有任何带内共振效应。

    Wideband flat power detector
    79.
    发明授权
    Wideband flat power detector 失效
    宽带平坦功率检测器

    公开(公告)号:US5325064A

    公开(公告)日:1994-06-28

    申请号:US992310

    申请日:1992-12-21

    CPC分类号: G01R21/12

    摘要: A wideband detector having a substantially flat response is made by using the signal at the isolation port of a coupler. As the response or transfer characteristic at the isolation port is substantially linear, a matching network having the inverse opposite transfer characteristic with respect to frequency may be connected to the coupler. The addition of the matching network transfer characteristic to the transfer characteristic of the coupler in the isolation port produces a superposition. Accordingly, the matching network transfer characteristic compensates for the linear varying transfer characteristic at the coupler isolation port to produce a substantially flat output of the matching network. The detector connected to the matching network output will then produce a detector signal which is substantially flat over the frequency range of the bandspread of interest.

    摘要翻译: 通过使用耦合器的隔离端口处的信号来进行具有基本平坦响应的宽带检测器。 由于隔离端口的响应或传输特性基本上是线性的,所以具有与频率相反的相反传输特性的匹配网络可以连接到耦合器。 将匹配网络传输特性添加到隔离端口中的耦合器的传输特性产生叠加。 因此,匹配网络传输特性补偿耦合器隔离端口处的线性变化传输特性,以产生匹配网络的基本平坦的输出。 连接到匹配网络输出端的检测器将产生一个检测器信号,该信号在感兴趣的带宽的频率范围上基本上是平坦的。

    Apparatus and a method for an electrical transmission-line interface
    80.
    发明授权
    Apparatus and a method for an electrical transmission-line interface 失效
    电传输线接口的装置和方法

    公开(公告)号:US5304969A

    公开(公告)日:1994-04-19

    申请号:US951741

    申请日:1992-09-25

    CPC分类号: H01P1/04

    摘要: A new interface and a method for making the same, and more particularly, an electrical transmission-line interface and a method for making the same. On a substrate having semiconductors, a driver or receiver circuit is provided to interface with an electrical transmission-line. Integral means for the electrical transmission-line alignment, support and transit through a sealed environment is also provided. A fluid tight seal can also be provided for the various components that are in the interior of the housing. Variable time-delay means is provided for a computer clock system or other microwave applications.

    摘要翻译: 一种新的接口及其制造方法,更具体地说,涉及一种电气传输线接口及其制造方法。 在具有半导体的基板上,提供驱动器或接收器电路以与电气传输线接口。 还提供了用于电气传输线对准,支撑和通过密封环境的整体装置。 还可以为壳体内部的各种部件提供流体密封。 为计算机时钟系统或其他微波应用提供了可变时延装置。