Methods and structures for electronic probing arrays
    69.
    发明授权
    Methods and structures for electronic probing arrays 失效
    电子探测阵列的方法

    公开(公告)号:US06499216B1

    公开(公告)日:2002-12-31

    申请号:US09405029

    申请日:1999-09-24

    申请人: Joseph Fjelstad

    发明人: Joseph Fjelstad

    IPC分类号: A05K300

    摘要: A probe card for testing an electrical element such as a semiconductor wafer or a printed wiring board includes a substrate with circuitry thereon, an encapsulant layer overlying the substrate and a multiplicity of leads extending upwardly from the substrate through the encapsulant layer to terminals, the terminals projecting above the encapsulant layer. The probe card can be engaged with the electronic element so that the tips of the leads bear on the contact pads of the electronic element, and so that the leads and encapsulant layer deform to accommodate irregularities in the electronic element or probe card. The card can be made by providing the substrate, a sacrificial layer and leads extending between the sacrificial layer and substrate, moving the substrate and sacrificial layer away from one another to deform the leads and injecting a curable material around the leads to form the encapsulant layer.

    摘要翻译: 用于测试诸如半导体晶片或印刷线路板的电气元件的探针卡包括其上具有电路的衬底,覆盖衬底的密封剂层和从衬底通过密封剂层向上延伸到端子的多个引线,端子 突出在密封剂层上方。 探针卡可以与电子元件接合,使得引线的尖端承载在电子元件的接触垫上,并且使得引线和密封剂层变形以适应电子元件或探针卡中的不规则。 可以通过提供衬底,牺牲层和在牺牲层和衬底之间延伸的引线来制造该卡,使衬底和牺牲层彼此远离地移动以使引线变形并且在引线周围注入可固化材料以形成密封层 。