Abstract:
Metal interconnections are formed in an integrated by combining damascene processes and subtractive metal etching. A wide trench is formed in a dielectric layer. A conductive material is deposited in the wide trench. Trenches are etched in the conductive material to delineate a plurality of metal plugs each contacting a respective metal track exposed by the wide trench.
Abstract:
Provided is a reconfigurable Ring Oscillator (RO) Physical Unclonable Function (PUF), which comprises a NAND gate with a first input line and a second input line and a series of inverters with at least one memory cell placed between two inverters of the series of inverters, where an output of a last inverter provides input to the second input line, and where the memory cell comprises a Field Effect Transistor (FET). In addition, the reconfigurable RO PUF comprises a frequency counter, where the output of the last inverter provides input to the frequency counter. In normal operation mode, the first input line is on to enable ring oscillation and the FET is off. In reconfiguration mode, the first input line is off and the FET is on to enable reconfiguration.
Abstract:
Embodiments of the present invention are directed to processing methods and resulting structures having backside programmable memory cells. In a non-limiting embodiment, a front end of line structure having a plurality of programmable cells is formed such that each programmable cell includes a backside via in direct contact with a device region of the respective cell. A first portion of the backside vias defines one or more placeholder backside vias and a second portion defines one or more programmed backside vias. A back end of line structure (word line) is formed on a first surface of the front end of line structure. A backside structure is formed on a second surface of the front end of line structure opposite the first surface. The backside structure includes a backside metallization layer (bit line) in direct contact with the one or more programmed backside vias.
Abstract:
Embodiments of the present invention are directed to processing methods and resulting structures for integrated circuits having backside programmable gate arrays. In a non-limiting embodiment, a front end of line structure having an array of transistors is formed such that each transistor of the array of transistors includes one or more placeholder backside vias. A first portion of the backside vias defines one or more placeholder backside vias and a second portion of the one or more backside vias defines one or more programmed backside vias. A back end of line structure is formed on a first surface of the front end of line structure. A backside structure is formed on a second surface of the front end of line structure opposite the first surface. The backside structure includes a backside metallization layer in direct contact with the one or more programmed backside vias.
Abstract:
A phase change memory (PCM) cell comprising a substrate a first electrode located on the substrate. A phase change material layer located adjacent to the first electrode, wherein a first side of the phase change material layer is in direct contact with the first electrode. A second electrode located adjacent to phase change material layer, wherein the second electrode is in direct contact with a second side of the phase change material layer, wherein the first side and the second side are different sides of the phase change material layer. An airgap is located directly above the phase change material layer, wherein the airgap provides space for the phase change material to expand or restrict.
Abstract:
Embodiments of present invention provide a phase change memory (PCM) device. The PCM device includes a first PCM cell with the first PCM cell including an L-shaped phase change element, the L-shaped phase change element having a horizontal portion and a vertical portion on top of the horizontal portion; a selector underneath the horizontal portion of the L-shaped phase change element; a top electrode in contact with a top surface of the vertical portion of the L-shaped phase change element; and a bottom electrode in contact with the selector; and a second PCM cell. A method of manufacturing the PCM device is also provided.
Abstract:
Embodiments of present invention provide a SRAM device. The SRAM device includes a first, a second, and a third SRAM cell each having a first and a second pass-gate (PG) transistor, wherein the second PG transistor of the second SRAM cell and the first PG transistor of the first SRAM cell are stacked in a first PG transistor cell, and the first PG transistor of the third SRAM cell and the second PG transistor of the first SRAM cell are stacked in a second PG transistor cell. The first and second PG transistors of the first SRAM cell may be stacked on top of, or underneath, the second PG transistor of the second SRAM cell and/or the first PG transistor of the third SRAM cell.
Abstract:
A phase change memory (PCM) cell comprising a substrate a first electrode located on the substrate. A phase change material layer located adjacent to the first electrode, wherein a first side of the phase change material layer is in direct contact with the first electrode. A second electrode located adjacent to phase change material layer, wherein the second electrode is in direct contact with a second side of the phase change material layer, wherein the first side and the second side are different sides of the phase change material layer. An airgap is located directly above the phase change material layer, wherein the airgap provides space for the phase change material to expand or restrict.
Abstract:
The semiconductor device comprises a first ring oscillator and a second ring oscillator. An input of the first ring oscillator is an end output of the first ring oscillator and an output of the second ring oscillator and wherein an input of the second ring oscillator is an end output of the second ring oscillator and an output of the first ring oscillator.
Abstract:
A phase change bridge memory cell includes: a first interlevel dielectric layer; a first electrode and a second electrode disposed in the first interlevel dielectric layer and separated by a portion of the first interlevel dielectric layer; an interlevel dielectric pillar on the portion of the first interlevel dielectric layer; a first phase change material on the interlevel dielectric pillar; and a second phase change material including two areas on opposite sides of the interlevel dielectric pillar and electrically connected by the first phase change material, wherein the second phase change material is connected to the first electrode and the second electrode.