Silicon on insulator (SOI) transcap integration providing front and back gate capacitance tuning

    公开(公告)号:US10283650B2

    公开(公告)日:2019-05-07

    申请号:US15659718

    申请日:2017-07-26

    Abstract: Certain aspects of the present disclosure generally relate to a semiconductor variable capacitor offering at least two types of capacitance tuning, as well as techniques for fabricating the same. For example, a CMOS-compatible silicon on insulator (SOI) process with a buried oxide (BOX) layer may provide a transcap with a front gate (above the BOX layer) and a back gate (beneath the BOX layer). The front gate may offer lower voltage, coarse capacitance tuning, whereas the back gate may offer higher voltage, fine capacitance tuning. By offering both types of capacitance tuning, such transcaps may provide greater capacitance resolution. Several variations of transcaps with front gate and back gate tuning are illustrated and described herein.

    Fully depleted silicon on insulator integration

    公开(公告)号:US10043826B1

    公开(公告)日:2018-08-07

    申请号:US15660288

    申请日:2017-07-26

    Abstract: Certain aspects of the present disclosure generally relate to a semiconductor device. The semiconductor device generally includes a substrate, a first non-insulative region disposed above the substrate, and a second non-insulative region disposed above the first non-insulative region, wherein the first and second non-insulative regions have the same doping type and different doping concentrations. In certain aspects, the semiconductor device also includes a first dielectric layer, a channel region, the first dielectric layer being disposed adjacent to a first side of the channel region, a second dielectric layer disposed adjacent to a second side of the channel region, and a third non-insulative region disposed above the second dielectric layer. In certain aspects, the semiconductor device also includes a fourth non-insulative region disposed adjacent to a third side of the channel region, and a fifth non-insulative region disposed adjacent to a fourth side of the channel region.

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