公开(公告)号：US07700917B1

公开(公告)日：2010-04-20

申请号：US11867275

申请日：2007-10-04

Applicant: Simon Galloway ,  Richard Vince

Inventor： Simon Galloway ,  Richard Vince

IPC: H01J37/30

CPC classification number: H01J37/20 ,  H01J37/3053 ,  H01J2237/045 ,  H01J2237/206 ,  H01J2237/28 ,  H01J2237/3151 ,  H01J2237/31745

Abstract: An apparatus for holding a specimen to be viewed in a focused beam microscope, which can be an electron microscope or a focused ion beam microscope. The apparatus has a base and a specimen carriage with specimen mounting surface in a first plane and an ion beam screen or knife blade. The relative position between the ion beam screen and the specimen carriage are remotely adjustable while the apparatus is mounted in the focused beam microscope. In a further embodiment, the apparatus is transferable between an ion beam milling device and the focused beam microscope while the milling device and the microscope share a common vacuum.

Abstract translation: 在聚焦光束显微镜中保持待观察的样品的装置，其可以是电子显微镜或聚焦离子束显微镜。 该装置具有基座和具有第一平面中的试样安装表面和离子束筛子或刀片的试样托架。 离子束屏幕和样品托架之间的相对位置可远程调节，同时将设备安装在聚焦光束显微镜中。 在另一个实施例中，该装置可在离子束研磨装置和聚焦光束显微镜之间转移，同时铣削装置和显微镜共享共同的真空。

公开(公告)号：US20100038557A1

公开(公告)日：2010-02-18

申请号：US12541001

申请日：2009-08-13

Applicant: Michael Zach

Inventor： Michael Zach

IPC: G21K5/08 ,  H01B13/00

CPC classification number: H01J37/20 ,  H01J37/26 ,  H01J2237/206

Abstract: A planar substrate for electrochemical experimentation provides multiple isolated electrical conductors sandwiched between insulating layers of ultrananocrystaline diamond. The isolated electrical conductors may attach to conductive pads at the periphery of the substrate and exposed at apertures in the central region of the substrate for a variety of experimental purposes.

Abstract translation: 用于电化学实验的平面基板提供了夹在超晶体金刚石的绝缘层之间的多个隔离电导体。 分离的电导体可以附着到衬底的周边的导电焊盘，并在衬底的中心区域的孔处暴露以用于各种实验目的。

公开(公告)号：US20080308731A1

公开(公告)日：2008-12-18

申请号：US12023443

申请日：2008-01-31

Applicant: Hidetoshi Nishiyama ,  Mitsuru Koizumi

Inventor： Hidetoshi Nishiyama ,  Mitsuru Koizumi

IPC: G01N23/00 ,  G21K5/10

CPC classification number: H01J37/28 ,  H01J37/20 ,  H01J37/228 ,  H01J2237/0266 ,  H01J2237/2004 ,  H01J2237/206 ,  H01J2237/2608 ,  H01J2237/2808

Abstract: A specimen holder, a specimen inspection apparatus, and a specimen inspection method permitting a specimen consisting of cultured cells to be observed or inspected. Also, a method of fabricating the holder is offered. The holder has an open specimen-holding surface. At least a part of this surface is formed by a film. A specimen cultured on the specimen-holding surface of the film can be irradiated via the film with a primary beam for observation or inspection of the specimen. Consequently, the cultured specimen (e.g., cells) can be observed or inspected in vitro. Especially, if an electron beam is used as the primary beam, the specimen in vitro can be observed or inspected by SEM. Because the specimen-holding surface is open, a manipulator can gain access to the specimen. A stimulus can be given to the specimen using the manipulator. The reaction can be observed or inspected.

Abstract translation: 试样支架，试样检查装置和允许观察或检查由培养细胞组成的试样的试样检查方法。 此外，提供了制造保持器的方法。 支架具有开放的标本保持表面。 该表面的至少一部分由膜形成。 可以在膜的试样保持表面上培养的样品通过膜通过主光束照射，用于观察或检查样品。 因此，可以在体外观察或检查培养的标本（例如细胞）。 特别地，如果使用电子束作为主光束，则可以通过SEM观察或检查体外的样本。 由于样品保持表面是开放的，操纵器可以进入样品。 可以使用机械手对试样给予刺激。 可以观察或检查反应。

公开(公告)号：US07462830B2

公开(公告)日：2008-12-09

申请号：US10912148

申请日：2004-08-06

Applicant: Shohei Terada ,  Kazutoshi Kaji ,  Shigeto Isakozawa

Inventor： Shohei Terada ,  Kazutoshi Kaji ,  Shigeto Isakozawa

IPC: H01J37/28

CPC classification number: H01J37/20 ,  G01N23/2251 ,  G01N23/2252 ,  H01J37/26 ,  H01J2237/2008 ,  H01J2237/206 ,  H01J2237/2802

Abstract: An object of the invention is to provide a method and apparatus for observing inside structures and a specimen holder, wherein aging degradation of a good sample to a bad sample can be tracked in the same field of view, using the same specimen in order to determine the mechanism of failure. The present invention is a method for observing inside structures. The method comprises irradiating a specimen with a corpuscular beam generated from a corpuscular beam source, detecting transmitted particles transmitted by the specimen, applying a voltage to a portion of the specimen, and observing of a detection status of the transmitted particles in the voltage-applied portion as needed.

Abstract translation: 本发明的目的是提供一种用于观察内部结构和样本保持器的方法和装置，其中可以使用相同的样本在相同的视野中跟踪良好样本的老化劣化到不良样本，以确定 失败的机制。 本发明是用于观察内部结构的方法。 该方法包括用从粒子束源产生的粒子束照射样本，检测由样本透射的透射粒子，向样本的一部分施加电压，并观察施加电压的透射粒子的检测状态 部分。

公开(公告)号：US20080150557A1

公开(公告)日：2008-06-26

申请号：US11957835

申请日：2007-12-17

Applicant: Christof BAUR ,  Robert J. FOLARON ,  Adam HARTMAN ,  Philip C. FOSTER ,  Jay C. NELSON ,  Richard E. STALLCUP

Inventor： Christof BAUR ,  Robert J. FOLARON ,  Adam HARTMAN ,  Philip C. FOSTER ,  Jay C. NELSON ,  Richard E. STALLCUP

IPC: G01R31/305

CPC classification number: G01N1/28 ,  G01N1/32 ,  G01R31/307 ,  H01J37/3056 ,  H01J2237/20 ,  H01J2237/2008 ,  H01J2237/206 ,  H01J2237/24592 ,  H01J2237/2594 ,  H01J2237/28 ,  H01J2237/2817 ,  H01J2237/31745

Abstract: An apparatus including a positioner control device, a measuring device and a control routine. The positioner control device is communicatively coupled to a chamber of a charged particle beam device (CPBD) and is configured to individually manipulate each of a plurality of probes within the CPBD chamber to establish contact between ones of the plurality of probes and corresponding ones of a plurality of contact points of a sample positioned in the CPBD chamber. The measuring device is communicatively coupled to the CPBD and the positioner control device and is configured to perform one of a measurement and a detection of a characteristic associated with one of the plurality of contact points. The control routine is configured to at least partially automate control of at least one of the CPBD, the positioner control device and the measuring device.

Abstract translation: 一种包括定位器控制装置，测量装置和控制程序的装置。 定位器控制装置通信地耦合到带电粒子束装置（CPBD）的腔室，并且被配置为单独地操作CPBD室内的多个探针中的每一个，以建立多个探针中的一个探针和 位于CPBD室中的样品的多个接触点。 测量装置通信地耦合到CPBD和定位器控制装置，并被配置为执行与多个接触点之一相关联的特性的测量和检测中的一个。 控制程序被配置为至少部分地自动化对CPBD，定位器控制装置和测量装置中的至少一个的控制。

公开(公告)号：US20050184236A1

公开(公告)日：2005-08-25

申请号：US11063692

申请日：2005-02-23

Applicant: Christof Baur ,  Richard Stallcup

Inventor： Christof Baur ,  Richard Stallcup

IPC: H01J37/20 ,  G01N1/28 ,  G01N1/32 ,  G01N23/00 ,  G01R31/305 ,  H01J37/28 ,  H01J37/305

CPC classification number: G01N1/28 ,  G01N1/32 ,  G01R31/307 ,  H01J37/3056 ,  H01J2237/20 ,  H01J2237/2008 ,  H01J2237/206 ,  H01J2237/24592 ,  H01J2237/2594 ,  H01J2237/28 ,  H01J2237/2817 ,  H01J2237/31745

Abstract: A method including directing a first electrical signal to at least one of a plurality of probes each positioned within a chamber of a charged particle beam device. At least one of the plurality of probes is exposed to a charged particle beam of the charged particle beam device, and a second electrical signal is compared to the first electrical signal to determine a characteristic associated with the at least one of the plurality of probes.

Abstract translation: 一种方法，包括将第一电信号引导到多个探针中的至少一个，每个探针定位在带电粒子束装置的腔室内。 将多个探针中的至少一个暴露于带电粒子束装置的带电粒子束，并将第二电信号与第一电信号进行比较，以确定与多个探针中的至少一个探针相关联的特性。

公开(公告)号：US06822245B2

公开(公告)日：2004-11-23

申请号：US09794828

申请日：2001-02-27

Applicant: Hiroyuki Muto ,  Tohru Ishitani ,  Yuichi Madokoro

Inventor： Hiroyuki Muto ,  Tohru Ishitani ,  Yuichi Madokoro

IPC: G21K510

CPC classification number: H01J37/3056 ,  H01J37/28 ,  H01J37/304 ,  H01J2237/206 ,  H01J2237/21 ,  H01J2237/3174 ,  H01J2237/31749

Abstract: For the sake of realizing high throughput and high processing position accuracy in an ion beam apparatus, two kinds of ion beams for processing are prepared of which one is a focusing ion beam for high image resolution and an edge processing ion beam of large beam current for permitting a sectional edge portion to be processed sharply, whereby high processing position accuracy can be ensured even with a large current ion beam.

Abstract translation: 为了在离子束装置中实现高吞吐量和高处理位置精度，准备两种用于处理的离子束，其中一种是用于高分辨率的聚焦离子束和用于大束流的边缘处理离子束 允许边缘部分被尖锐地加工，从而即使用大的电流离子束也能够确保高的加工位置精度。

公开(公告)号：US6130434A

公开(公告)日：2000-10-10

申请号：US316862

申请日：1999-05-21

Applicant: James A. Mitchell ,  Philip J. Palermo

Inventor： James A. Mitchell ,  Philip J. Palermo

IPC: G01Q30/04 ,  G01Q30/08 ,  H01J37/00 ,  H01J37/18 ,  H01J37/20 ,  H01J37/252 ,  H01J37/26 ,  H01J37/28

CPC classification number: G01N23/2204 ,  H01J37/20 ,  H01J37/28 ,  H01J2237/2001 ,  H01J2237/2002 ,  H01J2237/2003 ,  H01J2237/2005 ,  H01J2237/204 ,  H01J2237/206 ,  H01J2237/2605

Abstract: A system is provided for imaging, in an ESE microscope or other variable pressure microscope, a single sample at various time intervals during dissolution of the sample in a liquid. The system includes a sample chamber having a sample well. The sample well includes an first fluid port and a second fluid port for forming a dissolution bath in the sample well. In accordance with the system according to the present invention, the sample chamber is placed into the specimen chamber of the ESE microscope and a sample is deposited into the sample well of the sample chamber. The sample is immersed in a liquid which flows through the sample well via the first and second fluid ports during a dissolution cycle. The liquid is then drained from the sample well via one of the first and second fluid ports during a draining cycle, and then, during an imaging cycle, the sample is imaged by the ESE microscope. The dissolution cycle, the draining cycle, and the imaging cycle all occur while the sample well is inside the specimen chamber of the ESE microscope.

公开(公告)号：US20240038486A1

公开(公告)日：2024-02-01

申请号：US18298031

申请日：2023-04-10

Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.

Inventor： Yu-Ching Chiu ,  Chih-Kuang Kao ,  Huei-Wen Yang

IPC: H01J37/248 ,  H01J37/305 ,  H01J37/30 ,  H01J37/28

CPC classification number: H01J37/248 ,  H01J37/305 ,  H01J37/3005 ,  H01J37/28 ,  H01J2237/206 ,  H01J2237/31749 ,  H01J2237/2802 ,  H01J2237/20207 ,  H01J2237/20214 ,  H01J2237/024

Abstract: An apparatus for observing a sample using a charged particle beam includes an ion beam column configured to generate and direct an ion beam, an electron beam column configured to generate and direct an electron beam, a vacuum chamber for housing the sample, and a probe positioned in the vacuum chamber. The probe is configured to provide electrical connection between the sample and a power supply.

公开(公告)号：US20180053625A1

公开(公告)日：2018-02-22

申请号：US15510627

申请日：2016-11-11

Applicant: BEIJING UNIVERSITY OF TECHNOLOGY

Inventor： XIAODONG HAN ,  ZHIPENG LI ,  SHENGCHENG MAO ,  XIAODONG WANG ,  CHUNQIANG ZHUANG ,  JIANFEI ZHANG ,  QINGSONG DENG ,  YADI ZHAI ,  TAONAN ZHANG ,  ZE ZHANG

IPC: H01J37/20 ,  G01N23/02

CPC classification number: H01J37/20 ,  G01N23/02 ,  G01N2223/307 ,  G01N2223/32 ,  G01N2223/418 ,  H01J37/26 ,  H01J2237/2007 ,  H01J2237/206 ,  H01J2237/262

Abstract: A double-tilt in-situ nanoindentation platform for TEM (transmission electron microscope) belongs to the field of in-situ characterization of the mechanical property-microstructure relationship of materials at the nano- and atomic scale. The platform is consisted of adhesive area, support beams, bearing beams, sample loading stage and mini indenter. The overall structure of the platform is prepared by semiconductor microfabrication technology. The in-situ nanoindentation experiment can be driven by bimetallic strip, V-shaped electro-thermal beam, piezoelectric ceramics, electrostatic comb or shape memory alloys et. al. The sample is obtained by focused ion beam cutting. The integrated platform can be placed in the narrow space on the front end of the TEM sample holder, giving rise to the condition of double-axis tilt. The driving device drives the mini indenter to carry out in-situ nanoindentation, in-situ compression and in-situ bending and the like of the materials in TEM. The deformation process of material can be in-situ observed in sub angstrom, atomic and nano scale to study the deformation mechanism of material, which can further reveal the relationship of microstructure-mechanical properties of the material.