公开(公告)号：US20150013461A1

公开(公告)日：2015-01-15

申请号：US14330979

申请日：2014-07-14

Applicant: ENVIRONETIX TECHNOLOGIES CORP.

Inventor： THOMAS POLLARD ,  DONALD McCANN

IPC: H01L41/113 ,  G01H11/08

CPC classification number: H01L41/1132 ,  G01H11/08 ,  G01K11/265 ,  G01L1/165 ,  G01N29/2462 ,  G01N2291/0423 ,  G10K11/36 ,  H03H9/02543 ,  H03H9/0259 ,  H03H9/02598

Abstract: A SAW mode sensor for sensing parameters such as temperature, pressure, and strain. The sensor is made of a piezoelectric crystal cut at selected angles, with an attached electrode layer with a signal receiver and signal transmitter. The signal receiver initiates a wave in the substrate which propagates in the substrate and the speed of the wave and amplitude of the wave is interpreted as the parameter being sensed.

Abstract translation: 用于感测温度，压力和应变等参数的SAW模式传感器。 传感器由选定角度切割的压电晶体制成，附带的电极层带有信号接收器和信号发射器。 信号接收器在衬底中启动在衬底中传播的波，波的速度和波的幅度被解释为被感测的参数。