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517 条记录 (耗时 0.029 秒)

    Charged particle energy analyzers
    71.
    发明授权
    Charged particle energy analyzers 失效
    充电颗粒能量分析仪

    公开(公告)号：US5185524A

    公开(公告)日：1993-02-09

    申请号：US699669

    申请日：1991-05-14

    申请人： Simon C. Page

    发明人： Simon C. Page

    IPC分类号： H01J37/05 ,  H01J37/244 ,  H01J49/44 ,  H01J49/48

    CPC分类号： H01J49/484 ,  H01J37/05

    摘要： A charged particle energy analyzer includes two hemispherical electrodes and means for developing an inverse square electric field in the gap between the two electrodes. An afocal charged particle lens arrangement is arranged to project a charged particle image of a sample into the electric field. Two baffles are disposed in the gap between the electrodes the baffles being effective to restrict the energy and angular divergence of the particles transmitted by the analyzer, the baffles being positioned so as to reduce the dependence of the energy and the orientation of the charged particles transmitted by the baffles on the position of the particles within the image. A two-dimensional detector is arranged to detect the charged particle image transmitted by the analyzer.

    Electron energy filter
    72.
    发明授权
    Electron energy filter 失效
    电子能量过滤器

    公开(公告)号：US5177361A

    公开(公告)日：1993-01-05

    申请号：US812626

    申请日：1991-12-23

    申请人： Dieter Krahl ,  Hans Patzold ,  Albrecht Rilk ,  Johannes Bihr

    发明人： Dieter Krahl ,  Hans Patzold ,  Albrecht Rilk ,  Johannes Bihr

    IPC分类号： G01Q30/02 ,  H01J37/05 ,  H01J49/46

    CPC分类号： H01J37/05 ,  H01J49/46

    摘要： The invention is directed to an electron energy filter which is assembled from three or four plates placed together in a sandwich-like configuration. The pole pieces are seated on the inner sides of the outer plates and attached thereto. The pole pieces can therefore be produced in pairs so that their outer surfaces match precisely. This assembly is economical and provides a precise manufacture.

    摘要翻译： 本发明涉及一种电子能量过滤器，其以三明治状构造放置在一起的三个或四个板组装。 极片位于外板的内侧并附接在其上。 因此，极片可以成对地制造，使得它们的外表面精确匹配。 该组件是经济的并且提供精确的制造。

    Device for providing an energy filtered charge particle image
    74.
    发明授权
    Device for providing an energy filtered charge particle image 失效
    用于提供能量过滤的电荷粒子图像的装置

    公开(公告)号：US4810883A

    公开(公告)日：1989-03-07

    申请号：US6712

    申请日：1987-01-29

    申请人： David W. Turner

    发明人： David W. Turner

    IPC分类号： H01J37/05 ,  H01J49/46

    CPC分类号： B82Y15/00 ,  H01J37/05 ,  H01J49/46

    摘要： A device for providing an energy filtered charged particle image particularly an electron image in the form of an electron energy analyzer which acts as a band-pass filter whilst maintaining the spatial integrity of the electron image in a uniform magnetic field. It embodies new electron optical properties wherein image electrons injected parallel to the magnetic field are guided, using crossed electrostatic and magnetic fields, to a low-pass electron mirror and then through a high-pass retardation filter. Non-uniform electrostatic deflection fields are used to compensate for the energy-dependent dispersion of the crossed fields whereby it is possible to correct for image distortion resulting from such dispersion.

    摘要翻译： PCT No.PCT / GB86 / 00298 Sec。 371日期1987年1月29日 102（e）日期1987年1月29日PCT申请日1986年5月30日PCT公布。 出版物WO86 / 07188 日期为1986年12月4日。一种用于提供能量过滤的带电粒子图像的装置，特别是电子能量分析仪形式的电子图像，其作为带通滤光器，同时将电子图像的空间完整性保持在均匀的磁 领域。 它体现了新的电子光学特性，其中平行于磁场的图像电子使用交叉的静电场和磁场被引导到低通电子镜，然后通过高通延迟滤波器。 使用非均匀的静电偏转场来补偿交叉场的能量相关色散，由此可以校正由这种色散引起的图像失真。

    Spectrometer objective for electron beam mensuration techniques
    75.
    发明授权
    Spectrometer objective for electron beam mensuration techniques 失效
    电子束测量技术的光谱仪物镜

    公开(公告)号：US4808821A

    公开(公告)日：1989-02-28

    申请号：US874498

    申请日：1986-06-16

    申请人： Hans-Peter Feuerbaum ,  Juergen Frosien

    发明人： Hans-Peter Feuerbaum ,  Juergen Frosien

    IPC分类号： H01J37/28 ,  G01Q20/02 ,  G01Q20/04 ,  G01Q30/02 ,  G01R31/28 ,  G01R31/305 ,  H01J37/10 ,  H01J37/147 ,  H01J37/244 ,  H01J37/26 ,  H01J49/06 ,  H01J49/44 ,  H01J49/48 ,  H01J37/05

    CPC分类号： H01J49/06 ,  G01R31/305 ,  H01J37/1474 ,  H01J37/268 ,  H01J49/488

    摘要： A spectrometer objective is composed of a short focal length, asymmetrical objective lens comprising an integrated electrostatic opposing field spectrometer and a single-stage deflection system arranged within the magnetic lens. Since the deflection of primary electrons occurs within the spectrometer objective, the space for a two-state deflection system employed in conventional systems between a condenser lens and an objective lens can be eliminated. The extremely-short structural length of the electron beam measuring apparatus which is thereby obtainable, in turn, has a beneficial effect on the influence of the lateral Boersch effect on probe diameter, this influence increasing with the length of the electron-optical beam path.

    摘要翻译： 光谱仪物镜由包括集成静电相对场光谱仪的短焦距不对称物镜和布置在磁透镜内的单级偏转系统组成。 由于一次电子的偏转发生在光谱仪物镜内，因此可以消除在聚光透镜和物镜之间的常规系统中采用的两状态偏转系统的空间。 由此可以获得电子束测量装置的极短的结构长度，对横向Boersch效应对探针直径的影响具有有益的影响，这种影响随着电子束光路的长度而增加。

    Alpha-type electron energy filter
    76.
    发明授权
    Alpha-type electron energy filter 失效
    Alpha型电子能过滤器

    公开(公告)号：US4760261A

    公开(公告)日：1988-07-26

    申请号：US907043

    申请日：1986-09-12

    申请人： Harald Rose ,  Stefan Lanio

    发明人： Harald Rose ,  Stefan Lanio

    IPC分类号： H01J37/05 ,  H01J37/26 ,  H01J49/44 ,  H05B31/26 ,  G21K1/08

    CPC分类号： H01J37/05

    摘要： An image forming alpha filter having pole pieces with straight edges is disclosed which has good local resolution and very good energy resolution. It includes three deflection regions, which are separated from one another by relatively large interspaces.

    摘要翻译： 公开了具有良好的局部分辨率和非常好的能量分辨率的具有直边缘极片的图像形成α滤光器。 它包括三个偏转区域，它们通过相对较大的间隙彼此分开。

    Opposing field spectrometer for electron beam mensuration technology
    77.
    发明授权
    Opposing field spectrometer for electron beam mensuration technology 失效
    电子束测量技术的反射场光谱仪

    公开(公告)号：US4683376A

    公开(公告)日：1987-07-28

    申请号：US773863

    申请日：1985-09-09

    申请人： Hans-Peter Feuerbaum

    发明人： Hans-Peter Feuerbaum

    IPC分类号： G01R19/00 ,  G01Q30/02 ,  G01R31/302 ,  G01R31/305 ,  H01J37/05 ,  H01J37/26 ,  G01N23/00

    CPC分类号： H01J37/05 ,  G01R31/305 ,  H01J37/268

    摘要： An electrostatic opposing field spectrometer has an extraction electrode (AN) and an opposing field electrode arrangement with a pair of planar opposing field electrodes (EG1 and EG2) mounted to an outer electrode part (EM) at either end of a truncated conical shaped bore extending therethrough, where the smaller opening of the bore is in the direction of the extraction electrode (AN). The planar opposing field electrodes (EG1 and EG2), in conjunction with the bore surface, generates substantially spherical equi-potential lines (A1 and A2) which transmit a larger solid angle distribution of secondary electrons (SE) triggered at a measuring point (M) on the specimen surface (PR).

    摘要翻译： 静电相对场光谱仪具有提取电极（AN）和相对的场电极装置，其具有一对平面相对的场电极（EG1和EG2），其安装到在截锥形孔延伸的任一端的外电极部分（EM） 其中孔的较小开口沿着提取电极（AN）的方向。 平面相对的场电极（EG1和EG2）与孔表面一起产生基本上球形的等电位线（A1和A2），其传播在测量点（M）处触发的二次电子（SE）的较大立体角分布 ）在样品表面（PR）上。

    Ion implanter
    78.
    发明授权
    Ion implanter 失效
    离子注入机

    公开(公告)号：US4634931A

    公开(公告)日：1987-01-06

    申请号：US636996

    申请日：1984-08-02

    申请人： Shunroku Taya ,  Susumu Kozasa

    发明人： Shunroku Taya ,  Susumu Kozasa

    IPC分类号： H01J37/05 ,  H01J37/30 ,  H01J37/317 ,  H01J49/20 ,  H01J49/30 ,  H01L21/265 ,  H01J7/24 ,  H05B31/26

    CPC分类号： H01J37/3007 ,  H01J37/3171

    摘要： Ions emitted from an ion source are dispersed by a dispersion means, and those ions of a predetermined mass number are extracted from the thus-dispersed ions and are selectively implanted into a sample. A plane of incidence of ions in the mass-dispersing means is so formed that the angle of incidence of ions thereon has a negative value, and a plane of emission of ions therein is so formed that the angle of emission of ions of the predetermined mass number therefrom has a positive value.

    摘要翻译： 从离子源发出的离子通过分散装置分散，从这样分散的离子中提取出预定质量的离子，并选择性地将其注入到样品中。 质量分散装置中的离子入射面被形成为使得其上的离子的入射角具有负值，并且其中的离子的发射面形成为使得预定质量的离子的发射角 其数量为正值。

    Scanning charged beam particle beam microscope
    80.
    发明授权
    Scanning charged beam particle beam microscope 失效
    扫描束束束光束显微镜

    公开(公告)号：US3857034A

    公开(公告)日：1974-12-24

    申请号：US35808073

    申请日：1973-05-07

    申请人： MAX PLANCK GESELLSCHAFT

    发明人： HOPPE W

    IPC分类号： H01J37/04 ,  H01J37/05 ,  H01J37/244 ,  H01J37/28 ,  H01J37/26 ,  G01N23/00

    CPC分类号： H01J37/04 ,  H01J37/05 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/2441 ,  H01J2237/24465 ,  H01J2237/2449 ,  H01J2237/24507 ,  H01J2237/24585

    摘要： For dark-field imaging of the specimen, a scanning corpuscularbeam microscope is equipped with multiple annular apertures located between the beam source and the specimen on the one hand and between the specimen and the detector on the other hand. The areas of the multiple annular apertures conjointly i.e. complementarily cover the ray path. The aperture situated in front of the detector is surrounded by a wide, radiationtransmitting region. The invention affords utilizing for the generation of the image not only the rays scattered outside of the aperture cone but also a large part of the rays scattered within this cone.

    摘要翻译： 对于样品的暗场成像，扫描型红外光束显微镜在一方面和另一方面在样品和检测器之间配备有多个环形孔，位于光束源和样品之间。 多个环形孔的区域联合地即互补地覆盖光线路径。 位于检测器前面的孔被宽的辐射透射区域包围。 本发明不仅可以利用散射在孔锥外的光线，而且可以利用散射在该锥体内的大部分光线。