公开(公告)号：US5185524A

公开(公告)日：1993-02-09

申请号：US699669

申请日：1991-05-14

Applicant: Simon C. Page

Inventor： Simon C. Page

IPC: H01J37/05 ,  H01J37/244 ,  H01J49/44 ,  H01J49/48

CPC classification number: H01J49/484 ,  H01J37/05

Abstract: A charged particle energy analyzer includes two hemispherical electrodes and means for developing an inverse square electric field in the gap between the two electrodes. An afocal charged particle lens arrangement is arranged to project a charged particle image of a sample into the electric field. Two baffles are disposed in the gap between the electrodes the baffles being effective to restrict the energy and angular divergence of the particles transmitted by the analyzer, the baffles being positioned so as to reduce the dependence of the energy and the orientation of the charged particles transmitted by the baffles on the position of the particles within the image. A two-dimensional detector is arranged to detect the charged particle image transmitted by the analyzer.

公开(公告)号：US5286974A

公开(公告)日：1994-02-15

申请号：US962250

申请日：1992-10-16

Applicant: Andrew R. Walker ,  Simon C. Page

Inventor： Andrew R. Walker ,  Simon C. Page

IPC: G01N23/225 ,  G01Q30/02 ,  G21K5/04 ,  H01J37/02 ,  H01J37/20 ,  H01J37/252 ,  H01J37/285 ,  H01J49/08 ,  H01J49/44

CPC classification number: H01J37/026 ,  H01J37/285

Abstract: A charged particle energy analyser has a magnetic lens such as a snorkel-type lens and a source for directing ionising radiation onto a specimen causing charged particles to be emitted from its surface. The specimen is immersed in the magnetic imaging field of the magnetic lens so that particles having energies in a predetermined energy range are brought to a focus, the energies of the focussed particles being analysed by an energy analyser. An electrode arrangement is provided for enabling the magnetic imaging field of the magnetic lens to utilise unfocussed particles to cause charge neutralisation of the specimen. Alternatively, charged particles from a source are subjected to an electric field which is transverse to the optical axis of the magnetic lens and are guided onto the specimen by the magnetic imaging field of the magnetic lens.

Abstract translation: 带电粒子能量分析仪具有诸如浮潜型透镜的磁性透镜和用于将电离辐射引导到试样上的源，从而使带电粒子从其表面发射。 将样品浸入磁性透镜的磁性成像领域，使具有预定能量范围内的能量的粒子聚焦，由能量分析仪分析聚焦粒子的能量。 提供了一种电极装置，用于使得磁性透镜的磁性成像领域能够利用未被聚焦的颗粒来引起样品的电荷中和。 或者，来自源极的带电粒子经受横向于磁性透镜的光轴的电场，并通过磁性透镜的磁性成像场被引导到样品上。