TORQUE SENSOR AND MANUFACTURING METHOD THEREFOR
    46.
    发明申请
    TORQUE SENSOR AND MANUFACTURING METHOD THEREFOR 有权
    扭矩传感器及其制造方法

    公开(公告)号:US20150369678A1

    公开(公告)日:2015-12-24

    申请号:US14760776

    申请日:2014-01-14

    CPC classification number: G01L3/10 B23K26/20 G01L1/165 G01L1/2287 Y10T29/43

    Abstract: A torque sensor includes: a base portion fixed to a metal shaft having a rod shape as a measurement object of strain; a strain detection element of an surface acoustic wave type which is arranged in the base portion, and detects the strain of the metal shaft (10) through the base portion; and a fixing portion that is arranged between the base portion and the strain detection element, and fixes the strain detection element to the base portion.

    Abstract translation: 扭矩传感器包括:固定到具有作为应变测量对象的杆形状的金属轴的基部; 表面声波型的应变检测元件,其布置在基部中,并且通过基部检测金属轴(10)的应变; 以及设置在所述基部和所述应变检测元件之间的固定部,并且将所述应变检测元件固定到所述基部。

    Low-cost temperature and pressure sensor comprising SAW resonators, and method of fabrication for same
    48.
    发明授权
    Low-cost temperature and pressure sensor comprising SAW resonators, and method of fabrication for same 有权
    包括SAW谐振器的低成本温度和压力传感器及其制造方法

    公开(公告)号:US09027407B2

    公开(公告)日:2015-05-12

    申请号:US13825312

    申请日:2011-09-19

    Abstract: A pressure and temperature sensor comprising comprises at least a first resonator of the SAW type comprising a piezoelectric substrate, thinned at least locally, of the membrane type, a second resonator of the SAW type comprising a piezoelectric substrate and a third resonator of the SAW type comprising a piezoelectric substrate, characterized in that the first, the second and the third resonators are respectively on the surface of first, second and third individual piezoelectric substrates, each of the individual substrates being positioned on the surface of a common base section, locally machined away under said first resonator in such a manner as to liberate the substrate from said resonator so as to render it operational for the measurement of pressure. A method of fabrication for such a sensor is also provided.

    Abstract translation: 一种压力和温度传感器,包括至少一种SAW型的第一谐振器,包括至少部分薄膜化的压电衬底,SAW型的第二谐振器,包括压电衬底和SAW型的第三谐振器 包括压电基片,其特征在于,第一,第二和第三谐振器分别位于第一,第二和第三单独的压电基片的表面上,每个单独的基板位于公共基底部分的表面上,被局部加工 在所述第一谐振器下方以从所述谐振器释放衬底的方式,以便使其可操作用于测量压力。 还提供了一种用于这种传感器的制造方法。

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