Overlay measurement device and method for controlling focus movement and program storage medium therefor

    公开(公告)号:US12010425B2

    公开(公告)日:2024-06-11

    申请号:US18205254

    申请日:2023-06-02

    IPC分类号: H04N23/67 G02B7/105

    CPC分类号: H04N23/676 G02B7/105

    摘要: There is provided an overlay measurement device controlling a focus movement, which includes: a lighting part being configured to orient lighting toward an overlay measurement target; a collection part comprising an objective lens and a detector for obtaining one or more of images of each focus in the overlay measurement target; a lens focus actuator moving the objective lens to adjust a distance between the objective lens and a wafer; and a processor controlling an operation of the lens focus actuator. The processor obtains a focus graph respectively in relation to two layers from one or more of the images of each focus, and the processor identifies a reference focus in relation to the obtained focus graphs to move the objective lens.

    Image capturing apparatus and method for controlling image capturing apparatus

    公开(公告)号:US11917301B2

    公开(公告)日:2024-02-27

    申请号:US17974966

    申请日:2022-10-27

    发明人: Akimitsu Yoshida

    摘要: An image capturing apparatus includes: an image capturing unit configured to control an imaging sensor; a first obtaining unit configured to obtain a first detection result that is a result of detection of a subject from image data captured by the image capturing unit; a second obtaining unit configured to transmit the image data to an external image processing apparatus and obtain a second detection result that is a result of detection of a subject from the image data by the image processing apparatus; and a control unit configured to perform shooting processing using settings of shooting parameters determined based on at least one of the first detection result and the second detection result, wherein the control unit is configured to perform shooting processing using settings of the shooting parameters determined based on the first detection result until the second detection result is obtained from the image processing apparatus.

    OVERLAY MEASUREMENT DEVICE AND METHOD FOR CONTROLLING FOCUS MOVEMENT AND PROGRAM STORAGE MEDIUM THEREFOR

    公开(公告)号:US20240155232A1

    公开(公告)日:2024-05-09

    申请号:US18205254

    申请日:2023-06-02

    IPC分类号: H04N23/67 G02B7/105

    CPC分类号: H04N23/676 G02B7/105

    摘要: There is provided an overlay measurement device controlling a focus movement, which includes: a lighting part being configured to orient lighting toward an overlay measurement target; a collection part comprising an objective lens and a detector for obtaining one or more of images of each focus in the overlay measurement target; a lens focus actuator moving the objective lens to adjust a distance between the objective lens and a wafer; and a processor controlling an operation of the lens focus actuator. The processor obtains a focus graph respectively in relation to two layers from one or more of the images of each focus, and the processor identifies a reference focus in relation to the obtained focus graphs to move the objective lens.