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48 条记录 (耗时 0.026 秒)

    Electron microscope specimen holder
    31.
    发明授权
    Electron microscope specimen holder 失效
    电子显微镜样品架

    公开(公告)号：US5367171A

    公开(公告)日：1994-11-22

    申请号：US965423

    申请日：1992-10-23

    申请人： Takashi Aoyama ,  Kishu Hosoi ,  Yutaka Misawa ,  Koji Kimoto ,  Shigeto Isakozawa ,  Kazuhiro Ueda

    发明人： Takashi Aoyama ,  Kishu Hosoi ,  Yutaka Misawa ,  Koji Kimoto ,  Shigeto Isakozawa ,  Kazuhiro Ueda

    IPC分类号： H01J37/20

    CPC分类号： H01J37/20

    摘要： A specimen cartridge fashioned of a good thermal conductor, with an outer frame being fashioned of heat insulating material, and with a connecting rod being fashioned of a poor thermal conductor. A temperature distribution of the specimen is uniform and a temperature drift is reduced, with a thermal expansion of a specimen cartridge tilting rod not affecting the tilting angle, thereby making it possible to perform various highly accurate observations and measurements with an electron microscope.

    摘要翻译： 由良好的热导体形成的样品盒，外框由绝热材料制成，并且连接杆由不良的导热体构成。 样品盒的温度分布是均匀的并且温度漂移降低，而样品盒倾斜杆的热膨胀不影响倾斜角度，从而可以用电子显微镜进行各种高精度的观测和测量。

    Field emission electron gun system
    32.
    发明授权
    Field emission electron gun system 失效
    场发射电子枪系统

    公开(公告)号：US4945247A

    公开(公告)日：1990-07-31

    申请号：US365827

    申请日：1989-06-14

    申请人： Takeshi Kawasaki ,  Junji Endo ,  Shigeto Isakozawa ,  Masahiro Tomita ,  Akira Tonomura

    发明人： Takeshi Kawasaki ,  Junji Endo ,  Shigeto Isakozawa ,  Masahiro Tomita ,  Akira Tonomura

    IPC分类号： H01J29/48 ,  H01J37/073 ,  H01J37/145

    CPC分类号： H01J37/073

    摘要： In a field emission electron gun system with a multi-stage acceleration tube comprising a field emission electron source, a field emission electrode for extracting the electrons, a magnetic lens having a magnetic gap between the field emission electron source and the field emission electrode or a magnetic lens having a magnetic pole which also serves as the field emission electrode, and at least two-stages of acceleration electrodes for accelerating the electrons, a magnetization current I for the magnetic lens is changed interlocking with a field emission voltage V.sub.1 applied between the field emission electron source and the field emission electrode so that IN/.sqroot.V.sub.1 (N: the number of windings of the magnetic lens) takes a predetermined value and a first acceleration voltage V.sub.2 applied between the field emission electron source and the first-stage acceleration electrode is changed interlocking with the field emission voltage V.sub.1 so that V.sub.2 /V.sub.1 takes a predetermined value.

    摘要翻译： 在具有包括场发射电子源的多级加速管的场发射电子枪系统中，用于提取电子的场发射电极，在场发射电子源和场发射电极之间具有磁隙的磁透镜或 具有也用作场发射电极的磁极的磁性透镜以及用于加速电子的至少两级的加速电极，用于磁性透镜的磁化电流I与施加在磁场之间的场致发射电压V1互锁地变化 发射电子源和场发射电极，使得IN / 2ROOT V1（N：磁性透镜的绕组数）取预定值，施加在场发射电子源和第一级加速电极之间的第一加速电压V2 与场致发射电压V1互锁，使得V2 / V1取规定值。

    Electron microscope
    33.
    发明授权
    Electron microscope 失效
    电子显微镜

    公开(公告)号：US4283627A

    公开(公告)日：1981-08-11

    申请号：US098664

    申请日：1979-11-29

    申请人： Shigeto Isakozawa ,  Kazuo Shii

    发明人： Shigeto Isakozawa ,  Kazuo Shii

    IPC分类号： H01J37/147 ,  H01J37/04 ,  H01J37/26 ,  H01J37/295 ,  G01N23/00

    CPC分类号： H01J37/04 ,  H01J37/265 ,  H01J37/295

    摘要： The electron beam having penetrated a sample is projected on a field limiting plate having an opening by means of an objective lens. That part of the electron beam which has passed through the opening of the field limiting plate, is projected upon a viewing screen by means of an image forming lens system. An electron beam deflection system is disposed between the hind focal point of the objective lens and the field limiting plate, the system having its deflection center at the hind focal point of the objective lens.

    摘要翻译： 穿透了样品的电子束通过物镜投射在具有开口的场界限板上。 已经通过场界限板的开口的电子束的那部分通过图像形成透镜系统投射到观察屏幕上。 电子束偏转系统设置在物镜的后焦点和场限制板之间，该系统的偏转中心位于物镜的后焦点处。

    Method and apparatus for observing inside structures, and specimen holder
    34.
    发明授权
    Method and apparatus for observing inside structures, and specimen holder 有权
    用于观察内部结构和试样架的方法和装置

    公开(公告)号：US08134131B2

    公开(公告)日：2012-03-13

    申请号：US12329661

    申请日：2008-12-08

    申请人： Shohei Terada ,  Kazutoshi Kaji ,  Shigeto Isakozawa

    发明人： Shohei Terada ,  Kazutoshi Kaji ,  Shigeto Isakozawa

    IPC分类号： G21K5/00

    CPC分类号： H01J37/20 ,  G01N23/2251 ,  G01N23/2252 ,  H01J37/26 ,  H01J2237/2008 ,  H01J2237/206 ,  H01J2237/2802

    摘要： An object of the invention is to provide a method and apparatus for observing inside structures and a specimen holder, wherein aging degradation of a good sample to a bad sample can be tracked in the same field of view, using the same specimen in order to determine the mechanism of failure. The present invention is a method for observing inside structures. The method comprises irradiating a specimen with a corpuscular beam generated from a corpuscular beam source, detecting transmitted particles transmitted by the specimen, applying a voltage to a portion of the specimen, and observing of a detection status of the transmitted particles in the voltage-applied portion as needed.

    摘要翻译： 本发明的目的是提供一种用于观察内部结构和样本保持器的方法和装置，其中可以使用相同的样本在相同的视野中跟踪良好样本的老化劣化到不良样本，以便确定 失败的机制。 本发明是一种观察内部结构的方法。 该方法包括用从粒子束源产生的粒子束照射样本，检测由样本透射的透射粒子，向样本的一部分施加电压，并观察施加电压的透射粒子的检测状态 部分。

    Method and apparatus for observing inside structures, and specimen holder
    36.
    发明授权
    Method and apparatus for observing inside structures, and specimen holder 有权
    用于观察内部结构和试样架的方法和装置

    公开(公告)号：US07462830B2

    公开(公告)日：2008-12-09

    申请号：US10912148

    申请日：2004-08-06

    申请人： Shohei Terada ,  Kazutoshi Kaji ,  Shigeto Isakozawa

    发明人： Shohei Terada ,  Kazutoshi Kaji ,  Shigeto Isakozawa

    IPC分类号： H01J37/28

    CPC分类号： H01J37/20 ,  G01N23/2251 ,  G01N23/2252 ,  H01J37/26 ,  H01J2237/2008 ,  H01J2237/206 ,  H01J2237/2802

    摘要： An object of the invention is to provide a method and apparatus for observing inside structures and a specimen holder, wherein aging degradation of a good sample to a bad sample can be tracked in the same field of view, using the same specimen in order to determine the mechanism of failure. The present invention is a method for observing inside structures. The method comprises irradiating a specimen with a corpuscular beam generated from a corpuscular beam source, detecting transmitted particles transmitted by the specimen, applying a voltage to a portion of the specimen, and observing of a detection status of the transmitted particles in the voltage-applied portion as needed.

    摘要翻译： 本发明的目的是提供一种用于观察内部结构和样本保持器的方法和装置，其中可以使用相同的样本在相同的视野中跟踪良好样本的老化劣化到不良样本，以确定 失败的机制。 本发明是用于观察内部结构的方法。 该方法包括用从粒子束源产生的粒子束照射样本，检测由样本透射的透射粒子，向样本的一部分施加电压，并观察施加电压的透射粒子的检测状态 部分。

    Charged particle system and a method for measuring image magnification
    38.
    发明申请
    Charged particle system and a method for measuring image magnification 有权
    带电粒子系统和测量图像放大倍数的方法

    公开(公告)号：US20050189501A1

    公开(公告)日：2005-09-01

    申请号：US11038478

    申请日：2005-01-21

    申请人： Mitsugu Sato ,  Atsushi Takane ,  Shigeto Isakozawa ,  Takashi Iizumi ,  Tatsuya Maeda ,  Hiromi Inada

    发明人： Mitsugu Sato ,  Atsushi Takane ,  Shigeto Isakozawa ,  Takashi Iizumi ,  Tatsuya Maeda ,  Hiromi Inada

    IPC分类号： G21K5/00 ,  G03F7/20 ,  G21K5/04 ,  H01J37/08 ,  H01J37/22 ,  H01J37/256 ,  H01J37/28 ,  H01L21/027 ,  H01L21/66

    CPC分类号： H01J37/28 ,  H01J2237/2826

    摘要： A charged particle beam apparatus capable of automatically measuring an image magnification error of an apparatus and capable of automatically calibrating the image magnification in high precision is provided. To this end, while an image processing operation of either an auto-correlation function or an FFT transformation is employed with respect to a scanning image of a reference material having a periodic structure, the averaged pitch dimension of which is known, averaged periodic information owned by the scanning image is detected so as to measure an image magnification error of the apparatus. Also, the information as to the acquired image magnification error is fed back to an image magnification control means of the apparatus so as to automatically execute a calibration as to the image magnification in high precision.

    摘要翻译： 提供一种能够自动测量装置的图像放大误差并且能够以高精度自动校准图像放大率的带电粒子束装置。 为此，当对具有周期性结构的参考材料的扫描图像采用自相关函数或FFT变换的图像处理操作时，其平均间距尺寸已知，所拥有的平均周期信息 检测扫描图像以测量装置的图像放大误差。 此外，关于获取的图像放大误差的信息被反馈到装置的图像倍率控制装置，以便以高精度自动执行关于图像放大的校准。

    Method and apparatus for scanning transmission electron microscopy
    40.
    发明授权
    Method and apparatus for scanning transmission electron microscopy 失效
    扫描透射电子显微镜的方法和装置

    公开(公告)号：US06822233B2

    公开(公告)日：2004-11-23

    申请号：US10346138

    申请日：2003-01-17

    申请人： Kuniyasu Nakamura ,  Hiroshi Kakibayashi ,  Mikio Ichihashi ,  Shigeto Isakozawa ,  Yuji Sato ,  Takahito Hashimoto

    发明人： Kuniyasu Nakamura ,  Hiroshi Kakibayashi ,  Mikio Ichihashi ,  Shigeto Isakozawa ,  Yuji Sato ,  Takahito Hashimoto

    IPC分类号： H01J3704

    CPC分类号： H01J37/1471 ,  H01J37/28 ,  H01J2237/2802

    摘要： A scanning transmission electron microscope (STEM) has an electron source for generating a primary electron beam and an electron illuminating lens system for converging the primary electron beam from the electron source onto a specimen for illumination. An electron deflecting system is provided for scanning the specimen with the primary electron beam. The STEM also has a scattered electron detector for detecting scattered electrons transmitted through the specimen. A projection lens system projects the scattered electrons onto a detection surface of the scattered electron detector. An image displaying device displays the scanning transmission electron microscope image of the specimen using a detection signal from the scattered electron detector. A detection angle changing device for establishes the range of the scattering angle of the scattered electrons detected by the scattered electron detector. This structure enhances the contrast of a desired portion of the specimen under observation for a scanning transmitted image by selective establishment of detection angle ranges for the scattered electron detector.

    摘要翻译： 扫描透射电子显微镜（STEM）具有用于产生一次电子束的电子源和用于将来自电子源的一次电子束聚焦到用于照明的样本上的电子照明透镜系统。 提供电子偏转系统用于用一次电子束扫描样本。 STEM还具有散射电子检测器，用于检测通过样品传播的散射电子。 投影透镜系统将散射的电子投射到散射电子检测器的检测表面上。 图像显示装置使用来自散射电子检测器的检测信号来显示样本的扫描透射电子显微镜图像。 一种用于确定由散射电子检测器检测的散射电子的散射角的范围的检测角度改变装置。 该结构通过选择性地建立散射电子检测器的检测角度范围，增强了扫描透射图像观察下的样本的期望部分的对比度。