公开(公告)号：US5724131A

公开(公告)日：1998-03-03

申请号：US511351

申请日：1995-08-04

申请人： Wai Kin Chim ,  Daniel Siu Hung Chan ,  Jacob Chee Hong Phang ,  Jing Mei Tao ,  Yong Yu Liu

发明人： Wai Kin Chim ,  Daniel Siu Hung Chan ,  Jacob Chee Hong Phang ,  Jing Mei Tao ,  Yong Yu Liu

IPC分类号： H01J37/244 ,  G01N21/71

CPC分类号： H01J37/244 ,  H01J37/228 ,  H01J2237/2445 ,  H01J2237/2808

摘要： An integrated emission microscope with an emitted radiation detection system for collecting and analyzing radiation from a device under test. A semi-ellipsoidal mirror of high ellipticity directs emitted radiation from the device under test through an aperture to a radiation guide, Which transmits the radiation to spectral analyzer. The device under test may be mounted on a scanning stage. The system permits high spatial resolution selected area spectroscopic analysis, panchromatic imaging, and spectroscopic mapping of the emitted radiation from the device under test.

摘要翻译： 一种具有发射辐射检测系统的集成放射显微镜，用于收集和分析来自被测器件的辐射。 高椭圆率的半椭球镜将被测器件的辐射通过孔径引导到辐射导向器，辐射导向器将辐射传输到光谱分析仪。 被测设备可以安装在扫描台上。 该系统允许高空间分辨率选择的区域光谱分析，全色成像和来自被测器件的发射辐射的光谱映射。

公开(公告)号：US5393976A

公开(公告)日：1995-02-28

申请号：US156626

申请日：1993-11-24

申请人： Hirotami Koike

发明人： Hirotami Koike

IPC分类号： H01J37/22 ,  H01J37/256

CPC分类号： B82Y15/00 ,  H01J37/224 ,  H01J37/228 ,  H01J2237/225 ,  H01J2237/24495 ,  H01J2237/2808

摘要： An apparatus for displaying a sample image comprises a scanning illumination system 3 for scanning a sample by an irradiation ray ray being relatively moved, a first detection portion 7 for detecting a first detection signal obtained from a continuous area of the sample by the irradiation ray ray, a second detection portion 9 for detecting a faint second detection signal obtained from a micro-discrete area of the sample by the irradiation ray ray, a signal processing portion 16 for processing the second detection signal such that a pixel size in accordance with the second detection signal is enlarged relative to a pixel size in accordance with the first detection signal, an image signal formation portion 17 for forming a superimposed image signal by superimposing the second detection signal processed by the signal processing portion upon the first detection signal, and an image display portion 19 for displaying an image of the sample in accordance with the superimposed image signal.

摘要翻译： 用于显示样本图像的装置包括：扫描照明系统3，用于通过相对移动的照射光线扫描样品;第一检测部分7，用于检测通过照射射线射线从样品的连续区域获得的第一检测信号 用于检测通过照射射线射线从样本的微分离区域获得的微弱的第二检测信号的第二检测部分9，用于处理第二检测信号的信号处理部分16，使得根据第二检测信号的像素尺寸 检测信号相对于根据第一检测信号的像素尺寸被放大;图像信号形成部分17，用于通过将由信号处理部分处理的第二检测信号叠加在第一检测信号上而形成叠加图像信号;以及图像 显示部分19，用于根据叠加的图像信号显示样本的图像。

公开(公告)号：US5264704A

公开(公告)日：1993-11-23

申请号：US977840

申请日：1992-11-17

申请人： Jacob C. H. Phang ,  Daniel S. H. Chan ,  Kin L. Pey

发明人： Jacob C. H. Phang ,  Daniel S. H. Chan ,  Kin L. Pey

IPC分类号： G01Q30/20 ,  H01J37/20 ,  H01J37/244

CPC分类号： H01J37/228 ,  H01J37/244 ,  H01J2237/2808

摘要： A parabolic light reflection device in a cathodoluminescence (CL) apparatus is integrated with a photosensitive solid state device mounted on a supporting plate, and supported in an electron microscope vacuum chamber specimen stage by an adaptor element. These components are optically aligned with respect to one another and a readily exchangeable unit is thus obtained. Designed for CL emission operation in an electron microscope, the parabolic light reflection device and the photosensitive solid state detection device are optically aligned and then mounted on a supporting plate of the photosensitive solid state device. The unit thus configured is supported by the specimen stage adaptor element to obtain a mechanical element which can be easily inserted in and removed from any standard electron microscope vacuum chamber stage as a single integrated unit.

摘要翻译： 阴极发光（CL）装置中的抛物面光反射装置与安装在支撑板上的光敏固体装置集成，并通过适配器元件支撑在电子显微镜真空室样品台中。 这些组分相对于光学对准，因此获得易于更换的单元。 专为电子显微镜中的CL发射操作而设计，抛光光反射装置和光敏固态检测装置被光学对准，然后安装在光敏固态装置的支撑板上。 这样构成的单元由样本台适配器元件支撑，以获得能够容易地插入任何标准电子显微镜真空室的单元和单个集成单元中的机械元件。

公开(公告)号：US4900932A

公开(公告)日：1990-02-13

申请号：US239317

申请日：1988-09-01

申请人： Norbert Schafer ,  Eugen Weimer ,  Herbert Gross ,  Bernd Eppli ,  Eberhard Rossow

发明人： Norbert Schafer ,  Eugen Weimer ,  Herbert Gross ,  Bernd Eppli ,  Eberhard Rossow

IPC分类号： G01N23/225 ,  G01Q30/02 ,  G01Q90/00 ,  H01J37/244

CPC分类号： H01J37/228 ,  G01N23/2254 ,  H01J37/244 ,  H01J2237/2445 ,  H01J2237/2808

摘要： A detector is disclosed which includes an elliptical hollow mirror and a tube having a reflecting inner surface for conducting the light emitted by a specimen under investigation in a scanning electron microscope. A vacuum window is seated at the outer end portion of the tube directly ahead of a receiver.

摘要翻译： 公开了一种检测器，其包括椭圆形中空反射镜和具有反射内表面的管，用于在扫描电子显微镜中传导被研究中的试样发射的光。 真空窗口位于接收器正前方的管的外端部分。

公开(公告)号：US20170133198A1

公开(公告)日：2017-05-11

申请号：US15309748

申请日：2015-04-23

申请人： Technische Universiteit Delft

发明人： Pieter KRUIT ,  Aernout Christiaan ZONNEVYLLE ,  Yan REN

IPC分类号： H01J37/28 ,  H01J37/22 ,  H01J37/244 ,  H01J37/141 ,  H01J37/20

CPC分类号： H01J37/244 ,  H01J37/141 ,  H01J37/20 ,  H01J37/222 ,  H01J37/224 ,  H01J37/28 ,  H01J2237/2443 ,  H01J2237/24455 ,  H01J2237/24495 ,  H01J2237/2802 ,  H01J2237/2808

摘要： An apparatus for inspecting a sample includes a sample holder for holding the sample; a multi beam charged particle generator for generating an array of primary charged particle beams; an electro-magnetic lens system for directing the array of primary charged particle beams into an array of separate focused primary charged particle beams on the sample; a multi-pixel photon detector arranged for detecting photons created by the focused primary charged particle beams when the primary charged particle beams impinge on the sample or after transmission of said primary charged particle beams through the sample; and an optical assembly for conveying photons created by at least two adjacent focused primary charged particle beams of the array of separate focused primary charged particle beams to distinct and/or separate pixels or to distinct and/or separate groups of pixels of the multi-pixel photon detector.

公开(公告)号：US20150076364A1

公开(公告)日：2015-03-19

申请号：US14540220

申请日：2014-11-13

申请人： CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE ,  UNIVERSITE PARIS SUD 11

发明人： Mathieu Kociak ,  Luiz Fernando Zagonel ,  Marcel Tence ,  Stefano Mazzucco

IPC分类号： G01N23/225 ,  H01J37/26

CPC分类号： G01N23/2254 ,  G01N2201/08 ,  H01J37/228 ,  H01J37/244 ,  H01J37/261 ,  H01J37/28 ,  H01J2237/024 ,  H01J2237/063 ,  H01J2237/24475 ,  H01J2237/2448 ,  H01J2237/24485 ,  H01J2237/2602 ,  H01J2237/2802 ,  H01J2237/2808

摘要： A cathodoluminescence detection system is provided, including a source of charged particles arranged to illuminate a sample with a charged particle beam, and an optical path having at least two optical components capable of collecting and conveying light radiation coming from the illuminated sample to an analysis device; each optical component of the optical path is selected so that: the maximum output angle of the optical component is less than or equal to 120% of the maximum acceptance angle of the next optical component; and the diameter of the radiation coming from the optical component in the input plane of the next optical component is less than or equal to 120% of the useful input diameter of the next optical component.

摘要翻译： 提供了一种阴极发光检测系统，其包括用带电粒子束照射样品的带电粒子源，以及具有至少两个光学部件的光路，所述至少两个光学部件能够将来自被照射样品的光辐射收集并传送到分析装置 ; 选择光路的每个光学部件，使得：光学部件的最大输出角度小于或等于下一个光学部件的最大接收角度的120％; 并且来自下一个光学部件的输入平面中的光学部件的辐射的直径小于或等于下一个光学部件的有用输入直径的120％。

公开(公告)号：US08912509B2

公开(公告)日：2014-12-16

申请号：US13699981

申请日：2011-04-29

申请人： Mathieu Kociak ,  Luiz Fernando Zagonel ,  Marcel Tence ,  Stefano Mazzucco

发明人： Mathieu Kociak ,  Luiz Fernando Zagonel ,  Marcel Tence ,  Stefano Mazzucco

IPC分类号： G01N21/64 ,  G01N23/225 ,  H01J37/244 ,  H01J37/22 ,  H01J37/28

CPC分类号： G01N23/2254 ,  G01N2201/08 ,  H01J37/228 ,  H01J37/244 ,  H01J37/261 ,  H01J37/28 ,  H01J2237/024 ,  H01J2237/063 ,  H01J2237/24475 ,  H01J2237/2448 ,  H01J2237/24485 ,  H01J2237/2602 ,  H01J2237/2802 ,  H01J2237/2808

摘要： A cathodoluminescence detection system is provided, including a collection optic collecting light radiation coming from a sample illuminated by a charged particle beam and sending the light radiation to an analyzer, a positioner for the collection optic; the positioner including several translation components of the collection optic. Each translation component effects the translation of the collection optic in one dimension of space so that the translation components effect the translation of the collection optic in several dimensions of space.

摘要翻译： 提供了阴极发光检测系统，其包括收集来自由带电粒子束照射的样品的光辐射并将光辐射发送到分析器的收集光学器件，用于收集光学器件的定位器; 定位器包括收集光学元件的几个翻译部件。 每个翻译组件在一个维度的空间中影响收集光学器件的平移，使得翻译组件在几个维度的空间中影响收集光学器件的平移。

公开(公告)号：US08674320B2

公开(公告)日：2014-03-18

申请号：US13795291

申请日：2013-03-12

申请人： Attolight SA

发明人： Jean Berney

IPC分类号： H01J29/58 ,  H01J49/08 ,  G21K1/00

CPC分类号： G21K1/00 ,  G01N23/2254 ,  H01J37/222 ,  H01J37/28 ,  H01J2237/06333 ,  H01J2237/226 ,  H01J2237/2611 ,  H01J2237/2808 ,  H01J2237/30472

摘要： A method for generating a cathodoluminescence map comprising the steps of: generating an intensity modulated charged particle beam; focusing said charged particle beam on a specimen; gating temporally the cathodoluminescence emitted by said specimen to provide time-gated cathodoluminescence; measuring the time-gated cathodoluminescence for different charged particle beam positions on the specimen to generate a cathodoluminescence map; deconvoluting the cathodoluminescence map to improve the resolution of said cathodoluminescence map. The invention further provides devices for carrying out such methods.

摘要翻译： 一种用于产生阴极发光图的方法，包括以下步骤：产生强度调制带电粒子束; 将所述带电粒子束聚焦在样品上; 定时地选择由所述样品发射的阴极发光，以提供时间门控的阴极发光; 测量样品上不同带电粒子束位置的时间门阴极发光以产生阴极发光图; 解卷积阴极发光图以改善所述阴极发光图的分辨率。 本发明还提供了用于执行这种方法的装置。

公开(公告)号：US20130335817A1

公开(公告)日：2013-12-19

申请号：US13976556

申请日：2011-01-05

申请人： Shinichiro Isobe ,  Takaaki Kanemaru ,  Shin-ichi Takasu

发明人： Shinichiro Isobe ,  Takaaki Kanemaru ,  Shin-ichi Takasu

IPC分类号： G02B21/06 ,  G02B21/04

CPC分类号： G02B21/06 ,  G01N21/6458 ,  G01N23/2251 ,  G01N2021/6463 ,  G01N2021/6484 ,  G02B21/04 ,  G02B21/16 ,  H01J37/228 ,  H01J37/28 ,  H01J2237/2806 ,  H01J2237/2807 ,  H01J2237/2808

摘要： Provided is a multiple light source microscope which is capable of performing not only electron image observation but also fluorescence image observation, fluoroscopic image observation and the like for the same biological tissue sample, and is provided with a plurality of observation-use light sources. Disclosed is this multiple light source microscope configured by: an optical microscope unit for observing fluorescence, provided with a light source unit; and a scanning electron microscope unit, wherein the optical microscope has a Cassegrain mirror with an aspherical reflecting surface, and the Cassegrain mirror is arranged in a lens barrel of the scanning microscope unit so as to be coaxial with an optical axis of an electron beam of the scanning electron microscope unit.

摘要翻译： 本发明提供一种不仅对同一生物组织样品进行电子图像观察，而且能够进行荧光图像观察，透视图像观察等的多光源显微镜，并且设置有多个观察用光源。 公开了这种多光源显微镜，其由以下部分构成：用于观察荧光的光学显微镜单元，设置有光源单元; 以及扫描电子显微镜单元，其中，所述光学显微镜具有带有非球面反射面的卡塞格林镜，并且所述卡塞格朗格镜布置在所述扫描显微镜单元的透镜镜筒中，以与所述扫描显微镜单元的电子束的光轴同轴 扫描电子显微镜单元。

公开(公告)号：US20130200262A1

公开(公告)日：2013-08-08

申请号：US13809685

申请日：2011-07-14

申请人： Pieter Kruit ,  Jacob Pieter Hoogenboom ,  Aernout Christiaan Zonnevylle

发明人： Pieter Kruit ,  Jacob Pieter Hoogenboom ,  Aernout Christiaan Zonnevylle

IPC分类号： H01J37/22 ,  H01J37/26 ,  G01N21/62

CPC分类号： H01J37/22 ,  G01N21/62 ,  G01N2021/625 ,  H01J37/226 ,  H01J37/228 ,  H01J37/256 ,  H01J37/26 ,  H01J37/28 ,  H01J2237/204 ,  H01J2237/2445 ,  H01J2237/2482 ,  H01J2237/2808

摘要： An inspection apparatus is provided comprising in combination at least an optical microscope (2, 3, 4) and an ion- or electron microscope (7, 8) equipped with a source (7) for emitting a primary beam (9) of radiation to a sample (10) in a sample holder. The apparatus may comprise a detector (8) for detection of secondary radiation (11) backscattered from the sample and induced by the primary beam. The optical microscope is equipped with an light collecting device (2) to receive in use luminescence light (12) emitted by the sample and to focus it on a photon-detector (4).

摘要翻译： 提供一种检查装置，其至少包括光学显微镜（2,3,4）和配备有用于发射辐射的主光束（9）的源（7）的离子或电子显微镜（7,8）的组合， 在样品架中的样品（10）。 该装置可包括检测器（8），用于检测从样品反向散射并由主光束引发的次级辐射（11）。 光学显微镜配备有光收集装置（2），以使用由样品发射的发光（12）接收并将其聚焦在光子检测器（4）上。