IMAGE CAPTURING ELEMENT AND IMAGE CAPTURING APPARATUS

    公开(公告)号:US20240107198A1

    公开(公告)日:2024-03-28

    申请号:US18375148

    申请日:2023-09-29

    申请人: NIKON CORPORATION

    发明人: Sota NAKANISHI

    IPC分类号: H04N25/772

    CPC分类号: H04N25/772

    摘要: An image capturing element includes a first substrate having a plurality of pixel blocks including at least one pixel, the plurality of pixel blocks being arranged to be aligned in a row direction and a column direction, and a second substrate having a plurality of control blocks including a conversion unit which converts a signal output from the pixel into a digital signal and a through electrode unit configured to output the signal converted into the digital signal by the conversion unit, the plurality of control blocks being arranged to be aligned in the row direction and the column direction.

    Optical objective for operation in EUV spectral region

    公开(公告)号:US11934105B2

    公开(公告)日:2024-03-19

    申请号:US16655932

    申请日:2019-10-17

    申请人: Nikon Corporation

    IPC分类号: G03F7/20 G03F7/00 G02B17/06

    摘要: A catoptric system having a reference axis and first, second, and third reflectors. The first reflector contains a pattern-source carrying a substantially one-dimensional pattern. A combination of the second and third reflectors is configured to form an optical image of the pattern, with a demagnification coefficient N>1 in extreme UV light, and with only two beams of light that have originated at the first reflector as a result of irradiation of the first reflector with light incident upon it. An exposure apparatus employing the catoptric system and method of device manufacturing with the use of the exposure apparatus.

    VARIABLE MAGNIFICATION OPTICAL SYSTEM, OPTICAL APPARATUS, AND METHOD FOR PRODUCING VARIABLE MAGNIFICATION OPTICAL SYSTEM

    公开(公告)号:US20240077709A1

    公开(公告)日:2024-03-07

    申请号:US18367995

    申请日:2023-09-13

    申请人: Nikon Corporation

    发明人: Takeshi UMEDA

    IPC分类号: G02B15/14

    摘要: A variable magnification optical system comprising, in order from an object side, a first lens group having positive refractive power, a second lens group having negative refractive power, a third lens group having positive refractive power, and a rear lens group having negative refractive power; upon varying a magnification from a wide angle end state to a tele photo end state, a distance between the first lens group and the second lens group being varied, a distance between the second lens group and the third lens group being varied, and a distance between the third lens group and the rear lens group being varied; the third lens group or the rear lens group comprising a focusing lens group which is moved upon carrying out focusing from an infinitely distant object to a closely distant object; and predetermined conditional expression(s) being satisfied, thereby various aberrations being corrected superbly.

    Electronic devices and program
    60.
    发明授权

    公开(公告)号:US11902663B2

    公开(公告)日:2024-02-13

    申请号:US17263242

    申请日:2019-07-25

    申请人: NIKON CORPORATION

    摘要: An electronic device is configured to send positional information to an external device configured to set the positional information to data, the electronic device includes: an acquisition unit configured to acquire positional information; and a sender unit configured to send information to the external device, wherein the sender unit is configured to send the external device a command not to set positional information received from the electronic device in a case where a mode not allowing the external device to set positional information to data is chosen.