公开(公告)号：US07406394B2

公开(公告)日：2008-07-29

申请号：US11261742

申请日：2005-10-28

Applicant: Boguslaw A. Swedek ,  Dominic J. Benvegnu ,  Jeffrey Drue David

Inventor： Boguslaw A. Swedek ,  Dominic J. Benvegnu ,  Jeffrey Drue David

IPC: G01B5/02 ,  G01B7/02 ,  G01B11/02 ,  G01B13/02

CPC classification number: B24B49/12 ,  B24B37/013 ,  B24B37/205 ,  B24B49/08 ,  B24D7/14 ,  G05B15/02 ,  H01L21/31053 ,  H01L21/3212 ,  H01L22/26

Abstract: Methods and apparatus for spectrum-based endpointing. An endpointing method includes selecting two or more reference spectra. Each reference spectrum is a spectrum of white light reflected from a film of interest on a first substrate and has a thickness greater than a target thickness. The reference spectra is selected for particular spectra-based endpoint determination logic so that the target thickness is achieved when endpoint is called by applying the particular spectra-based endpoint logic. The method includes obtaining two or more current spectra. Each current spectrum is a spectrum of white light reflected from a film of interest on a second substrate when the film of interest is being subjected to a polishing step and has a current thickness that is greater than the target thickness. The method includes determining, for the second substrate, when an endpoint of the polishing step has been achieved.

Abstract translation: 用于基于频谱的终点的方法和装置。 一种终点方法包括选择两个或更多个参考光谱。 每个参考光谱是在第一衬底上从感兴趣的膜反射的白光的光谱，并且具有大于目标厚度的厚度。 为特定的基于光谱的端点确定逻辑选择参考光谱，以便通过应用特定的基于光谱的端点逻辑来调用端点时实现目标厚度。 该方法包括获得两个或更多个当前光谱。 每个电流光谱是当感兴趣的膜经受抛光步骤并且具有大于目标厚度的电流厚度时，在第二衬底上从感兴趣的膜反射的白光的光谱。 该方法包括为第二基底确定何时已经实现了抛光步骤的终点。

公开(公告)号：US20070245807A1

公开(公告)日：2007-10-25

申请号：US11569216

申请日：2004-10-12

Applicant: Ralph Sutehall

Inventor： Ralph Sutehall

IPC: G01B13/02

CPC classification number: G01B13/02

Abstract: A method of determining the position of a blockage (192, 392) in a passage (15, 313) having a first end and a second end. The method comprises blowing a sealing device (200) into the passage to form a seal adjacent the blockage (192, 392), then blowing a gas into the passage from the first end, making at least one measurement concerning the gas blown into the passage from the first end and determining a distance D between the first end and the sealing device using the at least one measurement.

Abstract translation: 一种确定具有第一端和第二端的通道（15,313）中的堵塞位置（192,392）的方法。 该方法包括将密封装置（200）吹入通道以形成邻近堵塞物（192,392）的密封，然后从第一端向气体中吹入气体，进行至少一次吹入通道的气体测量 并且使用所述至少一个测量来确定所述第一端和所述密封装置之间的距离D.

公开(公告)号：US20050246910A1

公开(公告)日：2005-11-10

申请号：US10840400

申请日：2004-05-07

Applicant: Michael Mowers

Inventor： Michael Mowers

IPC: F41G1/00 ,  F41G1/467 ,  G01B13/02 ,  G01C3/00 ,  G01C3/22

CPC classification number: G01C3/22 ,  F41B5/1492 ,  F41G1/467 ,  F41J5/10

Abstract: The weaponry camera sight has a digital electronic display of the sight picture for the shooter. The display may be magnified as desired, thereby eliminating need for a scope sight. The device may also include a range finding device, with range information being provided on screen. The camera may also be used to record the image viewed on screen, if so desired. Remotely situated controls may be provided for operating the zoom magnification and recording feature, thereby allowing the shooter to operate the present camera sight without need to move his or her hands on the weapon. The present camera sight is particularly well suited for use with an archery bow, but may be used with a firearm if so desired.

Abstract translation: 武器相机瞄准具有用于射手的视线图的数字电子显示器。 显示器可以根据需要被放大，从而消除对瞄准镜的需要。 该装置还可以包括范围查找装置，其范围信息在屏幕上提供。 如果需要，相机也可以用于记录在屏幕上观看的图像。 可以提供遥控位置的控制以操作变焦倍率和记录特征，从而允许射手操作本照相机瞄准镜，而不需要将他或她的手移到武器上。 本相机视野特别适合用于射箭弓，但如果需要，也可与枪支配合使用。

公开(公告)号：US06895360B2

公开(公告)日：2005-05-17

申请号：US10322198

申请日：2002-12-17

Applicant: Ai-Sen Liu ,  Syun-Ming Jang

Inventor： Ai-Sen Liu ,  Syun-Ming Jang

IPC: B24B37/04 ,  B24B49/12 ,  G01B11/06 ,  G01B11/02 ,  G01B13/02

CPC classification number: B24B37/042 ,  B24B49/12 ,  G01B11/0625

Abstract: A method for determining a material layer thickness transmissive to infrared (IR) energy in a semiconductor wafer manufacturing process including providing at least one semiconductor wafer comprising an IR transmissive layer; passing IR energy through the IR transmissive layer to produce at least one Fourier transform infrared (FTIR) spectrum; and, determining an amount of the IR transmissive layer present according to an amount of IR energy absorbed by a predetermined contributing characteristic vibrational mode portion of the FTIR spectrum.

Abstract translation: 一种用于确定在半导体晶片制造工艺中透射到红外（IR）能量的材料层厚度的方法，包括提供包括IR透射层的至少一个半导体晶片; 通过IR透射层传递IR能量以产生至少一个傅里叶变换红外（FTIR）光谱; 以及根据由FTIR光谱的预定贡献特征振动模式部分吸收的IR能量的量确定存在的IR透射层的量。

公开(公告)号：US4850221A

公开(公告)日：1989-07-25

申请号：US243567

申请日：1988-09-12

Applicant: Henry Zielke

Inventor： Henry Zielke

IPC: G01B13/02 ,  H01H3/24 ,  H01R43/28 ,  H02G1/12

CPC classification number: H01R43/28 ,  H01H3/24 ,  H02G1/1248

Abstract: An apparatus is provided for accurately sensing the presence of an end of a wire in a position for stripping insulation therefrom or crimping a terminal thereto. The apparatus comprises a housing having an aperture extending therethrough for delivering a flow of low pressure air. A target is pivotally mounted to the housing and can undergo a small range of pivotal movement. The flow of air through the housing will urge the target to one extreme position in its range of pivotal movement. However, the end of a wire urged into contact with the target will cause the sensor target to pivot through its range of movement into a position for blocking the flow of air through the housing. Back pressure created by the blockage of air through the housing will be sensed by appropriate apparatus to initiate portions of the apparatus for stripping insulation from the wire or crimping a terminal thereto.

公开(公告)号：US4663857A

公开(公告)日：1987-05-12

申请号：US786081

申请日：1985-10-10

Applicant: Sanae Mori

Inventor： Sanae Mori

IPC: G01B5/14 ,  F16C17/00 ,  G01B13/02 ,  G01B13/16 ,  G01B21/00 ,  G01B21/08 ,  G01B21/16 ,  G01B21/20 ,  G01B7/28

CPC classification number: G01B13/02 ,  G01B13/16 ,  Y10S33/17

Abstract: A device for measuring interference and wall thickness of a half cylindrical plain bearing includes a bearing support block provided with a substantially semi-cylindrical shaped recess for receiving the plain bearing, a pressing mechanism for closely pressing the plain bearing against the recess, a substantially semi-columnar shaped wall thickness measuring head having a smaller outer diameter than the inner diameter of the plain bearing when it closely contacts with the recess, and a positioning mechanism for establishing a predetermined positional relationship between the recess and the wall thickness measuring head upon measurement. The bearing support block carries a detector or detectors for measuring interference of the half cylindrical plain bearing, and the wall thickness measuring head incorporates measuring instruments such as air micrometers.

Abstract translation: 用于测量半圆柱形滑动轴承的干涉和壁厚的装置包括：轴承支撑块，其设置有用于接收滑动轴承的基本上半圆柱形的凹部;压紧机构，用于将滑动轴承紧密地压靠在凹部上， - 柱状壁厚测量头，当与凹槽紧密接触时，其外径小于滑动轴承的内径;以及定位机构，用于在测量时在凹部和壁厚测量头之间建立预定的位置关系。 轴承支撑块带有用于测量半圆柱形滑动轴承的干涉的检测器或检测器，并且壁厚测量头包含诸如空气微米的测量仪器。

公开(公告)号：US4604892A

公开(公告)日：1986-08-12

申请号：US641965

申请日：1984-07-27

Applicant: Michelle Carreras

Inventor： Michelle Carreras

IPC: G01B13/00 ,  G01B13/06 ,  G01B13/02

CPC classification number: G01B13/06 ,  G01B13/00

Abstract: An apparatus and process are disclosed for the contactless measurement of the volume of a layer of wet, electrically resistive material that is deposited on a rigid substrate support, where the deposit of said electrically resistive material has a known length and width. The apparatus measures the topological thickness of the deposit of electrically resistive material by means of a pneumatic gas system that has an outlet, positioned above the deposit on the substrate, through which a jet of gas under pressure is directed downwardly against the deposit and the substrate. The outlet for the pneumatic gas jet is constructed to be homothetic to the width and length of the deposit. An apparatus is provided for selectively moving and changing the position of the deposit and its support relative to the pneumatic gas system, so that the gas jet may be sequentially directed either at the deposit or the bare substrate while a constant pressure measurement is maintained, whereby to determine the difference in distances from the gas jet outlet to the upper surface of the deposit or to the bare substrate, so as to obtain a measure of the topological thickness of the deposit.

Abstract translation: PCT No.PCT / FR83 / 00246 Sec。 371日期1984年7月27日 102（e）日期1984年7月27日PCT提交1983年12月8日PCT公布。 出版物WO84 / 02394 日期为1984年6月21日。公开了一种用于非接触式测量沉积在刚性衬底支撑件上的湿电阻材料层的体积的装置和方法，其中所述电阻材料的沉积具有已知长度 和宽度。 该装置通过气动气体系统测量电阻材料沉积的拓扑厚度，该气动系统具有位于基底上的沉积物上方的出口，通过该出口，压力下的气体射流朝向沉积物和基底 。 用于气动气体射流的出口构造成与沉积物的宽度和长度相同。 提供了一种用于选择性地移动和改变沉积物及其支撑件相对于气动气体系统的位置的装置，使得气体射流可以在保持恒定压力测量的同时顺序地指向沉积物或裸基底，由此 以确定从气体喷射出口到沉积物的上表面到裸基底的距离的差异，以便获得沉积物的拓扑厚度的量度。

公开(公告)号：US4373188A

公开(公告)日：1983-02-08

申请号：US82902

申请日：1979-10-09

Applicant: John G. Dowding ,  Peter R. Turner ,  Robert J. Hudson

Inventor： John G. Dowding ,  Peter R. Turner ,  Robert J. Hudson

IPC: A24C5/34 ,  G01G9/00 ,  G06G7/48 ,  G01B13/02

CPC classification number: A24C5/3424 ,  G01G9/005 ,  Y10S131/91

Abstract: Cigarette-rod weight monitoring system in which the signals from a scanner, e.g. a nucleonic device such as Molins "MODIC", are processed and stored in a memory in a digitized form, and the memory contents are used to drive an analog display device. These signals, which represent the individual cigarettes, or short lengths, are accumulated in the memory over a period which is sufficiently long for a statistically significant distribution pattern to be achieved, so that the shape of the distribution curve can be observed to determine whether it is "normal" or whether any skews or other irregularities are present. In addition the accomulated signals can be analyzed in various ways to provide quantitative measurements of overall standard deviation, or effective standard deviation either side of the mean to show whether any "skews" exist. S.D. can be calculated for whole cigarettes or short lengths for different diagnostic purposes.

Abstract translation: 香烟杆重量监测系统，其中来自扫描仪的信号，例如 诸如Molins“MODIC”的核子装置以数字形式被处理并存储在存储器中，并且存储器内容用于驱动模拟显示装置。 代表单个香烟或短长度的这些信号在足够长的时间内积累在存储器中，以达到统计上显着的分布模式，从而可以观察到分布曲线的形状，以确定它是否 是“正常”还是存在任何偏斜或其他违规行为。 此外，可以以各种方式分析所收集的信号，以提供总体标准偏差的定量测量，或平均值的任何一侧的有效标准偏差，以显示是否存在任何“偏差”。 S.D. 可以为整个香烟或短长度计算不同的诊断目的。

公开(公告)号：US3854322A

公开(公告)日：1974-12-17

申请号：US36763173

申请日：1973-06-06

Applicant: LFE CORP

Inventor： WOOD D ,  MURPHY R

IPC: G01B13/02 ,  G01B13/06

CPC classification number: G01B13/06 ,  G01B7/105

Abstract: A caliper gauge for continuously measuring the thickness of a moving layer in which a sensing head is held at a uniform spacing from a layer of material being measured by a pneumatic piston positioned by a feedback control system responsive to a comparison between a reference pneumatic nozzle and a pneumatic nozzle in the sensing head facing the layer being measured. The distance of the sensing head from an electrical conductor underlying the layer being measured is monitored electromagnetically to derive layer thickness.

Abstract translation: 用于连续测量移动层的厚度的卡尺，其中感测头与通过反馈控制系统定位的气动活塞测量的材料层保持均匀的间隔，响应于参考气动喷嘴和 感测头中的气动喷嘴面向被测量的层。 感测头与被测量层下面的电导体的距离被电磁监测以导出层厚度。

公开(公告)号：US3844045A

公开(公告)日：1974-10-29

申请号：US26109772

申请日：1972-06-08

Applicant: FARMAN F

Inventor： FARMAN F

IPC: G01B13/02 ,  G01B19/64

CPC classification number: G01B13/02

Abstract: A fluidic device in the form of a precise position indicator for indicating at a remote and separate location the precise travel of a tool, a table, a grinding wheel or other variable in relation to other stationary elements of a machine and including, e.g., with conventional lathe parts, a tool slide means and a stationary slide means, an actuating rod element secured to the tool slide means by a clamping means such that the actuating rod element moves forward simultaneously with said tool, and actuating means adjustably secured to said rod in contacting engagement with a piston for depression of an actuating cylinder to displace hydraulic fluid through a tube into a zeroing cylinder and through a connecting tube into a slave cylinder, forcing a piston rod into the base of a dial indicator adaptor means connected to the slave cylinder to produce a read off on a dial indicator affixed to the adaptor means.

Abstract translation: 精确位置指示器形式的流体装置，用于在远程和分离位置处指示相对于机器的其它静止元件的工具，工作台，砂轮或其他变量的精确行程，并且包括例如与 常规车床部件，工具滑动装置和固定滑动装置，通过夹紧装置固定到工具滑动装置的致动杆元件，使得致动杆元件与所述工具同时向前移动，并且致动装置可调节地固定到所述杆 与用于按压致动缸的活塞接触接合，以将通过管的液压流体移动到归零缸中，并通过连接管进入从动缸，迫使活塞杆进入连接到从动缸的千分表指示器适配器的基座 以在固定在适配器装置上的刻度盘上产生读出。