Scanning type exposure apparatus, method of manufacturing micro-apparatus, mask, projection optical apparatus, and method of manufacturing mask
    71.
    发明授权
    Scanning type exposure apparatus, method of manufacturing micro-apparatus, mask, projection optical apparatus, and method of manufacturing mask 有权
    扫描型曝光装置,微型装置的制造方法,掩模,投影光学装置及掩模的制造方法

    公开(公告)号:US08654307B2

    公开(公告)日:2014-02-18

    申请号:US11723124

    申请日:2007-03-16

    申请人: Masaki Kato

    发明人: Masaki Kato

    摘要: It is disclosed a mask on which a pattern for transfer is formed. The mask comprising a first row pattern part and a second row pattern part which are arranged along a first direction on the mask. The whole region of the first row pattern part and the whole region of the second row pattern part region are arranged to deviate from each other by a predetermined amount in a second direction perpendicular to the first direction.

    摘要翻译: 公开了一种在其上形成转印图案的掩模。 所述掩模包括沿着所述掩模上的第一方向布置的第一行图案部分和第二行图案部分。 第一行图​​形部分的整个区域和第二行图案部分区域的整个区域被布置成在垂直于第一方向的第二方向上彼此偏离预定量。

    Control of an interferometric optical polarization beam splitter
    72.
    发明授权
    Control of an interferometric optical polarization beam splitter 有权
    干涉光学偏振分束器的控制

    公开(公告)号:US08606120B2

    公开(公告)日:2013-12-10

    申请号:US12790778

    申请日:2010-05-28

    IPC分类号: H04B10/67

    摘要: The present invention provides a system, apparatus and method to control an optical polarization beam splitter. A portion of an optical output of the polarization beam splitter is converted into a corresponding electrical signal. The electrical signal is then provided to the polarization beam splitter as a control signal via a feedback loop. The polarization beam splitter controls a characteristic of the optical output of the polarization beam splitter in response to the received control signal. The characteristic, for example, may be controlled through thermo-optically or electro-optically. The control system may be used over a period of time to maintain the characteristic at a desired value, for example as the components of the polarization beam splitter, or other elements used in the control of the polarization beam splitter, age.

    摘要翻译: 本发明提供一种控制光偏振分束器的系统,装置和方法。 偏振分束器的光输出的一部分被转换成相应的电信号。 然后,电信号经由反馈回路作为控制信号提供给偏振分束器。 偏振分束器响应于接收到的控制信号控制偏振分束器的光输出的特性。 例如,可以通过热光学或电光学来控制特性。 控制系统可以在一段时间内使用,以将特性保持在期望值,例如作为偏振分束器的分量或在偏振分束器的控制中使用的其他元件的年龄。

    DEVICE ATTACHMENT MEMBER
    73.
    发明申请
    DEVICE ATTACHMENT MEMBER 有权
    设备附件会员

    公开(公告)号:US20130306811A1

    公开(公告)日:2013-11-21

    申请号:US13980093

    申请日:2011-11-11

    IPC分类号: F16M13/02

    摘要: A device attachment member used for a manufacture work machine equipped with: a device necessary for performing a manufacture work; a main frame on which the device is to be installed; and a controller configured to control the device, the device attachment member including a main body to be attached to the device, wherein the device attachment member includes an identification-information recording medium in which is recorded identification information, the device being identified by the controller based on the identification information, the identification-information recording medium being incorporated in the main body.

    摘要翻译: 一种用于制造工作机械的装置附件,其配备有:进行制造工作所需的装置; 安装设备的主框架; 以及控制器,被配置为控制所述设备,所述设备附接构件包括要附接到所述设备的主体,其中所述设备附接构件包括识别信息记录介质,其中记录有识别信息,所述设备由所述控制器识别 基于识别信息,识别信息记录介质被结合在主体中。

    ROLLER BEARING
    74.
    发明申请
    ROLLER BEARING 有权
    滚子轴承

    公开(公告)号:US20130223779A1

    公开(公告)日:2013-08-29

    申请号:US13879718

    申请日:2011-10-06

    IPC分类号: F16C33/66

    摘要: A rolling bearing assembly in which the number of components is reduced, and a high speed operation can be enabled with an increase of the stirring resistance being avoided by a sufficient discharge of lubricant oil and with an increase of temperature within the bearing assembly being suppressed. The rolling bearing assembly includes a pair of raceway rings, which are inner and outer rings, a plurality of rolling elements interposed between the inner and outer rings and a retailer for retaining the rolling elements. Each of the inner and outer rings is provided with an axially extending raceway ring extension portion and an oil supply and drainage mechanism for supplying a lubricant oil, which concurrently serves as a bearing cooling medium, to the bearing assembly and for discharging the lubricant oil to outside of the bearing assembly is provided in the raceway ring extension portion.

    摘要翻译: 减少组件数量的滚动轴承组件,并且通过充分排出润滑油以及轴承组件内的温度升高来抑制搅拌阻力的增加,能够实现高速运转。 滚动轴承组件包括一对滚道环,它们是内圈和外圈,插入在内圈和外圈之间的多个滚动元件和用于保持滚动元件的零售商。 内圈和外圈中的每一个设置有轴向延伸的滚道环延伸部分和用于将同时用作轴承冷却介质的润滑油供应到轴承组件并用于将润滑油排出到的供油和排出机构 轴承组件外侧设置在滚道环延伸部中。

    OPTICAL COMMUNICATION SYSTEM HAVING TUNABLE SOURCES
    75.
    发明申请
    OPTICAL COMMUNICATION SYSTEM HAVING TUNABLE SOURCES 有权
    具有可控源的光通信系统

    公开(公告)号:US20130170787A1

    公开(公告)日:2013-07-04

    申请号:US13340982

    申请日:2011-12-30

    IPC分类号: G02B6/34 G02B6/122

    摘要: Consistent with one example of the disclosed implementations, a photonic integrated circuit (PIC) may be provided that includes s group of lasers and an arrayed waveguide grating (AWG) disposed on a substrate. Each laser in the group may supply an optical signal, such that each optical signal has a different wavelength. Each laser may be tunable to at least two designated wavelengths, which are separated from one another by a free spectral range (FSR) of the AWG. As a result, the optical signals provided from each laser may be combined by the AWG, regardless of which designated wavelength the optical signals have. Accordingly, a PIC may be provided that has a relatively simple construction but can supply optical signals having tunable wavelengths.

    摘要翻译: 与所公开的实施例的一个示例一致,可以提供包括s组激光器和设置在衬底上的阵列波导光栅(AWG)的光子集成电路(PIC)。 组中的每个激光器可以提供光信号,使得每个光信号具有不同的波长。 每个激光器可以被调谐到至少两个指定的波长,它们通过AWG的自由光谱范围(FSR)彼此分开。 结果,从每个激光器提供的光信号可以由AWG组合,而不管光信号具有哪个指定波长。 因此,可以提供具有相对简单结构但可提供具有可调波长的光信号的PIC。

    INKJET HEAD AND RECORDING DEVICE
    76.
    发明申请
    INKJET HEAD AND RECORDING DEVICE 有权
    喷墨头和记录装置

    公开(公告)号:US20130050354A1

    公开(公告)日:2013-02-28

    申请号:US13598250

    申请日:2012-08-29

    IPC分类号: B41J2/045

    摘要: Disclosed is an inkjet head including a fluid channel substrate on which individual liquid chambers are arranged, the individual liquid chambers being partitioned by liquid chamber partition walls; an oscillation plate that is formed on a surface facing openings of nozzles; actuators; wiring layer patterns that supplies driving signals to the actuators, the wiring layer patterns being formed above the corresponding liquid chamber partition walls; and a supporting substrate in which concave oscillation chambers are formed, the concave oscillation chambers being partitioned by supporting substrate partition walls. A width in the short direction of the supporting substrate partition wall is smaller than a width in the short direction of the liquid chamber partition wall and greater than a width of the wiring layer pattern.

    摘要翻译: 公开了一种喷墨头,其包括流体通道基板,单独的液体室布置在该流体通道基板上,各个液体室由液体室隔壁分隔开; 形成在与喷嘴的开口对置的表面上的振动板; 执行机构 向致动器提供驱动信号的布线层图案,布线层图案形成在相应的液体室隔壁上方; 以及支撑基板,其中形成凹形振荡室,所述凹形振荡室由支撑基板分隔壁分隔开。 支撑基板分隔壁的短边方向的宽度小于液室分隔壁的短边方向的宽度,大于布线层图案的宽度。

    Digital PLL circuit and method of controlling the same
    79.
    发明授权
    Digital PLL circuit and method of controlling the same 失效
    数字PLL电路及其控制方法

    公开(公告)号:US08248122B2

    公开(公告)日:2012-08-21

    申请号:US12882711

    申请日:2010-09-15

    IPC分类号: H03L7/06

    摘要: According to one embodiment, a PLL circuit generates a first signal of 1/m times from a reference clock and a second signal of 1/n times from an output of an oscillator, obtains a quantized phase difference corresponding to a shift amount between the both signals, integrates the phase difference, predicts a control value for the oscillator based on the integrated value, converts the predicted control value into an analog value. Sequential integration is performed for the phase difference until the polarity of the phase difference is reversed from negative to positive and then from positive to negative again, or until the polarity is reversed from positive to negative and then from negative to positive again, a predictive weight value is generated by multiplying the integrated value by a predictive coefficient value of optional ratio, and the control value is obtained by adding the predictive weight value to the integrated value.

    摘要翻译: 根据一个实施例,PLL电路从参考时钟产生1 / m次的第一信号,并从振荡器的输出产生1 / n次的第二信号,获得对应于两者之间的移位量的量化相位差 信号,积分相位差,基于积分值预测振荡器的控制值,将预测的控制值转换为模拟值。 对于相位差执行顺序积分,直到相位差的极性从负值反转到正,然后再次从正向相反,或者直到极性从正向相反,然后从负到正,再次从负变为正,预测重量 通过将积分值乘以可选比率的预测系数值来生成值,并且通过将预测权重值与积分值相加来获得控制值。

    INKJET HEAD AND IMAGE FORMING DEVICE
    80.
    发明申请
    INKJET HEAD AND IMAGE FORMING DEVICE 有权
    喷墨头和图像形成装置

    公开(公告)号:US20120206545A1

    公开(公告)日:2012-08-16

    申请号:US13365352

    申请日:2012-02-03

    IPC分类号: B41J2/045

    摘要: Disclosed is an inkjet head that includes individual liquid chambers having liquid droplet discharging holes; an oscillation plate; piezoelectric elements formed by laminating a lower electrode, a piezoelectric material, and upper electrodes on the oscillation plate, wherein the lower electrode is a common electrode and the upper electrode is an individual electrode; a common electrode wiring connected to the lower electrode;and individual electrode wirings connected to the corresponding upper electrodes of the piezoelectric elements, wherein driving signals are individually input to the corresponding individual electrode wirings. The inkjet head further includes an upper layer insulator film; an intermediate layer insulator film; and a lower layer insulator film. The intermediate layer insulator film and the upper layer insulator film have openings for exposing the piezoelectric elements.

    摘要翻译: 公开了一种喷墨头,其包括具有液滴排出孔的各个液室; 振荡板; 通过在振荡板上层叠下电极,压电材料和上电极而形成的压电元件,其中下电极是公共电极,上电极是单独电极; 连接到下电极的公共电极布线; 以及连接到压电元件的相应上电极的单独电极配线,其中驱动信号被单独输入到相应的单独电极布线。 喷墨头还包括上层绝缘膜; 中间层绝缘膜; 和下层绝缘膜。 中间层绝缘膜和上层绝缘膜具有用于使压电元件露出的开口。